JP6172442B2 - ゲートバルブ - Google Patents

ゲートバルブ Download PDF

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Publication number
JP6172442B2
JP6172442B2 JP2013095346A JP2013095346A JP6172442B2 JP 6172442 B2 JP6172442 B2 JP 6172442B2 JP 2013095346 A JP2013095346 A JP 2013095346A JP 2013095346 A JP2013095346 A JP 2013095346A JP 6172442 B2 JP6172442 B2 JP 6172442B2
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JP
Japan
Prior art keywords
opening
wall
convex wall
valve plate
valve
Prior art date
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Active
Application number
JP2013095346A
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English (en)
Japanese (ja)
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JP2014214863A (ja
JP2014214863A5 (enExample
Inventor
石垣　恒雄
恒雄 石垣
洋己 下田
洋己 下田
小川　浩司
浩司 小川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SMC Corp
Original Assignee
SMC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by SMC Corp filed Critical SMC Corp
Priority to JP2013095346A priority Critical patent/JP6172442B2/ja
Publication of JP2014214863A publication Critical patent/JP2014214863A/ja
Publication of JP2014214863A5 publication Critical patent/JP2014214863A5/ja
Application granted granted Critical
Publication of JP6172442B2 publication Critical patent/JP6172442B2/ja
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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
  • Drying Of Semiconductors (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
JP2013095346A 2013-04-30 2013-04-30 ゲートバルブ Active JP6172442B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013095346A JP6172442B2 (ja) 2013-04-30 2013-04-30 ゲートバルブ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013095346A JP6172442B2 (ja) 2013-04-30 2013-04-30 ゲートバルブ

Publications (3)

Publication Number Publication Date
JP2014214863A JP2014214863A (ja) 2014-11-17
JP2014214863A5 JP2014214863A5 (enExample) 2016-06-02
JP6172442B2 true JP6172442B2 (ja) 2017-08-02

Family

ID=51940823

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013095346A Active JP6172442B2 (ja) 2013-04-30 2013-04-30 ゲートバルブ

Country Status (1)

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JP (1) JP6172442B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6209043B2 (ja) * 2013-09-30 2017-10-04 東京エレクトロン株式会社 ゲートバルブおよび基板処理装置
KR102193380B1 (ko) * 2016-12-19 2020-12-21 주식회사 원익아이피에스 기판 처리 장치
CN109323012B (zh) * 2018-12-10 2023-10-10 嘉兴科奥电磁技术有限公司 滑片式三通电磁阀
CN114464550A (zh) 2020-11-09 2022-05-10 东京毅力科创株式会社 基片处理系统
CN113932011A (zh) * 2021-11-23 2022-01-14 深圳市尊绅投资有限公司 一种应用于tft、pecvd工艺的腔体真空传输阀门密封组件

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03173784A (ja) * 1989-12-01 1991-07-29 Hitachi Ltd 真空容器
JP2005030459A (ja) * 2003-07-09 2005-02-03 Smc Corp 真空排気弁
JP2006005008A (ja) * 2004-06-15 2006-01-05 Matsushita Electric Ind Co Ltd プラズマ処理装置
JP2006194303A (ja) * 2005-01-12 2006-07-27 Nok Corp 耐プラズマ用シール

Also Published As

Publication number Publication date
JP2014214863A (ja) 2014-11-17

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