CN105047509B - The focusing arrangement of big beam deflection target practice X-ray source with microbeam - Google Patents
The focusing arrangement of big beam deflection target practice X-ray source with microbeam Download PDFInfo
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Abstract
The invention discloses the focusing arrangement of big beam deflection target practice X-ray source with microbeam, including electron beam channel pipe, condenser lenss module, transition root module, objective lens module, movable diaphragm module, lens isis seat and target；Condenser lenss module upper end is connected with electron gun, the connected transition root module in lower end；Transition root module lower end is connected objective lens module, objective lens module lower end socket lens isis seat, and movable diaphragm is installed inside lens isis seat.Movable diaphragm module has 2, and distal center position is respectively symmetrically and is provided with half V shaped hole；When diaphragm piece is moved left and right, by controlling overlap-add region, the light hole in continuous different size aperture is formed.Electron beam sequentially passes through condenser lenss module, transition root module, objective lens module and movable diaphragm module from top to bottom by electron beam channel pipe, reaches target plane；X-ray is produced by bombarding target；Advantage is that high-precision movable diaphragm light hole size can realize being switched fast for the electron beam of different beam spot diameter,s.
Description
Technical field
The invention belongs to three dimensional lossless micro-observation technology field, and in particular to big beam deflection target practice microbeam speckle X is penetrated
The focusing arrangement of line source.
Background technology
X-ray source with microbeam is to produce one of essential element of fine definition radioscopy microscopic image.Generally there are two kinds
Scheme produces X-ray source with microbeam：One is that common X-ray tube is combined with X-ray optic；But, X-ray optic
Require in terms of material property and stability it is very high, require consideration for how during design reduce from various X-ray optics transmit
The loss of the useful x-ray photon number on sample and its heat load problem；To consider whether there is strain during installation, positioning whether essence
The problems such as true and optical element stability in the large；Two is that the electron beam of high-speed motion is pooled Microfocus X-ray so as to bombardment gold
" fine focusing x-ray source " category target surface, produce the X-ray of small beam spot, i.e.,；Due to cost it is relatively low, it is easy to control, at present extensively should
For the field such as X-ray micro-imaging and X-ray Micro-CT scanning.
" fine focusing x-ray source " generally adopts two-stage lens focusing system, is referred to as thing apart from the nearer magnetic lenses of target plane
Mirror, is condenser lenss apart from target surface magnetic lenses farther out.The energy of incident beam at target surface, line and beam spot are through making with target
With rear, intensity and the distribution of X-ray beam are determined.Therefore, design optimization two-stage lens focusing system is ensureing target surface electron beam
Obtain the target that little beam spot is always " fine focusing x-ray source " worker while line again.
In two-stage lens fine focusing x-ray source, at target surface, the performance of electron beam is due to being referred to by object lens index, condenser lenss
Between mark and electronics, the factor of coulomb stress effect affects, and causes the handoff procedure of electron beam line extremely complex, is unfavorable for realizing moving
The real-time monitored of state process；And influence each other between object lens and condenser lenss, it is difficult to realize independent adjustment；Simultaneously using micro- Jiao
When speckle x-ray source carries out CT image checkings, under conditions of the position between micro- focal spot x-ray source and detector is fixed, its visual field
Range size is inversely proportional to resolution height, i.e. the big resolution in the visual field is low；The little high resolution in the visual field.In detection, usually first
Sample is scanned using big visual field low resolution, then selects region interested to carry out low coverage high-resolution as needed
Detection sample, generally moves sample using multidimensional work stage so that between x-ray source and sample, sample with
Distance between detector changes come the switching for realizing big low coverage；Due to the motion response of the work stage by carrying sample
Rate limitation, if while the mass ratio of sample is larger, it is difficult to which realization is switched fast, and needs switching time increase, affects
The detection efficiency of sample, this is very unfavorable to the transient process sometimes for detection sample.
The content of the invention
When the present invention is for carrying out CT image checkings using x-ray source, the detection visual field and the resolution of system cannot be simultaneously
Take into account, while the response speed of the work stage motion by carrying sample is limited and the quality of sample affects, needs are cut
The time of changing increases, and is unfavorable for realizing the real-time monitored of dynamic process.For these reasons, the present invention proposes that one kind can be switched fast
The visual field and the two-stage lens focusing system device of resolution, specifically refer to a kind of big beam deflection target practice microbeam speckle X-ray
The focusing arrangement in source.
