JP6131195B2 - スイッチノードリンギングが低減された3次元電源モジュール - Google Patents
スイッチノードリンギングが低減された3次元電源モジュール Download PDFInfo
- Publication number
- JP6131195B2 JP6131195B2 JP2013553496A JP2013553496A JP6131195B2 JP 6131195 B2 JP6131195 B2 JP 6131195B2 JP 2013553496 A JP2013553496 A JP 2013553496A JP 2013553496 A JP2013553496 A JP 2013553496A JP 6131195 B2 JP6131195 B2 JP 6131195B2
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- power supply
- supply module
- die
- terminal
- fet die
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- 230000001360 synchronised effect Effects 0.000 claims description 59
- 239000002184 metal Substances 0.000 claims description 28
- 229910052751 metal Inorganic materials 0.000 claims description 28
- 150000001875 compounds Chemical class 0.000 claims description 9
- 230000005669 field effect Effects 0.000 claims description 4
- 238000004806 packaging method and process Methods 0.000 claims description 2
- 230000037361 pathway Effects 0.000 claims 1
- 230000003071 parasitic effect Effects 0.000 description 44
- 238000000034 method Methods 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 238000005538 encapsulation Methods 0.000 description 5
- 238000012546 transfer Methods 0.000 description 5
- 230000000712 assembly Effects 0.000 description 4
- 238000000429 assembly Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229910000679 solder Inorganic materials 0.000 description 4
- 238000005476 soldering Methods 0.000 description 4
- 241000217377 Amblema plicata Species 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000004146 energy storage Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Classifications
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- H01L23/495—Lead-frames or other flat leads
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M3/00—Conversion of dc power input into dc power output
- H02M3/02—Conversion of dc power input into dc power output without intermediate conversion into ac
- H02M3/04—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters
- H02M3/10—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M3/145—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M3/155—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
- H02M3/156—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of output voltage or current, e.g. switching regulators
- H02M3/158—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of output voltage or current, e.g. switching regulators including plural semiconductor devices as final control devices for a single load
- H02M3/1588—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of output voltage or current, e.g. switching regulators including plural semiconductor devices as final control devices for a single load comprising at least one synchronous rectifier element
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B70/00—Technologies for an efficient end-user side electric power management and consumption
- Y02B70/10—Technologies improving the efficiency by using switched-mode power supplies [SMPS], i.e. efficient power electronics conversion e.g. power factor correction or reduction of losses in power supplies or efficient standby modes
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Dc-Dc Converters (AREA)
