JP2013200487A5 - - Google Patents

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Publication number
JP2013200487A5
JP2013200487A5 JP2012069722A JP2012069722A JP2013200487A5 JP 2013200487 A5 JP2013200487 A5 JP 2013200487A5 JP 2012069722 A JP2012069722 A JP 2012069722A JP 2012069722 A JP2012069722 A JP 2012069722A JP 2013200487 A5 JP2013200487 A5 JP 2013200487A5
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JP
Japan
Prior art keywords
stator
mover
cooling jacket
water
mesh
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JP2012069722A
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English (en)
Japanese (ja)
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JP2013200487A (ja
JP5943669B2 (ja
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Priority to JP2012069722A priority Critical patent/JP5943669B2/ja
Priority claimed from JP2012069722A external-priority patent/JP5943669B2/ja
Publication of JP2013200487A publication Critical patent/JP2013200487A/ja
Publication of JP2013200487A5 publication Critical patent/JP2013200487A5/ja
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Publication of JP5943669B2 publication Critical patent/JP5943669B2/ja
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JP2012069722A 2012-03-26 2012-03-26 ガルバノスキャナ及びレーザ加工装置 Active JP5943669B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012069722A JP5943669B2 (ja) 2012-03-26 2012-03-26 ガルバノスキャナ及びレーザ加工装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012069722A JP5943669B2 (ja) 2012-03-26 2012-03-26 ガルバノスキャナ及びレーザ加工装置

Publications (3)

Publication Number Publication Date
JP2013200487A JP2013200487A (ja) 2013-10-03
JP2013200487A5 true JP2013200487A5 (OSRAM) 2014-11-06
JP5943669B2 JP5943669B2 (ja) 2016-07-05

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ID=49520763

Family Applications (1)

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JP2012069722A Active JP5943669B2 (ja) 2012-03-26 2012-03-26 ガルバノスキャナ及びレーザ加工装置

Country Status (1)

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JP (1) JP5943669B2 (OSRAM)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103676146A (zh) * 2013-11-28 2014-03-26 成都位时通科技有限公司 用于扫描头的振镜装置
JP6569329B2 (ja) * 2015-06-29 2019-09-04 セイコーエプソン株式会社 光学デバイスおよび画像表示装置
CN105364305B (zh) * 2015-12-10 2017-06-13 重庆镭宝激光科技有限公司 用于激光焊接机器人的焊接头
CN105364306B (zh) * 2015-12-10 2017-06-13 重庆镭宝激光科技有限公司 一种激光焊接机器人
US10424989B2 (en) * 2017-01-13 2019-09-24 General Electric Company Methods for manufacturing a housing for an electrical machine
CN109471333B (zh) * 2017-09-08 2020-05-01 上海微电子装备（集团）股份有限公司 一种振镜矫正系统及方法
US12413036B2 (en) 2021-04-16 2025-09-09 General Electric Company Thermal control apparatus for laser system

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS589102A (ja) * 1981-07-10 1983-01-19 Agency Of Ind Science & Technol 光学フアイバ−冷却機構
JP2008043133A (ja) * 2006-08-09 2008-02-21 Hitachi Via Mechanics Ltd 揺動アクチュエータ装置およびレーザ加工装置
JP2009069392A (ja) * 2007-09-12 2009-04-02 Canon Inc 揺動体装置、揺動体装置によって構成される光偏向器及び画像形成装置
JP2011129640A (ja) * 2009-12-16 2011-06-30 Hitachi Cable Ltd ディンプル板およびその製造方法、並びに放熱板およびその製造方法

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