JP6092219B2 - 電気銀めっき液 - Google Patents
電気銀めっき液 Download PDFInfo
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- JP6092219B2 JP6092219B2 JP2014528031A JP2014528031A JP6092219B2 JP 6092219 B2 JP6092219 B2 JP 6092219B2 JP 2014528031 A JP2014528031 A JP 2014528031A JP 2014528031 A JP2014528031 A JP 2014528031A JP 6092219 B2 JP6092219 B2 JP 6092219B2
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- Prior art keywords
- acid
- plating solution
- group
- solution according
- plating
- Prior art date
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- 238000007747 plating Methods 0.000 title claims description 103
- 229910052709 silver Inorganic materials 0.000 title claims description 35
- 239000004332 silver Substances 0.000 title claims description 35
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 title claims description 31
- -1 azole compound Chemical class 0.000 claims description 60
- IOHPVZBSOKLVMN-UHFFFAOYSA-N 2-(2-phenylethyl)benzoic acid Chemical compound OC(=O)C1=CC=CC=C1CCC1=CC=CC=C1 IOHPVZBSOKLVMN-UHFFFAOYSA-N 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 17
- 239000004094 surface-active agent Substances 0.000 claims description 16
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 13
- 239000002253 acid Substances 0.000 claims description 11
- 150000003839 salts Chemical class 0.000 claims description 11
- KAESVJOAVNADME-UHFFFAOYSA-N 1H-pyrrole Natural products C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 claims description 9
- YTPLMLYBLZKORZ-UHFFFAOYSA-N Divinylene sulfide Natural products C=1C=CSC=1 YTPLMLYBLZKORZ-UHFFFAOYSA-N 0.000 claims description 9
- 125000003277 amino group Chemical group 0.000 claims description 9
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 9
- 239000008139 complexing agent Substances 0.000 claims description 8
- 229930192474 thiophene Natural products 0.000 claims description 8
- 238000011282 treatment Methods 0.000 claims description 8
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 6
- 229910052760 oxygen Inorganic materials 0.000 claims description 6
- 239000001301 oxygen Substances 0.000 claims description 6
- 125000003172 aldehyde group Chemical group 0.000 claims description 5
- 125000000217 alkyl group Chemical group 0.000 claims description 5
- 229940100890 silver compound Drugs 0.000 claims description 5
- 150000003379 silver compounds Chemical class 0.000 claims description 5
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 4
- 239000002736 nonionic surfactant Substances 0.000 claims description 4
- XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 150000002894 organic compounds Chemical class 0.000 claims description 3
- 239000011347 resin Substances 0.000 claims description 3
- 229920005989 resin Polymers 0.000 claims description 3
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 claims description 2
- 125000002777 acetyl group Chemical group [H]C([H])([H])C(*)=O 0.000 claims description 2
- 125000003545 alkoxy group Chemical group 0.000 claims description 2
- 125000002877 alkyl aryl group Chemical group 0.000 claims description 2
- 229910000423 chromium oxide Inorganic materials 0.000 claims description 2
- 125000005843 halogen group Chemical group 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 150000003577 thiophenes Chemical class 0.000 claims description 2