The focusing arrangement of big beam deflection target practice X-ray source with microbeam, including electron beam channel pipe, condenser lenss module,
Transition root module, objective lens module, movable diaphragm module, lens isis seat and target.
The focusing arrangement generally cylindrical structural, electron beam channel pipe adopt hollow pipe, positioned at condenser lenss module and thing
On the central axis of mirror module；Including upper electron beam channel pipe and lower electron beam channel pipe；Upper electron beam channel pipe upper end and electricity
Sub- rifle connection, upper electron beam channel pipe lower end passes through condenser lenss module；Lower electron beam channel pipe upper end is connected with condenser lenss module
Connect, lower electron beam channel pipe lower end is connected through objective lens module with lens isis seat；Upper electron beam channel pipe is logical with lower electron beam
Deferent connects together.
Electron beam sequentially passes through condenser lenss module, transition root module, objective lens module from top to bottom by electron beam channel pipe
With movable diaphragm module, target plane is reached；X-ray is produced by bombarding target.
Condenser lenss module upper end is connected with electron gun, the connected transition root module in condenser lenss module lower end；
Condenser lenss module includes condenser lenss upper magnet yoke, condenser lenss lower yoke, condenser lenss pole shoe member, condenser lenss coil block
With condenser lenss sealing ring；
Condenser lenss upper magnet yoke and condenser lenss lower yoke using inner hollow cylinder, make-up fixed placement, and with gather
Light microscopic seal ring seal is isolated, and on condenser lenss, the axis of lower yoke is identical with the axis of electron beam channel pipe.Condenser lenss pole
Boots component includes on condenser lenss pole shoe under pole shoe and condenser lenss, and using the cylinder of inner hollow, the upper and lower pole shoe of condenser lenss leads to
Cross the assembling of pole shoe magnetism-isolating loop integral, it is identical with the axis of electron beam channel pipe；The horizontal center line of condenser lenss pole shoe member
With the central axis upright of electron beam channel pipe, and position of intersecting point be condenser lenss position.Condenser lenss coil block is annular, is wrapped
Include condenser lenss coil and condenser lenss skeleton, by bobbin be arranged on condenser lenss pole shoe member outside with lower yoke on condenser lenss in
Between hollow space.
Cylinder of the transition root module using inner hollow, the axis of cylinder and the axis phase of electron beam channel pipe
Together.
Transition root module lower end is connected objective lens module, and objective lens module includes object lens upper module and object lens lower module, objective line
Coil assembly and object lens sealing ring；Object lens upper module adopts the cone of inner hollow in " mountain " font, object lens lower module.
Object lens upper module and object lens lower module make-up fixed placement, hollow internal placement objective lens coil component；Mould on object lens
The axial symmetry center of block and object lens lower module is identical with the central shaft of electron beam channel pipe, while being provided with axial symmetry in the heart logical
Road, so that electron beam passes through.
Objective lens coil component is annular, is placed on object lens sealing ring, and object lens sealing ring is by screw and mould on object lens
Block is connected and fixes, while being placed on above object lens lower module；Between object lens upper module and object lens lower module are formed in the horizontal direction
Gap, the center in gap and the joining of axis are object lens positions；
Objective lens module lower end is socketed lens isis seat, and movable diaphragm is installed inside lens isis seat.
