JP5981939B2 - 振動絶縁装置 - Google Patents

振動絶縁装置 Download PDF

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Publication number
JP5981939B2
JP5981939B2 JP2013546677A JP2013546677A JP5981939B2 JP 5981939 B2 JP5981939 B2 JP 5981939B2 JP 2013546677 A JP2013546677 A JP 2013546677A JP 2013546677 A JP2013546677 A JP 2013546677A JP 5981939 B2 JP5981939 B2 JP 5981939B2
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Japan
Prior art keywords
mounting structure
vibration isolator
receiving volume
base structure
permanent magnets
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JP2013546677A
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Japanese (ja)
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JP2014503057A5 (enExample
JP2014503057A (ja
Inventor
ヤンセン，イエルーン・ローデフイクス・ヘラルドス
パウリデス，ヨハンネス・ヤコブス・フーベルトウス
ロモノフア，エレナ・アンドレーナ
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テヒニーセ・ユニベルシタイト・エイントホーヘン
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F6/00—Magnetic springs; Fluid magnetic springs, i.e. magnetic spring combined with a fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F6/00—Magnetic springs; Fluid magnetic springs, i.e. magnetic spring combined with a fluid
    • F16F6/005—Magnetic springs; Fluid magnetic springs, i.e. magnetic spring combined with a fluid using permanent magnets only
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/03—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using magnetic or electromagnetic means

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Vibration Prevention Devices (AREA)
JP2013546677A 2011-01-03 2011-12-22 振動絶縁装置 Expired - Fee Related JP5981939B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP11150034A EP2472139A1 (en) 2011-01-03 2011-01-03 Vibration isolator
EP11150034.4 2011-01-03
PCT/EP2011/073785 WO2012093038A1 (en) 2011-01-03 2011-12-22 Vibration isolator

Publications (3)

Publication Number Publication Date
JP2014503057A JP2014503057A (ja) 2014-02-06
JP2014503057A5 JP2014503057A5 (enExample) 2015-02-12
JP5981939B2 true JP5981939B2 (ja) 2016-08-31

Family

ID=44063495

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013546677A Expired - Fee Related JP5981939B2 (ja) 2011-01-03 2011-12-22 振動絶縁装置

Country Status (5)

Country Link
US (1) US9243677B2 (enExample)
EP (1) EP2472139A1 (enExample)
JP (1) JP5981939B2 (enExample)
KR (1) KR101932999B1 (enExample)
WO (1) WO2012093038A1 (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9754711B2 (en) * 2011-01-03 2017-09-05 Asml Netherlands B.V. Vibration isolator with displacement structure
CN103453062B (zh) * 2013-08-15 2015-06-17 华中科技大学 零刚度磁悬浮主动隔振器及其构成的六自由度隔振系统
US9509204B2 (en) 2013-12-12 2016-11-29 The Boeing Company Motion-damping systems between base structure and an attached component and methods including the same
US9670981B2 (en) 2013-12-12 2017-06-06 The Boeing Company Motion-damping systems and methods including the same
CN106151340A (zh) * 2016-07-08 2016-11-23 哈尔滨工程大学 一种基于永磁体阵列的线性负刚度机构
KR102304291B1 (ko) * 2017-03-16 2021-09-27 에이에스엠엘 네델란즈 비.브이. 베어링 디바이스, 자기 중력 보상기, 진동 분리 시스템, 리소그래피 장치, 네거티브 강성을 갖는 중력 보상기를 제어하는 방법, 및 스프링
CN107842570B (zh) * 2017-11-06 2020-06-26 哈尔滨工业大学 一种电涡流三维隔震支座
KR102168401B1 (ko) 2019-06-28 2020-10-21 충남대학교산학협력단 중력보상 구동부
KR102161989B1 (ko) 2019-06-28 2020-10-06 충남대학교산학협력단 중력보상 구동부
KR102391658B1 (ko) 2020-06-01 2022-04-27 충남대학교산학협력단 영강성을 활용한 중력보상 보이스코일모터
CN111734776B (zh) * 2020-06-29 2021-11-16 哈尔滨工业大学 基于水平预压弹簧与磁弹簧并联的三自由度低频隔振器
CN111677798A (zh) * 2020-06-29 2020-09-18 哈尔滨工业大学 基于磁引力正负刚度并联的水平二自由度电磁隔振装置
CN111677800A (zh) * 2020-06-29 2020-09-18 哈尔滨工业大学 基于正负刚度并联的水平二自由度电磁隔振装置
CN115681395A (zh) * 2021-07-21 2023-02-03 成都极米科技股份有限公司 一种减震机构及采用其的扬声器和投影仪
CN119267486A (zh) * 2024-10-30 2025-01-07 哈尔滨工业大学 面向大型精密隔微振的负刚度阻尼一体化调控装置
CN119267482B (zh) * 2024-10-30 2025-10-03 哈尔滨工业大学 大型精密隔微振自适应主被动复合空间电磁阵列阻尼调控装置
CN119267481B (zh) * 2024-10-30 2025-11-04 哈尔滨工业大学 基于多组垂直磁化空间永磁阵列的大型精密隔微振阻尼器
CN120042891A (zh) * 2025-02-19 2025-05-27 同济大学 一种海尔贝克电磁型准零刚度隔振平台

