JP2015037079A5 - - Google Patents

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Publication number
JP2015037079A5
JP2015037079A5 JP2014160010A JP2014160010A JP2015037079A5 JP 2015037079 A5 JP2015037079 A5 JP 2015037079A5 JP 2014160010 A JP2014160010 A JP 2014160010A JP 2014160010 A JP2014160010 A JP 2014160010A JP 2015037079 A5 JP2015037079 A5 JP 2015037079A5
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JP
Japan
Prior art keywords
gas
sample chamber
sample
electron beam
electric field
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JP2014160010A
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English (en)
Japanese (ja)
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JP2015037079A (ja
JP6192618B2 (ja
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Priority claimed from EP13180022.9A external-priority patent/EP2838108A1/en
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Publication of JP2015037079A5 publication Critical patent/JP2015037079A5/ja
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Publication of JP6192618B2 publication Critical patent/JP6192618B2/ja
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JP2014160010A 2013-08-12 2014-08-06 環境制御型透過電子顕微鏡の使用方法 Active JP6192618B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP13180022.9A EP2838108A1 (en) 2013-08-12 2013-08-12 Method of using an environmental transmission electron microscope
EP13180022.9 2013-08-12

Publications (3)

Publication Number Publication Date
JP2015037079A JP2015037079A (ja) 2015-02-23
JP2015037079A5 true JP2015037079A5 (https=) 2017-06-08
JP6192618B2 JP6192618B2 (ja) 2017-09-06

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ID=48948341

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014160010A Active JP6192618B2 (ja) 2013-08-12 2014-08-06 環境制御型透過電子顕微鏡の使用方法

Country Status (4)

Country Link
US (1) US9570270B2 (https=)
EP (2) EP2838108A1 (https=)
JP (1) JP6192618B2 (https=)
CN (1) CN104377104B (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9927939B2 (en) * 2014-08-13 2018-03-27 Samsung Display Co., Ltd. Touch panel and display apparatus including the same
US20210285899A1 (en) * 2017-06-26 2021-09-16 Gerasimos Daniel Danilatos Specimen control means for particle beam microscopy
CN110231354B (zh) * 2019-05-31 2020-09-08 武汉大学 一种非激光激发的四维透射电子显微镜装置及其使用方法
US11081314B2 (en) * 2019-10-01 2021-08-03 National Technology & Engineering Solutions Of Sandia, Llc Integrated transmission electron microscope
CN113241295A (zh) * 2021-04-28 2021-08-10 中国科学院大连化学物理研究所 一种用于环境透射电子显微镜的负压气氛控制系统
JP7585153B2 (ja) * 2021-07-13 2024-11-18 株式会社日立製作所 試料ホルダー及び電子顕微鏡
CN115116812B (zh) * 2022-08-29 2022-11-11 深圳市宗源伟业科技有限公司 一种高精度电子显微镜

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59130365U (ja) * 1983-02-21 1984-09-01 日本電子株式会社 電子顕微鏡における試料通電装置
GB8604004D0 (en) * 1986-02-18 1986-03-26 Cambridge Instr Ltd Specimen chamber
WO1999030345A1 (en) 1997-12-08 1999-06-17 Philips Electron Optics B.V. Environmental sem with a magnetic field for improved secondary electron detection
AU748840B2 (en) 1997-12-08 2002-06-13 Fei Company Environmental SEM with multipole fields for improved secondary electron detection
US8872129B2 (en) * 2007-05-09 2014-10-28 Protochips, Inc. Microscopy support structures
JP2009129799A (ja) * 2007-11-27 2009-06-11 Hitachi Ltd 走査透過型電子顕微鏡
JP5226378B2 (ja) * 2008-04-28 2013-07-03 株式会社日立ハイテクノロジーズ 透過型電子顕微鏡、及び試料観察方法
US8299432B2 (en) * 2008-11-04 2012-10-30 Fei Company Scanning transmission electron microscope using gas amplification
JP2011034895A (ja) * 2009-08-05 2011-02-17 Hitachi High-Technologies Corp 荷電粒子線装置及び試料汚染除去機構
DE112010005188B4 (de) * 2010-01-27 2016-04-07 Hitachi High-Technologies Corp. Vorrichtung zum Bestrahlen mit geladenen Teilchen
EP2487703A1 (en) * 2011-02-14 2012-08-15 Fei Company Detector for use in charged-particle microscopy
EP2555221B1 (en) 2011-08-03 2013-07-24 Fei Company Method of studying a sample in an ETEM

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