TWI632710B - 超音波轉換器裝置及超音波探針及電子機器及超音波影像裝置 - Google Patents
超音波轉換器裝置及超音波探針及電子機器及超音波影像裝置 Download PDFInfo
- Publication number
- TWI632710B TWI632710B TW103111139A TW103111139A TWI632710B TW I632710 B TWI632710 B TW I632710B TW 103111139 A TW103111139 A TW 103111139A TW 103111139 A TW103111139 A TW 103111139A TW I632710 B TWI632710 B TW I632710B
- Authority
- TW
- Taiwan
- Prior art keywords
- film
- electrode
- ultrasonic
- piezoelectric
- conductive film
- Prior art date
Links
- 239000000523 sample Substances 0.000 title claims description 22
- 239000004020 conductor Substances 0.000 claims description 78
- 239000000758 substrate Substances 0.000 claims description 12
- 238000003384 imaging method Methods 0.000 claims description 5
- 239000002994 raw material Substances 0.000 description 44
- 229920002120 photoresistant polymer Polymers 0.000 description 22
- 238000000034 method Methods 0.000 description 18
- 238000005530 etching Methods 0.000 description 15
- 238000004519 manufacturing process Methods 0.000 description 14
- 230000005540 biological transmission Effects 0.000 description 8
- 230000003014 reinforcing effect Effects 0.000 description 8
- 238000000926 separation method Methods 0.000 description 8
- 238000001514 detection method Methods 0.000 description 7
- 239000012528 membrane Substances 0.000 description 7
- 238000005192 partition Methods 0.000 description 7
- 238000002604 ultrasonography Methods 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 230000001681 protective effect Effects 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 6
- 229910052814 silicon oxide Inorganic materials 0.000 description 6
- 239000011810 insulating material Substances 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 238000003491 array Methods 0.000 description 3
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000000149 penetrating effect Effects 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 229910052741 iridium Inorganic materials 0.000 description 2
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- -1 polysiloxane Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
- A61B8/4494—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4427—Device being portable or laptop-like
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/52—Devices using data or image processing specially adapted for diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/5207—Devices using data or image processing specially adapted for diagnosis using ultrasonic, sonic or infrasonic waves involving processing of raw data to produce diagnostic data, e.g. for generating an image
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
- B06B1/0629—Square array
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0688—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
- H10N30/082—Shaping or machining of piezoelectric or electrostrictive bodies by etching, e.g. lithography
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N39/00—Integrated devices, or assemblies of multiple devices, comprising at least one piezoelectric, electrostrictive or magnetostrictive element covered by groups H10N30/00 – H10N35/00
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Biomedical Technology (AREA)
- Medical Informatics (AREA)
- Veterinary Medicine (AREA)
- Biophysics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Pathology (AREA)
- Radiology & Medical Imaging (AREA)
- Public Health (AREA)
- Heart & Thoracic Surgery (AREA)
- Physics & Mathematics (AREA)
- Molecular Biology (AREA)
- Surgery (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Gynecology & Obstetrics (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Transducers For Ultrasonic Waves (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013071582A JP6136464B2 (ja) | 2013-03-29 | 2013-03-29 | 超音波トランスデューサー装置およびプローブ並びに電子機器および超音波画像装置 |
| JP2013-071582 | 2013-03-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201438477A TW201438477A (zh) | 2014-10-01 |
| TWI632710B true TWI632710B (zh) | 2018-08-11 |
Family
ID=50389918
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW103111139A TWI632710B (zh) | 2013-03-29 | 2014-03-25 | 超音波轉換器裝置及超音波探針及電子機器及超音波影像裝置 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US9592031B2 (enExample) |
| EP (1) | EP2783759A3 (enExample) |
| JP (1) | JP6136464B2 (enExample) |
| KR (1) | KR102106653B1 (enExample) |
