JP5899187B2 - 透過型光電陰極 - Google Patents
透過型光電陰極 Download PDFInfo
- Publication number
- JP5899187B2 JP5899187B2 JP2013228044A JP2013228044A JP5899187B2 JP 5899187 B2 JP5899187 B2 JP 5899187B2 JP 2013228044 A JP2013228044 A JP 2013228044A JP 2013228044 A JP2013228044 A JP 2013228044A JP 5899187 B2 JP5899187 B2 JP 5899187B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- transmissive
- photocathode
- photoelectric conversion
- conductive layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000005540 biological transmission Effects 0.000 title description 9
- 239000010410 layer Substances 0.000 claims description 110
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 49
- 238000006243 chemical reaction Methods 0.000 claims description 44
- 239000000758 substrate Substances 0.000 claims description 42
- 229910021389 graphene Inorganic materials 0.000 claims description 34
- 239000002356 single layer Substances 0.000 claims description 5
- 238000002834 transmittance Methods 0.000 description 13
- 230000035945 sensitivity Effects 0.000 description 12
- 239000002585 base Substances 0.000 description 11
- 239000000463 material Substances 0.000 description 11
- 229910021393 carbon nanotube Inorganic materials 0.000 description 8
- 239000002041 carbon nanotube Substances 0.000 description 8
- 229910002804 graphite Inorganic materials 0.000 description 8
- 239000010439 graphite Substances 0.000 description 8
- 238000005259 measurement Methods 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 5
- 239000004020 conductor Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 239000011889 copper foil Substances 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 229910052787 antimony Inorganic materials 0.000 description 3
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000003595 spectral effect Effects 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 229910052792 caesium Inorganic materials 0.000 description 2
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 229910052700 potassium Inorganic materials 0.000 description 2
- 239000011591 potassium Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000006228 supernatant Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/34—Photo-emissive cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/32—Secondary-electron-emitting electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J40/00—Photoelectric discharge tubes not involving the ionisation of a gas
- H01J40/02—Details
- H01J40/04—Electrodes
- H01J40/06—Photo-emissive cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
- H01J43/04—Electron multipliers
- H01J43/06—Electrode arrangements
- H01J43/08—Cathode arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
- H01J43/04—Electron multipliers
- H01J43/06—Electrode arrangements
- H01J43/10—Dynodes
Landscapes
- Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
Description
1.CNTとグラファイトの混合粉末をアルコールに溶かして攪拌する。
2.グラファイト片が沈殿するまで放置する。
3.上澄み液を採取する。
4.サンプル基板(Φ1インチコルツ板)をヒーターで200℃に加熱する。
5.コルツ板上に3で採取した上澄み液をスポイトで1滴垂らす。
6.アルコールが蒸発したことを確認した後に5を再度実行する。
Claims (3)
- 光が入射する一面、及び前記一面側から入射した前記光を出射する他面を有する光透過性基板と、
前記光透過性基板の前記他面側に設けられ、前記他面から出射される前記光を光電子に変換する光電変換層と、
前記光透過性基板と前記光電変換層との間に設けられるグラフェンからなる光透過性導電層と、
を備える透過型光電陰極。 - 前記光透過性導電層は、単層のグラフェンからなることを特徴とする請求項1記載の透過型光電陰極。
- 前記光透過性導電層は、多層のグラフェンからなることを特徴とする請求項1記載の透過型光電陰極。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013228044A JP5899187B2 (ja) | 2013-11-01 | 2013-11-01 | 透過型光電陰極 |
PCT/JP2014/071089 WO2015064173A1 (ja) | 2013-11-01 | 2014-08-08 | 透過型光電陰極 |
EP14858313.1A EP3065159B1 (en) | 2013-11-01 | 2014-08-08 | Electron tube with transmission photocathode |
US15/029,336 US9824844B2 (en) | 2013-11-01 | 2014-08-08 | Transmission mode photocathode |
