JP2005203858A - 水晶振動子 - Google Patents
水晶振動子 Download PDFInfo
- Publication number
- JP2005203858A JP2005203858A JP2004005486A JP2004005486A JP2005203858A JP 2005203858 A JP2005203858 A JP 2005203858A JP 2004005486 A JP2004005486 A JP 2004005486A JP 2004005486 A JP2004005486 A JP 2004005486A JP 2005203858 A JP2005203858 A JP 2005203858A
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- JP
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- Prior art keywords
- thickness
- electrode
- crystal
- frequency
- crystal piece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 54
- 230000005284 excitation Effects 0.000 claims abstract description 32
- 238000000605 extraction Methods 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 239000010453 quartz Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 230000032683 aging Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 230000008646 thermal stress Effects 0.000 description 2
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
- H03H9/131—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials consisting of a multilayered structure
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
- H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
- H03H2003/0407—Temperature coefficient
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
【解決手段】ATカットとした水晶片1の両主面に励振電極2を有し、前記水晶片の厚みを5μ以下とした水晶振動子において、前記水晶片の厚みaに対する前記励振電極の厚みbの電極厚み比b/aを0.014叉は0.012以下とした構成とする。前記水晶片は厚みの小さい振動領域と厚みの大きい外周部とからなる。前記励振電極から外周部に延出する引出電極3は、前記励振電極の厚みより大きくする。
【選択図】図2
Description
Claims (3)
- ATカットとした水晶片の両主面に励振電極を有し、前記水晶片の厚みを5μm以下とした水晶振動子において、前記水晶片の厚みaに対する前記励振電極の厚みbの電極厚み比b/aを0.014叉は0.012以下としたことを特徴とする水晶振動子。
- 前記水晶片は厚みの小さい振動領域と厚みの大きい外周部とからなる請求項1の水晶振動子。
- 前記励振電極から外周部に延出する引出電極は、前記励振電極の厚みより大きくした請求項1の水晶振動子。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004005486A JP4477364B2 (ja) | 2004-01-13 | 2004-01-13 | 水晶振動子 |
US11/035,313 US7129624B2 (en) | 2004-01-13 | 2005-01-13 | Crystal unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004005486A JP4477364B2 (ja) | 2004-01-13 | 2004-01-13 | 水晶振動子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005203858A true JP2005203858A (ja) | 2005-07-28 |
JP4477364B2 JP4477364B2 (ja) | 2010-06-09 |
Family
ID=34737234
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004005486A Expired - Fee Related JP4477364B2 (ja) | 2004-01-13 | 2004-01-13 | 水晶振動子 |
Country Status (2)
Country | Link |
---|---|
US (1) | US7129624B2 (ja) |
JP (1) | JP4477364B2 (ja) |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005204253A (ja) * | 2004-01-19 | 2005-07-28 | Toyo Commun Equip Co Ltd | Uhf帯基本波atカット水晶振動素子 |
JP2010074422A (ja) * | 2008-09-17 | 2010-04-02 | Nippon Dempa Kogyo Co Ltd | 水晶振動子素子の製造方法、水晶振動子素子、水晶振動子及び水晶発振器 |
WO2013027381A1 (ja) * | 2011-08-22 | 2013-02-28 | セイコーエプソン株式会社 | 振動素子、振動子、電子デバイス、及び電子機器 |
JP2013207337A (ja) * | 2012-03-27 | 2013-10-07 | Seiko Epson Corp | 振動素子、振動子、電子デバイス、及び電子機器 |
CN103368519A (zh) * | 2012-03-27 | 2013-10-23 | 精工爱普生株式会社 | 振动元件、振子、电子器件、电子设备以及移动体 |
JP2014154994A (ja) * | 2013-02-07 | 2014-08-25 | Seiko Epson Corp | 振動素子、振動子、電子デバイス、電子機器、及び移動体 |
US9013243B2 (en) | 2012-03-27 | 2015-04-21 | Seiko Epson Corporation | Resonator element, resonator, electronic device, electronic apparatus, and mobile object |
US9312812B2 (en) | 2013-10-30 | 2016-04-12 | Seiko Epson Corporation | Oscillation circuit, oscillator, method of manufacturing oscillator, electronic device, and moving object |
US9438167B2 (en) | 2013-10-30 | 2016-09-06 | Seiko Epson Corporation | Oscillation circuit, oscillator, manufacturing method of oscillator, electronic device, and moving object |
US9461585B2 (en) | 2013-10-30 | 2016-10-04 | Seiko Epson Corporation | Oscillation circuit, oscillator, manufacturing method of oscillator, electronic device, and moving object |
US9628022B2 (en) | 2013-10-30 | 2017-04-18 | Seiko Epson Corporation | Oscillation circuit, oscillator, method of manufacturing oscillator, electronic device, and moving object |
