JP4477364B2 - 水晶振動子 - Google Patents
水晶振動子 Download PDFInfo
- Publication number
- JP4477364B2 JP4477364B2 JP2004005486A JP2004005486A JP4477364B2 JP 4477364 B2 JP4477364 B2 JP 4477364B2 JP 2004005486 A JP2004005486 A JP 2004005486A JP 2004005486 A JP2004005486 A JP 2004005486A JP 4477364 B2 JP4477364 B2 JP 4477364B2
- Authority
- JP
- Japan
- Prior art keywords
- thickness
- electrode
- frequency
- excitation electrode
- crystal piece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000013078 crystal Substances 0.000 title claims description 42
- 230000005284 excitation Effects 0.000 claims description 33
- 238000000605 extraction Methods 0.000 claims description 9
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 230000032683 aging Effects 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000008646 thermal stress Effects 0.000 description 2
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
- H03H9/131—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials consisting of a multilayered structure
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
- H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
- H03H2003/0407—Temperature coefficient
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
Claims (1)
- 厚みの小さい振動領域と厚みの大きい外周部とからなるATカットとした水晶片を備え、前記振動領域の両主面に励振電極を有して前記励振電極から前記外周部の両端部に放射状とした引出電極を延出し、前記励振電極及び引出電極の下地電極となる一層目をNiWとして二層目をAuとし、前記振動領域の厚みを5μm以下とした水晶振動子において、前記励振電極の一層目の厚みを75Å以下とするとともに、前記振動領域の厚みaに対する前記励振電極の二層目の厚みbの電極厚み比b/aを0.014又は0.012以下とし、前記放射状とした引出電極は前記励振電極の厚みより大きくしたことを特徴とする水晶振動子。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004005486A JP4477364B2 (ja) | 2004-01-13 | 2004-01-13 | 水晶振動子 |
US11/035,313 US7129624B2 (en) | 2004-01-13 | 2005-01-13 | Crystal unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004005486A JP4477364B2 (ja) | 2004-01-13 | 2004-01-13 | 水晶振動子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005203858A JP2005203858A (ja) | 2005-07-28 |
JP4477364B2 true JP4477364B2 (ja) | 2010-06-09 |
Family
ID=34737234
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004005486A Expired - Fee Related JP4477364B2 (ja) | 2004-01-13 | 2004-01-13 | 水晶振動子 |
Country Status (2)
Country | Link |
---|---|
US (1) | US7129624B2 (ja) |
JP (1) | JP4477364B2 (ja) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005204253A (ja) * | 2004-01-19 | 2005-07-28 | Toyo Commun Equip Co Ltd | Uhf帯基本波atカット水晶振動素子 |
JP2010074422A (ja) | 2008-09-17 | 2010-04-02 | Nippon Dempa Kogyo Co Ltd | 水晶振動子素子の製造方法、水晶振動子素子、水晶振動子及び水晶発振器 |
US8242664B2 (en) * | 2008-12-26 | 2012-08-14 | Nihon Dempa Kogyo Co., Ltd. | Elastic wave device and electronic component |
JP2013046085A (ja) * | 2011-08-22 | 2013-03-04 | Seiko Epson Corp | 圧電振動素子、圧電振動子、電子デバイス、及び電子機器 |
US9013242B2 (en) | 2012-03-27 | 2015-04-21 | Seiko Epson Corporation | Resonator element, resonator, electronic device, electronic apparatus, and mobile object |
JP6079280B2 (ja) * | 2013-02-07 | 2017-02-15 | セイコーエプソン株式会社 | 振動素子、振動子、電子デバイス、電子機器、及び移動体 |
TWI578585B (zh) | 2012-03-27 | 2017-04-11 | 精工愛普生股份有限公司 | 振動元件、振動器、電子裝置、電子機器及移動體 |
JP6064350B2 (ja) * | 2012-03-27 | 2017-01-25 | セイコーエプソン株式会社 | 振動素子、振動子、電子デバイス、及び電子機器 |
JP6226127B2 (ja) | 2013-10-30 | 2017-11-08 | セイコーエプソン株式会社 | 発振回路、発振器、発振器の製造方法、電子機器及び移動体 |
JP2015088876A (ja) | 2013-10-30 | 2015-05-07 | セイコーエプソン株式会社 | 振動素子、振動子、電子デバイス、電子機器及び移動体 |
JP6206664B2 (ja) | 2013-10-30 | 2017-10-04 | セイコーエプソン株式会社 | 発振回路、発振器、発振器の製造方法、電子機器及び移動体 |
JP2015088930A (ja) | 2013-10-30 | 2015-05-07 | セイコーエプソン株式会社 | 発振回路、発振器、発振器の製造方法、電子機器及び移動体 |
JP2015088931A (ja) | 2013-10-30 | 2015-05-07 | セイコーエプソン株式会社 | 発振回路、発振器、発振器の製造方法、電子機器及び移動体 |
JP2017079347A (ja) | 2015-10-19 | 2017-04-27 | セイコーエプソン株式会社 | 圧電振動片、圧電振動子、圧電振動子の製造方法、電子機器、および移動体 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3382381A (en) * | 1965-05-27 | 1968-05-07 | Piezo Technology Inc | Tab plateback |
JPS5229908B2 (ja) * | 1971-11-17 | 1977-08-04 | ||
JPS5537052A (en) * | 1978-09-06 | 1980-03-14 | Seiko Instr & Electronics Ltd | At-cut crystal oscillator |
JPH04276914A (ja) * | 1991-03-05 | 1992-10-02 | Seiko Epson Corp | 厚み辷り水晶振動子 |
IL130889A (en) * | 1998-11-02 | 2003-11-23 | Meidensha Electric Mfg Co Ltd | Qcm sensor |
JP2001244778A (ja) * | 1999-12-22 | 2001-09-07 | Toyo Commun Equip Co Ltd | 高周波圧電振動子 |
-
2004
- 2004-01-13 JP JP2004005486A patent/JP4477364B2/ja not_active Expired - Fee Related
-
2005
- 2005-01-13 US US11/035,313 patent/US7129624B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20050151450A1 (en) | 2005-07-14 |
US7129624B2 (en) | 2006-10-31 |
JP2005203858A (ja) | 2005-07-28 |
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