JP6192618B2 - 環境制御型透過電子顕微鏡の使用方法 - Google Patents

環境制御型透過電子顕微鏡の使用方法 Download PDF

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JP6192618B2
JP6192618B2 JP2014160010A JP2014160010A JP6192618B2 JP 6192618 B2 JP6192618 B2 JP 6192618B2 JP 2014160010 A JP2014160010 A JP 2014160010A JP 2014160010 A JP2014160010 A JP 2014160010A JP 6192618 B2 JP6192618 B2 JP 6192618B2
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sample
sample chamber
gas
electron beam
electric field
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Japanese (ja)
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JP2015037079A (ja
JP2015037079A5 (https=
Inventor
クリスチャン ティエメイエール ピーター
クリスチャン ティエメイエール ピーター
ヨハン ピーテル コーニングス スタン
ヨハン ピーテル コーニングス スタン
ヘンストゥラ アレクサンデル
ヘンストゥラ アレクサンデル
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FEI Co
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FEI Co
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/263—Contrast, resolution or power of penetration
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/006—Details of gas supplies, e.g. in an ion source, to a beam line, to a specimen or to a workpiece
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2602—Details
    • H01J2237/2605—Details operating at elevated pressures, e.g. atmosphere
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/262—Non-scanning techniques

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
JP2014160010A 2013-08-12 2014-08-06 環境制御型透過電子顕微鏡の使用方法 Active JP6192618B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP13180022.9A EP2838108A1 (en) 2013-08-12 2013-08-12 Method of using an environmental transmission electron microscope
EP13180022.9 2013-08-12

Publications (3)

Publication Number Publication Date
JP2015037079A JP2015037079A (ja) 2015-02-23
JP2015037079A5 JP2015037079A5 (https=) 2017-06-08
JP6192618B2 true JP6192618B2 (ja) 2017-09-06

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ID=48948341

Family Applications (1)

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JP2014160010A Active JP6192618B2 (ja) 2013-08-12 2014-08-06 環境制御型透過電子顕微鏡の使用方法

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Country Link
US (1) US9570270B2 (https=)
EP (2) EP2838108A1 (https=)
JP (1) JP6192618B2 (https=)
CN (1) CN104377104B (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9927939B2 (en) * 2014-08-13 2018-03-27 Samsung Display Co., Ltd. Touch panel and display apparatus including the same
US20210285899A1 (en) * 2017-06-26 2021-09-16 Gerasimos Daniel Danilatos Specimen control means for particle beam microscopy
CN110231354B (zh) * 2019-05-31 2020-09-08 武汉大学 一种非激光激发的四维透射电子显微镜装置及其使用方法
US11081314B2 (en) * 2019-10-01 2021-08-03 National Technology & Engineering Solutions Of Sandia, Llc Integrated transmission electron microscope
CN113241295A (zh) * 2021-04-28 2021-08-10 中国科学院大连化学物理研究所 一种用于环境透射电子显微镜的负压气氛控制系统
JP7585153B2 (ja) * 2021-07-13 2024-11-18 株式会社日立製作所 試料ホルダー及び電子顕微鏡
CN115116812B (zh) * 2022-08-29 2022-11-11 深圳市宗源伟业科技有限公司 一种高精度电子显微镜

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59130365U (ja) * 1983-02-21 1984-09-01 日本電子株式会社 電子顕微鏡における試料通電装置
GB8604004D0 (en) * 1986-02-18 1986-03-26 Cambridge Instr Ltd Specimen chamber
WO1999030345A1 (en) 1997-12-08 1999-06-17 Philips Electron Optics B.V. Environmental sem with a magnetic field for improved secondary electron detection
AU748840B2 (en) 1997-12-08 2002-06-13 Fei Company Environmental SEM with multipole fields for improved secondary electron detection
US8872129B2 (en) * 2007-05-09 2014-10-28 Protochips, Inc. Microscopy support structures
JP2009129799A (ja) * 2007-11-27 2009-06-11 Hitachi Ltd 走査透過型電子顕微鏡
JP5226378B2 (ja) * 2008-04-28 2013-07-03 株式会社日立ハイテクノロジーズ 透過型電子顕微鏡、及び試料観察方法
US8299432B2 (en) * 2008-11-04 2012-10-30 Fei Company Scanning transmission electron microscope using gas amplification
JP2011034895A (ja) * 2009-08-05 2011-02-17 Hitachi High-Technologies Corp 荷電粒子線装置及び試料汚染除去機構
DE112010005188B4 (de) * 2010-01-27 2016-04-07 Hitachi High-Technologies Corp. Vorrichtung zum Bestrahlen mit geladenen Teilchen
EP2487703A1 (en) * 2011-02-14 2012-08-15 Fei Company Detector for use in charged-particle microscopy
EP2555221B1 (en) 2011-08-03 2013-07-24 Fei Company Method of studying a sample in an ETEM

Also Published As

Publication number Publication date
JP2015037079A (ja) 2015-02-23
EP2838108A1 (en) 2015-02-18
CN104377104A (zh) 2015-02-25
CN104377104B (zh) 2018-04-13
EP2838109A1 (en) 2015-02-18
US9570270B2 (en) 2017-02-14
US20150041647A1 (en) 2015-02-12

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