Movable diaphragm module has 2, respectively symmetrical left diaphragm adjustment module and right diaphragm adjustment module, and left diaphragm is adjusted
Section module includes driver part, left diaphragm rod and the left diaphragm piece of left diaphragm；Right diaphragm adjustment module includes the driving of right diaphragm
Part, right diaphragm rod and right diaphragm piece；
The driver part of the driver part of left diaphragm and right diaphragm is separately mounted to the both sides of lens isis seat, left diaphragm rod
Connect the driver part of the driver part and right diaphragm of left diaphragm with right diaphragm rod respectively, left diaphragm rod and right diaphragm rod connect respectively
Left diaphragm piece and right diaphragm piece are connect, left diaphragm piece and right diaphragm piece are symmetrically oppositely arranged；
Integrally in cirque structure, lens isis seat is connected using screw thread lens isis seat with the lower end of lower electron beam channel pipe
Connect, positioned at the lower section of object lens lower module, the central axis of lens isis seat is identical with the central axis of electron beam channel pipe, object lens
Place left diaphragm piece and right diaphragm piece inside the circle ring center of diaphragm seat, lens isis seat side is respectively symmetrically and is provided with two and leads to
Hole, distinguishes as the distal center position of the passage that left diaphragm rod and right diaphragm rod are moved left and right, left diaphragm piece and right diaphragm piece
V-notch is symmetrically provided with, the symmetrical left diaphragm piece in two ends and right diaphragm piece are overlapped mutually, forms aperture；The drive division of left diaphragm
The driver part of part and right diaphragm controls left diaphragm rod and right diaphragm rod is moved left and right respectively, and then drives left diaphragm piece and right light
Late piece is moved left and right, and by the overlap-add region for controlling left diaphragm piece and right diaphragm piece, forms the thang-kng in continuous different size aperture
Hole.When left diaphragm piece and completely overlapped right diaphragm piece, light hole minimum 0, when left diaphragm piece and right diaphragm piece splice completely
The hole for being formed together is maximum light hole.
By vac sorb in the lower section of lens isis seat when target works, surface is provided with indent, plate in interior recess or
Sputtering last layer heavy metal thin film.
The electron beam that electron gun is launched through condenser lenss module, lower yoke, condenser lenss coil block on by condenser lenss
Under the action of a magnetic field formed with the upper and lower pole shoe of condenser lenss, parallel beam is formed；When objective lens module, by adjusting movable diaphragm mould
Block, selects suitable light hole in movable diaphragm module to adjust the angle of incidence of target surface electron beam, and the line changed at target plane is big
Little and beam spot size；Through objective lens module, on the one hand objective lens module passes through electricity in operating distance and objective lens coil component to electron beam
The optimization of stream, obtains the X-ray beam of high intensity and brightness, it is ensured that microbeam speckle under big line at target plane；On the other hand in optically focused
Objective lens coil electric current is finely tuned when mirror coil current is constant, the electronics sharply defined image at target plane is found, coordinates removable diaphragm module
Light hole change be rapidly completed the switching of line；Electron beam is bombarded target after lens isis and produces X-ray.
It is an advantage of the current invention that：
(1) a kind of focusing system device of big beam deflection target practice X-ray source with microbeam, objective lens module and condenser lenss mould
Block can independently adjust respective coil block exciting current.
(2) a kind of focusing system device of big beam deflection target practice X-ray source with microbeam, high-precision movable diaphragm lead to
Unthreaded hole size can realize being switched fast for the electron beam of different beam spot diameter,s.
Description of the drawings
Fig. 1 is the overall structure figure of focusing system device of the present invention；
Fig. 2 is the structural representation of condenser lenss module of the present invention；
Fig. 2 a are the structural representations of condenser lenss pole shoe of the present invention；
Fig. 3 is the structure chart of objective lens module of the present invention；
Fig. 4 is the structural representation of movable diaphragm module of the invention；
Fig. 4 a are the structural representations of left diaphragm piece of the invention；
Fig. 4 b are the structural representations of right diaphragm piece of the invention；
Fig. 5 is the structure chart of lens isis seat of the present invention；
Fig. 6 is the structure chart of target of the present invention；
Fig. 7 is the schematic diagram of parallel model work of the present invention；
Fig. 8 is the light path schematic diagram that movable diaphragm of the invention switches line；
101- sealing ring a；102- clamp nuts；103- condenser lenss upper magnet yokes；104- condenser lenss pole shoe members；1041- gathers
Pole shoe on light microscopic；Pole shoe under 1042- condenser lenss；1043- pole shoe magnetism-isolating loops；1044- condenser lenss position；105- condenser lenss are sealed
Ring；106- condenser lenss coil blocks；1061- condenser lenss coils；1062- condenser lenss skeletons；107- sealing ring b；108- condenser lenss
Lower yoke；201- object lens upper modules；202- objective lens coil components；203- object lens lower modules；204- object lens sealing rings；205- is sealed
Circle c, 206- sealing ring d；207- object lens positions；301- changeover portions；The left diaphragm adjustment modules of 401-；The right diaphragms of 402- adjust mould
Block；The driver part of the left diaphragms of 4011-；The left diaphragm rods of 4012-；The left diaphragm sealing rings of 4013-；The left diaphragm pieces of 4014-；4021-
The driver part of right diaphragm；The right diaphragm rods of 4022-；The right diaphragm sealing rings of 4023-；The right diaphragm pieces of 4024-；403- light holes；
Electron beam channel pipe under 502-；The upper electron beam channel pipes of 501-；601- lens isis seats；602- sealing ring e；603- sealing ring f；
604- targets；6041- heavy metal thin film；
Specific embodiment
Below in conjunction with drawings and Examples, the present invention is described in further detail.
