JP6130677B2 - 研磨装置および研磨方法 - Google Patents

研磨装置および研磨方法 Download PDF

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Publication number
JP6130677B2
JP6130677B2 JP2013017192A JP2013017192A JP6130677B2 JP 6130677 B2 JP6130677 B2 JP 6130677B2 JP 2013017192 A JP2013017192 A JP 2013017192A JP 2013017192 A JP2013017192 A JP 2013017192A JP 6130677 B2 JP6130677 B2 JP 6130677B2
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JP
Japan
Prior art keywords
polishing
stopper
substrate
pressing member
pressing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2013017192A
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English (en)
Japanese (ja)
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JP2014150131A (ja
JP2014150131A5 (enExample
Inventor
関　正也
正也 関
哲二 戸川
哲二 戸川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP2013017192A priority Critical patent/JP6130677B2/ja
Priority to KR1020140008386A priority patent/KR101877092B1/ko
Priority to TW103103080A priority patent/TWI634596B/zh
Priority to CN201410043555.4A priority patent/CN103962939B/zh
Priority to US14/167,129 priority patent/US9561573B2/en
Publication of JP2014150131A publication Critical patent/JP2014150131A/ja
Publication of JP2014150131A5 publication Critical patent/JP2014150131A5/ja
Priority to US15/386,624 priority patent/US9694467B2/en
Application granted granted Critical
Publication of JP6130677B2 publication Critical patent/JP6130677B2/ja
Priority to KR1020180063619A priority patent/KR102008100B1/ko
Priority to KR1020190076393A priority patent/KR102073919B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/002—Machines or devices using grinding or polishing belts; Accessories therefor for grinding edges or bevels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/004—Machines or devices using grinding or polishing belts; Accessories therefor using abrasive rolled strips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/18—Accessories
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
JP2013017192A 2013-01-31 2013-01-31 研磨装置および研磨方法 Active JP6130677B2 (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP2013017192A JP6130677B2 (ja) 2013-01-31 2013-01-31 研磨装置および研磨方法
KR1020140008386A KR101877092B1 (ko) 2013-01-31 2014-01-23 연마 장치 및 연마 방법
TW103103080A TWI634596B (zh) 2013-01-31 2014-01-28 研磨裝置及研磨方法
US14/167,129 US9561573B2 (en) 2013-01-31 2014-01-29 Polishing apparatus
CN201410043555.4A CN103962939B (zh) 2013-01-31 2014-01-29 研磨装置及研磨方法
US15/386,624 US9694467B2 (en) 2013-01-31 2016-12-21 Polishing method of polishing a substrate
KR1020180063619A KR102008100B1 (ko) 2013-01-31 2018-06-01 연마 장치 및 연마 방법
KR1020190076393A KR102073919B1 (ko) 2013-01-31 2019-06-26 연마 장치 및 연마 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013017192A JP6130677B2 (ja) 2013-01-31 2013-01-31 研磨装置および研磨方法

Publications (3)

Publication Number Publication Date
JP2014150131A JP2014150131A (ja) 2014-08-21
JP2014150131A5 JP2014150131A5 (enExample) 2015-11-19
JP6130677B2 true JP6130677B2 (ja) 2017-05-17

Family

ID=51223438

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013017192A Active JP6130677B2 (ja) 2013-01-31 2013-01-31 研磨装置および研磨方法

Country Status (5)

