JP5824318B2 - 圧力スイング吸着処理による精製水素ガスの製造装置および方法 - Google Patents
圧力スイング吸着処理による精製水素ガスの製造装置および方法 Download PDFInfo
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- JP5824318B2 JP5824318B2 JP2011230270A JP2011230270A JP5824318B2 JP 5824318 B2 JP5824318 B2 JP 5824318B2 JP 2011230270 A JP2011230270 A JP 2011230270A JP 2011230270 A JP2011230270 A JP 2011230270A JP 5824318 B2 JP5824318 B2 JP 5824318B2
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- 238000001179 sorption measurement Methods 0.000 title claims description 118
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 title claims description 84
- 238000004519 manufacturing process Methods 0.000 title claims description 20
- 239000007789 gas Substances 0.000 claims description 98
- 239000003463 adsorbent Substances 0.000 claims description 32
- 239000011261 inert gas Substances 0.000 claims description 32
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 32
- 238000000034 method Methods 0.000 claims description 21
- 230000008929 regeneration Effects 0.000 claims description 20
- 238000011069 regeneration method Methods 0.000 claims description 20
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 10
- 238000006243 chemical reaction Methods 0.000 claims description 10
- 229910052710 silicon Inorganic materials 0.000 claims description 9
- 239000010703 silicon Substances 0.000 claims description 9
- 238000000151 deposition Methods 0.000 claims description 6
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 claims description 6
- 239000005052 trichlorosilane Substances 0.000 claims description 6
- 230000008021 deposition Effects 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 2
- 238000001556 precipitation Methods 0.000 claims description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 17
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 17
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 17
- 239000012535 impurity Substances 0.000 description 12
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 9
- 229910052739 hydrogen Inorganic materials 0.000 description 9
- 239000005046 Chlorosilane Substances 0.000 description 8
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 description 8
- 239000001257 hydrogen Substances 0.000 description 8
- 238000004821 distillation Methods 0.000 description 7
- 238000010926 purge Methods 0.000 description 6
- 239000012466 permeate Substances 0.000 description 5
- 239000006200 vaporizer Substances 0.000 description 5
- 238000004061 bleaching Methods 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 238000013459 approach Methods 0.000 description 3
- 239000007844 bleaching agent Substances 0.000 description 3
- 238000000746 purification Methods 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000006837 decompression Effects 0.000 description 2
- 238000001165 gas chromatography-thermal conductivity detection Methods 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- 241001494479 Pecora Species 0.000 description 1
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- 229910021536 Zeolite Inorganic materials 0.000 description 1
- 238000005660 chlorination reaction Methods 0.000 description 1
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 1
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 1
- 239000011863 silicon-based powder Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 239000010457 zeolite Substances 0.000 description 1
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- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
- C01B3/50—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification
- C01B3/56—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification by contacting with solids; Regeneration of used solids
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/002—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by condensation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
- B01D53/047—Pressure swing adsorption
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- B01D—SEPARATION
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- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/68—Halogens or halogen compounds
- B01D53/685—Halogens or halogen compounds by treating the gases with solids
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/75—Multi-step processes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/102—Carbon
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2256/00—Main component in the product gas stream after treatment
- B01D2256/16—Hydrogen
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
- B01D2257/204—Inorganic halogen compounds
- B01D2257/2045—Hydrochloric acid
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