- 239000000243 solution Substances 0.000 description 34
- 150000001875 compounds Chemical class 0.000 description 16
- 235000014113 dietary fatty acids Nutrition 0.000 description 13
- 229930195729 fatty acid Natural products 0.000 description 13
- 239000000194 fatty acid Substances 0.000 description 13
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 12
- 125000001424 substituent group Chemical group 0.000 description 12
- 230000000052 comparative effect Effects 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
- FJKROLUGYXJWQN-UHFFFAOYSA-N papa-hydroxy-benzoic acid Natural products OC(=O)C1=CC=C(O)C=C1 FJKROLUGYXJWQN-UHFFFAOYSA-N 0.000 description 8
- YGSDEFSMJLZEOE-UHFFFAOYSA-N salicylic acid Chemical compound OC(=O)C1=CC=CC=C1O YGSDEFSMJLZEOE-UHFFFAOYSA-N 0.000 description 8
- IOJUPLGTWVMSFF-UHFFFAOYSA-N benzothiazole Chemical class C1=CC=C2SC=NC2=C1 IOJUPLGTWVMSFF-UHFFFAOYSA-N 0.000 description 7
- GLDQAMYCGOIJDV-UHFFFAOYSA-N 2,3-dihydroxybenzoic acid Chemical compound OC(=O)C1=CC=CC(O)=C1O GLDQAMYCGOIJDV-UHFFFAOYSA-N 0.000 description 6
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 6
- RWZYAGGXGHYGMB-UHFFFAOYSA-N anthranilic acid Chemical compound NC1=CC=CC=C1C(O)=O RWZYAGGXGHYGMB-UHFFFAOYSA-N 0.000 description 6
- 239000004327 boric acid Substances 0.000 description 6
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 6
- 150000001558 benzoic acid derivatives Chemical class 0.000 description 5
- 150000004665 fatty acids Chemical class 0.000 description 5
- 125000000542 sulfonic acid group Chemical group 0.000 description 5
- UIAFKZKHHVMJGS-UHFFFAOYSA-N 2,4-dihydroxybenzoic acid Chemical compound OC(=O)C1=CC=C(O)C=C1O UIAFKZKHHVMJGS-UHFFFAOYSA-N 0.000 description 4
- WXTMDXOMEHJXQO-UHFFFAOYSA-N 2,5-dihydroxybenzoic acid Chemical compound OC(=O)C1=CC(O)=CC=C1O WXTMDXOMEHJXQO-UHFFFAOYSA-N 0.000 description 4
- GOUHYARYYWKXHS-UHFFFAOYSA-N 4-formylbenzoic acid Chemical compound OC(=O)C1=CC=C(C=O)C=C1 GOUHYARYYWKXHS-UHFFFAOYSA-N 0.000 description 4
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 4
- KKEYFWRCBNTPAC-UHFFFAOYSA-N Terephthalic acid Chemical compound OC(=O)C1=CC=C(C(O)=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-N 0.000 description 4
- 239000000654 additive Substances 0.000 description 4
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 4
- 150000002460 imidazoles Chemical class 0.000 description 4
- 150000002473 indoazoles Chemical class 0.000 description 4
- KBOPZPXVLCULAV-UHFFFAOYSA-N mesalamine Chemical compound NC1=CC=C(O)C(C(O)=O)=C1 KBOPZPXVLCULAV-UHFFFAOYSA-N 0.000 description 4
- 229960004963 mesalazine Drugs 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- 150000003217 pyrazoles Chemical class 0.000 description 4
- 229960004889 salicylic acid Drugs 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 150000003536 tetrazoles Chemical class 0.000 description 4
- 150000003852 triazoles Chemical class 0.000 description 4
- BCMCBBGGLRIHSE-UHFFFAOYSA-N 1,3-benzoxazole Chemical compound C1=CC=C2OC=NC2=C1 BCMCBBGGLRIHSE-UHFFFAOYSA-N 0.000 description 3
- 229940082044 2,3-dihydroxybenzoic acid Drugs 0.000 description 3
- ZMPRRFPMMJQXPP-UHFFFAOYSA-N 2-sulfobenzoic acid Chemical compound OC(=O)C1=CC=CC=C1S(O)(=O)=O ZMPRRFPMMJQXPP-UHFFFAOYSA-N 0.000 description 3
