JP5973756B2 - 焦点位置変更装置およびこれを用いた共焦点光学装置 - Google Patents

焦点位置変更装置およびこれを用いた共焦点光学装置 Download PDF

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Publication number
JP5973756B2
JP5973756B2 JP2012057103A JP2012057103A JP5973756B2 JP 5973756 B2 JP5973756 B2 JP 5973756B2 JP 2012057103 A JP2012057103 A JP 2012057103A JP 2012057103 A JP2012057103 A JP 2012057103A JP 5973756 B2 JP5973756 B2 JP 5973756B2
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Japan
Prior art keywords
rotating plate
optical path
light source
light
path changing
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JP2012057103A
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Japanese (ja)
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JP2013190624A (ja
JP2013190624A5 (enExample
Inventor
満宏 石原
満宏 石原
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Takaoka Toko Co Ltd
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Takaoka Toko Co Ltd
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Application filed by Takaoka Toko Co Ltd filed Critical Takaoka Toko Co Ltd
Priority to JP2012057103A priority Critical patent/JP5973756B2/ja
Priority to US13/610,112 priority patent/US9435982B2/en
Priority to TW101136680A priority patent/TWI486555B/zh
Priority to KR1020120118659A priority patent/KR101428864B1/ko
Priority to CN201210488295.2A priority patent/CN103309030B/zh
Publication of JP2013190624A publication Critical patent/JP2013190624A/ja
Publication of JP2013190624A5 publication Critical patent/JP2013190624A5/ja
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Publication of JP5973756B2 publication Critical patent/JP5973756B2/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/248—Base structure objective (or ocular) turrets
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/14—Mountings, adjusting means, or light-tight connections, for optical elements for lenses adapted to interchange lenses
    • G02B7/16—Rotatable turrets
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Lens Barrels (AREA)
JP2012057103A 2012-03-14 2012-03-14 焦点位置変更装置およびこれを用いた共焦点光学装置 Active JP5973756B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2012057103A JP5973756B2 (ja) 2012-03-14 2012-03-14 焦点位置変更装置およびこれを用いた共焦点光学装置
US13/610,112 US9435982B2 (en) 2012-03-14 2012-09-11 Focus position changing apparatus and confocal optical apparatus using the same
TW101136680A TWI486555B (zh) 2012-03-14 2012-10-04 焦點位置改變裝置及使用其之共焦光學裝置
KR1020120118659A KR101428864B1 (ko) 2012-03-14 2012-10-24 초점 위치 변경 장치 및 이를 이용한 공초점 광학 장치
CN201210488295.2A CN103309030B (zh) 2012-03-14 2012-11-26 焦点位置改变设备及使用其的共焦光学设备

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012057103A JP5973756B2 (ja) 2012-03-14 2012-03-14 焦点位置変更装置およびこれを用いた共焦点光学装置

Publications (3)

Publication Number Publication Date
JP2013190624A JP2013190624A (ja) 2013-09-26
JP2013190624A5 JP2013190624A5 (enExample) 2015-02-12
JP5973756B2 true JP5973756B2 (ja) 2016-08-23

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Family Applications (1)

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JP2012057103A Active JP5973756B2 (ja) 2012-03-14 2012-03-14 焦点位置変更装置およびこれを用いた共焦点光学装置

Country Status (5)