Country Link
US (2) US9561573B2 (enExample)
JP (1) JP6130677B2 (enExample)
KR (3) KR101877092B1 (enExample)
CN (1) CN103962939B (enExample)
TW (1) TWI634596B (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017148931A (ja) * 2016-02-19 2017-08-31 株式会社荏原製作所 研磨装置および研磨方法
JP6568006B2 (ja) * 2016-04-08 2019-08-28 株式会社荏原製作所 研磨装置および研磨方法
CN106625216A (zh) * 2016-11-25 2017-05-10 新乡市振英机械设备有限公司 防尘罩磨边时使用的旋转架
JP6920849B2 (ja) * 2017-03-27 2021-08-18 株式会社荏原製作所 基板処理方法および装置
JP6840617B2 (ja) * 2017-05-15 2021-03-10 株式会社荏原製作所 研磨装置および研磨方法
US10571069B2 (en) * 2017-09-14 2020-02-25 Applied Materials, Inc. Gimbal assembly for heater pedestal
JP6899298B2 (ja) * 2017-09-27 2021-07-07 株式会社荏原製作所 研磨方法および研磨装置
CN108807228B (zh) * 2018-06-05 2020-10-16 安徽省华腾农业科技有限公司经开区分公司 一种半导体芯片生产工艺
JP7121572B2 (ja) 2018-07-20 2022-08-18 株式会社荏原製作所 研磨装置および研磨方法
JP7169210B2 (ja) * 2019-01-28 2022-11-10 株式会社荏原製作所 研磨方法および研磨装置
JP7099757B1 (ja) 2021-02-09 2022-07-12 株式会社Ｂｂｓ金明 半導体ウェハーの研磨装置
CN113714905A (zh) * 2021-09-03 2021-11-30 安徽永茂泰铝业有限公司 一种用于汽车铸造件的环保型打磨设备及其打磨方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3415017A (en) * 1965-05-13 1968-12-10 Zech Murray Corp Apparatus for finishing workpieces under controlled pressures
US6126512A (en) * 1998-07-10 2000-10-03 Aplex Inc. Robust belt tracking and control system for hostile environment
EP1080841A3 (en) * 1999-09-02 2001-07-11 Mitsubishi Materials Corporation Carrier head, polishing apparatus using the carrier head, and method for sensing polished surface state
JP2001205549A (ja) * 2000-01-25 2001-07-31 Speedfam Co Ltd 基板エッジ部の片面研磨方法およびその装置
JP2004154874A (ja) * 2002-11-05 2004-06-03 Ebara Corp ポリッシング装置及びポリッシング方法
JP2005305586A (ja) * 2004-04-20 2005-11-04 Nihon Micro Coating Co Ltd 研磨装置
CN101934491B (zh) * 2004-11-01 2012-07-25 株式会社荏原制作所 抛光设备
KR101236472B1 (ko) * 2007-10-15 2013-02-22 삼성전자주식회사 웨이퍼 베벨 영역 폴리싱 장치 및 그 장치에서의 연마종말점 검출 방법
JP5192355B2 (ja) * 2008-11-28 2013-05-08 株式会社ディスコ ウエーハの面取り部除去方法および研削装置
US8741097B2 (en) * 2009-10-27 2014-06-03 Tokyo Electron Limited Plasma processing apparatus and plasma processing method
JP5257408B2 (ja) * 2010-06-01 2013-08-07 王子ホールディングス株式会社 植物の挿し木苗製造方法
JP5886602B2 (ja) * 2011-03-25 2016-03-16 株式会社荏原製作所 研磨装置および研磨方法
JP2013103318A (ja) * 2011-11-16 2013-05-30 Toshiba Corp 研磨装置及び研磨方法

Also Published As

Publication number Publication date
CN103962939A (zh) 2014-08-06
JP2014150131A (ja) 2014-08-21
KR20140098683A (ko) 2014-08-08
US20170100813A1 (en) 2017-04-13
TWI634596B (zh) 2018-09-01
US20140213154A1 (en) 2014-07-31
US9694467B2 (en) 2017-07-04
TW201434082A (zh) 2014-09-01
KR102073919B1 (ko) 2020-02-06
KR20190083319A (ko) 2019-07-11
US9561573B2 (en) 2017-02-07
CN103962939B (zh) 2018-01-12
KR102008100B1 (ko) 2019-08-06
KR101877092B1 (ko) 2018-07-10
KR20180064359A (ko) 2018-06-14

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