- IFLKEBSJTZGCJG-UHFFFAOYSA-N 5-methyl-2-thiophenecarboxylic acid Natural products CC=1C=CSC=1C(O)=O IFLKEBSJTZGCJG-UHFFFAOYSA-N 0.000 description 3
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 3
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 3
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 3
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerol Natural products OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 3
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 3
- FZWLAAWBMGSTSO-UHFFFAOYSA-N Thiazole Chemical compound C1=CSC=N1 FZWLAAWBMGSTSO-UHFFFAOYSA-N 0.000 description 3
- 230000000996 additive effect Effects 0.000 description 3
- 150000004820 halides Chemical class 0.000 description 3
- PVNIIMVLHYAWGP-UHFFFAOYSA-N nicotinic acid Natural products OC(=O)C1=CC=CN=C1 PVNIIMVLHYAWGP-UHFFFAOYSA-N 0.000 description 3
- YXIWHUQXZSMYRE-UHFFFAOYSA-N 1,3-benzothiazole-2-thiol Chemical compound C1=CC=C2SC(S)=NC2=C1 YXIWHUQXZSMYRE-UHFFFAOYSA-N 0.000 description 2
- YQIGEJHOYBUSLR-UHFFFAOYSA-N 1-(1h-benzimidazol-2-yl)-n,n-bis(1h-benzimidazol-2-ylmethyl)methanamine Chemical compound C1=CC=C2NC(CN(CC=3NC4=CC=CC=C4N=3)CC=3NC4=CC=CC=C4N=3)=NC2=C1 YQIGEJHOYBUSLR-UHFFFAOYSA-N 0.000 description 2
- HYZJCKYKOHLVJF-UHFFFAOYSA-N 1H-benzimidazole Chemical compound C1=CC=C2NC=NC2=C1 HYZJCKYKOHLVJF-UHFFFAOYSA-N 0.000 description 2
- DEPDDPLQZYCHOH-UHFFFAOYSA-N 1h-imidazol-2-amine Chemical compound NC1=NC=CN1 DEPDDPLQZYCHOH-UHFFFAOYSA-N 0.000 description 2
- JVVRJMXHNUAPHW-UHFFFAOYSA-N 1h-pyrazol-5-amine Chemical compound NC=1C=CNN=1 JVVRJMXHNUAPHW-UHFFFAOYSA-N 0.000 description 2
- BRRSNXCXLSVPFC-UHFFFAOYSA-N 2,3,4-Trihydroxybenzoic acid Chemical compound OC(=O)C1=CC=C(O)C(O)=C1O BRRSNXCXLSVPFC-UHFFFAOYSA-N 0.000 description 2
- IBHWREHFNDMRPR-UHFFFAOYSA-N 2,4,6-Trihydroxybenzoic acid Chemical compound OC(=O)C1=C(O)C=C(O)C=C1O IBHWREHFNDMRPR-UHFFFAOYSA-N 0.000 description 2
- AKEUNCKRJATALU-UHFFFAOYSA-N 2,6-dihydroxybenzoic acid Chemical compound OC(=O)C1=C(O)C=CC=C1O AKEUNCKRJATALU-UHFFFAOYSA-N 0.000 description 2
- LWUAMROXVQLJKA-UHFFFAOYSA-N 2-amino-3-chlorobenzoic acid Chemical compound NC1=C(Cl)C=CC=C1C(O)=O LWUAMROXVQLJKA-UHFFFAOYSA-N 0.000 description 2
- HJVAVGOPTDJYOJ-UHFFFAOYSA-N 2-amino-4,5-dimethoxybenzoic acid Chemical compound COC1=CC(N)=C(C(O)=O)C=C1OC HJVAVGOPTDJYOJ-UHFFFAOYSA-N 0.000 description 2
- ICSNLGPSRYBMBD-UHFFFAOYSA-N 2-aminopyridine Chemical compound NC1=CC=CC=N1 ICSNLGPSRYBMBD-UHFFFAOYSA-N 0.000 description 2
- ASSKVPFEZFQQNQ-UHFFFAOYSA-N 2-benzoxazolinone Chemical compound C1=CC=C2OC(O)=NC2=C1 ASSKVPFEZFQQNQ-UHFFFAOYSA-N 0.000 description 2
- YEDUAINPPJYDJZ-UHFFFAOYSA-N 2-hydroxybenzothiazole Chemical compound C1=CC=C2SC(O)=NC2=C1 YEDUAINPPJYDJZ-UHFFFAOYSA-N 0.000 description 2
- DXYYSGDWQCSKKO-UHFFFAOYSA-N 2-methylbenzothiazole Chemical compound C1=CC=C2SC(C)=NC2=C1 DXYYSGDWQCSKKO-UHFFFAOYSA-N 0.000 description 2
- IQGMRVWUTCYCST-UHFFFAOYSA-N 3-Aminosalicylic acid Chemical compound NC1=CC=CC(C(O)=O)=C1O IQGMRVWUTCYCST-UHFFFAOYSA-N 0.000 description 2
- LBKFGYZQBSGRHY-UHFFFAOYSA-N 3-hydroxy-4-methoxybenzoic acid Chemical compound COC1=CC=C(C(O)=O)C=C1O LBKFGYZQBSGRHY-UHFFFAOYSA-N 0.000 description 2
