JP5950269B2 - 基板加工方法及び基板 - Google Patents

基板加工方法及び基板 Download PDF

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Publication number
JP5950269B2
JP5950269B2 JP2011027606A JP2011027606A JP5950269B2 JP 5950269 B2 JP5950269 B2 JP 5950269B2 JP 2011027606 A JP2011027606 A JP 2011027606A JP 2011027606 A JP2011027606 A JP 2011027606A JP 5950269 B2 JP5950269 B2 JP 5950269B2
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substrate
modified layer
processing method
polycrystalline
adhesive
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Japanese (ja)
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JP2012169361A5 (enExample
JP2012169361A (ja
Inventor
順一 池野
順一 池野
利香 松尾
利香 松尾
鈴木　秀樹
秀樹 鈴木
国司　洋介
洋介 国司
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Shin Etsu Polymer Co Ltd
Saitama University NUC
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Shin Etsu Polymer Co Ltd
Saitama University NUC
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  • Laser Beam Processing (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP2011027606A 2011-02-10 2011-02-10 基板加工方法及び基板 Active JP5950269B2 (ja)

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JP2012169361A JP2012169361A (ja) 2012-09-06
JP2012169361A5 JP2012169361A5 (enExample) 2014-04-03
JP5950269B2 true JP5950269B2 (ja) 2016-07-13

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Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014013107A1 (de) 2013-10-08 2015-04-09 Siltectra Gmbh Neuartiges Waferherstellungsverfahren
DE102015000449A1 (de) 2015-01-15 2016-07-21 Siltectra Gmbh Festkörperteilung mittels Stoffumwandlung
US11407066B2 (en) 2014-01-15 2022-08-09 Siltectra Gmbh Splitting of a solid using conversion of material
JP6298695B2 (ja) * 2014-04-16 2018-03-20 信越ポリマー株式会社 原盤製造方法及び原盤
JP2016035965A (ja) * 2014-08-01 2016-03-17 リンテック株式会社 板状部材の分割装置および板状部材の分割方法
EP4234156B1 (de) 2014-11-27 2025-10-29 Siltectra GmbH Laserbasiertes trennverfahren

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4128204B2 (ja) * 2000-09-13 2008-07-30 浜松ホトニクス株式会社 レーザ加工方法
JP2005294656A (ja) * 2004-04-02 2005-10-20 Sharp Corp 基板製造方法及び基板製造装置
JP2010021398A (ja) * 2008-07-11 2010-01-28 Disco Abrasive Syst Ltd ウェーハの処理方法
JP2010155259A (ja) * 2008-12-26 2010-07-15 Seiko Epson Corp 溝形成方法
KR101769158B1 (ko) * 2009-04-07 2017-08-17 하마마츠 포토닉스 가부시키가이샤 레이저 가공 장치 및 레이저 가공 방법
JP5398332B2 (ja) * 2009-04-16 2014-01-29 信越ポリマー株式会社 半導体ウェーハの製造方法及びその装置
JP5456382B2 (ja) * 2009-06-17 2014-03-26 信越ポリマー株式会社 半導体ウェーハの製造方法及びその装置

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