JP2013190624A5 - - Google Patents

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Publication number
JP2013190624A5
JP2013190624A5 JP2012057103A JP2012057103A JP2013190624A5 JP 2013190624 A5 JP2013190624 A5 JP 2013190624A5 JP 2012057103 A JP2012057103 A JP 2012057103A JP 2012057103 A JP2012057103 A JP 2012057103A JP 2013190624 A5 JP2013190624 A5 JP 2013190624A5
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JP
Japan
Prior art keywords
optical path
path changing
rotating plate
light source
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2012057103A
Other languages
English (en)
Japanese (ja)
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JP2013190624A (ja
JP5973756B2 (ja
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Publication date
Application filed filed Critical
Priority claimed from JP2012057103A external-priority patent/JP5973756B2/ja
Priority to JP2012057103A priority Critical patent/JP5973756B2/ja
Priority to US13/610,112 priority patent/US9435982B2/en
Priority to TW101136680A priority patent/TWI486555B/zh
Priority to KR1020120118659A priority patent/KR101428864B1/ko
Priority to CN201210488295.2A priority patent/CN103309030B/zh
Publication of JP2013190624A publication Critical patent/JP2013190624A/ja
Publication of JP2013190624A5 publication Critical patent/JP2013190624A5/ja
Publication of JP5973756B2 publication Critical patent/JP5973756B2/ja
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2012057103A 2012-03-14 2012-03-14 焦点位置変更装置およびこれを用いた共焦点光学装置 Active JP5973756B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2012057103A JP5973756B2 (ja) 2012-03-14 2012-03-14 焦点位置変更装置およびこれを用いた共焦点光学装置
US13/610,112 US9435982B2 (en) 2012-03-14 2012-09-11 Focus position changing apparatus and confocal optical apparatus using the same
TW101136680A TWI486555B (zh) 2012-03-14 2012-10-04 焦點位置改變裝置及使用其之共焦光學裝置
KR1020120118659A KR101428864B1 (ko) 2012-03-14 2012-10-24 초점 위치 변경 장치 및 이를 이용한 공초점 광학 장치
CN201210488295.2A CN103309030B (zh) 2012-03-14 2012-11-26 焦点位置改变设备及使用其的共焦光学设备

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012057103A JP5973756B2 (ja) 2012-03-14 2012-03-14 焦点位置変更装置およびこれを用いた共焦点光学装置

Publications (3)

Publication Number Publication Date
JP2013190624A JP2013190624A (ja) 2013-09-26
JP2013190624A5 true JP2013190624A5 (enExample) 2015-02-12
JP5973756B2 JP5973756B2 (ja) 2016-08-23

Family

ID=49134432

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012057103A Active JP5973756B2 (ja) 2012-03-14 2012-03-14 焦点位置変更装置およびこれを用いた共焦点光学装置

Country Status (5)

Country Link
US (1) US9435982B2 (enExample)
JP (1) JP5973756B2 (enExample)
KR (1) KR101428864B1 (enExample)
CN (1) CN103309030B (enExample)
TW (1) TWI486555B (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2511852B1 (de) * 2011-04-15 2013-03-13 Sick Ag Beleuchtungsvorrichtung für einen kamerabasierten Codeleser
CN105258686B (zh) * 2015-10-22 2019-02-01 青岛镭创光电技术有限公司 激光投线仪
US10254105B2 (en) * 2016-12-05 2019-04-09 Quality Vision International, Inc. Exchangeable lens module system for probes of optical measuring machines
JP6819362B2 (ja) * 2017-03-02 2021-01-27 オムロン株式会社 共焦点計測装置
KR20220080110A (ko) * 2019-10-19 2022-06-14 아폴로 메디컬 옵틱스, 엘티디. 광학 시스템 및 그 간섭 대물렌즈 모듈
TWI885129B (zh) * 2021-04-16 2025-06-01 安盟生技股份有限公司 干涉物鏡模組、使用其之干涉系統及成像方法
CN115091107B (zh) * 2022-08-24 2023-04-25 中国工程物理研究院激光聚变研究中心 一种用于激光加工的高精度装夹装置及装夹方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH095046A (ja) * 1995-06-21 1997-01-10 Takaoka Electric Mfg Co Ltd 立体形状測定装置
US6426835B1 (en) * 1999-03-23 2002-07-30 Olympus Optical Co., Ltd. Confocal microscope
JP2001083426A (ja) 1999-07-09 2001-03-30 Olympus Optical Co Ltd 共焦点顕微鏡
JP2001093426A (ja) * 1999-09-28 2001-04-06 Matsushita Electric Ind Co Ltd Ａｃ型プラズマディスプレイパネルおよびその駆動方法
JP2001133695A (ja) * 1999-11-01 2001-05-18 Nikon Corp 顕微鏡装置
DE60131510T2 (de) * 2000-03-27 2008-10-23 Toyota Jidosha Kabushiki Kaisha, Toyota-shi Abgasreinigungsvorrichtung
TW555954B (en) * 2001-02-28 2003-10-01 Olympus Optical Co Confocal microscope, optical height-measurement method, automatic focusing method
JP4148350B2 (ja) 2002-05-24 2008-09-10 独立行政法人科学技術振興機構 共焦点顕微鏡及び微小開口回転盤
JP2005010516A (ja) * 2003-06-19 2005-01-13 Olympus Corp 顕微鏡
US8238019B2 (en) * 2003-11-01 2012-08-07 Silicon Quest Kabushiki-Kaisha Projection apparatus with coherent light source
WO2006046502A1 (ja) * 2004-10-27 2006-05-04 Nikon Corporation 光学素子の製造方法、光学素子、ニッポウディスク、コンフォーカル光学系、及び３次元測定装置
JP2006235250A (ja) * 2005-02-25 2006-09-07 Nikon Corp 測定顕微鏡
TWI279580B (en) * 2005-12-22 2007-04-21 Metal Ind Res & Dev Ct Co-focal microscopic imaging system with adjustable light source pattern
JP4867354B2 (ja) 2006-01-16 2012-02-01 横河電機株式会社 共焦点顕微鏡
JP4678601B2 (ja) * 2006-08-15 2011-04-27 横河電機株式会社 創薬スクリーニング装置
JP2008096895A (ja) * 2006-10-16 2008-04-24 Olympus Corp 顕微鏡用照明装置
JPWO2008069220A1 (ja) * 2006-11-30 2010-03-18 株式会社ニコン 結像装置及び顕微鏡
JP4970211B2 (ja) * 2007-10-18 2012-07-04 ヘキサゴン・メトロジー株式会社 ３次元形状測定器
WO2009055607A1 (en) * 2007-10-23 2009-04-30 Sherman Kenneth L Improved removable, rotatable gobo holder assembly
JP2009168964A (ja) 2008-01-15 2009-07-30 Nikon Corp 共焦点顕微鏡

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