CN103890593B - 借助使用片上中和电容器和线性致动的自动校准的电容换能器的线性度增强 - Google Patents

借助使用片上中和电容器和线性致动的自动校准的电容换能器的线性度增强 Download PDF

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Publication number
CN103890593B
CN103890593B CN201280050876.6A CN201280050876A CN103890593B CN 103890593 B CN103890593 B CN 103890593B CN 201280050876 A CN201280050876 A CN 201280050876A CN 103890593 B CN103890593 B CN 103890593B
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China
Prior art keywords
actuation
phase
capacitance
proof mass
output value
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Chinese (zh)
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CN103890593A (zh
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G·巴拉钱德兰
V·佩特科夫
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Robert Bosch GmbH
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Robert Bosch GmbH
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L25/00—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
    • G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
    • G01D18/002—Automatic recalibration
    • G01D18/006—Intermittent recalibration

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
CN201280050876.6A 2011-09-16 2012-09-14 借助使用片上中和电容器和线性致动的自动校准的电容换能器的线性度增强 Active CN103890593B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/235,334 US9032777B2 (en) 2011-09-16 2011-09-16 Linearity enhancement of capacitive transducers by auto-calibration using on-chip neutralization capacitors and linear actuation
US13/235,334 2011-09-16
PCT/US2012/055645 WO2013040508A1 (en) 2011-09-16 2012-09-14 Linearity enhancement of capacitive transducers by auto-calibration using on-chip neutralization capacitors and linear actuation

Publications (2)

Publication Number Publication Date
CN103890593A CN103890593A (zh) 2014-06-25
CN103890593B true CN103890593B (zh) 2016-10-26

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CN201280050876.6A Active CN103890593B (zh) 2011-09-16 2012-09-14 借助使用片上中和电容器和线性致动的自动校准的电容换能器的线性度增强

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Country Link
US (2) US9032777B2 (enExample)
EP (1) EP2756317B1 (enExample)
JP (1) JP6088521B2 (enExample)
CN (1) CN103890593B (enExample)
WO (1) WO2013040508A1 (enExample)

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US9285207B2 (en) * 2013-03-13 2016-03-15 Invensense, Inc. Linear capacitive displacement sensor
US9939290B1 (en) * 2013-09-16 2018-04-10 Panasonic Corporation Method for calibration of a system with time-multiplexed sensors
US9435821B1 (en) 2013-12-12 2016-09-06 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Single-axis accelerometer
JP2015125088A (ja) * 2013-12-27 2015-07-06 株式会社村田製作所 容量トリミング回路
US10260983B2 (en) * 2014-01-20 2019-04-16 Lear Corporation Apparatus and method for diagnostics of a capacitive sensor with plausibility check
GB201410038D0 (en) 2014-06-06 2014-07-16 Atlantic Inertial Systems Ltd Accelerometers
JP6555869B2 (ja) * 2014-10-17 2019-08-07 キヤノン株式会社 静電容量型トランスデューサ
CN105259372B (zh) * 2015-10-14 2018-07-10 华东光电集成器件研究所 晶圆级电容式加速度计自动测试系统
CN105486450B (zh) * 2015-12-10 2018-01-12 中国航空工业集团公司北京长城计量测试技术研究所 一种宽量程脉冲力校准装置
US10198133B2 (en) 2016-03-28 2019-02-05 Synaptics Incorporated Inflection based calibration method for force detector
EP3340021A4 (en) * 2016-10-31 2018-10-10 Shenzhen Goodix Technology Co., Ltd. Capacitance detection device and method, and pressure detection system
CN108008152B (zh) * 2017-11-28 2020-04-03 中国电子产品可靠性与环境试验研究所 获取mems加速度计的寄生失配电容的方法及装置
CN108195507A (zh) * 2017-12-16 2018-06-22 芜湖致通汽车电子有限公司 用于传感器自动化批量检测系统
JP2021071382A (ja) * 2019-10-31 2021-05-06 セイコーエプソン株式会社 物理量センサー、電子機器及び移動体
US11268975B2 (en) * 2019-12-19 2022-03-08 Invensense, Inc. Accelerometer sensitivity self-calibration with duty cycle control of drive signal
CN112125275B (zh) * 2020-11-26 2021-04-06 南京高华科技股份有限公司 一种mems电容式传感器及其制备方法
CN113203939B (zh) * 2021-04-26 2022-03-18 中国科学院地质与地球物理研究所 一种mems加速度传感器芯片的检测方法及装置
TWI797602B (zh) 2021-04-29 2023-04-01 財團法人工業技術研究院 具校正功能的微機電感測裝置
CN114414848B (zh) * 2021-12-01 2022-10-25 西安电子科技大学 基于对称驱动的mems电容型传感器的馈通电容提取方法
CN116448286B (zh) * 2022-10-10 2025-08-01 成都凯天电子股份有限公司 一种硅谐振压力传感器及其在线校准方法

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US5347867A (en) * 1993-02-03 1994-09-20 Minnetonka Warehouse Supply, Inc Accelerometer incorporating a driven shield
US5770802A (en) * 1997-04-16 1998-06-23 Texas Instruments Incorporated Sensor with improved capacitive to voltage converter integrated circuit
DE102009026496A1 (de) * 2009-05-27 2010-12-02 Robert Bosch Gmbh Kompensationskapazität für einen kapazitiven Sensor

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JP4931713B2 (ja) * 2006-08-08 2012-05-16 セイコーインスツル株式会社 力学量センサ
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5347867A (en) * 1993-02-03 1994-09-20 Minnetonka Warehouse Supply, Inc Accelerometer incorporating a driven shield
US5770802A (en) * 1997-04-16 1998-06-23 Texas Instruments Incorporated Sensor with improved capacitive to voltage converter integrated circuit
DE102009026496A1 (de) * 2009-05-27 2010-12-02 Robert Bosch Gmbh Kompensationskapazität für einen kapazitiven Sensor

Also Published As

Publication number Publication date
JP6088521B2 (ja) 2017-03-01
WO2013040508A1 (en) 2013-03-21
CN103890593A (zh) 2014-06-25
EP2756317B1 (en) 2015-09-09
EP2756317A1 (en) 2014-07-23
US20130067984A1 (en) 2013-03-21
US9032777B2 (en) 2015-05-19
US20130152663A1 (en) 2013-06-20
JP2014526701A (ja) 2014-10-06
US9116166B2 (en) 2015-08-25

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