The focusing arrangement of big beam deflection target practice X-ray source with microbeam, including electron beam channel pipe, condenser lenss module,
Transition root module, objective lens module, movable diaphragm module, lens isis seat and target.
Focusing arrangement generally cylindrical structural, as shown in figure 1, electron beam channel pipe is integrally located at the center of focusing arrangement
On axis, using hollow pipe made by duralumin or copper product, electron beam channel pipe includes electron beam channel pipe 501 and lower electronics
Beam passage pipe 502；Upper 501 upper end of electron beam channel pipe is connected with electron gun, and upper 501 lower end of electron beam channel pipe passes through condenser lenss
Module；Lower 502 upper end of electron beam channel pipe is connected with condenser lenss module, and lower 502 lower end of electron beam channel pipe passes through object lens mould
Block is threaded connection with lens isis seat 601；Upper electron beam channel pipe 501 is connected together with lower electron beam channel pipe 502.
Electron beam sequentially passes through condenser lenss from top to bottom by upper electron beam channel pipe 501 and lower electron beam channel pipe 502
Module, objective lens module and lens isis seat 601, reach 604 plane of target；Produced by bombarding the heavy metal thin film 6041 on target 604
Raw X-ray.
Condenser lenss module is as shown in Figure 2：Including condenser lenss upper magnet yoke 103, condenser lenss lower yoke 108, condenser lenss pole shoe group
Part 104, condenser lenss sealing ring 105 and condenser lenss coil block 106；
Condenser lenss pole shoe member 104 as shown in Figure 2 a, including pole shoe 1042 under pole shoe on condenser lenss 1041 and condenser lenss,
Using the cylinder of inner hollow, ensure there is certain interval S 2 when both install, and one is assembled into pole shoe magnetism-isolating loop 1043
Body；The central axis upright of the horizontal center line of condenser lenss pole shoe member 104 and upper electron beam channel pipe 501, and position of intersecting point
For condenser lenss position 1044；On condenser lenss, the cylinder diameter of pole shoe 1041 is D11, and under condenser lenss, the cylinder of pole shoe 1042 is straight
Footpath is D21.
, using the cylinder of inner hollow, make-up is placed, is used in combination for condenser lenss upper magnet yoke 103 and condenser lenss lower yoke 108
Condenser lenss sealing ring 105 is sealed off, and condenser lenss sealing ring 105 and condenser lenss upper magnet yoke 103, condenser lenss lower yoke 108 are contacted
Place is provided with sealing ring b107；Fixed by clamp nut 102 between electron gun and condenser lenss upper magnet yoke 103, use sealing ring a101
Sealing.
Condenser lenss line is installed between the hollow space outside condenser lenss pole shoe member 104 and on condenser lenss in the middle of lower yoke
Coil assembly 106, condenser lenss coil block 106 include condenser lenss coil 1061 and condenser lenss skeleton 1062；Condenser lenss coil block
106 is annular, is fixed on condenser lenss skeleton 1062.
108 lower end of condenser lenss lower yoke connects transition root module and lower electron beam channel pipe 502, and transition root module lower end is solid
Connect objective lens module.Condenser lenss module passes through transition root module junctional complex mirror module, condenser lenss module, transition root module and object lens mould
It is connected by screw realization connection between block；
Transition root module includes changeover portion 301, cylinder of the changeover portion 301 using inner hollow, the axis of cylinder
It is identical with the axis of electron beam channel pipe；
Objective lens module is as shown in Figure 3：Including object lens upper module 201 and object lens lower module 203, objective lens coil component 202, and
Object lens sealing ring 204；Object lens upper module 201 in fall " mountain " font, by pole shoe on object lens upper magnet yoke and object lens by one block of pure iron material
Material or spheroidal graphite cast-iron are processed；Cone of the object lens lower module 203 using inner hollow, by pole under object lens lower yoke and object lens
Boots are processed by one block of pure iron material or spheroidal graphite cast-iron；Object lens upper module 201 and 203 make-up of object lens lower module are placed, hollow
It is internal to place objective lens coil component 202；The axial symmetry center of object lens upper module 201 and object lens lower module 203 and electron beam channel
The central shaft of pipe is identical, while it is provided with passage in axial symmetry in the heart, so that electron beam passes through；Object lens upper module 201 and object lens
Lower module 203 forms gap in the horizontal direction, and the center in gap and the joining of axis are object lens positions 207；Object lens
The upper and lower magnetic circuit of module structure and gap into objective lens module；Object lens upper module 201 and object lens lower module 203 are equipped with sealing ring respectively
C205 and sealing ring d206.
