JP6066634B2 - エシェル型回折格子の製造方法およびエキシマレーザの製造方法 - Google Patents

エシェル型回折格子の製造方法およびエキシマレーザの製造方法 Download PDF

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Publication number
JP6066634B2
JP6066634B2 JP2012198065A JP2012198065A JP6066634B2 JP 6066634 B2 JP6066634 B2 JP 6066634B2 JP 2012198065 A JP2012198065 A JP 2012198065A JP 2012198065 A JP2012198065 A JP 2012198065A JP 6066634 B2 JP6066634 B2 JP 6066634B2
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Japan
Prior art keywords
blaze
angle
order
grating
manufacturing
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JP2012198065A
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English (en)
Japanese (ja)
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JP2013092754A (ja
JP2013092754A5 (enExample
Inventor
強 北村
強 北村
隆 助川
隆 助川
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Canon Inc
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Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2012198065A priority Critical patent/JP6066634B2/ja
Priority to US13/633,351 priority patent/US9031112B2/en
Priority to EP20120006853 priority patent/EP2579072B1/en
Publication of JP2013092754A publication Critical patent/JP2013092754A/ja
Publication of JP2013092754A5 publication Critical patent/JP2013092754A5/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/08004—Construction or shape of optical resonators or components thereof incorporating a dispersive element, e.g. a prism for wavelength selection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49764—Method of mechanical manufacture with testing or indicating
    • Y10T29/49778—Method of mechanical manufacture with testing or indicating with aligning, guiding, or instruction

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
JP2012198065A 2011-10-06 2012-09-10 エシェル型回折格子の製造方法およびエキシマレーザの製造方法 Active JP6066634B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2012198065A JP6066634B2 (ja) 2011-10-06 2012-09-10 エシェル型回折格子の製造方法およびエキシマレーザの製造方法
US13/633,351 US9031112B2 (en) 2011-10-06 2012-10-02 Echelle diffraction grating and its manufacturing method, excimer laser and its manufacturing method
EP20120006853 EP2579072B1 (en) 2011-10-06 2012-10-02 Echelle diffraction grating and its manufacturing method, excimer laser and its manufacturing method

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011222366 2011-10-06
JP2011222366 2011-10-06
JP2012198065A JP6066634B2 (ja) 2011-10-06 2012-09-10 エシェル型回折格子の製造方法およびエキシマレーザの製造方法

Publications (3)

Publication Number Publication Date
JP2013092754A JP2013092754A (ja) 2013-05-16
JP2013092754A5 JP2013092754A5 (enExample) 2015-10-01
JP6066634B2 true JP6066634B2 (ja) 2017-01-25

Family

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Family Applications (1)

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JP2012198065A Active JP6066634B2 (ja) 2011-10-06 2012-09-10 エシェル型回折格子の製造方法およびエキシマレーザの製造方法

Country Status (3)

Country Link
US (1) US9031112B2 (enExample)
EP (1) EP2579072B1 (enExample)
JP (1) JP6066634B2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5731811B2 (ja) * 2010-12-15 2015-06-10 キヤノン株式会社 ブレーズ型回折格子の製造方法及びそのための型の製造方法
JP6032869B2 (ja) * 2011-03-10 2016-11-30 キヤノン株式会社 ブレーズ型回折格子
DE102011015141A1 (de) * 2011-03-16 2012-09-20 Carl Zeiss Laser Optics Gmbh Verfahren zum Herstellen eines reflektiven optischen Bauelements für eine EUV-Projektionsbelichtungsanlage und derartiges Bauelement
JP6362364B2 (ja) * 2014-03-10 2018-07-25 キヤノン株式会社 回折格子、および回折格子の製造方法
CN107076892B (zh) * 2014-12-18 2019-10-29 极光先进雷射株式会社 光栅、光栅的制造方法和光栅的再生方法
JP6695550B2 (ja) * 2016-10-11 2020-05-20 国立研究開発法人量子科学技術研究開発機構 ラミナー型回折格子
KR101923821B1 (ko) * 2017-06-05 2018-11-29 국방과학연구소 유전체 다층박막 회절격자의 설계방법
JP2018139300A (ja) * 2018-04-09 2018-09-06 キヤノン株式会社 レーザ装置、および分光方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07261010A (ja) * 1994-03-18 1995-10-13 Shimadzu Corp レプリカ回折格子
US6511703B2 (en) * 1997-09-29 2003-01-28 Cymer, Inc. Protective overcoat for replicated diffraction gratings
US20010003035A1 (en) * 1998-09-10 2001-06-07 Robert G. Ozarski Diffraction grating and fabrication technique for same
US6067197A (en) * 1998-12-23 2000-05-23 Spectronic Instruments, Inc. Difraction grating having enhanced blaze performance at two wavelengths
DE10025694C2 (de) * 2000-05-24 2003-06-05 Zeiss Carl Verwendung eines Beugungsgitters
DE10158638A1 (de) * 2001-11-29 2003-06-26 Zeiss Carl Laser Optics Gmbh Optische Anordnung, Littrow-Gitter zur Verwendung in einer optischen Anordnung sowie Verwendung eines Littrow-Gitters
JP4475501B2 (ja) * 2003-10-09 2010-06-09 インターナショナル・ビジネス・マシーンズ・コーポレーション 分光素子、回折格子、複合回折格子、カラー表示装置、および分波器
DE102007032371A1 (de) 2007-07-06 2009-01-15 Carl Zeiss Laser Optics Gmbh Verfahren zum Beschichten eines optischen Bauelements für eine Laseranordnung
DE102009031688B4 (de) * 2009-06-26 2013-12-24 Carl Zeiss Laser Optics Gmbh Verfahren zum Bestimmen eines Beugungsgitters
JP5637702B2 (ja) * 2010-03-09 2014-12-10 キヤノン株式会社 露光装置およびデバイス製造方法

Also Published As

Publication number Publication date
EP2579072A2 (en) 2013-04-10
JP2013092754A (ja) 2013-05-16
EP2579072A3 (en) 2013-04-17
EP2579072B1 (en) 2014-07-16
US20130089118A1 (en) 2013-04-11
US9031112B2 (en) 2015-05-12

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