JP5854996B2 - 光電気装置及びその製造方法 - Google Patents
光電気装置及びその製造方法 Download PDFInfo
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- JP5854996B2 JP5854996B2 JP2012523578A JP2012523578A JP5854996B2 JP 5854996 B2 JP5854996 B2 JP 5854996B2 JP 2012523578 A JP2012523578 A JP 2012523578A JP 2012523578 A JP2012523578 A JP 2012523578A JP 5854996 B2 JP5854996 B2 JP 5854996B2
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
- B05D5/12—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain a coating with specific electrical properties
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect
- G02F1/153—Constructional details
- G02F1/1533—Constructional details structural features not otherwise provided for
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/62—Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/80—Constructional details
- H10K10/82—Electrodes
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
- H10K50/81—Anodes
- H10K50/818—Reflective anodes, e.g. ITO combined with thick metallic layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K77/00—Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
- H10K77/10—Substrates, e.g. flexible substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/844—Encapsulations
- H10K50/8445—Encapsulations multilayered coatings having a repetitive structure, e.g. having multiple organic-inorganic bilayers
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/846—Passivation; Containers; Encapsulations comprising getter material or desiccants
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Nonlinear Science (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Electroluminescent Light Sources (AREA)
- Photovoltaic Devices (AREA)
Description
− 第1の、金属基板を提供するステップ(S1)と、
− 金属基板の第1主面をパターン化するステップ(S2)であって、それとともに、前記第1主面に突出及び後退部分を作る、パターン化するステップ(S2)と、
− 前記金属基板の第1主面で第1バリア層構造を堆積するステップ(S3)と、
− 前記第1主面と反対側の第2主面で金属基板から材料を除去するステップ(S4)であって、それとともに前記後退部分と対向する側の第1バリア層構造を暴露する、材料を除去するステップ(S4)と、
前記金属基板から材料が除去された、前記第1バリア層構造の側に機能的構造を付加するステップ(S5)と、
第2バリア層構造を付加するステップ(S6)と、を具備する。
− 第1バリア層構造及び第2バリア層構造の間に囲まれた機能層構造を備え、
− 該装置は、オープンな、電気的に相互接続された導電性構造を有し、それは第1バリア層構造内に埋め込まれ、それは該バリア層構造内に横方向に延在する金属の少なくとも1つの細長のエレメントを具備し、そしてそれは機能層構造に接触して配置されるものを有し、その電気的に相互接続された導電性構造は、横方向に向かって、第1バリア層中に埋め込まれた処理された表面を有する。
したがって、機能的構造の他の側上の電極は、透明である必要はないので、それゆえ、相対的に厚くすることができ、それにともなって、良好な導電性を有することができる。同じことが、光起電力エレメントにも当てはまる。もし、環境からの光が機能層に導電性構造を経由して届けば、十分である。
図5Cは、導電性構造12i,12jのペアを示し、それぞれ櫛構造の形態で、互いに把持している。
10a 第1金属層
10b 第2金属層
10c エッチストップ層
11 金属基板の第1主面
12 突出部分、第1電極層、導電性構造
12a 細長のエレメント
12b 細長のエレメント
12c 細長のエレメント
12f 複数の細長のエレメント
12g バスバー
12i,j 導電性構造
13 後退部分
14 防護層、導電フレーム
15 金属基板の第2主面
20 第1バリア構造
30 機能的構造
32 ホール注入層
34 発光層
36 第2電極層
40 第2バリア構造
50 基板
91 第1外部電気接点
92 中間導体
93 外部接点
94 横断電気的接続
105b 金層
Claims (8)
- 薄膜光電気装置(1)を製造する方法であって、以下のステップ
− 第1の、金属基板(10)を提供するステップ(S1)と、
− 前記金属基板の第1主面(11)をパターン化するステップ(S2)であって、それとともに、前記第1主面に突出(12)及び後退部分(13)を作る、パターン化するステップ(S2)と、
− 前記金属基板(12)の第1主面(11)で第1バリア層構造(20)を堆積するステップ(S3)であって、前記第1バリア層構造が、少なくとも第1無機層及び第2無機層を含む積層体である、ステップ(S3)と、
− 前記第1主面(11)と反対側の第2主面(15)で金属基板から材料を除去するステップ(S4)であって、それとともに前記後退部分の対向側の第1バリア層構造(20)を暴露する、材料を除去するステップ(S4)と、
− 前記金属基板から材料が除去された、前記第1バリア層構造(20)の側に、機能的構造(30)を付加するステップ(S5)と、
− 第1バリア層構造の対抗側の機能的構造の側に、第2バリア層構造(40)を付加するステップ(S6)と、
を備える、薄膜光電気装置(1)を製造する方法。 - 前記金属基板(10)の第1主面(11)をパターン化するステップ(S2)は、前記第1主面上にパターン化された防護層(14)を付加するサブステップと、前記パターン化された防護層(14)を備えた金属基板(10)をエッチングするサブステップを備える、請求項1に記載の方法。
- 前記金属基板(10)の第1主面(11)をパターン化するステップ(S2)が機械的プロセスで実行される、請求項1に記載の方法。
- 前記金属基板(10)の第2主面(15)から材料を除去するステップ(S4)が、ホモジニアスエッチング方法により実行される、請求項1に記載の方法。
- 前記金属基板(10)の第2主面(15)から材料を除去するステップ(S4)がポリッシング方法により実行される、請求項1に記載の方法。
- 有機材料の基板(50)が、材料を前記金属基板(10)の第2主面(15)から除去する前に、バリア構造(20)の自由表面に付加される、請求項1に記載の方法。
- 前記金属基板(10)は、エッチストップ層(10c)により分離される第1及び第2金属層(10a、10b)を備え、前記エッチストップ層(10c)は、前記第2主面での前記金属基板から材料を除去するステップ(S4)の後で、且つ機能的構造(30)を付加するステップ(S5)の前に、除去される、請求項4に記載の方法。
- 前記第2主面(15)から材料を除去するステップ(S4)の後、導電性材料が、第1バリア層構造(20)内に残る突出部分(12)により規定されるパターンに従って、印刷される、請求項1に記載の方法。
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EP09167416A EP2282360A1 (en) | 2009-08-06 | 2009-08-06 | Opto-electric device and method for manufacturing the same |
EP09167416.8 | 2009-08-06 | ||
PCT/NL2010/050498 WO2011016724A1 (en) | 2009-08-06 | 2010-08-06 | Opto-electric device and method for manufacturing the same |
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EP (2) | EP2282360A1 (ja) |
JP (1) | JP5854996B2 (ja) |
KR (1) | KR20120054620A (ja) |
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2009
- 2009-08-06 EP EP09167416A patent/EP2282360A1/en not_active Withdrawn
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2010
- 2010-08-06 KR KR1020127005961A patent/KR20120054620A/ko not_active Application Discontinuation
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- 2010-08-06 JP JP2012523578A patent/JP5854996B2/ja not_active Expired - Fee Related
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JP2013501341A (ja) | 2013-01-10 |
WO2011016724A1 (en) | 2011-02-10 |
US9333531B2 (en) | 2016-05-10 |
EP2282360A1 (en) | 2011-02-09 |
KR20120054620A (ko) | 2012-05-30 |
US20130075777A1 (en) | 2013-03-28 |
EP2462639A1 (en) | 2012-06-13 |
CN102576803B (zh) | 2015-07-22 |
CN102576803A (zh) | 2012-07-11 |
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