JP5943669B2 - ガルバノスキャナ及びレーザ加工装置 - Google Patents
ガルバノスキャナ及びレーザ加工装置 Download PDFInfo
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- JP5943669B2 JP5943669B2 JP2012069722A JP2012069722A JP5943669B2 JP 5943669 B2 JP5943669 B2 JP 5943669B2 JP 2012069722 A JP2012069722 A JP 2012069722A JP 2012069722 A JP2012069722 A JP 2012069722A JP 5943669 B2 JP5943669 B2 JP 5943669B2
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- coil
- yoke
- conductive mesh
- housing case
- galvano scanner
- Prior art date
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- 238000001816 cooling Methods 0.000 claims description 37
- 239000000853 adhesive Substances 0.000 claims description 19
- 230000001070 adhesive effect Effects 0.000 claims description 19
- 239000004519 grease Substances 0.000 claims description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 17
- 239000000463 material Substances 0.000 description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 238000003825 pressing Methods 0.000 description 5
- 238000005553 drilling Methods 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 239000000498 cooling water Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000005347 demagnetization Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Images
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- Mechanical Optical Scanning Systems (AREA)
- Laser Beam Processing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012069722A JP5943669B2 (ja) | 2012-03-26 | 2012-03-26 | ガルバノスキャナ及びレーザ加工装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012069722A JP5943669B2 (ja) | 2012-03-26 | 2012-03-26 | ガルバノスキャナ及びレーザ加工装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013200487A JP2013200487A (ja) | 2013-10-03 |
| JP2013200487A5 JP2013200487A5 (OSRAM) | 2014-11-06 |
| JP5943669B2 true JP5943669B2 (ja) | 2016-07-05 |
Family
ID=49520763
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012069722A Active JP5943669B2 (ja) | 2012-03-26 | 2012-03-26 | ガルバノスキャナ及びレーザ加工装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5943669B2 (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12413036B2 (en) | 2021-04-16 | 2025-09-09 | General Electric Company | Thermal control apparatus for laser system |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103676146A (zh) * | 2013-11-28 | 2014-03-26 | 成都位时通科技有限公司 | 用于扫描头的振镜装置 |
| JP6569329B2 (ja) * | 2015-06-29 | 2019-09-04 | セイコーエプソン株式会社 | 光学デバイスおよび画像表示装置 |
| CN105364305B (zh) * | 2015-12-10 | 2017-06-13 | 重庆镭宝激光科技有限公司 | 用于激光焊接机器人的焊接头 |
| CN105364306B (zh) * | 2015-12-10 | 2017-06-13 | 重庆镭宝激光科技有限公司 | 一种激光焊接机器人 |
| US10424989B2 (en) * | 2017-01-13 | 2019-09-24 | General Electric Company | Methods for manufacturing a housing for an electrical machine |
| CN109471333B (zh) * | 2017-09-08 | 2020-05-01 | 上海微电子装备（集团）股份有限公司 | 一种振镜矫正系统及方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS589102A (ja) * | 1981-07-10 | 1983-01-19 | Agency Of Ind Science & Technol | 光学フアイバ−冷却機構 |
| JP2008043133A (ja) * | 2006-08-09 | 2008-02-21 | Hitachi Via Mechanics Ltd | 揺動アクチュエータ装置およびレーザ加工装置 |
| JP2009069392A (ja) * | 2007-09-12 | 2009-04-02 | Canon Inc | 揺動体装置、揺動体装置によって構成される光偏向器及び画像形成装置 |
| JP2011129640A (ja) * | 2009-12-16 | 2011-06-30 | Hitachi Cable Ltd | ディンプル板およびその製造方法、並びに放熱板およびその製造方法 |
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2012
- 2012-03-26 JP JP2012069722A patent/JP5943669B2/ja active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12413036B2 (en) | 2021-04-16 | 2025-09-09 | General Electric Company | Thermal control apparatus for laser system |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2013200487A (ja) | 2013-10-03 |
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