- IJFXRHURBJZNAO-UHFFFAOYSA-N 3-hydroxybenzoic acid Chemical compound OC(=O)C1=CC=CC(O)=C1 IJFXRHURBJZNAO-UHFFFAOYSA-N 0.000 description 2
- AUZQQIPZESHNMG-UHFFFAOYSA-N 3-methoxysalicylic acid Chemical compound COC1=CC=CC(C(O)=O)=C1O AUZQQIPZESHNMG-UHFFFAOYSA-N 0.000 description 2
- QMWGSOMVXSRXQX-UHFFFAOYSA-N 3-sulfobenzoic acid Chemical compound OC(=O)C1=CC=CC(S(O)(=O)=O)=C1 QMWGSOMVXSRXQX-UHFFFAOYSA-N 0.000 description 2
- WUBBRNOQWQTFEX-UHFFFAOYSA-N 4-aminosalicylic acid Chemical compound NC1=CC=C(C(O)=O)C(O)=C1 WUBBRNOQWQTFEX-UHFFFAOYSA-N 0.000 description 2
- 229940090248 4-hydroxybenzoic acid Drugs 0.000 description 2
- XLSZMDLNRCVEIJ-UHFFFAOYSA-N 4-methylimidazole Chemical compound CC1=CNC=N1 XLSZMDLNRCVEIJ-UHFFFAOYSA-N 0.000 description 2
- QMHIMXFNBOYPND-UHFFFAOYSA-N 4-methylthiazole Chemical compound CC1=CSC=N1 QMHIMXFNBOYPND-UHFFFAOYSA-N 0.000 description 2
- CARJPEPCULYFFP-UHFFFAOYSA-N 5-Sulfo-1,3-benzenedicarboxylic acid Chemical compound OC(=O)C1=CC(C(O)=O)=CC(S(O)(=O)=O)=C1 CARJPEPCULYFFP-UHFFFAOYSA-N 0.000 description 2
- QNVNLUSHGRBCLO-UHFFFAOYSA-N 5-hydroxybenzene-1,3-dicarboxylic acid Chemical compound OC(=O)C1=CC(O)=CC(C(O)=O)=C1 QNVNLUSHGRBCLO-UHFFFAOYSA-N 0.000 description 2
- PMZBHPUNQNKBOA-UHFFFAOYSA-N 5-methylbenzene-1,3-dicarboxylic acid Chemical compound CC1=CC(C(O)=O)=CC(C(O)=O)=C1 PMZBHPUNQNKBOA-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 239000005711 Benzoic acid Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- RGHNJXZEOKUKBD-SQOUGZDYSA-N D-gluconic acid Chemical compound OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C(O)=O RGHNJXZEOKUKBD-SQOUGZDYSA-N 0.000 description 2
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- AFVFQIVMOAPDHO-UHFFFAOYSA-N Methanesulfonic acid Chemical compound CS(O)(=O)=O AFVFQIVMOAPDHO-UHFFFAOYSA-N 0.000 description 2
- ZCQWOFVYLHDMMC-UHFFFAOYSA-N Oxazole Chemical compound C1=COC=N1 ZCQWOFVYLHDMMC-UHFFFAOYSA-N 0.000 description 2
- 229910019142 PO4 Inorganic materials 0.000 description 2
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 2
- WTKZEGDFNFYCGP-UHFFFAOYSA-N Pyrazole Chemical compound C=1C=NNC=1 WTKZEGDFNFYCGP-UHFFFAOYSA-N 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 230000002378 acidificating effect Effects 0.000 description 2
- 150000007933 aliphatic carboxylic acids Chemical class 0.000 description 2
- 125000001931 aliphatic group Chemical group 0.000 description 2
- 150000003973 alkyl amines Chemical class 0.000 description 2
- 229960004909 aminosalicylic acid Drugs 0.000 description 2
- 239000002280 amphoteric surfactant Substances 0.000 description 2
- 239000003945 anionic surfactant Substances 0.000 description 2
- 235000010233 benzoic acid Nutrition 0.000 description 2
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- 229910052799 carbon Inorganic materials 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- 125000002091 cationic group Chemical group 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- USIUVYZYUHIAEV-UHFFFAOYSA-N diphenyl ether Natural products C=1C=CC=CC=1OC1=CC=CC=C1 USIUVYZYUHIAEV-UHFFFAOYSA-N 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- 150000002170 ethers Chemical class 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 235000011187 glycerol Nutrition 0.000 description 2
