JP2013090103A5 - - Google Patents

Download PDF

Info

Publication number
JP2013090103A5
JP2013090103A5 JP2011228073A JP2011228073A JP2013090103A5 JP 2013090103 A5 JP2013090103 A5 JP 2013090103A5 JP 2011228073 A JP2011228073 A JP 2011228073A JP 2011228073 A JP2011228073 A JP 2011228073A JP 2013090103 A5 JP2013090103 A5 JP 2013090103A5
Authority
JP
Japan
Prior art keywords
shutter
shutter device
axis
axial direction
axial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011228073A
Other languages
English (en)
Japanese (ja)
Other versions
JP5919719B2 (ja
JP2013090103A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2011228073A priority Critical patent/JP5919719B2/ja
Priority claimed from JP2011228073A external-priority patent/JP5919719B2/ja
Publication of JP2013090103A publication Critical patent/JP2013090103A/ja
Publication of JP2013090103A5 publication Critical patent/JP2013090103A5/ja
Application granted granted Critical
Publication of JP5919719B2 publication Critical patent/JP5919719B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2011228073A 2011-10-17 2011-10-17 シャッター装置 Expired - Fee Related JP5919719B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011228073A JP5919719B2 (ja) 2011-10-17 2011-10-17 シャッター装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011228073A JP5919719B2 (ja) 2011-10-17 2011-10-17 シャッター装置

Publications (3)

Publication Number Publication Date
JP2013090103A JP2013090103A (ja) 2013-05-13
JP2013090103A5 true JP2013090103A5 (cg-RX-API-DMAC7.html) 2014-11-27
JP5919719B2 JP5919719B2 (ja) 2016-05-18

Family

ID=48533607

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011228073A Expired - Fee Related JP5919719B2 (ja) 2011-10-17 2011-10-17 シャッター装置

Country Status (1)

Country Link
JP (1) JP5919719B2 (cg-RX-API-DMAC7.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5944353B2 (ja) * 2013-07-17 2016-07-05 サンダース アンド アソシエイツ エルエルシー 水晶振動子のエッチング方法、及び、エッチング装置。
CN109440078B (zh) * 2019-01-02 2020-12-04 京东方科技集团股份有限公司 薄膜监测装置和薄膜监测方法
CN114752894B (zh) * 2022-04-14 2022-12-16 东莞市华升真空镀膜科技有限公司 沉积源挡板机构及具有该沉积源挡板机构的镀膜设备

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01142451U (cg-RX-API-DMAC7.html) * 1988-03-18 1989-09-29
JP4591570B2 (ja) * 2008-07-28 2010-12-01 株式会社村田製作所 周波数調整装置
JP5265407B2 (ja) * 2009-02-13 2013-08-14 株式会社アルバック 真空蒸着方法
JP5671242B2 (ja) * 2010-03-03 2015-02-18 サンダース アンド アソシエイツ エルエルシー エッチング装置

Similar Documents

Publication Publication Date Title
WO2011155809A3 (ko) 소형 카메라 엑츄에이터 및 소형 입체영상 촬영장치
JP6568034B2 (ja) レンズ駆動装置、カメラ装置及び電子機器
JP2014508049A5 (cg-RX-API-DMAC7.html)
EP2960716A3 (en) Lens drive apparatus, camera module and camera
JP2010191411A5 (cg-RX-API-DMAC7.html)
EP2607204A3 (en) Steering apparatus
WO2013074970A8 (en) Motive device for use in magnetically-sensitive environments
EP3012676A3 (en) Miniature lens driving apparatus
JP2012237736A5 (ja) 直動アクチュエータ及び加振装置
JP2013080327A5 (cg-RX-API-DMAC7.html)
WO2012164052A3 (en) Electrical machines
FR2972064B1 (fr) Procede de cryptographie comprenant une operation d'exponentiation
JP2013090103A5 (cg-RX-API-DMAC7.html)
JP2010152182A5 (cg-RX-API-DMAC7.html)
WO2008149796A1 (ja) 光走査用アクチュエータ
JP2017011797A5 (cg-RX-API-DMAC7.html)
JP2008139639A5 (cg-RX-API-DMAC7.html)
US8369037B2 (en) Actuator assembly and optical system having the same
JP2013140309A5 (cg-RX-API-DMAC7.html)
WO2014185877A3 (en) A laser processing machine with a movement mechanism including a joint
JP2013125233A5 (cg-RX-API-DMAC7.html)
JP2014528230A5 (cg-RX-API-DMAC7.html)
JP2017151234A5 (cg-RX-API-DMAC7.html)
JP2016122044A5 (cg-RX-API-DMAC7.html)
GB2428105B (en) Optical image stabilizer