JP6079280B2 - 振動素子、振動子、電子デバイス、電子機器、及び移動体 - Google Patents

振動素子、振動子、電子デバイス、電子機器、及び移動体 Download PDF

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Publication number
JP6079280B2
JP6079280B2 JP2013022030A JP2013022030A JP6079280B2 JP 6079280 B2 JP6079280 B2 JP 6079280B2 JP 2013022030 A JP2013022030 A JP 2013022030A JP 2013022030 A JP2013022030 A JP 2013022030A JP 6079280 B2 JP6079280 B2 JP 6079280B2
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substrate
excitation electrode
vibration
thickness
vibration element
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Japanese (ja)
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JP2014154994A (ja
JP2014154994A5 (enrdf_load_stackoverflow
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石井　修
修 石井
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2013022030A priority Critical patent/JP6079280B2/ja
Priority to US13/832,565 priority patent/US9013242B2/en
Priority to TW102110380A priority patent/TWI561004B/zh
Priority to CN201310098982.8A priority patent/CN103368519B/zh
Priority to CN2013201418735U priority patent/CN203352547U/zh
Publication of JP2014154994A publication Critical patent/JP2014154994A/ja
Priority to US14/663,790 priority patent/US20150194945A1/en
Publication of JP2014154994A5 publication Critical patent/JP2014154994A5/ja
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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
JP2013022030A 2012-03-27 2013-02-07 振動素子、振動子、電子デバイス、電子機器、及び移動体 Active JP6079280B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2013022030A JP6079280B2 (ja) 2013-02-07 2013-02-07 振動素子、振動子、電子デバイス、電子機器、及び移動体
US13/832,565 US9013242B2 (en) 2012-03-27 2013-03-15 Resonator element, resonator, electronic device, electronic apparatus, and mobile object
TW102110380A TWI561004B (en) 2012-03-27 2013-03-22 Vibrator element, vibrator, electronic device, electronic apparatus, and mobile object
CN2013201418735U CN203352547U (zh) 2012-03-27 2013-03-26 振动元件
CN201310098982.8A CN103368519B (zh) 2012-03-27 2013-03-26 振动元件、振子、电子器件、电子设备以及移动体
US14/663,790 US20150194945A1 (en) 2012-03-27 2015-03-20 Resonator element, resonator, electronic device, electronic apparatus, and mobile object

Applications Claiming Priority (1)

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JP2013022030A JP6079280B2 (ja) 2013-02-07 2013-02-07 振動素子、振動子、電子デバイス、電子機器、及び移動体

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JP2014154994A JP2014154994A (ja) 2014-08-25
JP2014154994A5 JP2014154994A5 (enrdf_load_stackoverflow) 2016-03-17
JP6079280B2 true JP6079280B2 (ja) 2017-02-15

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JP (1) JP6079280B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4407868A1 (en) 2023-01-07 2024-07-31 Aker Technoology Co., Ltd. Crystal oscillator and method for making the same

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6206664B2 (ja) 2013-10-30 2017-10-04 セイコーエプソン株式会社 発振回路、発振器、発振器の製造方法、電子機器及び移動体
JP6226127B2 (ja) 2013-10-30 2017-11-08 セイコーエプソン株式会社 発振回路、発振器、発振器の製造方法、電子機器及び移動体
JP2015088930A (ja) 2013-10-30 2015-05-07 セイコーエプソン株式会社 発振回路、発振器、発振器の製造方法、電子機器及び移動体
JP2015088931A (ja) 2013-10-30 2015-05-07 セイコーエプソン株式会社 発振回路、発振器、発振器の製造方法、電子機器及び移動体
JP2015088876A (ja) 2013-10-30 2015-05-07 セイコーエプソン株式会社 振動素子、振動子、電子デバイス、電子機器及び移動体
JP2017079347A (ja) * 2015-10-19 2017-04-27 セイコーエプソン株式会社 圧電振動片、圧電振動子、圧電振動子の製造方法、電子機器、および移動体
JP2022154545A (ja) * 2021-03-30 2022-10-13 株式会社大真空 圧電振動板および圧電振動デバイス
TWI776661B (zh) * 2021-08-31 2022-09-01 國立陽明交通大學 晶體振盪器及其製作方法
TWI759245B (zh) 2021-08-31 2022-03-21 國立陽明交通大學 晶體振盪器及其製作方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3845752B2 (ja) * 1998-03-26 2006-11-15 エプソントヨコム株式会社 Ｕｈｆ帯基本波水晶振動子及びフィルタ
JP2000040938A (ja) * 1998-07-23 2000-02-08 Toyo Commun Equip Co Ltd 超高周波圧電デバイス
JP2002190717A (ja) * 2000-12-21 2002-07-05 Toyo Commun Equip Co Ltd 高周波圧電デバイス
JP2002299998A (ja) * 2001-04-02 2002-10-11 Matsushita Electric Ind Co Ltd 圧電振動素子および圧電フィルタ
JP2004088137A (ja) * 2002-06-27 2004-03-18 Kinseki Ltd 小型高周波振動子
JP4196641B2 (ja) * 2002-10-23 2008-12-17 エプソントヨコム株式会社 超薄板圧電デバイスとその製造方法
JP2004207913A (ja) * 2002-12-24 2004-07-22 Toyo Commun Equip Co Ltd 水晶振動子
JP4477364B2 (ja) * 2004-01-13 2010-06-09 日本電波工業株式会社 水晶振動子
JP5796355B2 (ja) * 2011-06-03 2015-10-21 セイコーエプソン株式会社 圧電振動素子、圧電振動子、電子デバイス、及び電子機器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4407868A1 (en) 2023-01-07 2024-07-31 Aker Technoology Co., Ltd. Crystal oscillator and method for making the same

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