JP6036341B2 - 光学モジュール、及び電子機器 - Google Patents

光学モジュール、及び電子機器 Download PDF

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Publication number
JP6036341B2
JP6036341B2 JP2013014035A JP2013014035A JP6036341B2 JP 6036341 B2 JP6036341 B2 JP 6036341B2 JP 2013014035 A JP2013014035 A JP 2013014035A JP 2013014035 A JP2013014035 A JP 2013014035A JP 6036341 B2 JP6036341 B2 JP 6036341B2
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JP
Japan
Prior art keywords
control
substrate
optical module
electrode
reflective film
Prior art date
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Expired - Fee Related
Application number
JP2013014035A
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English (en)
Japanese (ja)
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JP2014145888A (ja
JP2014145888A5 (enExample
Inventor
友紀 松下
友紀 松下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2013014035A priority Critical patent/JP6036341B2/ja
Priority to EP14152626.9A priority patent/EP2759818A3/en
Priority to US14/165,904 priority patent/US20140211315A1/en
Priority to CN201410042294.4A priority patent/CN103969727B/zh
Publication of JP2014145888A publication Critical patent/JP2014145888A/ja
Publication of JP2014145888A5 publication Critical patent/JP2014145888A5/ja
Application granted granted Critical
Publication of JP6036341B2 publication Critical patent/JP6036341B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/027—Control of working procedures of a spectrometer; Failure detection; Bandwidth calculation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
    • G01J3/51—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G01N21/658—Raman scattering enhancement Raman, e.g. surface plasmons
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/314—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths
    • G01N2021/3144—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths for oxymetry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Optics & Photonics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Micromachines (AREA)
JP2013014035A 2013-01-29 2013-01-29 光学モジュール、及び電子機器 Expired - Fee Related JP6036341B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2013014035A JP6036341B2 (ja) 2013-01-29 2013-01-29 光学モジュール、及び電子機器
EP14152626.9A EP2759818A3 (en) 2013-01-29 2014-01-27 Optical module, and electronic apparatus
US14/165,904 US20140211315A1 (en) 2013-01-29 2014-01-28 Optical module, and electronic apparatus
CN201410042294.4A CN103969727B (zh) 2013-01-29 2014-01-28 光学模块以及电子设备

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013014035A JP6036341B2 (ja) 2013-01-29 2013-01-29 光学モジュール、及び電子機器

Publications (3)

Publication Number Publication Date
JP2014145888A JP2014145888A (ja) 2014-08-14
JP2014145888A5 JP2014145888A5 (enExample) 2016-03-17
JP6036341B2 true JP6036341B2 (ja) 2016-11-30

Family

ID=50072881

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013014035A Expired - Fee Related JP6036341B2 (ja) 2013-01-29 2013-01-29 光学モジュール、及び電子機器

Country Status (4)

Country Link
US (1) US20140211315A1 (enExample)
EP (1) EP2759818A3 (enExample)
JP (1) JP6036341B2 (enExample)
CN (1) CN103969727B (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6010275B2 (ja) 2010-03-15 2016-10-19 セイコーエプソン株式会社 光フィルター並びにそれを用いた分析機器及び光機器
JP5987573B2 (ja) * 2012-09-12 2016-09-07 セイコーエプソン株式会社 光学モジュール、電子機器、及び駆動方法
US9780134B2 (en) * 2014-05-16 2017-10-03 Taiwan Semiconductor Manufacturing Company Ltd. Semiconductor device and method of forming the same
CN109154526A (zh) * 2016-01-29 2019-01-04 惠普发展公司，有限责任合伙企业 具有可调谐透镜的分析物检测封装
JP7110081B2 (ja) * 2018-12-18 2022-08-01 浜松ホトニクス株式会社 制御装置、光学フィルタシステム、制御方法
CN109829419B (zh) * 2019-01-28 2021-08-24 京东方科技集团股份有限公司 指纹识别模组及其驱动方法和制作方法、显示装置
DE102019215893A1 (de) * 2019-10-16 2021-04-22 Robert Bosch Gmbh Mikromechanisches Bauteil für eine optische Vorrichtung
CN113946014B (zh) * 2021-12-20 2022-03-04 南京高华科技股份有限公司 一种可调光谐振器

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3729261A (en) * 1971-06-21 1973-04-24 Rca Corp Stabilized multipass interferometer
JPH07243963A (ja) 1994-03-07 1995-09-19 Yazaki Corp 光共振器とその製造方法
JP3801099B2 (ja) * 2002-06-04 2006-07-26 株式会社デンソー チューナブルフィルタ、その製造方法、及びそれを使用した光スイッチング装置
DE60202137T2 (de) * 2002-06-19 2005-03-31 John R. Sandercock Stabilisiertes Fabry-Perot Interferometer und Verfahren zum Stabilisieren eines Fabry-Perot Interferometers
TW593125B (en) * 2002-08-09 2004-06-21 Ind Tech Res Inst MEMS type differential actuator
JP4729289B2 (ja) * 2003-12-04 2011-07-20 オリンパス株式会社 光偏向器
US7130104B2 (en) * 2004-09-27 2006-10-31 Idc, Llc Methods and devices for inhibiting tilting of a mirror in an interferometric modulator
JP2008183350A (ja) * 2007-01-31 2008-08-14 Olympus Corp 可変分光素子、分光装置および内視鏡システム
JP2008197362A (ja) * 2007-02-13 2008-08-28 Olympus Corp 可変分光素子
JP5521359B2 (ja) * 2008-03-13 2014-06-11 セイコーエプソン株式会社 光偏向器及びその製造方法
JP2010054627A (ja) * 2008-08-26 2010-03-11 Toyota Central R&D Labs Inc 光学装置
JP5798709B2 (ja) * 2009-03-04 2015-10-21 セイコーエプソン株式会社 光フィルター及びそれを備えた光モジュール
JP5458983B2 (ja) * 2010-03-15 2014-04-02 セイコーエプソン株式会社 光フィルターの製造方法
JP6010275B2 (ja) * 2010-03-15 2016-10-19 セイコーエプソン株式会社 光フィルター並びにそれを用いた分析機器及び光機器
JP5589459B2 (ja) * 2010-03-15 2014-09-17 セイコーエプソン株式会社 光フィルター及び光フィルターモジュール並びに分析機器及び光機器
JP5668345B2 (ja) * 2010-07-13 2015-02-12 セイコーエプソン株式会社 光フィルター、光フィルターモジュール、分光測定器および光機器
JP5716412B2 (ja) * 2011-01-24 2015-05-13 セイコーエプソン株式会社 波長可変干渉フィルター、光モジュール、及び光分析装置

Also Published As

Publication number Publication date
CN103969727B (zh) 2018-03-09
JP2014145888A (ja) 2014-08-14
CN103969727A (zh) 2014-08-06
US20140211315A1 (en) 2014-07-31
EP2759818A3 (en) 2018-01-10
EP2759818A2 (en) 2014-07-30

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