- 229940091173 hydantoin Drugs 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- SUMDYPCJJOFFON-UHFFFAOYSA-N isethionic acid Chemical compound OCCS(O)(=O)=O SUMDYPCJJOFFON-UHFFFAOYSA-N 0.000 description 2
- QQVIHTHCMHWDBS-UHFFFAOYSA-N isophthalic acid Chemical compound OC(=O)C1=CC=CC(C(O)=O)=C1 QQVIHTHCMHWDBS-UHFFFAOYSA-N 0.000 description 2
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229960003512 nicotinic acid Drugs 0.000 description 2
- 235000001968 nicotinic acid Nutrition 0.000 description 2
- 239000011664 nicotinic acid Substances 0.000 description 2
- 235000006408 oxalic acid Nutrition 0.000 description 2
- VLTRZXGMWDSKGL-UHFFFAOYSA-N perchloric acid Chemical compound OCl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-N 0.000 description 2
- 239000010452 phosphate Substances 0.000 description 2
- NDVLTYZPCACLMA-UHFFFAOYSA-N silver oxide Chemical compound [O-2].[Ag+].[Ag+] NDVLTYZPCACLMA-UHFFFAOYSA-N 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- KZNICNPSHKQLFF-UHFFFAOYSA-N succinimide Chemical compound O=C1CCC(=O)N1 KZNICNPSHKQLFF-UHFFFAOYSA-N 0.000 description 2
- ZMZDMBWJUHKJPS-UHFFFAOYSA-N thiocyanic acid Chemical compound SC#N ZMZDMBWJUHKJPS-UHFFFAOYSA-N 0.000 description 2
- CWERGRDVMFNCDR-UHFFFAOYSA-N thioglycolic acid Chemical compound OC(=O)CS CWERGRDVMFNCDR-UHFFFAOYSA-N 0.000 description 2
- FKKJJPMGAWGYPN-UHFFFAOYSA-N thiophen-2-ylmethanamine Chemical compound NCC1=CC=CS1 FKKJJPMGAWGYPN-UHFFFAOYSA-N 0.000 description 2
- UMGDCJDMYOKAJW-UHFFFAOYSA-N thiourea Chemical compound NC(N)=S UMGDCJDMYOKAJW-UHFFFAOYSA-N 0.000 description 2
- 231100000331 toxic Toxicity 0.000 description 2
- 230000002588 toxic effect Effects 0.000 description 2
- JNYAEWCLZODPBN-JGWLITMVSA-N (2r,3r,4s)-2-[(1r)-1,2-dihydroxyethyl]oxolane-3,4-diol Chemical compound OC[C@@H](O)[C@H]1OC[C@H](O)[C@H]1O JNYAEWCLZODPBN-JGWLITMVSA-N 0.000 description 1
- FMCUPJKTGNBGEC-UHFFFAOYSA-N 1,2,4-triazol-4-amine Chemical compound NN1C=NN=C1 FMCUPJKTGNBGEC-UHFFFAOYSA-N 0.000 description 1
- SMMMRYMUPLGLIZ-UHFFFAOYSA-N 1,2-dihydroxy-5-pyridin-3-yl-1,2,4-triazole-3-thione Chemical compound S=C1N(O)N(O)C(C=2C=NC=CC=2)=N1 SMMMRYMUPLGLIZ-UHFFFAOYSA-N 0.000 description 1
- 150000000183 1,3-benzoxazoles Chemical class 0.000 description 1
- SILNNFMWIMZVEQ-UHFFFAOYSA-N 1,3-dihydrobenzimidazol-2-one Chemical compound C1=CC=C2NC(O)=NC2=C1 SILNNFMWIMZVEQ-UHFFFAOYSA-N 0.000 description 1
- YHMYGUUIMTVXNW-UHFFFAOYSA-N 1,3-dihydrobenzimidazole-2-thione Chemical compound C1=CC=C2NC(S)=NC2=C1 YHMYGUUIMTVXNW-UHFFFAOYSA-N 0.000 description 1
- OXFSTTJBVAAALW-UHFFFAOYSA-N 1,3-dihydroimidazole-2-thione Chemical compound SC1=NC=CN1 OXFSTTJBVAAALW-UHFFFAOYSA-N 0.000 description 1
- ZXSQEZNORDWBGZ-UHFFFAOYSA-N 1,3-dihydropyrrolo[2,3-b]pyridin-2-one Chemical compound C1=CN=C2NC(=O)CC2=C1 ZXSQEZNORDWBGZ-UHFFFAOYSA-N 0.000 description 1
- RAIPHJJURHTUIC-UHFFFAOYSA-N 1,3-thiazol-2-amine Chemical compound NC1=NC=CS1 RAIPHJJURHTUIC-UHFFFAOYSA-N 0.000 description 1
- CTIOCGQJYWNIBA-UHFFFAOYSA-N 1,5-dimethyltriazole-4-carboxylic acid Chemical compound CC1=C(C(O)=O)N=NN1C CTIOCGQJYWNIBA-UHFFFAOYSA-N 0.000 description 1
- GYFDNIRENHZKGR-UHFFFAOYSA-N 1-(2,5-dichlorothiophen-3-yl)ethanone Chemical compound CC(=O)C=1C=C(Cl)SC=1Cl GYFDNIRENHZKGR-UHFFFAOYSA-N 0.000 description 1
