JP5919719B2 - シャッター装置 - Google Patents

シャッター装置 Download PDF

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Publication number
JP5919719B2
JP5919719B2 JP2011228073A JP2011228073A JP5919719B2 JP 5919719 B2 JP5919719 B2 JP 5919719B2 JP 2011228073 A JP2011228073 A JP 2011228073A JP 2011228073 A JP2011228073 A JP 2011228073A JP 5919719 B2 JP5919719 B2 JP 5919719B2
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JP
Japan
Prior art keywords
shutter
unit
axis direction
shutter device
connecting portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2011228073A
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English (en)
Japanese (ja)
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JP2013090103A5 (cg-RX-API-DMAC7.html
JP2013090103A (ja
Inventor
孝司 齋場
孝司 齋場
文哉 伊藤
文哉 伊藤
嗣久馬 飯島
嗣久馬 飯島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2011228073A priority Critical patent/JP5919719B2/ja
Publication of JP2013090103A publication Critical patent/JP2013090103A/ja
Publication of JP2013090103A5 publication Critical patent/JP2013090103A5/ja
Application granted granted Critical
Publication of JP5919719B2 publication Critical patent/JP5919719B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Physical Vapour Deposition (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2011228073A 2011-10-17 2011-10-17 シャッター装置 Expired - Fee Related JP5919719B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011228073A JP5919719B2 (ja) 2011-10-17 2011-10-17 シャッター装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011228073A JP5919719B2 (ja) 2011-10-17 2011-10-17 シャッター装置

Publications (3)

Publication Number Publication Date
JP2013090103A JP2013090103A (ja) 2013-05-13
JP2013090103A5 JP2013090103A5 (cg-RX-API-DMAC7.html) 2014-11-27
JP5919719B2 true JP5919719B2 (ja) 2016-05-18

Family

ID=48533607

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011228073A Expired - Fee Related JP5919719B2 (ja) 2011-10-17 2011-10-17 シャッター装置

Country Status (1)

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JP (1) JP5919719B2 (cg-RX-API-DMAC7.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5944353B2 (ja) * 2013-07-17 2016-07-05 サンダース アンド アソシエイツ エルエルシー 水晶振動子のエッチング方法、及び、エッチング装置。
CN109440078B (zh) * 2019-01-02 2020-12-04 京东方科技集团股份有限公司 薄膜监测装置和薄膜监测方法
CN114752894B (zh) * 2022-04-14 2022-12-16 东莞市华升真空镀膜科技有限公司 沉积源挡板机构及具有该沉积源挡板机构的镀膜设备

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01142451U (cg-RX-API-DMAC7.html) * 1988-03-18 1989-09-29
JP4591570B2 (ja) * 2008-07-28 2010-12-01 株式会社村田製作所 周波数調整装置
JP5265407B2 (ja) * 2009-02-13 2013-08-14 株式会社アルバック 真空蒸着方法
JP5671242B2 (ja) * 2010-03-03 2015-02-18 サンダース アンド アソシエイツ エルエルシー エッチング装置

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Publication number Publication date
JP2013090103A (ja) 2013-05-13

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