US9748920B2 (en) | 2013-10-30 | 2017-08-29 | Seiko Epson Corporation | Resonator element, resonator, electronic device, electronic apparatus, and moving object |
US10291204B2 (en) | 2015-10-19 | 2019-05-14 | Seiko Epson Corporation | Piezoelectric vibrator element, piezoelectric vibrator, electronic apparatus, and vehicle |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8242664B2 (en) * | 2008-12-26 | 2012-08-14 | Nihon Dempa Kogyo Co., Ltd. | Elastic wave device and electronic component |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3382381A (en) * | 1965-05-27 | 1968-05-07 | Piezo Technology Inc | Tab plateback |
JPS5229908B2 (ja) * | 1971-11-17 | 1977-08-04 | ||
JPS5537052A (en) * | 1978-09-06 | 1980-03-14 | Seiko Instr & Electronics Ltd | At-cut crystal oscillator |
JPH04276914A (ja) * | 1991-03-05 | 1992-10-02 | Seiko Epson Corp | 厚み辷り水晶振動子 |
AU737757B2 (en) * | 1998-11-02 | 2001-08-30 | Kabushiki Kaisha Meidensha | QCM sensor |
JP2001244778A (ja) * | 1999-12-22 | 2001-09-07 | Toyo Commun Equip Co Ltd | 高周波圧電振動子 |
-
2004
- 2004-01-13 JP JP2004005486A patent/JP4477364B2/ja not_active Expired - Fee Related
-
2005
- 2005-01-13 US US11/035,313 patent/US7129624B2/en not_active Expired - Fee Related
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005204253A (ja) * | 2004-01-19 | 2005-07-28 | Toyo Commun Equip Co Ltd | Uhf帯基本波atカット水晶振動素子 |
JP2010074422A (ja) * | 2008-09-17 | 2010-04-02 | Nippon Dempa Kogyo Co Ltd | 水晶振動子素子の製造方法、水晶振動子素子、水晶振動子及び水晶発振器 |
US8288925B2 (en) | 2008-09-17 | 2012-10-16 | Nihon Dempa Kogyo Co., Ltd. | Method of manufacturing quartz resonator element, quartz resonator element, quartz resonator, and quartz oscillator |
WO2013027381A1 (ja) * | 2011-08-22 | 2013-02-28 | セイコーエプソン株式会社 | 振動素子、振動子、電子デバイス、及び電子機器 |
JP2013046085A (ja) * | 2011-08-22 | 2013-03-04 | Seiko Epson Corp | 圧電振動素子、圧電振動子、電子デバイス、及び電子機器 |
US9013243B2 (en) | 2012-03-27 | 2015-04-21 | Seiko Epson Corporation | Resonator element, resonator, electronic device, electronic apparatus, and mobile object |
CN103368519A (zh) * | 2012-03-27 | 2013-10-23 | 精工爱普生株式会社 | 振动元件、振子、电子器件、电子设备以及移动体 |
JP2013207337A (ja) * | 2012-03-27 | 2013-10-07 | Seiko Epson Corp | 振動素子、振動子、電子デバイス、及び電子機器 |
US9013242B2 (en) | 2012-03-27 | 2015-04-21 | Seiko Epson Corporation | Resonator element, resonator, electronic device, electronic apparatus, and mobile object |
CN103368519B (zh) * | 2012-03-27 | 2017-06-23 | 精工爱普生株式会社 | 振动元件、振子、电子器件、电子设备以及移动体 |
JP2014154994A (ja) * | 2013-02-07 | 2014-08-25 | Seiko Epson Corp | 振動素子、振動子、電子デバイス、電子機器、及び移動体 |
US9312812B2 (en) | 2013-10-30 | 2016-04-12 | Seiko Epson Corporation | Oscillation circuit, oscillator, method of manufacturing oscillator, electronic device, and moving object |
US9438167B2 (en) | 2013-10-30 | 2016-09-06 | Seiko Epson Corporation | Oscillation circuit, oscillator, manufacturing method of oscillator, electronic device, and moving object |
US9461585B2 (en) | 2013-10-30 | 2016-10-04 | Seiko Epson Corporation | Oscillation circuit, oscillator, manufacturing method of oscillator, electronic device, and moving object |
US9628022B2 (en) | 2013-10-30 | 2017-04-18 | Seiko Epson Corporation | Oscillation circuit, oscillator, method of manufacturing oscillator, electronic device, and moving object |
US9748920B2 (en) | 2013-10-30 | 2017-08-29 | Seiko Epson Corporation | Resonator element, resonator, electronic device, electronic apparatus, and moving object |
US10291204B2 (en) | 2015-10-19 | 2019-05-14 | Seiko Epson Corporation | Piezoelectric vibrator element, piezoelectric vibrator, electronic apparatus, and vehicle |
Also Published As
Publication number | Publication date |
---|---|
US7129624B2 (en) | 2006-10-31 |
JP4477364B2 (ja) | 2010-06-09 |
US20050151450A1 (en) | 2005-07-14 |
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