KR101428864B1 - 초점 위치 변경 장치 및 이를 이용한 공초점 광학 장치 - Google Patents

초점 위치 변경 장치 및 이를 이용한 공초점 광학 장치 Download PDF

Info

Publication number
KR101428864B1
KR101428864B1 KR1020120118659A KR20120118659A KR101428864B1 KR 101428864 B1 KR101428864 B1 KR 101428864B1 KR 1020120118659 A KR1020120118659 A KR 1020120118659A KR 20120118659 A KR20120118659 A KR 20120118659A KR 101428864 B1 KR101428864 B1 KR 101428864B1
Authority
KR
South Korea
Prior art keywords
light
plate
objective lens
light source
path changing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020120118659A
Other languages
English (en)
Korean (ko)
Other versions
KR20130105267A (ko
Inventor
미쯔히로 이시하라
Original Assignee
가부시키가이샤 다카오카 세이사쿠쇼
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 다카오카 세이사쿠쇼 filed Critical 가부시키가이샤 다카오카 세이사쿠쇼
Publication of KR20130105267A publication Critical patent/KR20130105267A/ko
Application granted granted Critical
Publication of KR101428864B1 publication Critical patent/KR101428864B1/ko
Assigned to 가부시끼가이샤 도꼬 다까오까 reassignment 가부시끼가이샤 도꼬 다까오까 권리의 전부이전등록 Assignors: 가부시키가이샤 다카오카 세이사쿠쇼
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/14—Mountings, adjusting means, or light-tight connections, for optical elements for lenses adapted to interchange lenses
    • G02B7/16—Rotatable turrets
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/248—Base structure objective (or ocular) turrets
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Lens Barrels (AREA)
KR1020120118659A 2012-03-14 2012-10-24 초점 위치 변경 장치 및 이를 이용한 공초점 광학 장치 Active KR101428864B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2012-057103 2012-03-14
JP2012057103A JP5973756B2 (ja) 2012-03-14 2012-03-14 焦点位置変更装置およびこれを用いた共焦点光学装置

Publications (2)

Publication Number Publication Date
KR20130105267A KR20130105267A (ko) 2013-09-25
KR101428864B1 true KR101428864B1 (ko) 2014-08-14

Family

ID=49134432

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020120118659A Active KR101428864B1 (ko) 2012-03-14 2012-10-24 초점 위치 변경 장치 및 이를 이용한 공초점 광학 장치

Country Status (5)

Country Link
US (1) US9435982B2 (enExample)
JP (1) JP5973756B2 (enExample)
KR (1) KR101428864B1 (enExample)
CN (1) CN103309030B (enExample)
TW (1) TWI486555B (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2511852B1 (de) * 2011-04-15 2013-03-13 Sick Ag Beleuchtungsvorrichtung für einen kamerabasierten Codeleser
CN105258686B (zh) * 2015-10-22 2019-02-01 青岛镭创光电技术有限公司 激光投线仪
US10254105B2 (en) * 2016-12-05 2019-04-09 Quality Vision International, Inc. Exchangeable lens module system for probes of optical measuring machines
JP6819362B2 (ja) * 2017-03-02 2021-01-27 オムロン株式会社 共焦点計測装置
EP4044898A4 (en) * 2019-10-19 2023-10-18 Apollo Medical Optics, Ltd. OPTICAL SYSTEM AND INTERFERENCE LENS MODULE THEREOF
TWI885129B (zh) * 2021-04-16 2025-06-01 安盟生技股份有限公司 干涉物鏡模組、使用其之干涉系統及成像方法
CN115091107B (zh) * 2022-08-24 2023-04-25 中国工程物理研究院激光聚变研究中心 一种用于激光加工的高精度装夹装置及装夹方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001083426A (ja) 1999-07-09 2001-03-30 Olympus Optical Co Ltd 共焦点顕微鏡
JP2003344778A (ja) 2002-05-24 2003-12-03 Japan Science & Technology Corp 共焦点顕微鏡及び微小開口回転盤
JP2007187945A (ja) 2006-01-16 2007-07-26 Yokogawa Electric Corp 共焦点顕微鏡
JP2009168964A (ja) 2008-01-15 2009-07-30 Nikon Corp 共焦点顕微鏡