- YTAOZIHQEPBPQQ-UHFFFAOYSA-N 1-(4-bromothiophen-2-yl)propan-1-one Chemical compound CCC(=O)C1=CC(Br)=CS1 YTAOZIHQEPBPQQ-UHFFFAOYSA-N 0.000 description 1
- ATLWDAOOUUVIKP-UHFFFAOYSA-N 1-(5-acetylthiophen-2-yl)ethanone Chemical compound CC(=O)C1=CC=C(C(C)=O)S1 ATLWDAOOUUVIKP-UHFFFAOYSA-N 0.000 description 1
- ASOKPJOREAFHNY-UHFFFAOYSA-N 1-Hydroxybenzotriazole Chemical compound C1=CC=C2N(O)N=NC2=C1 ASOKPJOREAFHNY-UHFFFAOYSA-N 0.000 description 1
- GGZHVNZHFYCSEV-UHFFFAOYSA-N 1-Phenyl-5-mercaptotetrazole Chemical compound SC1=NN=NN1C1=CC=CC=C1 GGZHVNZHFYCSEV-UHFFFAOYSA-N 0.000 description 1
- MOHLVDJRXGVGOM-UHFFFAOYSA-N 1-benzyl-5-oxopyrrolidine-2-carboxylic acid Chemical compound OC(=O)C1CCC(=O)N1CC1=CC=CC=C1 MOHLVDJRXGVGOM-UHFFFAOYSA-N 0.000 description 1
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- 229910052708 sodium Inorganic materials 0.000 description 1
- MDUSUFIKBUMDTJ-UHFFFAOYSA-N sodium;1h-1,2,4-triazole Chemical compound [Na].C=1N=CNN=1 MDUSUFIKBUMDTJ-UHFFFAOYSA-N 0.000 description 1
- RZLGEIPBTHKAGX-UHFFFAOYSA-M sodium;2h-triazole-4-thiolate;dihydrate Chemical compound O.O.[Na+].[S-]C=1C=NNN=1 RZLGEIPBTHKAGX-UHFFFAOYSA-M 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 229960002317 succinimide Drugs 0.000 description 1
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- DHCDFWKWKRSZHF-UHFFFAOYSA-N sulfurothioic S-acid Chemical compound OS(O)(=O)=S DHCDFWKWKRSZHF-UHFFFAOYSA-N 0.000 description 1
- 239000011975 tartaric acid Substances 0.000 description 1
- 235000002906 tartaric acid Nutrition 0.000 description 1
- 229940104261 taurate Drugs 0.000 description 1
- XOAAWQZATWQOTB-UHFFFAOYSA-N taurine Chemical compound NCCS(O)(=O)=O XOAAWQZATWQOTB-UHFFFAOYSA-N 0.000 description 1
- WOZVHXUHUFLZGK-UHFFFAOYSA-N terephthalic acid dimethyl ester Natural products COC(=O)C1=CC=C(C(=O)OC)C=C1 WOZVHXUHUFLZGK-UHFFFAOYSA-N 0.000 description 1
- RAOIDOHSFRTOEL-UHFFFAOYSA-N tetrahydrothiophene Chemical compound C1CCSC1 RAOIDOHSFRTOEL-UHFFFAOYSA-N 0.000 description 1
- 150000003557 thiazoles Chemical class 0.000 description 1
- UVZICZIVKIMRNE-UHFFFAOYSA-N thiodiacetic acid Chemical compound OC(=O)CSCC(O)=O UVZICZIVKIMRNE-UHFFFAOYSA-N 0.000 description 1
- DKGYESBFCGKOJC-UHFFFAOYSA-N thiophen-3-amine Chemical compound NC=1C=CSC=1 DKGYESBFCGKOJC-UHFFFAOYSA-N 0.000 description 1
- YCGAZNXXGKTASZ-UHFFFAOYSA-N thiophene-2,5-dicarboxylic acid Chemical compound OC(=O)C1=CC=C(C(O)=O)S1 YCGAZNXXGKTASZ-UHFFFAOYSA-N 0.000 description 1
- SOGBOGBTIKMGFS-UHFFFAOYSA-N thiophene-2-carbohydrazide Chemical compound NNC(=O)C1=CC=CS1 SOGBOGBTIKMGFS-UHFFFAOYSA-N 0.000 description 1
- CUPOOAWTRIURFT-UHFFFAOYSA-N thiophene-2-carbonitrile Chemical compound N#CC1=CC=CS1 CUPOOAWTRIURFT-UHFFFAOYSA-N 0.000 description 1
- QIQITDHWZYEEPA-UHFFFAOYSA-N thiophene-2-carbonyl chloride Chemical compound ClC(=O)C1=CC=CS1 QIQITDHWZYEEPA-UHFFFAOYSA-N 0.000 description 1
- DENPQNAWGQXKCU-UHFFFAOYSA-N thiophene-2-carboxamide Chemical compound NC(=O)C1=CC=CS1 DENPQNAWGQXKCU-UHFFFAOYSA-N 0.000 description 1
- QERYCTSHXKAMIS-UHFFFAOYSA-N thiophene-2-carboxylic acid Chemical compound OC(=O)C1=CC=CS1 QERYCTSHXKAMIS-UHFFFAOYSA-N 0.000 description 1
- NBOMNTLFRHMDEZ-UHFFFAOYSA-N thiosalicylic acid Chemical compound OC(=O)C1=CC=CC=C1S NBOMNTLFRHMDEZ-UHFFFAOYSA-N 0.000 description 1