CN201480058539.0A CN105684122B (zh) | 2013-11-01 | 2014-08-08 | 透过型光电阴极 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013228044A JP5899187B2 (ja) | 2013-11-01 | 2013-11-01 | 透過型光電陰極 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015088403A JP2015088403A (ja) | 2015-05-07 |
JP5899187B2 true JP5899187B2 (ja) | 2016-04-06 |
Family
ID=53003789
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013228044A Active JP5899187B2 (ja) | 2013-11-01 | 2013-11-01 | 透過型光電陰極 |
Country Status (5)
Country | Link |
---|---|
US (1) | US9824844B2 (ja) |
EP (1) | EP3065159B1 (ja) |
JP (1) | JP5899187B2 (ja) |
CN (1) | CN105684122B (ja) |
WO (1) | WO2015064173A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20200032088A (ko) | 2017-08-04 | 2020-03-25 | 하마마츠 포토닉스 가부시키가이샤 | 투과형 광전 음극 및 전자관 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102075065B1 (ko) * | 2017-02-16 | 2020-02-07 | 동우 화인켐 주식회사 | 터치 센서 및 이의 제조 방법 |
JP6958827B1 (ja) | 2020-05-20 | 2021-11-02 | 国立大学法人静岡大学 | 光電陰極及び光電陰極の製造方法 |
CN112185795B (zh) * | 2020-09-11 | 2022-08-02 | 中国科学院西安光学精密机械研究所 | 一种基于硅电子倍增器的混合型大面积光电倍增管 |
CN113512470A (zh) * | 2021-03-31 | 2021-10-19 | 杭州安誉科技有限公司 | 光电倍增管用光电阴极及其制备方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03108244A (ja) * | 1989-09-18 | 1991-05-08 | Philips Gloeilampenfab:Nv | 光電管の光電陰極用接点装置及びその製造方法 |
JP2598730B2 (ja) * | 1991-09-11 | 1997-04-09 | 株式会社荏原総合研究所 | 微粒子の荷電方法及び装置 |
JP2001202873A (ja) | 2000-01-17 | 2001-07-27 | Hamamatsu Photonics Kk | 光電子又は二次電子放射用陰極、光電子増倍管及び電子増倍管 |
JP4116294B2 (ja) | 2002-01-07 | 2008-07-09 | 浜松ホトニクス株式会社 | 光電面および光電変換管 |
JP2003338260A (ja) | 2002-05-21 | 2003-11-28 | Hamamatsu Photonics Kk | 半導体光電面とその製造方法、及びこの半導体光電面を用いた光検出管 |
JP4459635B2 (ja) * | 2004-01-16 | 2010-04-28 | 浜松ホトニクス株式会社 | 電子管及びその製造方法 |
JP4410027B2 (ja) * | 2004-05-24 | 2010-02-03 | 浜松ホトニクス株式会社 | 光電陰極及び電子管 |
JP4772414B2 (ja) * | 2005-08-05 | 2011-09-14 | 浜松ホトニクス株式会社 | 透過型光電面及び光検出器 |
CN1945776A (zh) | 2006-10-10 | 2007-04-11 | 四川天微电子有限责任公司 | 一种光电阴极和利用该阴极的真空紫外光电器件的制备工艺 |
JP2008135350A (ja) * | 2006-11-29 | 2008-06-12 | Hamamatsu Photonics Kk | 半導体光電陰極 |
JP5308078B2 (ja) | 2008-06-13 | 2013-10-09 | 浜松ホトニクス株式会社 | 光電陰極 |
NL1037800C2 (en) * | 2010-03-12 | 2011-09-13 | Photonis France Sas | A PHOTO CATHODE FOR USE IN A VACUUM TUBE AS WELL AS SUCH A VACUUM TUBE. |
US8872159B2 (en) * | 2011-09-29 | 2014-10-28 | The United States Of America, As Represented By The Secretary Of The Navy | Graphene on semiconductor detector |
US8823259B2 (en) * | 2012-05-07 | 2014-09-02 | Los Alamos National Security, Llc. | Graphene shield enhanced photocathodes and methods for making the same |
JP5955713B2 (ja) * | 2012-09-18 | 2016-07-20 | 浜松ホトニクス株式会社 | 光電陰極 |
CN203551109U (zh) | 2013-11-26 | 2014-04-16 | 四川天微电子有限责任公司 | 紫外线探测传感器 |
-
2013
- 2013-11-01 JP JP2013228044A patent/JP5899187B2/ja active Active
-
2014
- 2014-08-08 WO PCT/JP2014/071089 patent/WO2015064173A1/ja active Application Filing
- 2014-08-08 US US15/029,336 patent/US9824844B2/en active Active
- 2014-08-08 EP EP14858313.1A patent/EP3065159B1/en active Active
- 2014-08-08 CN CN201480058539.0A patent/CN105684122B/zh active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20200032088A (ko) | 2017-08-04 | 2020-03-25 | 하마마츠 포토닉스 가부시키가이샤 | 투과형 광전 음극 및 전자관 |
US10790129B2 (en) | 2017-08-04 | 2020-09-29 | Hamamatsu Photonics K.K. | Transmissive photocathode and electron tube |
Also Published As
Publication number | Publication date |
---|---|
EP3065159A4 (en) | 2017-06-28 |
EP3065159A1 (en) | 2016-09-07 |
US20160233044A1 (en) | 2016-08-11 |
CN105684122A (zh) | 2016-06-15 |
WO2015064173A1 (ja) | 2015-05-07 |
EP3065159B1 (en) | 2019-10-02 |
CN105684122B (zh) | 2018-01-05 |
US9824844B2 (en) | 2017-11-21 |
JP2015088403A (ja) | 2015-05-07 |
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