GB2525111A - X-ray source with improved target lifetime - Google Patents

X-ray source with improved target lifetime

Info

Publication number
GB2525111A
GB2525111A GB1512823.4A GB201512823A GB2525111A GB 2525111 A GB2525111 A GB 2525111A GB 201512823 A GB201512823 A GB 201512823A GB 2525111 A GB2525111 A GB 2525111A
Authority
GB
United Kingdom
Prior art keywords
electron beam
target
source
ray source
enclosure body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB1512823.4A
Other versions
GB2525111B (en
GB201512823D0 (en
Inventor
Bill Walker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nordson Corp
Original Assignee
Nordson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nordson Corp filed Critical Nordson Corp
Publication of GB201512823D0 publication Critical patent/GB201512823D0/en
Publication of GB2525111A publication Critical patent/GB2525111A/en
Application granted granted Critical
Publication of GB2525111B publication Critical patent/GB2525111B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/24—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof
    • H01J35/30—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof by deflection of the cathode ray
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/147—Spot size control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H01J35/116—Transmissive anodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
    • H05G1/08—Electrical details
    • H05G1/70—Circuit arrangements for X-ray tubes with more than one anode; Circuit arrangements for apparatus comprising more than one X ray tube or more than one cathode

Landscapes

  • X-Ray Techniques (AREA)

Abstract

There is provided an x-ray source (10) comprising: an enclosure body (12); a target (14) permanently fixed to or forming part of the enclosure body (12); an electron beam source within the enclosure body (12), the electron beam source (16, 18) configured to produce an electron beam along a beam path between the electron beam source (16, 18) and the target (14), the electron beam incident on the target (14) to generate x-rays; an electron beam focussing assembly (30, 36) positioned around the beam path between the target (14) and the electron beam source (16, 18); a first electron beam steering means (32) positioned around the beam path between the electron beam source (16, 18) and the electron beam focussing assembly (30, 36); and a second beam steering means (34) positioned around the beam path between the first electron beam steering means (32) and the target (14), wherein the first and second beam steering means (32, 34) are adjustable to alter a position of incidence of the beam on the target (14). The x-ray source (10) eliminates the need for an elastomer seal between the target (14) and the enclosure body (12). The elimination of elastomer seals has significant benefits in terms of performance and life of the x-ray source (10).
GB1512823.4A 2013-02-05 2014-02-04 X-ray source with improved target lifetime Active GB2525111B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP13154072.6A EP2763156A1 (en) 2013-02-05 2013-02-05 X-ray source with improved target lifetime
PCT/US2014/014535 WO2014123835A1 (en) 2013-02-05 2014-02-04 X-ray source with improved target lifetime

Publications (3)

Publication Number Publication Date
GB201512823D0 GB201512823D0 (en) 2015-09-02
GB2525111A true GB2525111A (en) 2015-10-14
GB2525111B GB2525111B (en) 2018-10-31

Family

ID=47709950

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1512823.4A Active GB2525111B (en) 2013-02-05 2014-02-04 X-ray source with improved target lifetime

Country Status (4)

Country Link
EP (1) EP2763156A1 (en)
DE (1) DE212014000043U1 (en)
GB (1) GB2525111B (en)
WO (1) WO2014123835A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105047509B (en) * 2015-07-24 2017-03-29 中国科学院电工研究所 The focusing arrangement of big beam deflection target practice X-ray source with microbeam
GB2565138A (en) * 2017-08-04 2019-02-06 Adaptix Ltd X-ray generator
DE102018100956B4 (en) * 2018-01-17 2021-06-24 Comet Ag Transmission target for an open X-ray tube, open X-ray tube, method for recognizing a transmission target and method for setting the parameters of this transmission target
US12035451B2 (en) 2021-04-23 2024-07-09 Carl Zeiss X-Ray Microscopy Inc. Method and system for liquid cooling isolated x-ray transmission target
US11864300B2 (en) 2021-04-23 2024-01-02 Carl Zeiss X-ray Microscopy, Inc. X-ray source with liquid cooled source coils
US11961694B2 (en) * 2021-04-23 2024-04-16 Carl Zeiss X-ray Microscopy, Inc. Fiber-optic communication for embedded electronics in x-ray generator
EP4254464A1 (en) * 2022-03-29 2023-10-04 Excillum AB Determination of operational state of x-ray source
US20240130028A1 (en) * 2022-10-18 2024-04-18 Carl Zeiss X-ray Microscopy, Inc. Reflection target X-ray source with steered beam on target

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1557864A1 (en) * 2004-01-23 2005-07-27 Tohken Co., Ltd. X-ray microscopic inspection apparatus
JP2005327497A (en) * 2004-05-12 2005-11-24 Shimadzu Corp X-ray generator
JP2006024522A (en) * 2004-07-09 2006-01-26 Shimadzu Corp X-ray generation device
US20070051907A1 (en) * 2005-09-03 2007-03-08 Alfred Reinhold Device for generating X-ray or XUV radiation
US20100141151A1 (en) * 2006-12-28 2010-06-10 Yxlon International Feinfocus Gmbh X-ray tube and method for examining a target by scanning with an electron beam
GB2473137A (en) * 2009-08-31 2011-03-02 Hamamatsu Photonics Kk An X-ray generator

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9620160D0 (en) * 1996-09-27 1996-11-13 Bede Scient Instr Ltd X-ray generator
GB9906886D0 (en) * 1999-03-26 1999-05-19 Bede Scient Instr Ltd Method and apparatus for prolonging the life of an X-ray target
DE102010009276A1 (en) * 2010-02-25 2011-08-25 Dürr Dental AG, 74321 X-ray tube and system for producing X-ray images for dental or orthodontic diagnostics

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1557864A1 (en) * 2004-01-23 2005-07-27 Tohken Co., Ltd. X-ray microscopic inspection apparatus
JP2005327497A (en) * 2004-05-12 2005-11-24 Shimadzu Corp X-ray generator
JP2006024522A (en) * 2004-07-09 2006-01-26 Shimadzu Corp X-ray generation device
US20070051907A1 (en) * 2005-09-03 2007-03-08 Alfred Reinhold Device for generating X-ray or XUV radiation
US20100141151A1 (en) * 2006-12-28 2010-06-10 Yxlon International Feinfocus Gmbh X-ray tube and method for examining a target by scanning with an electron beam
GB2473137A (en) * 2009-08-31 2011-03-02 Hamamatsu Photonics Kk An X-ray generator

Also Published As

Publication number Publication date
DE212014000043U1 (en) 2015-09-24
EP2763156A1 (en) 2014-08-06
GB2525111B (en) 2018-10-31
GB201512823D0 (en) 2015-09-02
WO2014123835A1 (en) 2014-08-14

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