EP2889481A3 - Verfahren zur Kalibrierung einer Membranvakuumpumpe sowie Membranvakuumpumpe - Google Patents

Verfahren zur Kalibrierung einer Membranvakuumpumpe sowie Membranvakuumpumpe Download PDF

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Publication number
EP2889481A3
EP2889481A3 EP14192137.9A EP14192137A EP2889481A3 EP 2889481 A3 EP2889481 A3 EP 2889481A3 EP 14192137 A EP14192137 A EP 14192137A EP 2889481 A3 EP2889481 A3 EP 2889481A3
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
piston
space
membrane
membrane vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP14192137.9A
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English (en)
French (fr)
Other versions
EP2889481B1 (de
EP2889481B2 (de
EP2889481A2 (de
Inventor
Armin Conrad
Sebastian Oberbeck
Swen Söhngen
Peter Vorwerk
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
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Filing date
Publication date
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=51903814&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP2889481(A3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2889481A2 publication Critical patent/EP2889481A2/de
Publication of EP2889481A3 publication Critical patent/EP2889481A3/de
Publication of EP2889481B1 publication Critical patent/EP2889481B1/de
Application granted granted Critical
Publication of EP2889481B2 publication Critical patent/EP2889481B2/de
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B51/00—Testing machines, pumps, or pumping installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B35/00—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for
    • F04B35/04—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric
    • F04B35/045—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric using solenoids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F04B37/16—Means for nullifying unswept space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Control Of Positive-Displacement Pumps (AREA)

Abstract

Die Erfindung betrifft ein Verfahren zur Kalibrierung einer Membranvakuumpumpe sowie eine Membranvakuumpumpe zur Förderung eines Mediums, mit einem mit einem Schwingspulenantrieb linear antreibbaren Kolben in einem Antriebsraum, mit einer zwischen einem Förderraum und Antriebsraum schwingenden Membran, die den Förderraum und den Antriebsraum trennt, mit einem Membrankopf, der mit der Membran den Förderraum bildet, wobei der Kolben als ein die Membran in Bewegung versetzender und um eine vorbestimmte Wegstrecke bewegbarer Kolben ausgebildet ist, mit einer Vorrichtung zur Erfassung eines Totpunktes und/oder Position des Kolbens, bei dem eine Steuervorrichtung den Totpunkt in Abhängigkeit von dem erfassten Signal der Vorrichtung verstellt.
EP14192137.9A 2013-12-03 2014-11-06 Verfahren zur Kalibrierung einer Membranvakuumpumpe sowie Membranvakuumpumpe Active EP2889481B2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102013113351.7A DE102013113351A1 (de) 2013-12-03 2013-12-03 Verfahren zur Kalibrierung einer Membranvakuumpumpe sowie Membranvakuumpumpe

Publications (4)

Publication Number Publication Date
EP2889481A2 EP2889481A2 (de) 2015-07-01
EP2889481A3 true EP2889481A3 (de) 2015-10-14
EP2889481B1 EP2889481B1 (de) 2018-04-04
EP2889481B2 EP2889481B2 (de) 2022-10-26

Family

ID=51903814

Family Applications (1)

Application Number Title Priority Date Filing Date
EP14192137.9A Active EP2889481B2 (de) 2013-12-03 2014-11-06 Verfahren zur Kalibrierung einer Membranvakuumpumpe sowie Membranvakuumpumpe

Country Status (3)