Objective lens coil component 202 is annular, is made up of objective lens coil skeleton and objective lens coil；Objective lens coil component
202 are placed on object lens sealing ring 204, and object lens sealing ring 204 is connected with object lens upper module 201 by screw and fixed, while
It is placed on above object lens lower module 203；
Movable diaphragm module has 2, as shown in figure 4, respectively symmetrical left diaphragm adjustment module 401 and right diaphragm are adjusted
Module 402, left diaphragm adjustment module 401 include the driver part 4011 of left diaphragm, left diaphragm rod 4012, left diaphragm sealing ring
4013 and left diaphragm piece 4014；Right diaphragm adjustment module 402 includes the driver part 4021 of right diaphragm, right diaphragm rod 4022, right
Diaphragm sealing ring 4023 and right diaphragm piece 4024；
The driver part 4021 of the driver part 4011 and right diaphragm of left diaphragm is separately mounted to inside lens isis seat 601
Two boss on, left diaphragm rod 4012 and right diaphragm rod 4022 connect the driver part 4011 and right diaphragm of left diaphragm respectively
Left diaphragm sealing ring 4013 and the sealing of right diaphragm are respectively equipped with driver part 4021, left diaphragm rod 4012 and right diaphragm rod 4022
Circle 4023；Left diaphragm rod 4012 and right diaphragm rod 4022 connect left diaphragm piece 4014 and right diaphragm piece 4024, left diaphragm piece respectively
4014 and right diaphragm piece 4024 be symmetrically oppositely arranged.
As shown in figures 4 a and 4b, the distal center position of left diaphragm piece 4014 and right diaphragm piece 4024 is respectively symmetrically and is provided with
V-notch, the symmetrical left diaphragm piece 4014 in two ends and right diaphragm piece are overlapped mutually about 4024, the driver part 4011 of left diaphragm
4012 side-to-side movement of left diaphragm rod is controlled, the driver part 4021 of right diaphragm controls right diaphragm rod 4022 and moves left and right, and then band
Move left diaphragm piece 4014 and right diaphragm piece 4024 to move left and right, control the symmetrical left diaphragm piece 4014 in two ends and right diaphragm piece 4024
Overlap-add region, forms the light hole 403 in continuous different size aperture, when left diaphragm piece 4014 and right diaphragm piece 4024 it is completely overlapped
When, light hole 403 minimum 0, when left diaphragm piece 4014 and right diaphragm piece 4024 are stitched together the hole to be formed completely for maximum
Light hole 403.
Lens isis seat 601 is as shown in figure 5, overall is in cirque structure, lens isis seat 601 and lower electron beam channel pipe
502 lower end is threaded connection, positioned in the lower section of object lens lower module 203, the central axis and electron beam of lens isis 601
The central axis of channel is identical, and lens isis seat 601 is provided with sealing ring e602.
Left diaphragm piece 4014 and right diaphragm piece 4024 are placed by the circle ring center of lens isis seat 601, with diameter greater than equal to a left side
4024 complete spliced size of diaphragm piece 4014 and right diaphragm piece, two sides of lens isis seat 601 are respectively symmetrically opened
There is a through hole, as the passage that left diaphragm rod 4012 and right diaphragm rod 4022 are moved left and right, left diaphragm rod 4012 and right diaphragm
Bar 4022 stretches into through hole, moves left and right, the axle of the moving direction of movable diaphragm module perpendicular to the central shaft of electron beam channel pipe
Line；The light hole 403 of different-diameter is formed by controlling the motion of movable diaphragm module.