Description
Claims (19)
- 電気的入力端子と接地端子である少なくとも1つのリードとを有する電源モジュールであって、
ダイパッドと複数のリードとを含むリードフレームであって、前記ダイパッドが前記電気的入力端子であり、前記複数のリードの少なくとも1つが接地端子である、前記リードフレームと、
制御FETダイを含む同期降圧コンバータと、
前記制御FETダイの頂部上にスタックされる同期FETダイと、
を含み、
前記制御FETダイが、第1の物理的領域と、第1の能動領域と、前記制御FETダイの第1の面上の第1のソース端子と、前記制御FETダイの前記第1の面とは反対側の第2の面上の第1のドレイン端子とを有し、
前記同期FETダイが、前記同期FETダイの第1の面上の第2のソース端子と、前記同期FETダイの前記第1の面とは反対側の第2の面上の第2のドレイン端子とを有し、
前記制御FETダイの前記第1のドレイン端子がドレイン端子を下向きに前記ダイパッドに直接に付けられ、前記同期FETダイの前記第2のソース端子が金属クリップによって前記接地端子に接続され、前記第2のソース端子と前記接地端子との間の電気的接続が前記金属クリップを介した2つの異なる電気的経路を含む、電源モジュール。 - 請求項1に記載の電源モジュールであって、
前記同期FETダイが、前記第1の物理的領域よりも小さくない第2の物理的領域と前記第1の能動領域よりも小さくない第2の能動領域とを有し、前記第2のドレイン端子が前記第1のソース端子に取り付けられる、電源モジュール。 - 請求項2に記載の電源モジュールであって、
前記制御FETダイと前記同期FETダイとがn型MOSFETを含む、電源モジュール。 - 請求項3に記載の電源モジュールであって、
前記複数のリードが前記ダイパッドの辺に対して一列に配置される、電源モジュール。 - 請求項4に記載の電源モジュールであって、
前記コンバータのスイッチノード端子として動作可能な第1の金属クリップを更に含み、前記第1の金属クリップが、前記第1のソース端子と前記第2のドレイン端子にハンダ付けされ、それぞれのリードに接続されるリッジを有する、電源モジュール。 - 請求項1に記載の電源モジュールであって、
前記金属クリップが、前記第2のソース端子にハンダ付けされ、それぞれのリードに接続される1つ又は複数のリッジを有する、電源モジュール。 - 請求項6に記載の電源モジュールであって、
前記制御FETダイが第1のゲート端子を有し、前記同期FETダイが第2のゲート端子を有する、電源モジュール。 - 請求項7に記載の電源モジュールであって、
前記第1及び第2のゲート端子をリードに接続するワイヤボンドを更に含む、電源モジュール。 - 請求項8に記載の電源モジュールであって、
前記コンバータとクリップとワイヤボンドとを封止し、外部部品への接続のために前記パッドと前記複数のリードとの表面を封止せずに残す、パッケージング化合物を更に含む、電源モジュール。 - 電源モジュールであって、
外部入力端子と下向きのドレイン端子を有する制御電界効果トランジスタ(FET)ダイとの間の第1の電気的経路と、
外部接地端子と同期FETダイとの間の第2及び第3の電気的経路と、
を含み、
前記第1の電気的経路が前記第2の電気的経路より電気的に抵抗性が小さく、前記第2及び第3の電気的経路が第2の金属クリップを含み、前記第2の金属クリップがその相対する側に沿った2つの細長いリッジを有し、前記2つの細長いリッジが前記外部接地端子に結合される、電源モジュール。 - 請求項10に記載の電源モジュールであって、
前記第1の電気的経路が、前記制御FETダイに直接にハンダ付けされる金属パッドを含む、電源モジュール。 - 請求項10に記載の電源モジュールであって、
前記第2の金属クリップが前記外部接地端子と前記同期FETダイとに接触する、電源モジュール。 - 請求項12に記載の電源モジュールであって、
前記第2の金属クリップがソース端子において前記同期FETダイに接触する、電源モジュール。 - 請求項10に記載の電源モジュールであって、
外部スイッチノード端子を更に含む、電源モジュール。 - 請求項10に記載の電源モジュールであって、
外部スイッチノード端子を更に含み、前記外部入力端子が前記外部スイッチノード端子と前記外部接地端子との間に配置される、電源モジュール。 - 電源モジュールであって、
外部入力端子と下向きのドレイン端子を有する制御電界効果トランジスタ(FET)ダイとの間の第1の電気的経路と、
外部接地端子と同期FETダイとの間の第2及び第3の電気的経路と、
第1の金属クリップに接続される外部スイッチノード端子と、
を含み、
前記第1の電気的経路が前記第2の電気的経路より電気的に抵抗性が小さく、前記第2及び第3の電気的経路が第2の金属クリップを含む、電源モジュール。 - 請求項16に記載の電源モジュールであって、
前記第1の金属クリップが前記制御FETダイと前記同期FETダイとの両方に接触する、電源モジュール。 - 請求項17に記載の電源モジュールであって、
前記制御FETダイが前記第1の金属クリップの第1の表面にハンダ付けされ、前記同期FETダイが前記第1の金属クリップの第2の表面にハンダ付けされる、電源モジュール。 - 請求項18に記載の電源モジュールであって、
前記第1の金属クリップが前記制御FETダイのソース端子と前記同期FETダイのドレイン端子とにハンダ付けされる、電源モジュール。
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Application Number | Priority Date | Filing Date | Title |
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US13/021,969 US20120200281A1 (en) | 2011-02-07 | 2011-02-07 | Three-Dimensional Power Supply Module Having Reduced Switch Node Ringing |
US13/021,969 | 2011-02-07 | ||
PCT/US2012/024171 WO2012109265A2 (en) | 2011-02-07 | 2012-02-07 | Three-dimensional power supply module having reduced switch node ringing |
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JP2014511027A5 JP2014511027A5 (ja) | 2015-03-26 |
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JP (1) | JP6131195B2 (ja) |
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Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI453831B (zh) | 2010-09-09 | 2014-09-21 | 台灣捷康綜合有限公司 | 半導體封裝結構及其製造方法 |