Country Link
US (1) US9435982B2 (enExample)
JP (1) JP5973756B2 (enExample)
KR (1) KR101428864B1 (enExample)
CN (1) CN103309030B (enExample)
TW (1) TWI486555B (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2511852B1 (de) * 2011-04-15 2013-03-13 Sick Ag Beleuchtungsvorrichtung für einen kamerabasierten Codeleser
CN105258686B (zh) * 2015-10-22 2019-02-01 青岛镭创光电技术有限公司 激光投线仪
US10254105B2 (en) * 2016-12-05 2019-04-09 Quality Vision International, Inc. Exchangeable lens module system for probes of optical measuring machines
JP6819362B2 (ja) * 2017-03-02 2021-01-27 オムロン株式会社 共焦点計測装置
JP2022552093A (ja) * 2019-10-19 2022-12-15 アポロ メディカル オプティクス，エルティーディー． 光学システムおよびその干渉対物モジュール
TWI885129B (zh) * 2021-04-16 2025-06-01 安盟生技股份有限公司 干涉物鏡模組、使用其之干涉系統及成像方法
CN115091107B (zh) * 2022-08-24 2023-04-25 中国工程物理研究院激光聚变研究中心 一种用于激光加工的高精度装夹装置及装夹方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH095046A (ja) * 1995-06-21 1997-01-10 Takaoka Electric Mfg Co Ltd 立体形状測定装置
US6426835B1 (en) * 1999-03-23 2002-07-30 Olympus Optical Co., Ltd. Confocal microscope
JP2001083426A (ja) 1999-07-09 2001-03-30 Olympus Optical Co Ltd 共焦点顕微鏡
JP2001093426A (ja) * 1999-09-28 2001-04-06 Matsushita Electric Ind Co Ltd Ａｃ型プラズマディスプレイパネルおよびその駆動方法
JP2001133695A (ja) * 1999-11-01 2001-05-18 Nikon Corp 顕微鏡装置
ES2292571T3 (es) * 2000-03-27 2008-03-16 Toyota Jidosha Kabushiki Kaisha Dispositivo de depuracion de gas de escape.
TW555954B (en) * 2001-02-28 2003-10-01 Olympus Optical Co Confocal microscope, optical height-measurement method, automatic focusing method
JP4148350B2 (ja) 2002-05-24 2008-09-10 独立行政法人科学技術振興機構 共焦点顕微鏡及び微小開口回転盤
JP2005010516A (ja) * 2003-06-19 2005-01-13 Olympus Corp 顕微鏡
US8238019B2 (en) * 2003-11-01 2012-08-07 Silicon Quest Kabushiki-Kaisha Projection apparatus with coherent light source
EP1806601B1 (en) * 2004-10-27 2012-01-11 Nikon Corporation Optical element manufacturing method, nipkow disc, confocal optical system, and 3d measurement device
JP2006235250A (ja) * 2005-02-25 2006-09-07 Nikon Corp 測定顕微鏡
TWI279580B (en) * 2005-12-22 2007-04-21 Metal Ind Res & Dev Ct Co-focal microscopic imaging system with adjustable light source pattern
JP4867354B2 (ja) 2006-01-16 2012-02-01 横河電機株式会社 共焦点顕微鏡
JP4678601B2 (ja) * 2006-08-15 2011-04-27 横河電機株式会社 創薬スクリーニング装置
JP2008096895A (ja) * 2006-10-16 2008-04-24 Olympus Corp 顕微鏡用照明装置
WO2008069220A1 (ja) * 2006-11-30 2008-06-12 Nikon Corporation 結像装置及び顕微鏡
JP4970211B2 (ja) * 2007-10-18 2012-07-04 ヘキサゴン・メトロジー株式会社 ３次元形状測定器
WO2009055607A1 (en) * 2007-10-23 2009-04-30 Sherman Kenneth L Improved removable, rotatable gobo holder assembly
JP2009168964A (ja) 2008-01-15 2009-07-30 Nikon Corp 共焦点顕微鏡

Also Published As

Publication number Publication date
US20130242396A1 (en) 2013-09-19
CN103309030A (zh) 2013-09-18
CN103309030B (zh) 2016-01-27
JP2013190624A (ja) 2013-09-26
TWI486555B (zh) 2015-06-01
TW201337215A (zh) 2013-09-16
KR20130105267A (ko) 2013-09-25
US9435982B2 (en) 2016-09-06
KR101428864B1 (ko) 2014-08-14

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