JP5895414B2 - 分光測定装置、及び分光測定方法 - Google Patents

分光測定装置、及び分光測定方法 Download PDF

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Publication number
JP5895414B2
JP5895414B2 JP2011203285A JP2011203285A JP5895414B2 JP 5895414 B2 JP5895414 B2 JP 5895414B2 JP 2011203285 A JP2011203285 A JP 2011203285A JP 2011203285 A JP2011203285 A JP 2011203285A JP 5895414 B2 JP5895414 B2 JP 5895414B2
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gap amount
peak
gap
unit
measurement
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JP2011203285A
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English (en)
Japanese (ja)
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JP2013064640A (ja
JP2013064640A5 (enExample
Inventor
達昭 舟本
達昭 舟本
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2011203285A priority Critical patent/JP5895414B2/ja
Priority to US13/606,813 priority patent/US20130070247A1/en
Publication of JP2013064640A publication Critical patent/JP2013064640A/ja
Publication of JP2013064640A5 publication Critical patent/JP2013064640A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/027—Control of working procedures of a spectrometer; Failure detection; Bandwidth calculation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
JP2011203285A 2011-09-16 2011-09-16 分光測定装置、及び分光測定方法 Active JP5895414B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2011203285A JP5895414B2 (ja) 2011-09-16 2011-09-16 分光測定装置、及び分光測定方法
US13/606,813 US20130070247A1 (en) 2011-09-16 2012-09-07 Spectroscopic measurement device, and spectroscopic measurement method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011203285A JP5895414B2 (ja) 2011-09-16 2011-09-16 分光測定装置、及び分光測定方法

Publications (3)

Publication Number Publication Date
JP2013064640A JP2013064640A (ja) 2013-04-11
JP2013064640A5 JP2013064640A5 (enExample) 2014-10-30
JP5895414B2 true JP5895414B2 (ja) 2016-03-30

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JP2011203285A Active JP5895414B2 (ja) 2011-09-16 2011-09-16 分光測定装置、及び分光測定方法

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US (1) US20130070247A1 (enExample)
JP (1) JP5895414B2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5919728B2 (ja) * 2011-10-26 2016-05-18 セイコーエプソン株式会社 分光測定装置
JP5811789B2 (ja) * 2011-11-09 2015-11-11 セイコーエプソン株式会社 分光測定装置
JP6098051B2 (ja) 2012-07-04 2017-03-22 セイコーエプソン株式会社 分光測定装置
JP5987573B2 (ja) * 2012-09-12 2016-09-07 セイコーエプソン株式会社 光学モジュール、電子機器、及び駆動方法
JP2015141209A (ja) * 2014-01-27 2015-08-03 セイコーエプソン株式会社 アクチュエーター制御装置、光学モジュール、及び電子機器
JP6679959B2 (ja) 2016-02-02 2020-04-15 セイコーエプソン株式会社 分光測定装置、及び分光測定方法
US11614553B2 (en) * 2019-12-30 2023-03-28 Halliburton Energy Services, Inc. Fiber optic cable depth calibration and downhole applications
WO2021146670A1 (en) * 2020-01-17 2021-07-22 Spectrove Inc. Mems device for interferometric spectroscopy

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0723708Y2 (ja) * 1988-09-30 1995-05-31 横河電機株式会社 レーザ周波数計
JP2002071562A (ja) * 2000-09-04 2002-03-08 Yokogawa Electric Corp 赤外分光測定装置
US6713770B2 (en) * 2001-01-29 2004-03-30 Cymer, Inc. High resolution spectral measurement device
JP2002257725A (ja) * 2001-03-02 2002-09-11 Advantest Corp ピーク検出方法及び装置
JP4504078B2 (ja) * 2004-04-26 2010-07-14 オリンパス株式会社 エアギャップ可変式分光透過率可変素子のエアギャップ基準位置調整構造及びエアギャップ可変式分光透過率可変素子のエアギャップ基準位置調整構造を備えた光学装置
JP2008292249A (ja) * 2007-05-23 2008-12-04 Hitachi High-Tech Manufacturing & Service Corp 分光光度計
JP2011106936A (ja) * 2009-11-17 2011-06-02 Seiko Epson Corp 分光測定装置、および分析装置

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US20130070247A1 (en) 2013-03-21
JP2013064640A (ja) 2013-04-11

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