CN104377104B - 使用环境透射电子显微镜的方法以及环境透射电子显微镜 - Google Patents
使用环境透射电子显微镜的方法以及环境透射电子显微镜 Download PDFInfo
- Publication number
- CN104377104B CN104377104B CN201410392945.2A CN201410392945A CN104377104B CN 104377104 B CN104377104 B CN 104377104B CN 201410392945 A CN201410392945 A CN 201410392945A CN 104377104 B CN104377104 B CN 104377104B
- Authority
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- China
- Prior art keywords
- gas
- sample
- electron microscope
- transmission electron
- electric field
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Links
- 230000005540 biological transmission Effects 0.000 title claims abstract description 29
- 238000000034 method Methods 0.000 title claims abstract description 10
- 230000005684 electric field Effects 0.000 claims abstract description 25
- 238000010894 electron beam technology Methods 0.000 claims abstract description 13
- 230000006866 deterioration Effects 0.000 claims abstract description 12
- 238000003384 imaging method Methods 0.000 claims description 14
- 230000001105 regulatory effect Effects 0.000 claims description 7
- 238000009738 saturating Methods 0.000 claims 1
- BFTGQIQVUVTBJU-UHFFFAOYSA-N 5,6-dihydroimidazo[2,1-c][1,2,4]dithiazole-3-thione Chemical compound C1CN2C(=S)SSC2=N1 BFTGQIQVUVTBJU-UHFFFAOYSA-N 0.000 abstract description 22
- 230000003287 optical effect Effects 0.000 abstract description 4
- 230000006698 induction Effects 0.000 abstract description 3
- 230000010287 polarization Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 40
- 230000007613 environmental effect Effects 0.000 description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 230000005611 electricity Effects 0.000 description 4
- 230000004075 alteration Effects 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- -1 but is once ionized Substances 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000000386 microscopy Methods 0.000 description 2
- 241000252073 Anguilliformes Species 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005430 electron energy loss spectroscopy Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000004452 microanalysis Methods 0.000 description 1
- 230000005405 multipole Effects 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/261—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical, image processing or photographic arrangements associated with the tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/261—Details
- H01J37/263—Contrast, resolution or power of penetration
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/006—Details of gas supplies, e.g. in an ion source, to a beam line, to a specimen or to a workpiece
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/2602—Details
- H01J2237/2605—Details operating at elevated pressures, e.g. atmosphere
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/262—Non-scanning techniques
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP13180022.9A EP2838108A1 (en) | 2013-08-12 | 2013-08-12 | Method of using an environmental transmission electron microscope |
| EP13180022.9 | 2013-08-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104377104A CN104377104A (zh) | 2015-02-25 |
| CN104377104B true CN104377104B (zh) | 2018-04-13 |
Family
ID=48948341
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410392945.2A Active CN104377104B (zh) | 2013-08-12 | 2014-08-12 | 使用环境透射电子显微镜的方法以及环境透射电子显微镜 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US9570270B2 (https=) |
| EP (2) | EP2838108A1 (https=) |
| JP (1) | JP6192618B2 (https=) |
| CN (1) | CN104377104B (https=) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9927939B2 (en) * | 2014-08-13 | 2018-03-27 | Samsung Display Co., Ltd. | Touch panel and display apparatus including the same |
| US20210285899A1 (en) * | 2017-06-26 | 2021-09-16 | Gerasimos Daniel Danilatos | Specimen control means for particle beam microscopy |
| CN110231354B (zh) * | 2019-05-31 | 2020-09-08 | 武汉大学 | 一种非激光激发的四维透射电子显微镜装置及其使用方法 |
| US11081314B2 (en) * | 2019-10-01 | 2021-08-03 | National Technology & Engineering Solutions Of Sandia, Llc | Integrated transmission electron microscope |
| CN113241295A (zh) * | 2021-04-28 | 2021-08-10 | 中国科学院大连化学物理研究所 | 一种用于环境透射电子显微镜的负压气氛控制系统 |
| JP7585153B2 (ja) * | 2021-07-13 | 2024-11-18 | 株式会社日立製作所 | 試料ホルダー及び電子顕微鏡 |
| CN115116812B (zh) * | 2022-08-29 | 2022-11-11 | 深圳市宗源伟业科技有限公司 | 一种高精度电子显微镜 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102637571A (zh) * | 2011-02-14 | 2012-08-15 | Fei公司 | 用于带电粒子显微术中的检测方法 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59130365U (ja) * | 1983-02-21 | 1984-09-01 | 日本電子株式会社 | 電子顕微鏡における試料通電装置 |
| GB8604004D0 (en) * | 1986-02-18 | 1986-03-26 | Cambridge Instr Ltd | Specimen chamber |
| WO1999030345A1 (en) | 1997-12-08 | 1999-06-17 | Philips Electron Optics B.V. | Environmental sem with a magnetic field for improved secondary electron detection |
| AU748840B2 (en) | 1997-12-08 | 2002-06-13 | Fei Company | Environmental SEM with multipole fields for improved secondary electron detection |
| US8872129B2 (en) * | 2007-05-09 | 2014-10-28 | Protochips, Inc. | Microscopy support structures |
| JP2009129799A (ja) * | 2007-11-27 | 2009-06-11 | Hitachi Ltd | 走査透過型電子顕微鏡 |
| JP5226378B2 (ja) * | 2008-04-28 | 2013-07-03 | 株式会社日立ハイテクノロジーズ | 透過型電子顕微鏡、及び試料観察方法 |
| US8299432B2 (en) * | 2008-11-04 | 2012-10-30 | Fei Company | Scanning transmission electron microscope using gas amplification |
| JP2011034895A (ja) * | 2009-08-05 | 2011-02-17 | Hitachi High-Technologies Corp | 荷電粒子線装置及び試料汚染除去機構 |
| DE112010005188B4 (de) * | 2010-01-27 | 2016-04-07 | Hitachi High-Technologies Corp. | Vorrichtung zum Bestrahlen mit geladenen Teilchen |
| EP2555221B1 (en) | 2011-08-03 | 2013-07-24 | Fei Company | Method of studying a sample in an ETEM |
-
2013
- 2013-08-12 EP EP13180022.9A patent/EP2838108A1/en not_active Withdrawn
-
2014
- 2014-08-06 JP JP2014160010A patent/JP6192618B2/ja active Active
- 2014-08-08 US US14/455,802 patent/US9570270B2/en active Active
- 2014-08-11 EP EP14180462.5A patent/EP2838109A1/en not_active Withdrawn
- 2014-08-12 CN CN201410392945.2A patent/CN104377104B/zh active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102637571A (zh) * | 2011-02-14 | 2012-08-15 | Fei公司 | 用于带电粒子显微术中的检测方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2015037079A (ja) | 2015-02-23 |
| JP6192618B2 (ja) | 2017-09-06 |
| EP2838108A1 (en) | 2015-02-18 |
| CN104377104A (zh) | 2015-02-25 |
| EP2838109A1 (en) | 2015-02-18 |
| US9570270B2 (en) | 2017-02-14 |
| US20150041647A1 (en) | 2015-02-12 |
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| PB01 | Publication | ||
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| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |