CN104068893B - 超声波换能器装置及其制造方法、探测器、电子设备 - Google Patents
超声波换能器装置及其制造方法、探测器、电子设备 Download PDFInfo
- Publication number
- CN104068893B CN104068893B CN201410120672.6A CN201410120672A CN104068893B CN 104068893 B CN104068893 B CN 104068893B CN 201410120672 A CN201410120672 A CN 201410120672A CN 104068893 B CN104068893 B CN 104068893B
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- film
- electrode
- conductive
- electrode film
- piezoelectric body
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 18
- 238000002604 ultrasonography Methods 0.000 title claims abstract 15
- 239000012528 membrane Substances 0.000 claims abstract description 39
- 239000011159 matrix material Substances 0.000 claims abstract description 7
- 238000012285 ultrasound imaging Methods 0.000 claims abstract 2
- 239000004020 conductor Substances 0.000 claims description 80
- 239000002994 raw material Substances 0.000 claims description 40
- 238000000034 method Methods 0.000 claims description 26
- 230000008569 process Effects 0.000 claims description 19
- 238000005530 etching Methods 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 14
- 238000009413 insulation Methods 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000002955 isolation Methods 0.000 claims 4
- 238000000926 separation method Methods 0.000 description 28
- 239000000523 sample Substances 0.000 description 14
- 230000005540 biological transmission Effects 0.000 description 12
- 239000000758 substrate Substances 0.000 description 12
- 230000003014 reinforcing effect Effects 0.000 description 8
- 238000001514 detection method Methods 0.000 description 7
- 238000005192 partition Methods 0.000 description 6
- 230000001681 protective effect Effects 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 229910052814 silicon oxide Inorganic materials 0.000 description 5
- 238000003384 imaging method Methods 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 238000003491 array Methods 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 238000001764 infiltration Methods 0.000 description 2
- 230000008595 infiltration Effects 0.000 description 2
- 229910052741 iridium Inorganic materials 0.000 description 2
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000009877 rendering Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
- A61B8/4494—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4427—Device being portable or laptop-like
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/52—Devices using data or image processing specially adapted for diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/5207—Devices using data or image processing specially adapted for diagnosis using ultrasonic, sonic or infrasonic waves involving processing of raw data to produce diagnostic data, e.g. for generating an image
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
- B06B1/0629—Square array
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0688—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
- H10N30/082—Shaping or machining of piezoelectric or electrostrictive bodies by etching, e.g. lithography
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N39/00—Integrated devices, or assemblies of multiple devices, comprising at least one piezoelectric, electrostrictive or magnetostrictive element covered by groups H10N30/00 – H10N35/00
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Heart & Thoracic Surgery (AREA)
- Molecular Biology (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Pathology (AREA)
- Radiology & Medical Imaging (AREA)
- Physics & Mathematics (AREA)
- Biomedical Technology (AREA)
- Veterinary Medicine (AREA)
- Medical Informatics (AREA)
- Biophysics (AREA)
- Surgery (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Gynecology & Obstetrics (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Transducers For Ultrasonic Waves (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013-071582 | 2013-03-29 | ||
| JP2013071582A JP6136464B2 (ja) | 2013-03-29 | 2013-03-29 | 超音波トランスデューサー装置およびプローブ並びに電子機器および超音波画像装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104068893A CN104068893A (zh) | 2014-10-01 |
| CN104068893B true CN104068893B (zh) | 2018-10-19 |
Family
ID=50389918
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410120672.6A Active CN104068893B (zh) | 2013-03-29 | 2014-03-27 | 超声波换能器装置及其制造方法、探测器、电子设备 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US9592031B2 (enExample) |
| EP (1) | EP2783759A3 (enExample) |
| JP (1) | JP6136464B2 (enExample) |
| KR (1) | KR102106653B1 (enExample) |
| CN (1) | CN104068893B (enExample) |
| TW (1) | TWI632710B (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016121765A1 (ja) * | 2015-01-29 | 2016-08-04 | 富士フイルム株式会社 | 電気音響変換フィルムおよび電気音響変換フィルムの製造方法 |
| JP2017103267A (ja) * | 2015-11-30 | 2017-06-08 | セイコーエプソン株式会社 | 圧電素子、圧電素子の形成方法および超音波装置 |
| JP6809094B2 (ja) | 2016-09-29 | 2021-01-06 | セイコーエプソン株式会社 | 圧電素子、圧電アクチュエーター、超音波探触子、超音波装置、電子機器、液体噴射ヘッド、及び液体噴射装置 |
| JP6862820B2 (ja) * | 2016-12-26 | 2021-04-21 | セイコーエプソン株式会社 | 超音波デバイス及び超音波装置 |
| JP6891506B2 (ja) | 2017-01-17 | 2021-06-18 | セイコーエプソン株式会社 | 圧電素子、圧電アクチュエーター、超音波探触子、超音波装置、電子機器、液体噴射ヘッド、及び液体噴射装置 |
| JP2018157125A (ja) | 2017-03-21 | 2018-10-04 | セイコーエプソン株式会社 | 圧電素子、超音波センサー、吐出ヘッド、超音波装置、液体吐出装置及び圧電素子の製造方法 |
| JP7047253B2 (ja) * | 2017-03-22 | 2022-04-05 | セイコーエプソン株式会社 | 超音波デバイスユニット、超音波探触子、及び超音波装置 |
| JP2018164039A (ja) | 2017-03-27 | 2018-10-18 | セイコーエプソン株式会社 | 圧電素子、圧電デバイス、超音波探触子、及び電子機器 |
| JP6874463B2 (ja) * | 2017-03-27 | 2021-05-19 | セイコーエプソン株式会社 | 圧電素子、圧電アクチュエーター、超音波探触子、超音波装置、電子機器、液体噴射ヘッド、及び液体噴射装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1790751A (zh) * | 2004-11-11 | 2006-06-21 | 株式会社东芝 | 具有执行器的半导体装置 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61144565A (ja) * | 1984-12-18 | 1986-07-02 | Toshiba Corp | 高分子圧電型超音波探触子 |
| JP2745147B2 (ja) * | 1989-03-27 | 1998-04-28 | 三菱マテリアル 株式会社 | 圧電変換素子 |
| JPH0835954A (ja) | 1994-07-22 | 1996-02-06 | Hitachi Constr Mach Co Ltd | 超音波探触子 |
| JPH0888899A (ja) | 1994-09-19 | 1996-04-02 | Daishinku Co | 超音波振動子 |
| EP0810676B1 (en) * | 1996-05-27 | 2002-08-28 | Ngk Insulators, Ltd. | Piezoelectric film-type element |
| JP2001291907A (ja) | 2000-04-06 | 2001-10-19 | Matsushita Electric Ind Co Ltd | 可撓性圧電素子 |
| JP2005051688A (ja) | 2003-07-31 | 2005-02-24 | Matsushita Electric Works Ltd | 超音波アレイセンサおよびその製造方法 |
| KR100909100B1 (ko) | 2003-09-24 | 2009-07-23 | 세이코 엡슨 가부시키가이샤 | 액체 분사 헤드와 그 제조 방법 및 액체 분사 장치 |
| JP4614068B2 (ja) | 2005-01-24 | 2011-01-19 | セイコーエプソン株式会社 | 液体噴射ヘッド及びその製造方法並びに液体噴射装置 |
| JP2006231909A (ja) | 2005-01-26 | 2006-09-07 | Seiko Epson Corp | 液体噴射ヘッド及び液体噴射装置 |
| JP4844717B2 (ja) | 2005-12-27 | 2011-12-28 | セイコーエプソン株式会社 | 液体噴射ヘッドの製造方法 |
| JP4633124B2 (ja) * | 2006-02-08 | 2011-02-16 | 東北パイオニア株式会社 | Ｓａｗ方式タッチセンサを備えた表示装置の製造方法 |
| US8508103B2 (en) * | 2009-03-23 | 2013-08-13 | Sonavation, Inc. | Piezoelectric identification device and applications thereof |
| WO2010148398A2 (en) * | 2009-06-19 | 2010-12-23 | The Regents Of The University Of Michigan | A thin-film device and method of fabricating the same |
| JP5671876B2 (ja) * | 2009-11-16 | 2015-02-18 | セイコーエプソン株式会社 | 超音波トランスデューサー、超音波センサー、超音波トランスデューサーの製造方法、および超音波センサーの製造方法 |
| JP5754129B2 (ja) * | 2010-03-11 | 2015-07-29 | セイコーエプソン株式会社 | 圧電素子、圧電センサー、電子機器、および圧電素子の製造方法 |
| JP5708364B2 (ja) * | 2011-08-22 | 2015-04-30 | セイコーエプソン株式会社 | 超音波アレイセンサーおよびその製造方法 |
-
2013
- 2013-03-29 JP JP2013071582A patent/JP6136464B2/ja active Active
-
2014
- 2014-03-25 TW TW103111139A patent/TWI632710B/zh active
- 2014-03-26 KR KR1020140035299A patent/KR102106653B1/ko active Active
- 2014-03-27 CN CN201410120672.6A patent/CN104068893B/zh active Active
- 2014-03-27 US US14/227,558 patent/US9592031B2/en active Active
- 2014-03-28 EP EP14162330.6A patent/EP2783759A3/en not_active Withdrawn
-
2017
- 2017-01-27 US US15/417,875 patent/US9782150B2/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1790751A (zh) * | 2004-11-11 | 2006-06-21 | 株式会社东芝 | 具有执行器的半导体装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| US9782150B2 (en) | 2017-10-10 |
| TW201438477A (zh) | 2014-10-01 |
| JP2014195494A (ja) | 2014-10-16 |
| US20140296716A1 (en) | 2014-10-02 |
| EP2783759A3 (en) | 2015-10-28 |
| TWI632710B (zh) | 2018-08-11 |
| EP2783759A2 (en) | 2014-10-01 |
| KR20140118856A (ko) | 2014-10-08 |
| CN104068893A (zh) | 2014-10-01 |
| JP6136464B2 (ja) | 2017-05-31 |
| US9592031B2 (en) | 2017-03-14 |
| KR102106653B1 (ko) | 2020-05-04 |
| US20170128047A1 (en) | 2017-05-11 |
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| GR01 | Patent grant |