- 229940103494 thiosalicylic acid Drugs 0.000 description 1
- 239000003440 toxic substance Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- WPSPBNRWECRRPK-UHFFFAOYSA-N trimethyl(1,2,4-triazol-1-yl)silane Chemical compound C[Si](C)(C)N1C=NC=N1 WPSPBNRWECRRPK-UHFFFAOYSA-N 0.000 description 1
- WKOLLVMJNQIZCI-UHFFFAOYSA-N vanillic acid Chemical compound COC1=CC(C(O)=O)=CC=C1O WKOLLVMJNQIZCI-UHFFFAOYSA-N 0.000 description 1
- TUUBOHWZSQXCSW-UHFFFAOYSA-N vanillic acid Natural products COC1=CC(O)=CC(C(O)=O)=C1 TUUBOHWZSQXCSW-UHFFFAOYSA-N 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 238000004065 wastewater treatment Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/46—Electroplating: Baths therefor from solutions of silver
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/01—Layered products comprising a layer of metal all layers being exclusively metallic
- B32B15/018—Layered products comprising a layer of metal all layers being exclusively metallic one layer being formed of a noble metal or a noble metal alloy
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/38—Chromatising
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D9/00—Electrolytic coating other than with metals
- C25D9/02—Electrolytic coating other than with metals with organic materials
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12771—Transition metal-base component
- Y10T428/12861—Group VIII or IB metal-base component
- Y10T428/12896—Ag-base component
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating And Plating Baths Therefor (AREA)
Description
(A)少なくとも1種の可溶性銀化合物と
(B)少なくとも1種の安息香酸誘導体又は該誘導体の塩と
(C)少なくとも1種の酸及び/又は錯化剤と
を含む水溶液である電気銀めっき液であって、前記安息香酸誘導体が下記の一般式Iで表される該めっき液である。
mは、1、2、3、4、又は5であり、
Raは、カルボキシル基であり、
Rbは、それぞれ独立して、アルデヒド基、カルボキシル基、アミノ基、水酸基又はスルホン酸基から選択され、
Rcは、それぞれ独立して、水素又は任意の置換基であり、
Ra、又はRbとベンゼン環との結合間に酸素又はCH2が1以上挿入されてもよい。
)
(12)本発明は、一側面において、前記めっき液を用いて電気銀めっきを行った後、更に以下のいずれか1種以上の皮膜処理を行う上記(9)〜(11)のいずれかに記載の方法又はめっき製品である。
・有機化合物又は樹脂系材料の膜を形成させる処理;
・銀以外の金属の膜を形成させる処理;及び
・クロム酸化成皮膜を形成させる処理。
本発明の浴には、銀源として可溶性銀化合物を用いる。特に限定はされないが例えば、塩化銀、臭化銀、ヨウ化銀、酸化銀、炭酸銀、硫酸銀、メタンスルホン酸銀、アルカノールスルホン酸銀、フェノールスルホン酸銀、スルファミン酸銀、チオシアン酸銀、チオ硫酸銀等が挙げられる。これらの可溶性銀化合物のめっき液中での濃度は、銀イオンとして1〜100g/L程度が適当であり、好ましくは5〜80g/Lであり、より好ましくは10〜50g/Lである。
本発明で用いられる特定の安息香酸誘導体は、銀めっき時に基板表面に強く作用し、析出する結晶を微細・均一にすることで銀めっき皮膜の光沢化に大きく寄与する。同時に該誘導体を用いることで、広範囲の電流密度を適用することが可能となる。特定の安息香酸誘導体とは、下記一般式(I)で表される安息香酸を指す。
mは、1、2、3、4、又は5であり、
Raは、カルボキシル基であり、
Rbは、それぞれ独立して、アルデヒド基、カルボキシル基、アミノ基、水酸基又はスルホン酸基から選択され、
Rcは、それぞれ独立して、水素又は任意の置換基であり、
随意的に、Ra、又はRbとベンゼン環との結合間に酸素又はCH2が1以上(典型的には10以下、5以下、又は3以下)挿入されてもよい。
ここで、Rcは特に限定されず、水素原子のまま、又は、アルキル基(例えば炭素数10以下、5以下、又は3以下)、アルキルアリール基、アセチル基、ニトロ基、ハロゲン基、アルコキシ基(例えば炭素数10以下、5以下、又は3以下)など任意の置換基で置換されていても良い。また、Rcについては、Ra及びRbと同様に、随意的に、ベンゼン環とRc置換基との間に酸素又はCH2が1以上(典型的には10以下、5以下、又は3以下)挿入されてもよい。
本発明のめっき浴にはさらに、アゾール系化合物又は/及びチオフェン系化合物を含有することができる。これらの化合物は、より一層光沢度を上げるための補助的な光沢剤として働いているものと考えられる。該アゾール化合物としては、テトラゾール類、イミダゾール類、ベンズイミダゾール類、ピラゾール類、インダゾール類、チアゾール類、ベンゾチアゾール類、オキサゾール類、ベンゾオキサゾール類、トリアゾール類及びそれらの誘導体等が好適に用いられる。
また、本発明において用いられる銀めっき浴には、さらに、浴成分として界面活性剤を含有させて用いることができる。界面活性剤を含有することで、半光沢〜光沢外観が得られる電流密度範囲を拡大させることが可能である。ここで、前記界面活性剤には、界面活性を有する高分子化合物も含めることができる。
本発明の銀めっき浴にはさらに、銀イオンが加水分解せず、安定に存在できるように、上記安息香酸誘導体とは別に一般的な酸を含有させることができる。種類は限定されないが、メタンスルホン酸、プロパンスルホン酸等のアルカンスルホン酸、イセチオン酸、2−ヒドロキシプロパン−1−スルホン酸等のアルカノールスルホン酸のような有機スルホン酸、塩酸、硝酸、硫酸、リン酸、過塩素酸などの無機酸が使用される。使用量については、特に制限されないが、総量で概ね0.001〜300g/Lの範囲で用いられ、さらに好適には0.01〜100g/Lの範囲で用いられる。
