KR101932999B1 - 진동 절연기 - Google Patents

진동 절연기 Download PDF

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Publication number
KR101932999B1
KR101932999B1 KR1020137020563A KR20137020563A KR101932999B1 KR 101932999 B1 KR101932999 B1 KR 101932999B1 KR 1020137020563 A KR1020137020563 A KR 1020137020563A KR 20137020563 A KR20137020563 A KR 20137020563A KR 101932999 B1 KR101932999 B1 KR 101932999B1
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KR
South Korea
Prior art keywords
rod structure
receiving volume
base structure
block
vibration isolators
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Expired - Fee Related
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KR1020137020563A
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Korean (ko)
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KR20140041413A (ko
Inventor
예로엔 로데비크어스 게라르두스 얀센
요한네스 야코버스 후베르투스 파울리데스
엘레나 안드레브나 로모노바
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에이에스엠엘 네델란즈 비.브이.
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F6/00—Magnetic springs; Fluid magnetic springs, i.e. magnetic spring combined with a fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F6/00—Magnetic springs; Fluid magnetic springs, i.e. magnetic spring combined with a fluid
    • F16F6/005—Magnetic springs; Fluid magnetic springs, i.e. magnetic spring combined with a fluid using permanent magnets only
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/03—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using magnetic or electromagnetic means

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Vibration Prevention Devices (AREA)
KR1020137020563A 2011-01-03 2011-12-22 진동 절연기 Expired - Fee Related KR101932999B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP11150034A EP2472139A1 (en) 2011-01-03 2011-01-03 Vibration isolator
EP11150034.4 2011-01-03
PCT/EP2011/073785 WO2012093038A1 (en) 2011-01-03 2011-12-22 Vibration isolator

Publications (2)

Publication Number Publication Date
KR20140041413A KR20140041413A (ko) 2014-04-04
KR101932999B1 true KR101932999B1 (ko) 2018-12-27

Family

ID=44063495

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020137020563A Expired - Fee Related KR101932999B1 (ko) 2011-01-03 2011-12-22 진동 절연기

Country Status (5)

Country Link
US (1) US9243677B2 (enExample)
EP (1) EP2472139A1 (enExample)
JP (1) JP5981939B2 (enExample)
KR (1) KR101932999B1 (enExample)
WO (1) WO2012093038A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102161989B1 (ko) 2019-06-28 2020-10-06 충남대학교산학협력단 중력보상 구동부
KR102168401B1 (ko) 2019-06-28 2020-10-21 충남대학교산학협력단 중력보상 구동부
KR20210148653A (ko) 2020-06-01 2021-12-08 충남대학교산학협력단 영강성을 활용한 중력보상 보이스코일모터

Families Citing this family (15)

* Cited by examiner, † Cited by third party
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US9754711B2 (en) * 2011-01-03 2017-09-05 Asml Netherlands B.V. Vibration isolator with displacement structure
CN103453062B (zh) * 2013-08-15 2015-06-17 华中科技大学 零刚度磁悬浮主动隔振器及其构成的六自由度隔振系统
US9509204B2 (en) 2013-12-12 2016-11-29 The Boeing Company Motion-damping systems between base structure and an attached component and methods including the same
US9670981B2 (en) 2013-12-12 2017-06-06 The Boeing Company Motion-damping systems and methods including the same
CN106151340A (zh) * 2016-07-08 2016-11-23 哈尔滨工程大学 一种基于永磁体阵列的线性负刚度机构
KR102304291B1 (ko) * 2017-03-16 2021-09-27 에이에스엠엘 네델란즈 비.브이. 베어링 디바이스, 자기 중력 보상기, 진동 분리 시스템, 리소그래피 장치, 네거티브 강성을 갖는 중력 보상기를 제어하는 방법, 및 스프링
CN107842570B (zh) * 2017-11-06 2020-06-26 哈尔滨工业大学 一种电涡流三维隔震支座
CN111734776B (zh) * 2020-06-29 2021-11-16 哈尔滨工业大学 基于水平预压弹簧与磁弹簧并联的三自由度低频隔振器
CN111677798A (zh) * 2020-06-29 2020-09-18 哈尔滨工业大学 基于磁引力正负刚度并联的水平二自由度电磁隔振装置
CN111677800A (zh) * 2020-06-29 2020-09-18 哈尔滨工业大学 基于正负刚度并联的水平二自由度电磁隔振装置
CN115681395A (zh) * 2021-07-21 2023-02-03 成都极米科技股份有限公司 一种减震机构及采用其的扬声器和投影仪
CN119267486A (zh) * 2024-10-30 2025-01-07 哈尔滨工业大学 面向大型精密隔微振的负刚度阻尼一体化调控装置
CN119267482B (zh) * 2024-10-30 2025-10-03 哈尔滨工业大学 大型精密隔微振自适应主被动复合空间电磁阵列阻尼调控装置
CN119267481B (zh) * 2024-10-30 2025-11-04 哈尔滨工业大学 基于多组垂直磁化空间永磁阵列的大型精密隔微振阻尼器
CN120042891A (zh) * 2025-02-19 2025-05-27 同济大学 一种海尔贝克电磁型准零刚度隔振平台