The structure of target 604 as shown in fig. 6, be provided with sealing ring f603, by vac sorb in lens isis seat 601 during work
Lower section, the material of target 604 is light weight element, such as aluminum；Surface is provided with indent, plates or sputter a last layer huge sum of money in interior recess
Category thin film 6041, such as tungsten.
Electron beam finally reaches target and puts down from the magnetic field for sequentially passing through the magnetic field of condenser lenss module generation, objective lens module is produced
Face, in order to avoid electronics disorderly flies in whole focusing arrangement everywhere, using upper electron beam channel pipe 501 and lower electron beam channel pipe
502nd, electronics is limited in the paraxial region of condenser lenss module and objective lens module for movable diaphragm module and lens isis seat 601.
In the focusing system device of big beam deflection target practice X-ray source with microbeam, as shown in fig. 7, by arranging optically focused
The multiple operation mould of two-stage focusing system is realized in the excitation of the position, structural parameters and coil block of mirror module and objective lens module
Formula, so as to ensureing at the target surface to realize microbeam speckle while big line.
A kind of focusing arrangement of big beam deflection target practice X-ray source with microbeam, movable diaphragm module switch the light of line
Road is as shown in figure 8, concrete grammar is as follows：
First, obtained by the initial condition for arranging focusing system device and the performance indications for optimizing electron beam at target plane
The structural parameters and electric parameter of objective lens module；
Then, the structural parameters and electric parameter of condenser lenss module are set, are realized between condenser lenss module and objective lens module
The motion of electron beam is parallel with optical axis, particular by the position, structural parameters and the line that arrange condenser lenss module and objective lens module
The excitation of coil assembly obtains the two-stage lens focusing system under parallel model, obtains big line X-ray source with microbeam；
Finally, by the automatic switchover and the fine setting of objective lens coil electric current of movable diaphragm, realize big line microbeam speckle X-ray
At the target surface of source, the electron beam of different beam spot sizes is switched fast, for the real-time monitored of sample.
Claims (8)
1. a kind of focusing arrangement of big beam deflection target practice X-ray source with microbeam, it is characterised in that including electron beam channel
Pipe, condenser lenss module, transition root module, objective lens module, movable diaphragm module, lens isis seat and target；
Condenser lenss module upper end is fixedly mounted on electron gun lower end；Condenser lenss module lower end is from top to bottom connected changeover portion mould successively
Block, objective lens module, lens isis seat and target, electron beam channel pipe are located on the central axis of condenser lenss module and objective lens module；
Condenser lenss module includes condenser lenss upper magnet yoke, condenser lenss lower yoke, condenser lenss pole shoe member and condenser lenss coil block, electricity
Beamlet forms parallel beam behind the magnetic field that condenser lenss module is formed；
Objective lens module includes object lens upper module, object lens lower module and objective lens coil component；Electron beam when objective lens module, object lens
On the one hand module passes through the optimization of electric current in operating distance and objective lens coil component, obtains the X-ray beam of high intensity and brightness, protects
Microbeam speckle under big line at card target plane；On the other hand fine setting objective lens coil electric current, finds the electronics sharply defined image at target plane, matches somebody with somebody
The light hole change for closing movable diaphragm module is rapidly completed the switching of line；
The movable diaphragm module is arranged on lens isis seat, including the left diaphragm piece and right diaphragm piece that are oppositely arranged；Zuo Guang
The distal center position of late piece and right diaphragm piece is respectively symmetrically and is provided with v-notch；Left diaphragm piece and right light are controlled by driver part
Late piece is moved left and right, and makes to be overlapped mutually between the v-notch on left diaphragm piece and right diaphragm piece, forms the thang-kng in different size aperture
Hole；
Electron beam sequentially passes through condenser lenss module, transition root module, objective lens module from top to bottom by electron beam channel pipe and leads to
Unthreaded hole, reaches target plane；X-ray is produced by bombarding target.
2. a kind of focusing arrangement of big beam deflection target practice X-ray source with microbeam as claimed in claim 1, its feature exist
In described electron beam channel pipe adopts hollow pipe, including upper electron beam channel pipe and lower electron beam channel pipe；Upper electron beam leads to
Deferent is connected together with lower electron beam channel pipe box；Upper electron beam channel pipe upper end is connected with electron gun, upper electron beam channel pipe
Lower end passes through condenser lenss module；Lower electron beam channel pipe upper end is connected with condenser lenss module, and lower electron beam channel pipe lower end is worn
Cross objective lens module to be connected with lens isis seat.