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH095046A (ja) * 1995-06-21 1997-01-10 Takaoka Electric Mfg Co Ltd 立体形状測定装置
US6426835B1 (en) * 1999-03-23 2002-07-30 Olympus Optical Co., Ltd. Confocal microscope
JP2001093426A (ja) * 1999-09-28 2001-04-06 Matsushita Electric Ind Co Ltd Ａｃ型プラズマディスプレイパネルおよびその駆動方法
JP2001133695A (ja) * 1999-11-01 2001-05-18 Nikon Corp 顕微鏡装置
WO2001073271A1 (en) * 2000-03-27 2001-10-04 Toyota Jidosha Kabushiki Kaisha Exhaust gas cleaning device
TW555954B (en) * 2001-02-28 2003-10-01 Olympus Optical Co Confocal microscope, optical height-measurement method, automatic focusing method
JP2005010516A (ja) * 2003-06-19 2005-01-13 Olympus Corp 顕微鏡
US8238019B2 (en) * 2003-11-01 2012-08-07 Silicon Quest Kabushiki-Kaisha Projection apparatus with coherent light source
US7704402B2 (en) * 2004-10-27 2010-04-27 Nikon Corporation Optical element manufacturing method, optical element, Nipkow disk, confocal optical system and 3-D measurement device
JP2006235250A (ja) * 2005-02-25 2006-09-07 Nikon Corp 測定顕微鏡
TWI279580B (en) * 2005-12-22 2007-04-21 Metal Ind Res & Dev Ct Co-focal microscopic imaging system with adjustable light source pattern
JP4678601B2 (ja) * 2006-08-15 2011-04-27 横河電機株式会社 創薬スクリーニング装置
JP2008096895A (ja) * 2006-10-16 2008-04-24 Olympus Corp 顕微鏡用照明装置
JPWO2008069220A1 (ja) * 2006-11-30 2010-03-18 株式会社ニコン 結像装置及び顕微鏡
JP4970211B2 (ja) * 2007-10-18 2012-07-04 ヘキサゴン・メトロジー株式会社 ３次元形状測定器
US8042974B2 (en) * 2007-10-23 2011-10-25 American Dj Supply, Inc. Removable, rotatable gobo holder assembly

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001083426A (ja) 1999-07-09 2001-03-30 Olympus Optical Co Ltd 共焦点顕微鏡
JP2003344778A (ja) 2002-05-24 2003-12-03 Japan Science & Technology Corp 共焦点顕微鏡及び微小開口回転盤
JP2007187945A (ja) 2006-01-16 2007-07-26 Yokogawa Electric Corp 共焦点顕微鏡
JP2009168964A (ja) 2008-01-15 2009-07-30 Nikon Corp 共焦点顕微鏡

Also Published As

Publication number Publication date
US9435982B2 (en) 2016-09-06
TWI486555B (zh) 2015-06-01
US20130242396A1 (en) 2013-09-19
CN103309030B (zh) 2016-01-27
JP2013190624A (ja) 2013-09-26
TW201337215A (zh) 2013-09-16
KR20130105267A (ko) 2013-09-25
JP5973756B2 (ja) 2016-08-23
CN103309030A (zh) 2013-09-18

Similar Documents

Publication Publication Date Title
KR101409644B1 (ko) 입체 형상 계측 장치
KR100474100B1 (ko) 공초점 현미경 및 이것을 이용한 높이 측정방법
US8610902B2 (en) Apparatus and method for inspecting an object with increased depth of field
JP3350918B2 (ja) ２次元配列型共焦点光学装置
CN1602421B (zh) 点格栅阵列成像系统
JP5999121B2 (ja) 共焦点光スキャナ
KR20130105267A (ko) 초점 위치 변경 장치 및 이를 이용한 공초점 광학 장치
JP5268061B2 (ja) 基板検査装置
CN1677240A (zh) 曝光装置
JP2000275027A (ja) スリット共焦点顕微鏡とそれを用いた表面形状計測装置
JP6090607B2 (ja) 共焦点スキャナ、共焦点顕微鏡
US7420691B2 (en) Method and apparatus for measuring interfacial positions, method and apparatus for measuring layer thickness, and method and apparatus for manufacturing optical discs
RU2540453C2 (ru) Микроскоп, устройство получения изображения и система получения изображения
JPWO2019159427A1 (ja) カメラモジュール調整装置及びカメラモジュール調整方法
JP3509088B2 (ja) ３次元形状計測用光学装置
KR102814284B1 (ko) 공초점 센싱 시스템
KR102964860B1 (ko) 입체 형상 계측 장치
JP2014048192A (ja) 物体検出装置および情報取得装置
JP2013011492A (ja) 三次元画像取得装置および三次元画像取得方法
JP2005107098A (ja) 共焦点型検査装置
JP2003279311A (ja) 光学式高さ測定装置及び方法
US20240118529A1 (en) Sample observation apparatus
JP2004144932A (ja) 共焦点顕微鏡システム

Legal Events

Date Code Title Description
A201 Request for examination
PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

D13-X000 Search requested

St.27 status event code: A-1-2-D10-D13-srh-X000

D14-X000 Search report completed

St.27 status event code: A-1-2-D10-D14-srh-X000

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U11-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

PN2301 Change of applicant

St.27 status event code: A-5-5-R10-R11-asn-PN2301

PN2301 Change of applicant

St.27 status event code: A-5-5-R10-R14-asn-PN2301

PN2301 Change of applicant

St.27 status event code: A-5-5-R10-R13-asn-PN2301

St.27 status event code: A-5-5-R10-R11-asn-PN2301

FPAY Annual fee payment

Payment date: 20170612

Year of fee payment: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

FPAY Annual fee payment

Payment date: 20180619

Year of fee payment: 5

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

FPAY Annual fee payment

Payment date: 20190621

Year of fee payment: 6

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

FPAY Annual fee payment

Payment date: 20200715

Year of fee payment: 7

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 7

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000

FPAY Annual fee payment

Payment date: 20210715

Year of fee payment: 8

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 8

FPAY Annual fee payment

Payment date: 20220630

Year of fee payment: 9

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 9

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 10

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 11

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 12

U11 Full renewal or maintenance fee paid

Free format text: ST27 STATUS EVENT CODE: A-4-4-U10-U11-OTH-PR1001 (AS PROVIDED BY THE NATIONAL OFFICE)

Year of fee payment: 12