US8981748B2 (en) * | 2011-08-08 | 2015-03-17 | Semiconductor Components Industries, Llc | Method of forming a semiconductor power switching device, structure therefor, and power converter |
US9589872B2 (en) * | 2012-03-28 | 2017-03-07 | Infineon Technologies Americas Corp. | Integrated dual power converter package having internal driver IC |
US9171784B2 (en) * | 2012-03-28 | 2015-10-27 | International Rectifier Corporation | Dual power converter package using external driver IC |
US20140063744A1 (en) * | 2012-09-05 | 2014-03-06 | Texas Instruments Incorporated | Vertically Stacked Power FETS and Synchronous Buck Converter Having Low On-Resistance |
JP5966921B2 (ja) * | 2012-12-28 | 2016-08-10 | トヨタ自動車株式会社 | 半導体モジュールの製造方法 |
US9589929B2 (en) * | 2013-03-14 | 2017-03-07 | Vishay-Siliconix | Method for fabricating stack die package |
US9966330B2 (en) | 2013-03-14 | 2018-05-08 | Vishay-Siliconix | Stack die package |
US9214415B2 (en) | 2013-04-11 | 2015-12-15 | Texas Instruments Incorporated | Integrating multi-output power converters having vertically stacked semiconductor chips |
US9171828B2 (en) * | 2014-02-05 | 2015-10-27 | Texas Instruments Incorporated | DC-DC converter having terminals of semiconductor chips directly attachable to circuit board |
US9355942B2 (en) * | 2014-05-15 | 2016-05-31 | Texas Instruments Incorporated | Gang clips having distributed-function tie bars |
US9515014B2 (en) | 2014-10-08 | 2016-12-06 | Infineon Technologies Americas Corp. | Power converter package with integrated output inductor |
US10103140B2 (en) * | 2016-10-14 | 2018-10-16 | Alpha And Omega Semiconductor Incorporated | Switch circuit with controllable phase node ringing |
US11309273B2 (en) | 2017-05-19 | 2022-04-19 | Shindengen Electric Manufacturing Co., Ltd. | Electronic module |
WO2018211680A1 (ja) * | 2017-05-19 | 2018-11-22 | 新電元工業株式会社 | 電子モジュール |
JP6952042B2 (ja) * | 2017-05-19 | 2021-10-20 | 新電元工業株式会社 | 電子モジュール |
EP3703119B1 (en) * | 2017-10-26 | 2022-06-08 | Shindengen Electric Manufacturing Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
DE102018207308B4 (de) * | 2018-05-09 | 2020-07-02 | Infineon Technologies Ag | Halbleiterbauteil mit integriertem shunt-widerstand und verfahren zu dessen herstellung |
US20200194347A1 (en) * | 2018-12-18 | 2020-06-18 | Alpha And Omega Semiconductor (Cayman) Ltd. | Semiconductor package and method of making the same |
US11658410B2 (en) | 2019-03-12 | 2023-05-23 | Epirus, Inc. | Apparatus and method for synchronizing power circuits with coherent RF signals to form a steered composite RF signal |
US11211703B2 (en) | 2019-03-12 | 2021-12-28 | Epirus, Inc. | Systems and methods for dynamic biasing of microwave amplifier |
US11616295B2 (en) | 2019-03-12 | 2023-03-28 | Epirus, Inc. | Systems and methods for adaptive generation of high power electromagnetic radiation and their applications |
US12068618B2 (en) | 2021-07-01 | 2024-08-20 | Epirus, Inc. | Systems and methods for compact directed energy systems |
US12003223B2 (en) | 2020-06-22 | 2024-06-04 | Epirus, Inc. | Systems and methods for modular power amplifiers |
US11469722B2 (en) | 2020-06-22 | 2022-10-11 | Epirus, Inc. | Systems and methods for modular power amplifiers |
