JP6154797B2 - メンブラン真空ポンプの較正の為の方法、およびメンブラン真空ポンプ - Google Patents

メンブラン真空ポンプの較正の為の方法、およびメンブラン真空ポンプ Download PDF

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JP6154797B2
JP6154797B2 JP2014243343A JP2014243343A JP6154797B2 JP 6154797 B2 JP6154797 B2 JP 6154797B2 JP 2014243343 A JP2014243343 A JP 2014243343A JP 2014243343 A JP2014243343 A JP 2014243343A JP 6154797 B2 JP6154797 B2 JP 6154797B2
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Prior art keywords
membrane
piston
vacuum pump
head
control device
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Japanese (ja)
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JP2015117696A (ja
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アルミン・コンラート
ゼバスティアン・オーバーベック
スヴェン・ゼーンゲン
ペーター・フォルヴェルク
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プファイファー・ヴァキューム・ゲーエムベーハー
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B51/00—Testing machines, pumps, or pumping installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B35/00—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for
    • F04B35/04—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric
    • F04B35/045—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric using solenoids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F04B37/16—Means for nullifying unswept space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
JP2014243343A 2013-12-03 2014-12-01 メンブラン真空ポンプの較正の為の方法、およびメンブラン真空ポンプ Active JP6154797B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102013113351.7A DE102013113351A1 (de) 2013-12-03 2013-12-03 Verfahren zur Kalibrierung einer Membranvakuumpumpe sowie Membranvakuumpumpe
DE102013113351.7 2013-12-03

Publications (2)

Publication Number Publication Date
JP2015117696A JP2015117696A (ja) 2015-06-25
JP6154797B2 true JP6154797B2 (ja) 2017-06-28

Family

ID=51903814

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014243343A Active JP6154797B2 (ja) 2013-12-03 2014-12-01 メンブラン真空ポンプの較正の為の方法、およびメンブラン真空ポンプ

Country Status (3)

Country Link
EP (1) EP2889481B2 (de)
JP (1) JP6154797B2 (de)
DE (1) DE102013113351A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11002270B2 (en) * 2016-04-18 2021-05-11 Ingersoll-Rand Industrial U.S., Inc. Cooling methods for electrically operated diaphragm pumps
DE102017112975B3 (de) * 2017-06-13 2018-10-25 KNF Micro AG Membranpumpe
CN110230585A (zh) * 2019-06-18 2019-09-13 苏州思维医疗科技有限公司 压力真空控制泵
DE102019117731A1 (de) * 2019-07-01 2021-01-07 Ebm-Papst St. Georgen Gmbh & Co. Kg Verfahren zur Positionserfassung der Membran einer elektromotorisch angetriebenen Membranpumpe
DE102019117729A1 (de) * 2019-07-01 2021-01-07 Ebm-Papst St. Georgen Gmbh & Co. Kg Verfahren zur Positionserfassung der Membran einer elektromotorisch angetriebenen Membranpumpe
CN113606121B (zh) * 2021-08-31 2023-09-15 广东佛燃天高流体机械设备有限公司 一种隔膜式压缩机
CN119804129B (zh) * 2025-03-11 2025-07-08 陕西奥德华机械制造有限公司 一种计量泵检测校验装置

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE859477C (de) 1951-01-30 1952-12-15 Christian Dr Groeber Kolbenverdichter fuer Kaeltemaschinen
DE1960371A1 (de) 1969-12-02 1971-06-09 Klein Heinrich Georg Anhebungsfreies Krankenaufnahmefaltsystem,Steckquerholm,auswechselbare,fuer Decken,Gurte und Verbindung Kopfstuetze,loser Querholmgleiter und Magnethalter
JPS534491Y2 (de) * 1973-01-30 1978-02-04
JPS5512222A (en) * 1978-07-11 1980-01-28 Hitachi Metals Ltd Diaphragm pump
DE3246731A1 (de) 1982-12-17 1984-06-20 Wabco Westinghouse Steuerungstechnik GmbH & Co, 3000 Hannover Einrichtung zum erfassen der position des kolbens eines arbeitszylinders
JP2590209B2 (ja) * 1988-06-29 1997-03-12 株式会社長野計器製作所 往復動作動装置
JPH09137781A (ja) 1995-11-15 1997-05-27 Matsushita Refrig Co Ltd 振動型圧縮機
DE19910920B4 (de) 1999-03-12 2006-05-11 Rietschle Thomas Memmingen Gmbh Schwingankermembranpumpe
JP2001090662A (ja) * 1999-09-24 2001-04-03 Sanyo Electric Co Ltd リニアコンプレッサ
BR9907432B1 (pt) 1999-12-23 2014-04-22 Brasil Compressores Sa Método de controle de compressor, sistema de monitoração de posição de um pistão e compressor
US7322801B2 (en) * 2003-08-26 2008-01-29 Thomas Industries Inc. Compact linear air pump and valve package
JP4120512B2 (ja) * 2003-08-27 2008-07-16 日産自動車株式会社 内燃機関の可変圧縮比機構及びそのピストン位置較正方法
DE102004010403A1 (de) 2004-03-03 2005-09-22 BSH Bosch und Siemens Hausgeräte GmbH Reversierender Linearantrieb mit Mitteln zur Erfassung einer Ankerposition
DE102005039772A1 (de) † 2005-08-22 2007-03-08 Prominent Dosiertechnik Gmbh Magnetdosierpumpe
SE529328C2 (sv) † 2005-11-15 2007-07-10 Johan Stenberg Styrsystem samt metod för styrning av elektromagnetiskt drivna pumpar
EP2061971A2 (de) * 2006-09-16 2009-05-27 THOMAS MAGNETE GmbH Membranpumpe
DE102006044248B3 (de) 2006-09-16 2008-04-03 Thomas Magnete Gmbh Membranpumpe
DE102008029370A1 (de) 2008-06-20 2009-12-24 BSH Bosch und Siemens Hausgeräte GmbH Linearverdichter

Also Published As

Publication number Publication date
DE102013113351A1 (de) 2015-06-03
EP2889481B1 (de) 2018-04-04
EP2889481A2 (de) 2015-07-01
EP2889481A3 (de) 2015-10-14
DE102013113351A8 (de) 2024-05-08
JP2015117696A (ja) 2015-06-25
EP2889481B2 (de) 2022-10-26

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