JP6088521B2 - オンチップの中和キャパシタ及び線形作動を用いて自動キャリブレーションを行うことによる容量性変換器の線形性増大 - Google Patents

オンチップの中和キャパシタ及び線形作動を用いて自動キャリブレーションを行うことによる容量性変換器の線形性増大 Download PDF

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JP6088521B2
JP6088521B2 JP2014530913A JP2014530913A JP6088521B2 JP 6088521 B2 JP6088521 B2 JP 6088521B2 JP 2014530913 A JP2014530913 A JP 2014530913A JP 2014530913 A JP2014530913 A JP 2014530913A JP 6088521 B2 JP6088521 B2 JP 6088521B2
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phase
automatic calibration
calibration method
proof mass
neutralization capacity
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JP2014526701A5 (enExample
JP2014526701A (ja
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バラチャンドラン，ガネーシュ
ペトコフ，ウラジーミル
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Robert Bosch GmbH
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Robert Bosch GmbH
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L25/00—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
    • G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
    • G01D18/002—Automatic recalibration
    • G01D18/006—Intermittent recalibration

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
JP2014530913A 2011-09-16 2012-09-14 オンチップの中和キャパシタ及び線形作動を用いて自動キャリブレーションを行うことによる容量性変換器の線形性増大 Active JP6088521B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/235,334 US9032777B2 (en) 2011-09-16 2011-09-16 Linearity enhancement of capacitive transducers by auto-calibration using on-chip neutralization capacitors and linear actuation
US13/235,334 2011-09-16
PCT/US2012/055645 WO2013040508A1 (en) 2011-09-16 2012-09-14 Linearity enhancement of capacitive transducers by auto-calibration using on-chip neutralization capacitors and linear actuation

Publications (3)

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JP2014526701A JP2014526701A (ja) 2014-10-06
JP2014526701A5 JP2014526701A5 (enExample) 2015-11-05
JP6088521B2 true JP6088521B2 (ja) 2017-03-01

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US (2) US9032777B2 (enExample)
EP (1) EP2756317B1 (enExample)
JP (1) JP6088521B2 (enExample)
CN (1) CN103890593B (enExample)
WO (1) WO2013040508A1 (enExample)

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US9435821B1 (en) 2013-12-12 2016-09-06 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Single-axis accelerometer
JP2015125088A (ja) * 2013-12-27 2015-07-06 株式会社村田製作所 容量トリミング回路
US10260983B2 (en) * 2014-01-20 2019-04-16 Lear Corporation Apparatus and method for diagnostics of a capacitive sensor with plausibility check
GB201410038D0 (en) * 2014-06-06 2014-07-16 Atlantic Inertial Systems Ltd Accelerometers
JP6555869B2 (ja) * 2014-10-17 2019-08-07 キヤノン株式会社 静電容量型トランスデューサ
CN105259372B (zh) * 2015-10-14 2018-07-10 华东光电集成器件研究所 晶圆级电容式加速度计自动测试系统
CN105486450B (zh) * 2015-12-10 2018-01-12 中国航空工业集团公司北京长城计量测试技术研究所 一种宽量程脉冲力校准装置
US10198133B2 (en) 2016-03-28 2019-02-05 Synaptics Incorporated Inflection based calibration method for force detector
KR102020998B1 (ko) 2016-10-31 2019-09-11 선전 구딕스 테크놀로지 컴퍼니, 리미티드 정전 용량 검출 장치, 방법 및 압력 검출 시스템
CN108008152B (zh) * 2017-11-28 2020-04-03 中国电子产品可靠性与环境试验研究所 获取mems加速度计的寄生失配电容的方法及装置
CN108195507A (zh) * 2017-12-16 2018-06-22 芜湖致通汽车电子有限公司 用于传感器自动化批量检测系统
JP2021071382A (ja) * 2019-10-31 2021-05-06 セイコーエプソン株式会社 物理量センサー、電子機器及び移動体
US11268975B2 (en) * 2019-12-19 2022-03-08 Invensense, Inc. Accelerometer sensitivity self-calibration with duty cycle control of drive signal
CN112125275B (zh) * 2020-11-26 2021-04-06 南京高华科技股份有限公司 一种mems电容式传感器及其制备方法
CN113203939B (zh) * 2021-04-26 2022-03-18 中国科学院地质与地球物理研究所 一种mems加速度传感器芯片的检测方法及装置
TWI797602B (zh) 2021-04-29 2023-04-01 財團法人工業技術研究院 具校正功能的微機電感測裝置
CN114414848B (zh) * 2021-12-01 2022-10-25 西安电子科技大学 基于对称驱动的mems电容型传感器的馈通电容提取方法
CN116448286B (zh) * 2022-10-10 2025-08-01 成都凯天电子股份有限公司 一种硅谐振压力传感器及其在线校准方法

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US8816703B2 (en) * 2011-09-01 2014-08-26 Robert Bosch Gmbh Linear capacitance-to-voltage converter using a single amplifier for accelerometer front ends with cancellation of spurious forces contributed by sensor circuitry

Also Published As

Publication number Publication date
WO2013040508A1 (en) 2013-03-21
US20130067984A1 (en) 2013-03-21
US9032777B2 (en) 2015-05-19
CN103890593A (zh) 2014-06-25
CN103890593B (zh) 2016-10-26
EP2756317A1 (en) 2014-07-23
US9116166B2 (en) 2015-08-25
JP2014526701A (ja) 2014-10-06
US20130152663A1 (en) 2013-06-20
EP2756317B1 (en) 2015-09-09

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