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- B01D2257/553—Compounds comprising hydrogen, e.g. silanes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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- B01D2258/00—Sources of waste gases
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- B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/40—Further details for adsorption processes and devices
- B01D2259/40007—Controlling pressure or temperature swing adsorption
- B01D2259/40009—Controlling pressure or temperature swing adsorption using sensors or gas analysers
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- B01D2259/40011—Methods relating to the process cycle in pressure or temperature swing adsorption
- B01D2259/40043—Purging
- B01D2259/4005—Nature of purge gas
- B01D2259/40052—Recycled product or process gas
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- B01D2259/40011—Methods relating to the process cycle in pressure or temperature swing adsorption
- B01D2259/40058—Number of sequence steps, including sub-steps, per cycle
- B01D2259/4006—Less than four
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- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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- B01D2259/404—Further details for adsorption processes and devices using four beds
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- Environmental & Geological Engineering (AREA)
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- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
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- Combustion & Propulsion (AREA)
- Separation Of Gases By Adsorption (AREA)
- Silicon Compounds (AREA)
- Hydrogen, Water And Hydrids (AREA)
Description
実施形態および実施例は説明のために述べられており、それに限定されるものではない。当業者により、添付の請求項に定義されるように、関連の保護範囲から逸脱することなく、変更および/もしくは修正がなされてよいことが理解されなければならない。
2 H2供給管(H2供給ライン)
3 ガス供給部
4 精製H2排出ライン
5 検出器
6 再生ガス供給ライン
7 再生ガス排出ライン
Claims (18)
- 圧力スイング吸着処理による精製水素ガスの製造装置であって、
未精製水素ガスに不活性ガスを添加するガス供給部と、
吸着剤が充填され、供給されてきた未精製水素ガスを精製する吸着塔と、
前記吸着塔から排出される精製水素ガス中の不活性ガスを測定する検出器と
を備えることを特徴とする精製水素ガス製造装置。 - 多結晶シリコンを製造する多結晶シリコンの析出反応から排出された水素ガスを精製し、前記水素ガスを前記反応に戻す多結晶シリコンの製造装置であって、
トリクロロシランを水素ガスと反応させることにより、多結晶シリコンをシリコンシードロッド上に析出させる反応器と、
前記反応器から排出された未精製水素ガスを分離する凝縮器と、
不活性ガスを前記未精製水素ガスに添加するガス供給部と、
吸着剤が充填され、供給されてきた未精製水素ガスを精製する吸着塔と、
前記吸着塔から排出される精製水素ガス中の不活性ガスを測定する検出器と
を備えることを特徴とする装置。 - 前記吸着塔の再生のために、前記排出された精製水素ガスの一部を前記吸着塔に戻す戻りラインをさらに備えることを特徴とする請求項2に記載の装置。
- 圧力スイング吸着処理による精製水素ガスの製造方法であって、
未精製水素ガスに不活性ガスを添加するステップと、
前記未精製水素ガスを吸着塔に供給し、圧力スイング吸着により精製するステップと、
前記吸着塔から排出される精製水素ガス中の不活性ガスを検出するステップと
を備えることを特徴とする精製水素ガス製造方法。 - 多結晶シリコンの析出反応から排出された水素ガスを精製し、前記水素ガスを前記反応に戻す多結晶シリコンの製造方法であって、
反応器においてトリクロロシランを水素ガスと反応させることにより、多結晶シリコンをシリコンシードロッド上に析出させるステップと、
前記反応器から排出されたガスを凝縮することにより未精製水素ガスを分離するステップと、
不活性ガスを前記未精製水素ガスに添加するステップと、
吸着塔に前記未精製水素ガスを供給し、圧力スイング吸着により精製するステップと、
前記吸着塔から排出される精製水素ガス中の不活性ガスを検出するステップと
を備えることを特徴とする多結晶シリコン製造方法。 - 前記吸着塔の再生のために、前記排出された精製水素ガスの一部を前記吸着塔に戻すステップをさらに備えることを特徴とする請求項5に記載の方法。
- 前記不活性ガスはArガスであることを特徴とする請求項1に記載の装置。
- 前記不活性ガスはArガスであることを特徴とする請求項2に記載の装置。
- 前記不活性ガスはArガスであることを特徴とする請求項4に記載の方法。
- 前記不活性ガスはArガスであることを特徴とする請求項5に記載の方法。
- 前記検出器は、0.15から0.3重量%の範囲内のArガスを測定することを特徴とする請求項7に記載の装置。
- 前記検出器は、0.15から0.3重量%の範囲内のArガスを測定することを特徴とする請求項8に記載の装置。
- Arガスは0.15から0.3重量%の範囲内で検出されることを特徴とする請求項9に記載の方法。
- Arガスは0.15から0.3重量%の範囲内で検出されることを特徴とする請求項10に記載の方法。
- 前記検出器は0.59から0.76MPaGの範囲の吸着塔の圧力下において、Arガスを測定することを特徴とする請求項7に記載の装置。
- 前記検出器は0.59から0.76MPaGの範囲の吸着塔の圧力下において、Arガスを測定することを特徴とする請求項8に記載の装置。
- Arガスは、0.59から0.76MPaGの範囲の吸着塔の圧力下において検出されることを特徴とする請求項9に記載の方法。
- Arガスは、0.59から0.76MPaGの範囲の吸着塔の圧力下において検出されることを特徴とする請求項10に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/917,875 US8241401B2 (en) | 2010-11-02 | 2010-11-02 | Apparatus and method for producing purified hydrogen gas by a pressure swing adsorption processes |
US12/917,875 | 2010-11-02 |
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JP2012096984A JP2012096984A (ja) | 2012-05-24 |
JP5824318B2 true JP5824318B2 (ja) | 2015-11-25 |
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Families Citing this family (8)
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JP2014189480A (ja) * | 2013-03-28 | 2014-10-06 | Sumitomo Seika Chem Co Ltd | 水素ガスの精製方法および精製装置 |
CN105879578A (zh) * | 2016-05-26 | 2016-08-24 | 煤炭工业合肥设计研究院 | 一种新型的煤矿瓦斯提浓用吸附设备塔 |
CN109843800B (zh) * | 2016-10-12 | 2022-06-07 | 株式会社德山 | 多晶硅的制造方法 |
JP6822285B2 (ja) * | 2017-03-31 | 2021-01-27 | 三菱マテリアル株式会社 | 水素混合ガスの製造方法 |
CN109092010B (zh) * | 2018-05-29 | 2021-01-15 | 浙江天采云集科技股份有限公司 | 一种led-mocvd制程废气全温程变压吸附提氢再利用的方法 |
BR112021021605A2 (pt) * | 2019-05-31 | 2021-12-21 | Haldor Topsoe As | Purificação de hidrogênio |
CN110436414A (zh) * | 2019-07-31 | 2019-11-12 | 武汉钢铁有限公司 | 一种高纯氢气净化设备 |
JP2022094106A (ja) * | 2020-12-14 | 2022-06-24 | キオクシア株式会社 | 半導体装置 |
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