CN103969727B - 光学模块以及电子设备 - Google Patents

光学模块以及电子设备 Download PDF

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Publication number
CN103969727B
CN103969727B CN201410042294.4A CN201410042294A CN103969727B CN 103969727 B CN103969727 B CN 103969727B CN 201410042294 A CN201410042294 A CN 201410042294A CN 103969727 B CN103969727 B CN 103969727B
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CN
China
Prior art keywords
substrate
control
reflectance coating
electrode
optical module
Prior art date
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Active
Application number
CN201410042294.4A
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English (en)
Chinese (zh)
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CN103969727A (zh
Inventor
松下友纪
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
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Publication of CN103969727A publication Critical patent/CN103969727A/zh
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Publication of CN103969727B publication Critical patent/CN103969727B/zh
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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/027—Control of working procedures of a spectrometer; Failure detection; Bandwidth calculation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
    • G01J3/51—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G01N21/658—Raman scattering enhancement Raman, e.g. surface plasmons
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/314—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths
    • G01N2021/3144—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths for oxymetry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Optics & Photonics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Micromachines (AREA)
CN201410042294.4A 2013-01-29 2014-01-28 光学模块以及电子设备 Active CN103969727B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013-014035 2013-01-29
JP2013014035A JP6036341B2 (ja) 2013-01-29 2013-01-29 光学モジュール、及び電子機器

Publications (2)

Publication Number Publication Date
CN103969727A CN103969727A (zh) 2014-08-06
CN103969727B true CN103969727B (zh) 2018-03-09

Family

ID=50072881

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201410042294.4A Active CN103969727B (zh) 2013-01-29 2014-01-28 光学模块以及电子设备

Country Status (4)

Country Link
US (1) US20140211315A1 (enExample)
EP (1) EP2759818A3 (enExample)
JP (1) JP6036341B2 (enExample)
CN (1) CN103969727B (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6010275B2 (ja) 2010-03-15 2016-10-19 セイコーエプソン株式会社 光フィルター並びにそれを用いた分析機器及び光機器
JP5987573B2 (ja) * 2012-09-12 2016-09-07 セイコーエプソン株式会社 光学モジュール、電子機器、及び駆動方法
US9780134B2 (en) * 2014-05-16 2017-10-03 Taiwan Semiconductor Manufacturing Company Ltd. Semiconductor device and method of forming the same
CN109154526A (zh) * 2016-01-29 2019-01-04 惠普发展公司，有限责任合伙企业 具有可调谐透镜的分析物检测封装
JP7110081B2 (ja) * 2018-12-18 2022-08-01 浜松ホトニクス株式会社 制御装置、光学フィルタシステム、制御方法
CN109829419B (zh) * 2019-01-28 2021-08-24 京东方科技集团股份有限公司 指纹识别模组及其驱动方法和制作方法、显示装置
DE102019215893A1 (de) * 2019-10-16 2021-04-22 Robert Bosch Gmbh Mikromechanisches Bauteil für eine optische Vorrichtung
CN113946014B (zh) * 2021-12-20 2022-03-04 南京高华科技股份有限公司 一种可调光谐振器

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8319169B2 (en) * 2009-03-04 2012-11-27 Seiko Epson Corporation Optical filter and optical module provided with same

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US3729261A (en) * 1971-06-21 1973-04-24 Rca Corp Stabilized multipass interferometer
JPH07243963A (ja) 1994-03-07 1995-09-19 Yazaki Corp 光共振器とその製造方法
JP3801099B2 (ja) * 2002-06-04 2006-07-26 株式会社デンソー チューナブルフィルタ、その製造方法、及びそれを使用した光スイッチング装置
DE60202137T2 (de) * 2002-06-19 2005-03-31 John R. Sandercock Stabilisiertes Fabry-Perot Interferometer und Verfahren zum Stabilisieren eines Fabry-Perot Interferometers
TW593125B (en) * 2002-08-09 2004-06-21 Ind Tech Res Inst MEMS type differential actuator
JP4729289B2 (ja) * 2003-12-04 2011-07-20 オリンパス株式会社 光偏向器
US7130104B2 (en) * 2004-09-27 2006-10-31 Idc, Llc Methods and devices for inhibiting tilting of a mirror in an interferometric modulator
JP2008183350A (ja) * 2007-01-31 2008-08-14 Olympus Corp 可変分光素子、分光装置および内視鏡システム
JP2008197362A (ja) * 2007-02-13 2008-08-28 Olympus Corp 可変分光素子
JP5521359B2 (ja) * 2008-03-13 2014-06-11 セイコーエプソン株式会社 光偏向器及びその製造方法
JP2010054627A (ja) * 2008-08-26 2010-03-11 Toyota Central R&D Labs Inc 光学装置
JP5458983B2 (ja) * 2010-03-15 2014-04-02 セイコーエプソン株式会社 光フィルターの製造方法
JP6010275B2 (ja) * 2010-03-15 2016-10-19 セイコーエプソン株式会社 光フィルター並びにそれを用いた分析機器及び光機器
JP5589459B2 (ja) * 2010-03-15 2014-09-17 セイコーエプソン株式会社 光フィルター及び光フィルターモジュール並びに分析機器及び光機器
JP5668345B2 (ja) * 2010-07-13 2015-02-12 セイコーエプソン株式会社 光フィルター、光フィルターモジュール、分光測定器および光機器
JP5716412B2 (ja) * 2011-01-24 2015-05-13 セイコーエプソン株式会社 波長可変干渉フィルター、光モジュール、及び光分析装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8319169B2 (en) * 2009-03-04 2012-11-27 Seiko Epson Corporation Optical filter and optical module provided with same

Also Published As

Publication number Publication date
JP6036341B2 (ja) 2016-11-30
JP2014145888A (ja) 2014-08-14
CN103969727A (zh) 2014-08-06
US20140211315A1 (en) 2014-07-31
EP2759818A3 (en) 2018-01-10
EP2759818A2 (en) 2014-07-30

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