3. a kind of focusing arrangement of big beam deflection target practice X-ray source with microbeam as claimed in claim 1, its feature exist
In, described condenser lenss upper magnet yoke and condenser lenss lower yoke make-up fixed placement, and isolated with condenser lenss seal ring seal, optically focused
On mirror, the axis of lower yoke is identical with the axis of electron beam channel pipe；Condenser lenss pole shoe member include on condenser lenss pole shoe and
Pole shoe under condenser lenss, assembles integral by pole shoe magnetism-isolating loop, identical with the axis of electron beam channel pipe；Condenser lenss pole shoe group
The horizontal center line of part and the central axis upright of electron beam channel pipe, and position of intersecting point is condenser lenss position；Condenser lenss coil
Component is annular, including condenser lenss coil and condenser lenss skeleton, by bobbin be arranged on outside condenser lenss pole shoe member with
Hollow space on condenser lenss in the middle of lower yoke.
4. a kind of focusing arrangement of big beam deflection target practice X-ray source with microbeam as claimed in claim 1, its feature exist
In in " mountain " font, object lens lower module adopts the cone of inner hollow to described object lens upper module；
Object lens upper module and object lens lower module make-up fixed placement, hollow internal placement objective lens coil component；Object lens upper module and
The axial symmetry center of object lens lower module is identical with the central shaft of electron beam channel pipe, while it is provided with passage in axial symmetry in the heart,
So that electron beam passes through；
Objective lens coil component is annular, is placed on object lens sealing ring, and object lens sealing ring is connected and fixes with object lens upper module,
It is placed on above object lens lower module simultaneously；Object lens upper module and object lens lower module form gap, the center in gap in the horizontal direction
Position is object lens position with the joining of axis.
5. a kind of focusing arrangement of big beam deflection target practice X-ray source with microbeam as claimed in claim 1, its feature exist
In, when described left diaphragm piece and completely overlapped right diaphragm piece, light hole minimum 0, when left diaphragm piece and right diaphragm piece it is complete
Spelling is connected together the hole to be formed for maximum light hole.
6. a kind of focusing arrangement of big beam deflection target practice X-ray source with microbeam as claimed in claim 1, its feature exist
In, by vac sorb in the lower section of lens isis seat when described target works, surface is provided with indent, plate in interior recess or
Sputtering last layer heavy metal thin film.
7. a kind of focusing arrangement of big beam deflection target practice X-ray source with microbeam as claimed in claim 1, its feature exist
In described movable diaphragm module is divided into symmetrically arranged left diaphragm adjustment module and right diaphragm adjustment module；Left diaphragm is adjusted
Module includes driver part, left diaphragm rod and the left diaphragm piece of left diaphragm；Right diaphragm adjustment module includes the drive division of right diaphragm
Part, right diaphragm rod and right diaphragm piece；The driver part of the driver part of left diaphragm and right diaphragm is separately mounted to lens isis seat
Both sides, left diaphragm rod two ends connect the driver part and left diaphragm piece of left diaphragm respectively；Right diaphragm rod two ends connect the right side respectively
The driver part of diaphragm and right diaphragm piece.
8. a kind of focusing arrangement of big beam deflection target practice X-ray source with microbeam as claimed in claim 1, its feature exist
In described lens isis seat is in integrally cirque structure, and left diaphragm piece and the right side are placed inside the circle ring center of lens isis seat
Diaphragm piece, lens isis seat side are respectively symmetrically and are provided with two through holes, used as leading to that left diaphragm rod and right diaphragm rod are moved left and right
Road.
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| CN109585244B (en) * | 2018-10-23 | 2021-09-14 | 中国科学院电工研究所 | High power density electron beam focusing device |
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| JP2006164819A (en) * | 2004-12-09 | 2006-06-22 | Hitachi Medical Corp | Microfocus x-ray tube and x-ray device using it |
| JP5675987B2 (en) * | 2010-08-27 | 2015-02-25 | ジーイー センシング アンド インスペクション テクノロジーズ ゲ−エムベーハー | Microfocus X-ray tube for high-resolution X-ray equipment |
| EP2763156A1 (en) * | 2013-02-05 | 2014-08-06 | Nordson Corporation | X-ray source with improved target lifetime |
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