Country Link
EP (1) EP2889481B2 (de)
JP (1) JP6154797B2 (de)
DE (1) DE102013113351A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170298919A1 (en) * 2016-04-18 2017-10-19 Ingersoll-Rand Company Direct drive linear motor for conventionally arranged double diaphragm pump
DE102017112975B3 (de) * 2017-06-13 2018-10-25 KNF Micro AG Membranpumpe
CN110230585A (zh) * 2019-06-18 2019-09-13 苏州思维医疗科技有限公司 压力真空控制泵
DE102019117731A1 (de) * 2019-07-01 2021-01-07 Ebm-Papst St. Georgen Gmbh & Co. Kg Verfahren zur Positionserfassung der Membran einer elektromotorisch angetriebenen Membranpumpe
DE102019117729A1 (de) * 2019-07-01 2021-01-07 Ebm-Papst St. Georgen Gmbh & Co. Kg Verfahren zur Positionserfassung der Membran einer elektromotorisch angetriebenen Membranpumpe
CN113606121B (zh) * 2021-08-31 2023-09-15 广东佛燃天高流体机械设备有限公司 一种隔膜式压缩机

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050047923A1 (en) * 2003-08-26 2005-03-03 Wenjun Li Compact linear air pump and valve package
WO2008031418A2 (de) * 2006-09-16 2008-03-20 Thomas Magnete Gmbh Membranpumpe

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE859477C (de) 1951-01-30 1952-12-15 Christian Dr Groeber Kolbenverdichter fuer Kaeltemaschinen
DE1960371A1 (de) 1969-12-02 1971-06-09 Klein Heinrich Georg Anhebungsfreies Krankenaufnahmefaltsystem,Steckquerholm,auswechselbare,fuer Decken,Gurte und Verbindung Kopfstuetze,loser Querholmgleiter und Magnethalter
JPS534491Y2 (de) * 1973-01-30 1978-02-04
JPS5512222A (en) * 1978-07-11 1980-01-28 Hitachi Metals Ltd Diaphragm pump
DE3246731A1 (de) * 1982-12-17 1984-06-20 Wabco Westinghouse Steuerungstechnik GmbH & Co, 3000 Hannover Einrichtung zum erfassen der position des kolbens eines arbeitszylinders
JP2590209B2 (ja) * 1988-06-29 1997-03-12 株式会社長野計器製作所 往復動作動装置
JPH09137781A (ja) * 1995-11-15 1997-05-27 Matsushita Refrig Co Ltd 振動型圧縮機
DE19910920B4 (de) * 1999-03-12 2006-05-11 Rietschle Thomas Memmingen Gmbh Schwingankermembranpumpe
JP2001090662A (ja) * 1999-09-24 2001-04-03 Sanyo Electric Co Ltd リニアコンプレッサ
BR9907432B1 (pt) * 1999-12-23 2014-04-22 Brasil Compressores Sa Método de controle de compressor, sistema de monitoração de posição de um pistão e compressor
JP4120512B2 (ja) * 2003-08-27 2008-07-16 日産自動車株式会社 内燃機関の可変圧縮比機構及びそのピストン位置較正方法
DE102004010403A1 (de) 2004-03-03 2005-09-22 BSH Bosch und Siemens Hausgeräte GmbH Reversierender Linearantrieb mit Mitteln zur Erfassung einer Ankerposition
DE102005039772A1 (de) 2005-08-22 2007-03-08 Prominent Dosiertechnik Gmbh Magnetdosierpumpe
SE529328C2 (sv) 2005-11-15 2007-07-10 Johan Stenberg Styrsystem samt metod för styrning av elektromagnetiskt drivna pumpar
DE102006044248B3 (de) 2006-09-16 2008-04-03 Thomas Magnete Gmbh Membranpumpe
DE102008029370A1 (de) * 2008-06-20 2009-12-24 BSH Bosch und Siemens Hausgeräte GmbH Linearverdichter

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050047923A1 (en) * 2003-08-26 2005-03-03 Wenjun Li Compact linear air pump and valve package
WO2008031418A2 (de) * 2006-09-16 2008-03-20 Thomas Magnete Gmbh Membranpumpe

Also Published As

Publication number Publication date
EP2889481B1 (de) 2018-04-04
JP6154797B2 (ja) 2017-06-28
DE102013113351A1 (de) 2015-06-03
EP2889481B2 (de) 2022-10-26
EP2889481A2 (de) 2015-07-01
JP2015117696A (ja) 2015-06-25
DE102013113351A8 (de) 2024-05-08

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