JP5990734B2 - 蛍光ｘ線分析装置 - Google Patents

蛍光ｘ線分析装置 Download PDF

Info

Publication number
JP5990734B2
JP5990734B2 JP2011262147A JP2011262147A JP5990734B2 JP 5990734 B2 JP5990734 B2 JP 5990734B2 JP 2011262147 A JP2011262147 A JP 2011262147A JP 2011262147 A JP2011262147 A JP 2011262147A JP 5990734 B2 JP5990734 B2 JP 5990734B2
Authority
JP
Japan
Prior art keywords
ray
crystal
curved
detector
fluorescent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2011262147A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013113782A5 (enExample
JP2013113782A (ja
Inventor
中野　朝雄
朝雄 中野
直樹 河原
直樹 河原
庄司　孝
孝 庄司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rigaku Corp
Original Assignee
Rigaku Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rigaku Corp filed Critical Rigaku Corp
Priority to JP2011262147A priority Critical patent/JP5990734B2/ja
Publication of JP2013113782A publication Critical patent/JP2013113782A/ja
Publication of JP2013113782A5 publication Critical patent/JP2013113782A5/ja
Application granted granted Critical
Publication of JP5990734B2 publication Critical patent/JP5990734B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP2011262147A 2011-11-30 2011-11-30 蛍光ｘ線分析装置 Active JP5990734B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011262147A JP5990734B2 (ja) 2011-11-30 2011-11-30 蛍光ｘ線分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011262147A JP5990734B2 (ja) 2011-11-30 2011-11-30 蛍光ｘ線分析装置

Publications (3)

Publication Number Publication Date
JP2013113782A JP2013113782A (ja) 2013-06-10
JP2013113782A5 JP2013113782A5 (enExample) 2014-12-04
JP5990734B2 true JP5990734B2 (ja) 2016-09-14

Family

ID=48709433

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011262147A Active JP5990734B2 (ja) 2011-11-30 2011-11-30 蛍光ｘ線分析装置

Country Status (1)

Country Link
JP (1) JP5990734B2 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109196340A (zh) * 2016-09-30 2019-01-11 株式会社理学 波长分散型荧光x射线分析装置和采用它的荧光x射线分析方法
US11796491B2 (en) 2021-01-05 2023-10-24 Shimadzu Corporation X-ray spectroscopic analysis apparatus and elemental analysis method

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016017759A (ja) * 2014-07-04 2016-02-01 株式会社リガク Ｘ線測定モジュールおよびそれを複数備える蛍光ｘ線分析装置
CN104264228A (zh) * 2014-10-09 2015-01-07 北京安科慧生科技有限公司 双曲面弯晶、组合式双曲面弯晶及单波长色散 x 射线荧光光谱仪
CN105115999B (zh) * 2015-09-08 2019-07-19 北京安科慧生科技有限公司 一种高灵敏度单色激发多元素x射线荧光光谱仪
DE112019002822T5 (de) * 2018-06-04 2021-02-18 Sigray, Inc. Wellenlängendispersives röntgenspektrometer
CN115667896B (zh) 2020-05-18 2024-06-21 斯格瑞公司 使用晶体分析器和多个检测元件的x射线吸收光谱的系统和方法
DE112021004828T5 (de) 2020-09-17 2023-08-03 Sigray, Inc. System und verfahren unter verwendung von röntgenstrahlen für tiefenauflösende messtechnik und analyse
US12480892B2 (en) 2020-12-07 2025-11-25 Sigray, Inc. High throughput 3D x-ray imaging system using a transmission x-ray source
JP7626856B2 (ja) 2020-12-07 2025-02-04 シグレイ、インコーポレイテッド 透過ｘ線源を用いた高スループット３ｄ ｘ線撮像システム
US12360067B2 (en) 2022-03-02 2025-07-15 Sigray, Inc. X-ray fluorescence system and x-ray source with electrically insulative target material
US11992350B2 (en) 2022-03-15 2024-05-28 Sigray, Inc. System and method for compact laminography utilizing microfocus transmission x-ray source and variable magnification x-ray detector
DE112023002079T5 (de) 2022-05-02 2025-02-27 Sigray, Inc. Sequenzielles wellenlängendispersives röntgenspektrometer
US12209977B2 (en) 2023-02-16 2025-01-28 Sigray, Inc. X-ray detector system with at least two stacked flat Bragg diffractors
CN116067998B (zh) * 2023-02-23 2025-05-09 中国工程物理研究院激光聚变研究中心 双通道多支路门控晶体谱仪
US12181423B1 (en) 2023-09-07 2024-12-31 Sigray, Inc. Secondary image removal using high resolution x-ray transmission sources
US12429437B2 (en) 2023-11-07 2025-09-30 Sigray, Inc. System and method for x-ray absorption spectroscopy using spectral information from two orthogonal planes
WO2025151383A1 (en) 2024-01-08 2025-07-17 Sigray, Inc. X-ray analysis system with focused x-ray beam and non-x-ray microscope
US12431256B2 (en) 2024-02-15 2025-09-30 Sigray, Inc. System and method for generating a focused x-ray beam