US20220020671A1 (en) * | 2020-07-20 | 2022-01-20 | Electronics And Telecommunications Research Institute | Flip-stack type semiconductor package and method of manufacturing the same |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6421262B1 (en) * | 2000-02-08 | 2002-07-16 | Vlt Corporation | Active rectifier |
JP2005217072A (ja) * | 2004-01-28 | 2005-08-11 | Renesas Technology Corp | 半導体装置 |
JP4489485B2 (ja) * | 2004-03-31 | 2010-06-23 | 株式会社ルネサステクノロジ | 半導体装置 |
CN101819955B (zh) * | 2004-12-20 | 2011-09-28 | 半导体元件工业有限责任公司 | 具有增强散热性的半导体封装结构 |
US7598603B2 (en) * | 2006-03-15 | 2009-10-06 | Infineon Technologies Ag | Electronic component having a power switch with an anode thereof mounted on a die attach region of a heat sink |
DE102006021959B4 (de) * | 2006-05-10 | 2011-12-29 | Infineon Technologies Ag | Leistungshalbleiterbauteil und Verfahren zu dessen Herstellung |
US7569920B2 (en) * | 2006-05-10 | 2009-08-04 | Infineon Technologies Ag | Electronic component having at least one vertical semiconductor power transistor |
DE102006034679A1 (de) * | 2006-07-24 | 2008-01-31 | Infineon Technologies Ag | Halbleitermodul mit Leistungshalbleiterchip und passiven Bauelement sowie Verfahren zur Herstellung desselben |
US7485954B2 (en) * | 2006-09-07 | 2009-02-03 | Alpha And Omega Semiconductor Limited | Stacked dual MOSFET package |
DE102007009521B4 (de) * | 2007-02-27 | 2011-12-15 | Infineon Technologies Ag | Bauteil und Verfahren zu dessen Herstellung |
US7683477B2 (en) * | 2007-06-26 | 2010-03-23 | Infineon Technologies Ag | Semiconductor device including semiconductor chips having contact elements |
US7750445B2 (en) * | 2007-09-18 | 2010-07-06 | Fairchild Semiconductor Corporation | Stacked synchronous buck converter |
US8035221B2 (en) * | 2007-11-08 | 2011-10-11 | Intersil Americas, Inc. | Clip mount for integrated circuit leadframes |
US7696612B2 (en) * | 2008-01-28 | 2010-04-13 | Fairchild Semiconductor Corporation | Multiphase synchronous buck converter |
US8492883B2 (en) * | 2008-03-14 | 2013-07-23 | Advanced Semiconductor Engineering, Inc. | Semiconductor package having a cavity structure |
US8148815B2 (en) * | 2008-10-13 | 2012-04-03 | Intersil Americas, Inc. | Stacked field effect transistor configurations |
CN101442035B (zh) * | 2008-12-14 | 2011-03-16 | 天水华天科技股份有限公司 | 一种扁平无引线封装件及其生产方法 |
US20100171543A1 (en) * | 2009-01-08 | 2010-07-08 | Ciclon Semiconductor Device Corp. | Packaged power switching device |
US8680627B2 (en) * | 2011-01-14 | 2014-03-25 | International Rectifier Corporation | Stacked half-bridge package with a common conductive clip |
-
2011
- 2011-02-07 US US13/021,969 patent/US20120200281A1/en not_active Abandoned
-
2012
- 2012-02-07 WO PCT/US2012/024171 patent/WO2012109265A2/en active Application Filing
- 2012-02-07 CN CN2012800078397A patent/CN103348469A/zh active Pending
- 2012-02-07 CN CN201810832541.9A patent/CN108987365A/zh active Pending
- 2012-02-07 JP JP2013553496A patent/JP6131195B2/ja active Active
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JP2014511027A (ja) | 2014-05-01 |
US20120200281A1 (en) | 2012-08-09 |
CN103348469A (zh) | 2013-10-09 |
CN108987365A (zh) | 2018-12-11 |
WO2012109265A3 (en) | 2012-11-01 |
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