JP6136464B2 - 超音波トランスデューサー装置およびプローブ並びに電子機器および超音波画像装置 - Google Patents

超音波トランスデューサー装置およびプローブ並びに電子機器および超音波画像装置 Download PDF

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Publication number
JP6136464B2
JP6136464B2 JP2013071582A JP2013071582A JP6136464B2 JP 6136464 B2 JP6136464 B2 JP 6136464B2 JP 2013071582 A JP2013071582 A JP 2013071582A JP 2013071582 A JP2013071582 A JP 2013071582A JP 6136464 B2 JP6136464 B2 JP 6136464B2
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Japan
Prior art keywords
film
electrode
piezoelectric
conductive
ultrasonic transducer
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JP2013071582A
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English (en)
Japanese (ja)
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JP2014195494A5 (enExample
JP2014195494A (ja
Inventor
清瀬　摂内
摂内 清瀬
鈴木　博則
博則 鈴木
洋史 松田
洋史 松田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2013071582A priority Critical patent/JP6136464B2/ja
Priority to TW103111139A priority patent/TWI632710B/zh
Priority to KR1020140035299A priority patent/KR102106653B1/ko
Priority to CN201410120672.6A priority patent/CN104068893B/zh
Priority to US14/227,558 priority patent/US9592031B2/en
Priority to EP14162330.6A priority patent/EP2783759A3/en
Publication of JP2014195494A publication Critical patent/JP2014195494A/ja
Publication of JP2014195494A5 publication Critical patent/JP2014195494A5/ja
Priority to US15/417,875 priority patent/US9782150B2/en
Application granted granted Critical
Publication of JP6136464B2 publication Critical patent/JP6136464B2/ja
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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • A61B8/4494—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4427—Device being portable or laptop-like
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/52—Devices using data or image processing specially adapted for diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/5207—Devices using data or image processing specially adapted for diagnosis using ultrasonic, sonic or infrasonic waves involving processing of raw data to produce diagnostic data, e.g. for generating an image
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
    • B06B1/0629—Square array
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0688—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/082—Shaping or machining of piezoelectric or electrostrictive bodies by etching, e.g. lithography
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N39/00—Integrated devices, or assemblies of multiple devices, comprising at least one piezoelectric, electrostrictive or magnetostrictive element covered by groups H10N30/00 – H10N35/00
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Medical Informatics (AREA)
  • Veterinary Medicine (AREA)
  • Biophysics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Pathology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Public Health (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Gynecology & Obstetrics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Transducers For Ultrasonic Waves (AREA)
JP2013071582A 2013-03-29 2013-03-29 超音波トランスデューサー装置およびプローブ並びに電子機器および超音波画像装置 Active JP6136464B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2013071582A JP6136464B2 (ja) 2013-03-29 2013-03-29 超音波トランスデューサー装置およびプローブ並びに電子機器および超音波画像装置
TW103111139A TWI632710B (zh) 2013-03-29 2014-03-25 超音波轉換器裝置及超音波探針及電子機器及超音波影像裝置
KR1020140035299A KR102106653B1 (ko) 2013-03-29 2014-03-26 초음파 트랜스듀서 장치 및 프로브, 및 전자 기기 및 초음파 화상 장치
US14/227,558 US9592031B2 (en) 2013-03-29 2014-03-27 Ultrasonic transducer device, probe, electronic instrument, and ultrasonic diagnostic device
CN201410120672.6A CN104068893B (zh) 2013-03-29 2014-03-27 超声波换能器装置及其制造方法、探测器、电子设备
EP14162330.6A EP2783759A3 (en) 2013-03-29 2014-03-28 Ultrasonic transducer device, probe, electronic instrument, and ultrasonic diagnostic device
US15/417,875 US9782150B2 (en) 2013-03-29 2017-01-27 Ultrasonic transducer device, probe, electronic instrument, and ultrasonic diagnostic device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013071582A JP6136464B2 (ja) 2013-03-29 2013-03-29 超音波トランスデューサー装置およびプローブ並びに電子機器および超音波画像装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2017089381A Division JP6365726B2 (ja) 2017-04-28 2017-04-28 超音波トランスデューサー装置及び電子機器

Publications (3)

Publication Number Publication Date
JP2014195494A JP2014195494A (ja) 2014-10-16
JP2014195494A5 JP2014195494A5 (enExample) 2016-03-24
JP6136464B2 true JP6136464B2 (ja) 2017-05-31

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Country Status (6)

Country Link
US (2) US9592031B2 (enExample)
EP (1) EP2783759A3 (enExample)
JP (1) JP6136464B2 (enExample)
KR (1) KR102106653B1 (enExample)
CN (1) CN104068893B (enExample)
TW (1) TWI632710B (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6196400B2 (ja) * 2015-01-29 2017-09-13 富士フイルム株式会社 電気音響変換フィルム
JP2017103267A (ja) * 2015-11-30 2017-06-08 セイコーエプソン株式会社 圧電素子、圧電素子の形成方法および超音波装置
JP6809094B2 (ja) 2016-09-29 2021-01-06 セイコーエプソン株式会社 圧電素子、圧電アクチュエーター、超音波探触子、超音波装置、電子機器、液体噴射ヘッド、及び液体噴射装置
JP6862820B2 (ja) * 2016-12-26 2021-04-21 セイコーエプソン株式会社 超音波デバイス及び超音波装置
JP6891506B2 (ja) 2017-01-17 2021-06-18 セイコーエプソン株式会社 圧電素子、圧電アクチュエーター、超音波探触子、超音波装置、電子機器、液体噴射ヘッド、及び液体噴射装置
JP2018157125A (ja) 2017-03-21 2018-10-04 セイコーエプソン株式会社 圧電素子、超音波センサー、吐出ヘッド、超音波装置、液体吐出装置及び圧電素子の製造方法
JP7047253B2 (ja) * 2017-03-22 2022-04-05 セイコーエプソン株式会社 超音波デバイスユニット、超音波探触子、及び超音波装置
JP6874463B2 (ja) * 2017-03-27 2021-05-19 セイコーエプソン株式会社 圧電素子、圧電アクチュエーター、超音波探触子、超音波装置、電子機器、液体噴射ヘッド、及び液体噴射装置
JP2018164039A (ja) 2017-03-27 2018-10-18 セイコーエプソン株式会社 圧電素子、圧電デバイス、超音波探触子、及び電子機器

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61144565A (ja) * 1984-12-18 1986-07-02 Toshiba Corp 高分子圧電型超音波探触子
JP2745147B2 (ja) 1989-03-27 1998-04-28 三菱マテリアル 株式会社 圧電変換素子
JPH0835954A (ja) 1994-07-22 1996-02-06 Hitachi Constr Mach Co Ltd 超音波探触子
JPH0888899A (ja) 1994-09-19 1996-04-02 Daishinku Co 超音波振動子
DE69714909T2 (de) * 1996-05-27 2003-04-30 Ngk Insulators, Ltd. Piezoelektrisches Element des Dünnschichttyps
JP2001291907A (ja) 2000-04-06 2001-10-19 Matsushita Electric Ind Co Ltd 可撓性圧電素子
JP2005051688A (ja) 2003-07-31 2005-02-24 Matsushita Electric Works Ltd 超音波アレイセンサおよびその製造方法
US7559631B2 (en) 2003-09-24 2009-07-14 Seiko Epson Corporation Liquid-jet head, method for manufacturing the same, and liquid-jet apparatus
JP4744849B2 (ja) * 2004-11-11 2011-08-10 株式会社東芝 半導体装置
JP4614068B2 (ja) 2005-01-24 2011-01-19 セイコーエプソン株式会社 液体噴射ヘッド及びその製造方法並びに液体噴射装置
JP2006231909A (ja) 2005-01-26 2006-09-07 Seiko Epson Corp 液体噴射ヘッド及び液体噴射装置
JP4844717B2 (ja) 2005-12-27 2011-12-28 セイコーエプソン株式会社 液体噴射ヘッドの製造方法
EP1983409A1 (en) * 2006-02-08 2008-10-22 Tohoku Pioneer Corporation Method of manufacturing display having saw touch sensor
US8508103B2 (en) * 2009-03-23 2013-08-13 Sonavation, Inc. Piezoelectric identification device and applications thereof
WO2010148398A2 (en) * 2009-06-19 2010-12-23 The Regents Of The University Of Michigan A thin-film device and method of fabricating the same
JP5671876B2 (ja) * 2009-11-16 2015-02-18 セイコーエプソン株式会社 超音波トランスデューサー、超音波センサー、超音波トランスデューサーの製造方法、および超音波センサーの製造方法
JP5754129B2 (ja) * 2010-03-11 2015-07-29 セイコーエプソン株式会社 圧電素子、圧電センサー、電子機器、および圧電素子の製造方法
JP5708364B2 (ja) * 2011-08-22 2015-04-30 セイコーエプソン株式会社 超音波アレイセンサーおよびその製造方法

Also Published As

Publication number Publication date
TW201438477A (zh) 2014-10-01
US9782150B2 (en) 2017-10-10
CN104068893B (zh) 2018-10-19
US9592031B2 (en) 2017-03-14
TWI632710B (zh) 2018-08-11
US20140296716A1 (en) 2014-10-02
US20170128047A1 (en) 2017-05-11
JP2014195494A (ja) 2014-10-16
EP2783759A3 (en) 2015-10-28
CN104068893A (zh) 2014-10-01
KR102106653B1 (ko) 2020-05-04
KR20140118856A (ko) 2014-10-08
EP2783759A2 (en) 2014-10-01

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