JP6066759B2 - 成膜方法 - Google Patents
成膜方法 Download PDFInfo
- Publication number
- JP6066759B2 JP6066759B2 JP2013030378A JP2013030378A JP6066759B2 JP 6066759 B2 JP6066759 B2 JP 6066759B2 JP 2013030378 A JP2013030378 A JP 2013030378A JP 2013030378 A JP2013030378 A JP 2013030378A JP 6066759 B2 JP6066759 B2 JP 6066759B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- layer
- combustion chamber
- film formation
- cold spray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000151 deposition Methods 0.000 title description 12
- 238000000034 method Methods 0.000 claims description 116
- 230000015572 biosynthetic process Effects 0.000 claims description 58
- 239000007921 spray Substances 0.000 claims description 55
- 238000010438 heat treatment Methods 0.000 claims description 26
- 238000002485 combustion reaction Methods 0.000 claims description 25
- 238000004519 manufacturing process Methods 0.000 claims description 22
- 230000001590 oxidative effect Effects 0.000 claims description 13
- 238000005323 electroforming Methods 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 238000001816 cooling Methods 0.000 claims description 9
- 239000000945 filler Substances 0.000 claims description 8
- 239000007789 gas Substances 0.000 description 20
- 230000008021 deposition Effects 0.000 description 11
- 239000000463 material Substances 0.000 description 10
- 239000000843 powder Substances 0.000 description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 8
- 229910052802 copper Inorganic materials 0.000 description 7
- 239000010949 copper Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 229910052734 helium Inorganic materials 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 238000005507 spraying Methods 0.000 description 3
- 238000011282 treatment Methods 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000003507 refrigerant Substances 0.000 description 2
- 230000008719 thickening Effects 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- CMPNPRUFRJFQIB-UHFFFAOYSA-N [N].[Cu] Chemical compound [N].[Cu] CMPNPRUFRJFQIB-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 238000010288 cold spraying Methods 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000005554 pickling Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C24/00—Coating starting from inorganic powder
- C23C24/02—Coating starting from inorganic powder by application of pressure only
- C23C24/04—Impact or kinetic deposition of particles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
- C23C4/137—Spraying in vacuum or in an inert atmosphere
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
- C23C4/06—Metallic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/18—After-treatment
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013030378A JP6066759B2 (ja) | 2013-02-19 | 2013-02-19 | 成膜方法 |
| US14/765,122 US9932660B2 (en) | 2013-02-19 | 2013-05-20 | Method for depositing layer |
| PCT/JP2013/063901 WO2014128984A1 (ja) | 2013-02-19 | 2013-05-20 | 成膜方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013030378A JP6066759B2 (ja) | 2013-02-19 | 2013-02-19 | 成膜方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014159612A JP2014159612A (ja) | 2014-09-04 |
| JP2014159612A5 JP2014159612A5 (enExample) | 2015-12-17 |
| JP6066759B2 true JP6066759B2 (ja) | 2017-01-25 |
Family
ID=51390803
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013030378A Active JP6066759B2 (ja) | 2013-02-19 | 2013-02-19 | 成膜方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US9932660B2 (enExample) |
| JP (1) | JP6066759B2 (enExample) |
| WO (1) | WO2014128984A1 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104894505A (zh) * | 2015-06-15 | 2015-09-09 | 中国南方航空工业(集团)有限公司 | 超厚涂层真空等离子喷涂成型方法 |
| CN105365133B (zh) * | 2015-10-08 | 2017-08-29 | 北京动力机械研究所 | 一种贴片固化装置 |
| KR101746974B1 (ko) * | 2015-12-15 | 2017-06-28 | 주식회사 포스코 | 강판의 금속 코팅 방법 및 이를 이용하여 제조된 금속 코팅 강판 |
| JP6948350B2 (ja) * | 2017-01-17 | 2021-10-13 | デンカ株式会社 | セラミックス回路基板の製造方法 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060121187A1 (en) | 2004-12-03 | 2006-06-08 | Haynes Jeffrey D | Vacuum cold spray process |
| US20060269685A1 (en) | 2005-05-31 | 2006-11-30 | Honeywell International, Inc. | Method for coating turbine engine components with high velocity particles |
| JP2008127676A (ja) | 2006-11-24 | 2008-06-05 | Toyohashi Univ Of Technology | 金属皮膜の形成方法 |
| JP2009191349A (ja) * | 2008-02-18 | 2009-08-27 | Honda Motor Co Ltd | 強化皮膜の接合界面の改質方法 |
| JP5017675B2 (ja) | 2008-04-01 | 2012-09-05 | 富士岐工産株式会社 | 皮膜の製造方法 |
| JP2010047825A (ja) | 2008-08-25 | 2010-03-04 | Mitsubishi Heavy Ind Ltd | 金属皮膜の形成方法及び航空宇宙構造部材 |
| US20100170937A1 (en) * | 2009-01-07 | 2010-07-08 | General Electric Company | System and Method of Joining Metallic Parts Using Cold Spray Technique |
| JP5642461B2 (ja) * | 2010-09-07 | 2014-12-17 | 三菱重工業株式会社 | ロケットエンジンの燃焼室及び中空構造体の製造方法 |
-
2013
- 2013-02-19 JP JP2013030378A patent/JP6066759B2/ja active Active
- 2013-05-20 WO PCT/JP2013/063901 patent/WO2014128984A1/ja not_active Ceased
- 2013-05-20 US US14/765,122 patent/US9932660B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2014159612A (ja) | 2014-09-04 |
| US20150376762A1 (en) | 2015-12-31 |
| WO2014128984A1 (ja) | 2014-08-28 |
| US9932660B2 (en) | 2018-04-03 |
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