JP5973959B2 - 面外磁気トンネル接合セルの強磁性自由層の磁化方向を切換える方法、磁気メモリシステムおよびデータを電子的に記憶する方法 - Google Patents
面外磁気トンネル接合セルの強磁性自由層の磁化方向を切換える方法、磁気メモリシステムおよびデータを電子的に記憶する方法 Download PDFInfo
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- 230000005291 magnetic effect Effects 0.000 title claims description 69
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- 229910019236 CoFeB Inorganic materials 0.000 description 1
- 229910005335 FePt Inorganic materials 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 229910017947 MgOx Inorganic materials 0.000 description 1
- 229910019041 PtMn Inorganic materials 0.000 description 1
- 229910003087 TiOx Inorganic materials 0.000 description 1
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Classifications
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/161—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/14—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using thin-film elements
- G11C11/15—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using thin-film elements using multiple magnetic layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/165—Auxiliary circuits
- G11C11/1673—Reading or sensing circuits or methods
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/165—Auxiliary circuits
- G11C11/1675—Writing or programming circuits or methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
- H01F10/3286—Spin-exchange coupled multilayers having at least one layer with perpendicular magnetic anisotropy
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
- H01F10/3254—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the spacer being semiconducting or insulating, e.g. for spin tunnel junction [STJ]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
- H01F10/3254—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the spacer being semiconducting or insulating, e.g. for spin tunnel junction [STJ]
- H01F10/3259—Spin-exchange-coupled multilayers comprising at least a nanooxide layer [NOL], e.g. with a NOL spacer
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Power Engineering (AREA)
- Mram Or Spin Memory Techniques (AREA)
- Hall/Mr Elements (AREA)
Description
新しいタイプのメモリは、一般に利用されている形態のメモリと競うように大きな可能性を示してきた。たとえば、不揮発性のスピン移動トルクランダムアクセスメモリ(本明細書ではST−RAMと称する)は、「普遍的な」メモリとして扱われてきた。磁気トンネル接合(magnetic tunnel junction)(MTJ)セルは、高速であり、比較的高密度であり、消費電力が少ないので、ST−RAMでの用途で非常に注目されてきた。
本開示は、関連の強磁性層の磁気異方性(すなわち、磁化方向)をウェハ面に垂直にまたは「面外に」位置合わせさせた、しばしば磁気トンネル接合セルと称される磁気スピントルクメモリセル、およびそれらを利用する方法に関する。
本開示は、関連の強磁性層の磁化方向をウェハ面に垂直にまたは「面外に」位置合わせさせた磁気異方性を有する磁気トンネル接合(MTJ)セルのさまざまな実施例に向けられる。
Claims (9)
- 磁気メモリシステムであって、
強磁性自由層と、障壁層と、強磁性基準層とを有する磁気トンネル接合セルを備え、前記障壁層は、前記強磁性基準層と前記強磁性自由層との間に位置決めされ、前記強磁性自由層および前記強磁性基準層の磁化方向は面外であり、前記磁気メモリシステムはさらに、
前記磁気トンネル接合セルに電気的に接続され、前記磁気トンネル接合セルへのデータのビットの記憶のために、電流の流れる方向が周期的に変化するACスイッチング電流を供給するAC電流源と、
前記磁気トンネル接合セルに電気的に接続され、前記ACスイッチング電流が前記磁気トンネル接合セルに供給されているときにはDC電流を前記磁気トンネル接合セルに通さず、前記磁気トンネル接合セルからのデータの読取時にDC読取電流を前記磁気トンネル接合セルに通すDC電流源とを備え、
前記DC電流源からのDC読取電流の振幅は、前記AC電流源からのACスイッチング電流の振幅未満の振幅を有する、磁気メモリシステム。 - 前記強磁性自由層および前記強磁性基準層の磁化方向は垂直である、請求項1に記載の磁気メモリシステム。
- アレイ状に構成された複数の磁気トンネル接合セルをさらに備える、請求項1に記載の磁気メモリシステム。
- 各々が前記AC電流源と前記DC電流源とに電気的に接続された、アレイ状に構成された複数の磁気トンネル接合セルをさらに備える、請求項1に記載の磁気メモリシステム。
- データを電子的に記憶する方法であって、
面外磁気トンネル接合メモリセルを提供するステップを備え、前記面外磁気トンネル接合メモリセルは、強磁性自由層と、障壁層と、強磁性基準層とを備え、前記障壁層は、前記強磁性基準層と前記強磁性自由層との間に位置決めされ、前記強磁性自由層および前記強磁性基準層の磁化方向は面外であり、前記方法はさらに、
電流の流れる方向が周期的に変化するACスイッチング電流を前記面外磁気トンネル接合メモリセルに通すステップを備え、前記ACスイッチング電流は、前記強磁性自由層の磁化方向を切換え、それによってデータのビットを記憶し、前記方法はさらに、
DC読取電流を前記面外磁気トンネル接合メモリセルに通して、前記面外磁気トンネル接合メモリセルの抵抗を検知するステップを備え、前記DC読取電流は、前記ACスイッチング電流の振幅未満の振幅を有し、
前記ACスイッチング電流が前記磁気トンネル接合セルに供給されているときには、DC電流を前記磁気トンネル接合セルに通さない、方法。 - 前記ACスイッチング電流は、前記強磁性自由層の磁気回転周波数と一致させられる、請求項5に記載の方法。
- 前記ACスイッチング電流は、前記面外磁気トンネル接合メモリセルを迂回する磁場を引起す、請求項6に記載の方法。
- 前記ACスイッチング電流は、前記強磁性基準層から前記強磁性自由層に、または、前記強磁性自由層から前記強磁性基準層に通される、請求項5に記載の方法。
- 前記強磁性自由層の磁化方向を二度目に切換えるために、第2のACスイッチング電流を前記面外磁気トンネル接合メモリセルに通すステップをさらに備える、請求項5に記載の方法。
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US12/946,900 US8508973B2 (en) | 2010-11-16 | 2010-11-16 | Method of switching out-of-plane magnetic tunnel junction cells |
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JP2012109554A (ja) | 2012-06-07 |
US8792264B2 (en) | 2014-07-29 |
JP2013201458A (ja) | 2013-10-03 |
CN102467954B (zh) | 2014-12-17 |
KR101338050B1 (ko) | 2013-12-09 |
US8508973B2 (en) | 2013-08-13 |
US20130329490A1 (en) | 2013-12-12 |
US20120120708A1 (en) | 2012-05-17 |
CN102467954A (zh) | 2012-05-23 |
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