JP5959104B2 - 貼り合せ板状体検査装置及び方法 - Google Patents
貼り合せ板状体検査装置及び方法 Download PDFInfo
- Publication number
- JP5959104B2 JP5959104B2 JP2012175895A JP2012175895A JP5959104B2 JP 5959104 B2 JP5959104 B2 JP 5959104B2 JP 2012175895 A JP2012175895 A JP 2012175895A JP 2012175895 A JP2012175895 A JP 2012175895A JP 5959104 B2 JP5959104 B2 JP 5959104B2
- Authority
- JP
- Japan
- Prior art keywords
- edge
- plate
- gray value
- inspection
- sensor panel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/60—Analysis of geometric attributes
- G06T7/62—Analysis of geometric attributes of area, perimeter, diameter or volume
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
- G01N2021/8893—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques providing a video image and a processed signal for helping visual decision
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9513—Liquid crystal panels
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Biochemistry (AREA)
- Immunology (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Signal Processing (AREA)
- Life Sciences & Earth Sciences (AREA)
- Pathology (AREA)
- Geometry (AREA)
- Theoretical Computer Science (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012175895A JP5959104B2 (ja) | 2011-09-27 | 2012-08-08 | 貼り合せ板状体検査装置及び方法 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011211257 | 2011-09-27 | ||
JP2011211257 | 2011-09-27 | ||
JP2012175895A JP5959104B2 (ja) | 2011-09-27 | 2012-08-08 | 貼り合せ板状体検査装置及び方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2013083628A JP2013083628A (ja) | 2013-05-09 |
JP2013083628A5 JP2013083628A5 (ko) | 2015-09-17 |
JP5959104B2 true JP5959104B2 (ja) | 2016-08-02 |
Family
ID=47966551
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012175895A Expired - Fee Related JP5959104B2 (ja) | 2011-09-27 | 2012-08-08 | 貼り合せ板状体検査装置及び方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5959104B2 (ko) |
KR (1) | KR101376951B1 (ko) |
CN (1) | CN103017671B (ko) |
TW (1) | TWI449877B (ko) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6322087B2 (ja) * | 2014-08-27 | 2018-05-09 | 芝浦メカトロニクス株式会社 | 検査装置及び検査方法 |
JP6128337B2 (ja) * | 2014-10-23 | 2017-05-17 | パナソニックIpマネジメント株式会社 | 半導体装置の製造方法及び製造装置 |
CN110501349B (zh) * | 2018-05-18 | 2022-04-01 | 蓝思科技(长沙)有限公司 | 一种盖板弧边检测方法和系统及其检测设备 |
JP7485973B2 (ja) | 2022-04-28 | 2024-05-17 | 日亜化学工業株式会社 | 光学部材の製造方法及び発光装置の製造方法 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2640400B2 (ja) * | 1992-03-13 | 1997-08-13 | 積水化学工業株式会社 | 画像処理による板状体の寸法算出装置 |
JP3523408B2 (ja) * | 1996-02-19 | 2004-04-26 | 東レエンジニアリング株式会社 | 凹凸状物形状測定方法および装置 |
JPH10227617A (ja) * | 1997-02-12 | 1998-08-25 | Nikon Corp | 微小線幅測定方法及び微小線幅測定装置 |
JPH11328756A (ja) * | 1998-03-13 | 1999-11-30 | Sanyo Electric Co Ltd | 貼り合せ型ディスクの接着部の検査方法および検査装置 |
JP2003016463A (ja) * | 2001-07-05 | 2003-01-17 | Toshiba Corp | 図形の輪郭の抽出方法、パターン検査方法、パターン検査装置、プログラムおよびこれを格納したコンピュータ読み取り可能な記録媒体 |
KR100521016B1 (ko) * | 2002-01-21 | 2005-10-11 | 가부시키가이샤 히다치 고쿠사이 덴키 | 선폭 측정 방법 및 선폭 측정 장치 |
JP4217112B2 (ja) * | 2002-08-01 | 2009-01-28 | 株式会社リコー | 光ディスク検査装置、光ディスク検査方法、光ディスクの製造方法及び光ディスク |
JP4193579B2 (ja) * | 2003-05-21 | 2008-12-10 | 凸版印刷株式会社 | フィルム貼り付け位置検査方法及び検査装置 |
KR20060084852A (ko) * | 2003-09-15 | 2006-07-25 | 지고 코포레이션 | 표면 3각 측량 및 박막 코팅을 통한 프로파일링 |
ES2367262T3 (es) * | 2004-08-04 | 2011-10-31 | Fms Force Measuring Systems Ag | Dispositivo y procedimiento para la detección de una marca característica en una banda de material en movimiento. |