| CN (1) | CN104068893B (enExample) |
| TW (1) | TWI632710B (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6196400B2 (ja) * | 2015-01-29 | 2017-09-13 | 富士フイルム株式会社 | 電気音響変換フィルム |
| JP2017103267A (ja) * | 2015-11-30 | 2017-06-08 | セイコーエプソン株式会社 | 圧電素子、圧電素子の形成方法および超音波装置 |
| JP6809094B2 (ja) | 2016-09-29 | 2021-01-06 | セイコーエプソン株式会社 | 圧電素子、圧電アクチュエーター、超音波探触子、超音波装置、電子機器、液体噴射ヘッド、及び液体噴射装置 |
| JP6862820B2 (ja) * | 2016-12-26 | 2021-04-21 | セイコーエプソン株式会社 | 超音波デバイス及び超音波装置 |
| JP6891506B2 (ja) | 2017-01-17 | 2021-06-18 | セイコーエプソン株式会社 | 圧電素子、圧電アクチュエーター、超音波探触子、超音波装置、電子機器、液体噴射ヘッド、及び液体噴射装置 |
| JP2018157125A (ja) | 2017-03-21 | 2018-10-04 | セイコーエプソン株式会社 | 圧電素子、超音波センサー、吐出ヘッド、超音波装置、液体吐出装置及び圧電素子の製造方法 |
| JP7047253B2 (ja) * | 2017-03-22 | 2022-04-05 | セイコーエプソン株式会社 | 超音波デバイスユニット、超音波探触子、及び超音波装置 |
| JP6874463B2 (ja) * | 2017-03-27 | 2021-05-19 | セイコーエプソン株式会社 | 圧電素子、圧電アクチュエーター、超音波探触子、超音波装置、電子機器、液体噴射ヘッド、及び液体噴射装置 |
| JP2018164039A (ja) | 2017-03-27 | 2018-10-18 | セイコーエプソン株式会社 | 圧電素子、圧電デバイス、超音波探触子、及び電子機器 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20110221306A1 (en) * | 2010-03-11 | 2011-09-15 | Seiko Epson Corporation | Piezoelectric element, piezoelectric sensor, electronic device, and method for manufacturing piezoelectric element |
| JP2013046086A (ja) * | 2011-08-22 | 2013-03-04 | Seiko Epson Corp | 超音波アレイセンサーおよびその製造方法 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61144565A (ja) * | 1984-12-18 | 1986-07-02 | Toshiba Corp | 高分子圧電型超音波探触子 |
| JP2745147B2 (ja) | 1989-03-27 | 1998-04-28 | 三菱マテリアル 株式会社 | 圧電変換素子 |
| JPH0835954A (ja) | 1994-07-22 | 1996-02-06 | Hitachi Constr Mach Co Ltd | 超音波探触子 |
| JPH0888899A (ja) | 1994-09-19 | 1996-04-02 | Daishinku Co | 超音波振動子 |
| DE69714909T2 (de) * | 1996-05-27 | 2003-04-30 | Ngk Insulators, Ltd. | Piezoelektrisches Element des Dünnschichttyps |
| JP2001291907A (ja) | 2000-04-06 | 2001-10-19 | Matsushita Electric Ind Co Ltd | 可撓性圧電素子 |
| JP2005051688A (ja) | 2003-07-31 | 2005-02-24 | Matsushita Electric Works Ltd | 超音波アレイセンサおよびその製造方法 |
| US7559631B2 (en) | 2003-09-24 | 2009-07-14 | Seiko Epson Corporation | Liquid-jet head, method for manufacturing the same, and liquid-jet apparatus |
| JP4744849B2 (ja) * | 2004-11-11 | 2011-08-10 | 株式会社東芝 | 半導体装置 |
| JP4614068B2 (ja) | 2005-01-24 | 2011-01-19 | セイコーエプソン株式会社 | 液体噴射ヘッド及びその製造方法並びに液体噴射装置 |
| JP2006231909A (ja) | 2005-01-26 | 2006-09-07 | Seiko Epson Corp | 液体噴射ヘッド及び液体噴射装置 |
| JP4844717B2 (ja) | 2005-12-27 | 2011-12-28 | セイコーエプソン株式会社 | 液体噴射ヘッドの製造方法 |
| EP1983409A1 (en) * | 2006-02-08 | 2008-10-22 | Tohoku Pioneer Corporation | Method of manufacturing display having saw touch sensor |
| US8508103B2 (en) * | 2009-03-23 | 2013-08-13 | Sonavation, Inc. | Piezoelectric identification device and applications thereof |
| WO2010148398A2 (en) * | 2009-06-19 | 2010-12-23 | The Regents Of The University Of Michigan | A thin-film device and method of fabricating the same |
| JP5671876B2 (ja) * | 2009-11-16 | 2015-02-18 | セイコーエプソン株式会社 | 超音波トランスデューサー、超音波センサー、超音波トランスデューサーの製造方法、および超音波センサーの製造方法 |
-
2013
- 2013-03-29 JP JP2013071582A patent/JP6136464B2/ja active Active
-
2014
- 2014-03-25 TW TW103111139A patent/TWI632710B/zh active
- 2014-03-26 KR KR1020140035299A patent/KR102106653B1/ko active Active
- 2014-03-27 CN CN201410120672.6A patent/CN104068893B/zh active Active
- 2014-03-27 US US14/227,558 patent/US9592031B2/en active Active
- 2014-03-28 EP EP14162330.6A patent/EP2783759A3/en not_active Withdrawn
-
2017
- 2017-01-27 US US15/417,875 patent/US9782150B2/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20110221306A1 (en) * | 2010-03-11 | 2011-09-15 | Seiko Epson Corporation | Piezoelectric element, piezoelectric sensor, electronic device, and method for manufacturing piezoelectric element |
| JP2013046086A (ja) * | 2011-08-22 | 2013-03-04 | Seiko Epson Corp | 超音波アレイセンサーおよびその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201438477A (zh) | 2014-10-01 |
| US9782150B2 (en) | 2017-10-10 |
| CN104068893B (zh) | 2018-10-19 |
| US9592031B2 (en) | 2017-03-14 |
| US20140296716A1 (en) | 2014-10-02 |
| US20170128047A1 (en) | 2017-05-11 |
| JP2014195494A (ja) | 2014-10-16 |
| EP2783759A3 (en) | 2015-10-28 |
| CN104068893A (zh) | 2014-10-01 |
| KR102106653B1 (ko) | 2020-05-04 |
| KR20140118856A (ko) | 2014-10-08 |
| JP6136464B2 (ja) | 2017-05-31 |
| EP2783759A2 (en) | 2014-10-01 |
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