JP6031304B2 - 基板処理装置及び基板処理方法 - Google Patents

基板処理装置及び基板処理方法 Download PDF

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Publication number
JP6031304B2
JP6031304B2 JP2012205748A JP2012205748A JP6031304B2 JP 6031304 B2 JP6031304 B2 JP 6031304B2 JP 2012205748 A JP2012205748 A JP 2012205748A JP 2012205748 A JP2012205748 A JP 2012205748A JP 6031304 B2 JP6031304 B2 JP 6031304B2
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Prior art keywords
substrate
transmission mechanism
drive unit
power transmission
unit
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JP2012205748A
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Japanese (ja)
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JP2014060337A (ja
JP2014060337A5 (enrdf_load_stackoverflow
Inventor
剛吏 柴田
剛吏 柴田
孝志 野上
孝志 野上
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Kokusai Denki Electric Inc
Original Assignee
Hitachi Kokusai Electric Inc
Kokusai Denki Electric Inc
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Priority to JP2012205748A priority Critical patent/JP6031304B2/ja
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Publication of JP2014060337A5 publication Critical patent/JP2014060337A5/ja
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JP2012205748A 2012-09-19 2012-09-19 基板処理装置及び基板処理方法 Active JP6031304B2 (ja)

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JP2012205748A JP6031304B2 (ja) 2012-09-19 2012-09-19 基板処理装置及び基板処理方法

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JP2012205748A JP6031304B2 (ja) 2012-09-19 2012-09-19 基板処理装置及び基板処理方法

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JP2014060337A JP2014060337A (ja) 2014-04-03
JP2014060337A5 JP2014060337A5 (enrdf_load_stackoverflow) 2015-11-05
JP6031304B2 true JP6031304B2 (ja) 2016-11-24

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20240031682A (ko) 2022-09-01 2024-03-08 주식회사 엘지화학 열가소성 수지 조성물, 이의 제조방법 및 이로부터 제조된 성형품

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6704423B2 (ja) * 2018-01-17 2020-06-03 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 基板処理装置、半導体装置の製造方法およびプログラム

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03111196A (ja) * 1989-09-27 1991-05-10 Fanuc Ltd 産業用ロボットの伸縮軸作動機構
JPH04112735U (ja) * 1991-03-15 1992-09-30 日産車体株式会社 位置決め装置
JPH08168980A (ja) * 1994-10-21 1996-07-02 Shibaura Eng Works Co Ltd 産業用ロボット
JP2007130734A (ja) * 2005-11-14 2007-05-31 Yaskawa Electric Corp 上下機構を備えた搬送ロボット
JP2012169534A (ja) * 2011-02-16 2012-09-06 Hitachi Kokusai Electric Inc 基板処理装置及び半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20240031682A (ko) 2022-09-01 2024-03-08 주식회사 엘지화학 열가소성 수지 조성물, 이의 제조방법 및 이로부터 제조된 성형품

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