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002156343A (ja) * 2000-11-17 2002-05-31 Rigaku Industrial Co 蛍光ｘ線分析装置
CN1246858C (zh) * 2001-06-19 2006-03-22 X射线光学系统公司 X射线荧光(xrf)光谱测定系统和方法
JP4330981B2 (ja) * 2003-11-21 2009-09-16 株式会社リガク 蛍光ｘ線分析装置
US8058621B2 (en) * 2009-10-26 2011-11-15 General Electric Company Elemental composition detection system and method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109196340A (zh) * 2016-09-30 2019-01-11 株式会社理学 波长分散型荧光x射线分析装置和采用它的荧光x射线分析方法
US10768125B2 (en) 2016-09-30 2020-09-08 Rigaku Corporation Wavelength dispersive x-ray fluorescence spectrometer and x-ray fluorescence analyzing method using the same
US11796491B2 (en) 2021-01-05 2023-10-24 Shimadzu Corporation X-ray spectroscopic analysis apparatus and elemental analysis method

Also Published As

Publication number Publication date
JP2013113782A (ja) 2013-06-10

Similar Documents

Publication Publication Date Title
JP5990734B2 (ja) 蛍光ｘ線分析装置
US10295486B2 (en) Detector for X-rays with high spatial and high spectral resolution
JP7395775B2 (ja) 結晶解析装置及び複数の検出器素子を使用するｘ線吸収分光法のためのシステム及び方法
EP2772752B1 (en) X-ray spectrometry detector device
CN102472714B (zh) X射线装置、其使用方法以及x射线照射方法
JP6142135B2 (ja) 斜入射蛍光ｘ線分析装置および方法
JP5626750B2 (ja) 測定装置及び測定方法
US10256002B2 (en) Support structure and highly aligned monochromatic X-ray optics for X-ray analysis engines and analyzers
JP2008032749A (ja) 蛍光ｘ線分光システム及び蛍光ｘ線分光方法
JP2005512020A5 (enExample)
JP6392850B2 (ja) ビーム生成ユニットおよびｘ線小角散乱装置
CN106461579A (zh) X射线衍射装置
WO2013108876A1 (ja) Ｘ線回折装置
JP2004333131A (ja) 全反射蛍光ｘａｆｓ測定装置
JP5081556B2 (ja) デバイシェラー光学系を備えたｘ線回折測定装置とそのためのｘ線回折測定方法
US8537967B2 (en) Short working distance spectrometer and associated devices, systems, and methods
CN108572184B (zh) 高分辨率x射线衍射方法和装置
JP5039971B2 (ja) 非走査型波長分散型ｘ線分析装置及びそれを用いた測定方法
WO2003071257A1 (en) X-ray condenser
CN114646652B (zh) 一种x射线光子甄选仪的应用
US10914628B2 (en) Apparatus for spectrum and intensity profile characterization of a beam, use thereof and method thereof
RU2661742C1 (ru) Компактный широкодиапазонный вуф спектрометр
JP2016017759A (ja) Ｘ線測定モジュールおよびそれを複数備える蛍光ｘ線分析装置
US20150185168A1 (en) Device for measuring resonant inelastic x-ray scattering of a sample
JP2002148393A (ja) Ｘ線分光素子およびそれを用いたｘ線分析装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20141020

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20141020

RD02 Notification of acceptance of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7422

Effective date: 20141020

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20150727

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20150818

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20151016

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20160223

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20160414

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20160628

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20160707

R150 Certificate of patent or registration of utility model

Ref document number: 5990734

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

SG99 Written request for registration of restore

Free format text: JAPANESE INTERMEDIATE CODE: R316G99

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

SG99 Written request for registration of restore

Free format text: JAPANESE INTERMEDIATE CODE: R316G99

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

S803 Written request for registration of cancellation of provisional registration

Free format text: JAPANESE INTERMEDIATE CODE: R316805

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S803 Written request for registration of cancellation of provisional registration

Free format text: JAPANESE INTERMEDIATE CODE: R316805

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250