Citations (2)

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Publication number Priority date Publication date Assignee Title
US20030151321A1 (en) * 2002-02-12 2003-08-14 Nikon Corporation 3-ring magnetic anti-gravity support
JP2004363606A (ja) * 2003-06-02 2004-12-24 Asml Holding Nv レチクルマスキングブレードシステムおよびレチクルマスキングブレードの制御方法およびレチクルマスキングブレードの浮上装置

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JPS6014928B2 (ja) * 1976-11-18 1985-04-16 超エル・エス・アイ技術研究組合 磁気軸受装置
DE3461153D1 (en) * 1983-04-11 1986-12-11 Deutsche Forsch Luft Raumfahrt Suspension system for a motor vehicle
DE3410473C2 (de) * 1983-04-11 1986-02-06 Deutsche Forschungs- und Versuchsanstalt für Luft- und Raumfahrt e.V., 5000 Köln Federungssystem für ein Kraftfahrzeug
DE69405266T2 (de) * 1993-02-18 1998-04-09 Toshiba Kawasaki Kk Dynamischer Schwingungsdämpfer
JPH07113394B2 (ja) * 1993-04-07 1995-12-06 株式会社荏原製作所 除振装置
JPH10306823A (ja) * 1997-05-01 1998-11-17 Maintenance:Kk 永久磁石およびこの永久磁石を使用した磁気浮上支持構造
US6002184A (en) 1997-09-17 1999-12-14 Coactive Drive Corporation Actuator with opposing repulsive magnetic forces
US6231011B1 (en) * 1998-11-02 2001-05-15 University Of Houston System Satellite angular momentum control system using magnet-superconductor flywheels
JP2000337434A (ja) * 1999-05-25 2000-12-05 Delta Tooling Co Ltd 振動機構
JP2001349374A (ja) * 2000-06-02 2001-12-21 Delta Tooling Co Ltd 磁気バネ構造及び該磁気バネ構造を用いた除振機構
DE10205557A1 (de) * 2001-12-21 2003-07-03 Ingelheim Consulting Gmbh Elektromagnetisches Federsystem insbesondere Elektromagnetisches Federbein und seine Regelungen
JP3863429B2 (ja) * 2002-01-04 2006-12-27 学校法人東京電機大学 リニア振動アクチュエータ
JP4323759B2 (ja) * 2002-05-27 2009-09-02 キヤノン株式会社 露光装置およびデバイス製造方法
JP4143438B2 (ja) * 2003-02-24 2008-09-03 キヤノン株式会社 支持装置、露光装置、デバイス製造方法
WO2010136049A1 (en) * 2009-05-26 2010-12-02 Skf B.V. Electromagnetic actuator with integrated passive damper

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030151321A1 (en) * 2002-02-12 2003-08-14 Nikon Corporation 3-ring magnetic anti-gravity support
US6879127B2 (en) * 2002-02-12 2005-04-12 Nikon Corporation 3-ring magnetic anti-gravity support
JP2004363606A (ja) * 2003-06-02 2004-12-24 Asml Holding Nv レチクルマスキングブレードシステムおよびレチクルマスキングブレードの制御方法およびレチクルマスキングブレードの浮上装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102161989B1 (ko) 2019-06-28 2020-10-06 충남대학교산학협력단 중력보상 구동부
KR102168401B1 (ko) 2019-06-28 2020-10-21 충남대학교산학협력단 중력보상 구동부
KR20210148653A (ko) 2020-06-01 2021-12-08 충남대학교산학협력단 영강성을 활용한 중력보상 보이스코일모터

Also Published As

Publication number Publication date
US20130299290A1 (en) 2013-11-14
US9243677B2 (en) 2016-01-26
WO2012093038A1 (en) 2012-07-12
KR20140041413A (ko) 2014-04-04
JP5981939B2 (ja) 2016-08-31
EP2472139A1 (en) 2012-07-04
JP2014503057A (ja) 2014-02-06

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