JP6161295B2 - 固体撮像装置及びその製造方法 - Google Patents

固体撮像装置及びその製造方法 Download PDF

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JP6161295B2
JP6161295B2 JP2013005601A JP2013005601A JP6161295B2 JP 6161295 B2 JP6161295 B2 JP 6161295B2 JP 2013005601 A JP2013005601 A JP 2013005601A JP 2013005601 A JP2013005601 A JP 2013005601A JP 6161295 B2 JP6161295 B2 JP 6161295B2
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color filter
layer
solid
photoresist
imaging device
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Japanese (ja)
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JP2014138066A5 (enExample
JP2014138066A (ja
Inventor
政樹 栗原
政樹 栗原
大輔 下山
大輔 下山
伊藤　正孝
正孝 伊藤
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Canon Inc
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Canon Inc
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Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2013005601A priority Critical patent/JP6161295B2/ja
Priority to US14/154,883 priority patent/US9252183B2/en
Priority to CN201410020040.2A priority patent/CN103928480B/zh
Publication of JP2014138066A publication Critical patent/JP2014138066A/ja
Priority to US14/983,062 priority patent/US9806124B2/en
Publication of JP2014138066A5 publication Critical patent/JP2014138066A5/ja
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JP2013005601A 2013-01-16 2013-01-16 固体撮像装置及びその製造方法 Expired - Fee Related JP6161295B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2013005601A JP6161295B2 (ja) 2013-01-16 2013-01-16 固体撮像装置及びその製造方法
US14/154,883 US9252183B2 (en) 2013-01-16 2014-01-14 Solid state image pickup apparatus and method for manufacturing the same
CN201410020040.2A CN103928480B (zh) 2013-01-16 2014-01-16 固态图像拾取设备及其制造方法
US14/983,062 US9806124B2 (en) 2013-01-16 2015-12-29 Solid state image pickup apparatus and method for manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013005601A JP6161295B2 (ja) 2013-01-16 2013-01-16 固体撮像装置及びその製造方法

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JP2014138066A JP2014138066A (ja) 2014-07-28
JP2014138066A5 JP2014138066A5 (enExample) 2016-02-18
JP6161295B2 true JP6161295B2 (ja) 2017-07-12

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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018186240A (ja) * 2017-04-27 2018-11-22 株式会社東芝 半導体装置の製造方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4707218A (en) * 1986-10-28 1987-11-17 International Business Machines Corporation Lithographic image size reduction
US5143855A (en) * 1991-06-17 1992-09-01 Eastman Kodak Company Method for making contact openings in color image sensor passivation layer
JP3560990B2 (ja) * 1993-06-30 2004-09-02 株式会社東芝 固体撮像装置
JP2006351775A (ja) * 2005-06-15 2006-12-28 Fujifilm Holdings Corp カラーフィルタの製造方法、固体撮像素子の製造方法およびこれを用いた固体撮像素子
JP4971616B2 (ja) * 2005-09-27 2012-07-11 キヤノン株式会社 撮像装置
JP4550126B2 (ja) * 2008-04-25 2010-09-22 東京エレクトロン株式会社 エッチングマスク形成方法、エッチング方法、および半導体デバイスの製造方法
JP2010085756A (ja) * 2008-09-30 2010-04-15 Fujifilm Corp カラーフィルタの製造方法及び固体撮像装置
JP4741015B2 (ja) * 2009-03-27 2011-08-03 富士フイルム株式会社 撮像素子
JP5430387B2 (ja) * 2009-12-22 2014-02-26 キヤノン株式会社 固体撮像装置及び固体撮像装置の製造方法

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