本発明の銀めっき浴にはさらに、電気銀めっき液に使用される一般的な結晶微細化剤、平滑化添加剤、光沢添加剤等を適宜単独又は併用して含有させることができる。その使用量は、一般に0.01〜50g/Lが用いられ、さらに好適には0.1〜30g/Lが用いられる。
表1の比較例1〜7のとおり、めっき液を調製した。めっき方法および評価方法は実施例と同様とした。
比較例1〜3については、アルデヒド基、カルボキシル基、アミノ基、水酸基又はスルホン酸基以外の置換基のみで置換された安息香酸誘導体であるが、光沢のない無光沢外観のめっき外観が得られるのみであった。また、比較例7については、置換基がカルボキシル基1つの安息香酸であるが、比較例1〜3と同様の結果であった。さらに、比較例4〜6については、脂肪族カルボン酸(比較例4:シュウ酸、比較例5:クエン酸)、またはカルキシル基が置換した含窒素複素環化合物(比較例6:ニコチン酸)を含む浴であるが、クエン酸のみわずかに光沢性が認められたものの、黄色っぽい色合いであり、さらに使用電流密度範囲も非常に狭く、工業的には使用できないレベルであった。
Claims (13)
- (A)少なくとも1種の可溶性銀化合物と
(B)少なくとも1種の安息香酸誘導体又は該誘導体の塩と
(C)少なくとも1種の酸及び/又は錯化剤と
を含む水溶液である電気銀めっき液であって、
シアン化合物を実質的に含まない電気銀めっき液であり、
前記安息香酸誘導体が下記の一般式Iで表される該めっき液。
mは、1、2、3、4、又は5であり、
Raは、カルボキシル基であり、
Rbは、それぞれ独立して、アルデヒド基、カルボキシル基、アミノ基、又は水酸基から選択され、
Rcは、それぞれ独立して、水素原子、又は、アルキル基、アルキルアリール基、アセチル基、ハロゲン基、アルコキシ基から選択され、
Ra、又はRbとベンゼン環との結合間に酸素又はCH2が1以上挿入されてもよい。
) - 少なくとも1種のアゾール系化合物又は/及びチオフェン系化合物を更に含有する請求項1に記載のめっき液。
- 少なくとも1種の界面活性剤を更に含有する請求項1〜2いずれか1項に記載のめっき液。
- 前記界面活性剤がノニオン系界面活性剤である請求項3に記載のめっき液。
- 前記安息香酸誘導体又は該誘導体の塩の濃度が合計で0.0001g/L以上である請求項1〜4いずれか1項に記載のめっき液。
- 前記アゾール系化合物又は/及びチオフェン系化合物の濃度が合計で0.01g/L以上である請求項2に記載のめっき液。
- 前記界面活性剤の濃度が合計で0.001g/L以上である請求項3に記載のめっき液。
- 請求項1〜7のいずれか1項に記載のめっき液を用いる電気銀めっき方法。
- 請求項1〜7のいずれか1項に記載のめっき液を用いて電気銀めっき製品を製造する方法。
- 前記めっき液を用いて電気銀めっきを行った後、更に以下のいずれか1種以上の皮膜処理を行う請求項8〜9のいずれか1項に記載の方法:
・有機化合物又は樹脂系材料の膜を形成させる処理;
・銀以外の金属の膜を形成させる処理;及び
・クロム酸化成皮膜を形成させる処理。 - 請求項1に記載のめっき液であって、前記Rbは、それぞれ独立して、アミノ基又は水酸基から選択される該めっき液。
- 請求項1に記載のめっき液であって、前記Rbは、アミノ基である該めっき液。
- 請求項1に記載のめっき液であって、前記Rbは、水酸基である該めっき液。
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JP2012169982 | 2012-07-31 | ||
JP2012169982 | 2012-07-31 | ||
PCT/JP2013/065048 WO2014020981A1 (ja) | 2012-07-31 | 2013-05-30 | 電気銀めっき液 |
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US (1) | US20150184307A1 (ja) |
EP (1) | EP2881497A4 (ja) |
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KR101928641B1 (ko) | 2017-01-26 | 2018-12-12 | 중앙대학교 산학협력단 | 이산화탄소 환원 촉매의 제조방법 및 이산화탄소 환원 촉매 |
JP2022159396A (ja) * | 2020-09-15 | 2022-10-17 | Dowaメタルテック株式会社 | 銀めっき材およびその製造方法 |
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US20210172082A1 (en) * | 2019-12-10 | 2021-06-10 | Rohm And Haas Electronic Materials Llc | Acidic aqueous binary silver-bismuth alloy electroplating compositions and methods |
EP4170072A1 (en) * | 2020-06-23 | 2023-04-26 | Dowa Metaltech Co., Ltd. | Composite material, composite material manufacturing method, and terminal |
JP2023092352A (ja) * | 2021-12-21 | 2023-07-03 | Dowaメタルテック株式会社 | 複合材、複合材の製造方法および端子 |
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2013
- 2013-05-30 EP EP13826113.6A patent/EP2881497A4/en not_active Withdrawn
- 2013-05-30 JP JP2014528031A patent/JP6092219B2/ja active Active
- 2013-05-30 WO PCT/JP2013/065048 patent/WO2014020981A1/ja active Application Filing
- 2013-05-30 US US14/416,125 patent/US20150184307A1/en not_active Abandoned
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KR101928641B1 (ko) | 2017-01-26 | 2018-12-12 | 중앙대학교 산학협력단 | 이산화탄소 환원 촉매의 제조방법 및 이산화탄소 환원 촉매 |
JP2022159396A (ja) * | 2020-09-15 | 2022-10-17 | Dowaメタルテック株式会社 | 銀めっき材およびその製造方法 |
JP7370431B2 (ja) | 2020-09-15 | 2023-10-27 | Dowaメタルテック株式会社 | 銀めっき材およびその製造方法 |
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