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6014928B2 (ja) * 1976-11-18 1985-04-16 超エル・エス・アイ技術研究組合 磁気軸受装置
DE3461153D1 (en) * 1983-04-11 1986-12-11 Deutsche Forsch Luft Raumfahrt Suspension system for a motor vehicle
DE3410473C2 (de) * 1983-04-11 1986-02-06 Deutsche Forschungs- und Versuchsanstalt für Luft- und Raumfahrt e.V., 5000 Köln Federungssystem für ein Kraftfahrzeug
DE69405266T2 (de) * 1993-02-18 1998-04-09 Toshiba Kawasaki Kk Dynamischer Schwingungsdämpfer
JPH07113394B2 (ja) * 1993-04-07 1995-12-06 株式会社荏原製作所 除振装置
JPH10306823A (ja) * 1997-05-01 1998-11-17 Maintenance:Kk 永久磁石およびこの永久磁石を使用した磁気浮上支持構造
US6002184A (en) 1997-09-17 1999-12-14 Coactive Drive Corporation Actuator with opposing repulsive magnetic forces
US6231011B1 (en) * 1998-11-02 2001-05-15 University Of Houston System Satellite angular momentum control system using magnet-superconductor flywheels
JP2000337434A (ja) * 1999-05-25 2000-12-05 Delta Tooling Co Ltd 振動機構
JP2001349374A (ja) * 2000-06-02 2001-12-21 Delta Tooling Co Ltd 磁気バネ構造及び該磁気バネ構造を用いた除振機構
DE10205557A1 (de) * 2001-12-21 2003-07-03 Ingelheim Consulting Gmbh Elektromagnetisches Federsystem insbesondere Elektromagnetisches Federbein und seine Regelungen
JP3863429B2 (ja) * 2002-01-04 2006-12-27 学校法人東京電機大学 リニア振動アクチュエータ
US6879127B2 (en) * 2002-02-12 2005-04-12 Nikon Corporation 3-ring magnetic anti-gravity support
JP4323759B2 (ja) * 2002-05-27 2009-09-02 キヤノン株式会社 露光装置およびデバイス製造方法
JP4143438B2 (ja) * 2003-02-24 2008-09-03 キヤノン株式会社 支持装置、露光装置、デバイス製造方法
US6906789B2 (en) * 2003-06-02 2005-06-14 Asml Holding N.V. Magnetically levitated and driven reticle-masking blade stage mechanism having six degrees freedom of motion
WO2010136049A1 (en) * 2009-05-26 2010-12-02 Skf B.V. Electromagnetic actuator with integrated passive damper

Also Published As

Publication number Publication date
US20130299290A1 (en) 2013-11-14
US9243677B2 (en) 2016-01-26
KR101932999B1 (ko) 2018-12-27
WO2012093038A1 (en) 2012-07-12
KR20140041413A (ko) 2014-04-04
EP2472139A1 (en) 2012-07-04
JP2014503057A (ja) 2014-02-06

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