JP4776197B2 (ja) * | 2004-09-21 | 2011-09-21 | 日本特殊陶業株式会社 | 配線基板の検査装置 |
JP4312706B2 (ja) * | 2004-12-27 | 2009-08-12 | シャープ株式会社 | 膜厚差検出装置、膜厚差検出方法、カラーフィルタ検査装置、カラーフィルタ検査方法 |
WO2008018537A1 (fr) * | 2006-08-10 | 2008-02-14 | Shibaura Mechatronics Corporation | Dispositif d'inspection de plaquette en disque et procédé d'inspection |
TWI306149B (en) * | 2007-01-05 | 2009-02-11 | Chroma Ate Inc | Optical device for sensing distance |
JP2008242191A (ja) * | 2007-03-28 | 2008-10-09 | Sharp Corp | カラーフィルタ基板の検査方法、カラーフィルタ基板の絵素の検査装置、カラーフィルタ基板の製造方法及びカラーフィルタ基板を備えた表示装置 |
JP4943237B2 (ja) * | 2007-06-07 | 2012-05-30 | 新日本製鐵株式会社 | 疵検査装置及び疵検査方法 |
JP2011009395A (ja) * | 2009-06-25 | 2011-01-13 | Nec Corp | 部品の実装装置および部品の実装方法 |
TWI393852B (zh) * | 2009-12-07 | 2013-04-21 | Univ Nat Yunlin Sci & Tech | 玻璃基板量測方法及其裝置 |
-
2012
- 2012-08-08 JP JP2012175895A patent/JP5959104B2/ja not_active Expired - Fee Related
- 2012-08-14 TW TW101129357A patent/TWI449877B/zh not_active IP Right Cessation
- 2012-08-23 KR KR1020120092053A patent/KR101376951B1/ko not_active IP Right Cessation
- 2012-09-25 CN CN201210361062.6A patent/CN103017671B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
TW201314170A (zh) | 2013-04-01 |
CN103017671B (zh) | 2016-03-02 |
KR20130033949A (ko) | 2013-04-04 |
JP2013083628A (ja) | 2013-05-09 |
KR101376951B1 (ko) | 2014-03-20 |
TWI449877B (zh) | 2014-08-21 |
CN103017671A (zh) | 2013-04-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5959104B2 (ja) | 貼り合せ板状体検査装置及び方法 | |
US8736677B2 (en) | Inspection system | |
US9088729B2 (en) | Imaging apparatus and method of controlling same | |
US9756314B2 (en) | Three-dimensional image processing apparatus, three-dimensional image processing method, three-dimensional image processing program, computer-readable recording medium, and recording device | |
US8982101B2 (en) | Optical touch system and optical touch-position detection method | |
TWI499770B (zh) | Closure plate body inspection apparatus and method | |
US7561259B2 (en) | Lamination status inspecting apparatus, lamination status inspecting method, and recording medium storing lamination status detecting program | |
JP6102330B2 (ja) | プロジェクタ | |
KR101311981B1 (ko) | 평판 디스플레이 패널 검사 장치 및 방법 | |
JP6032696B2 (ja) | 貼り合せ板状体検査装置及び方法 | |
JP2012127675A (ja) | 表面形状の評価方法および評価装置 | |
JP2013083628A5 (ko) | ||
JP2006350452A (ja) | 撮影表示装置およびそのキャリブレーションデータ算出方法 | |
US20190033229A1 (en) | Inspection device for sheet object, and inspection method for sheet object | |
JP2004219119A (ja) | 欠陥検査方法および装置 | |
JP6322087B2 (ja) | 検査装置及び検査方法 | |
JP2004294097A (ja) | 容器の口部検査装置 | |
JP2016114602A (ja) | 表面形状測定装置、および欠陥判定装置 | |
JP2017223451A (ja) | 計測装置 | |
JP4815796B2 (ja) | 欠陥検査装置 | |
JP2010281724A (ja) | 凹凸検査方法 | |
JP5603287B2 (ja) | 自動焦点装置および焦点制御方法 | |
JP2018185218A (ja) | シート状物の検査装置および検査方法 | |
JP2014139591A (ja) | 投射型表示装置 | |
US9116577B2 (en) | Sensing method of optical touch |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150730 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20150730 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20160615 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20160615 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20160620 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5959104 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
LAPS | Cancellation because of no payment of annual fees |