JP2005536336A - 廃棄ガス流の利用 - Google Patents
廃棄ガス流の利用 Download PDFInfo
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- JP2005536336A JP2005536336A JP2004530384A JP2004530384A JP2005536336A JP 2005536336 A JP2005536336 A JP 2005536336A JP 2004530384 A JP2004530384 A JP 2004530384A JP 2004530384 A JP2004530384 A JP 2004530384A JP 2005536336 A JP2005536336 A JP 2005536336A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
- B01D53/229—Integrated processes (Diffusion and at least one other process, e.g. adsorption, absorption)
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
- C01B3/02—Production of hydrogen or of gaseous mixtures containing a substantial proportion of hydrogen
- C01B3/04—Production of hydrogen or of gaseous mixtures containing a substantial proportion of hydrogen by decomposition of inorganic compounds, e.g. ammonia
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
- B01D53/047—Pressure swing adsorption
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/86—Catalytic processes
- B01D53/8621—Removing nitrogen compounds
- B01D53/8634—Ammonia
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
- C01B3/02—Production of hydrogen or of gaseous mixtures containing a substantial proportion of hydrogen
- C01B3/04—Production of hydrogen or of gaseous mixtures containing a substantial proportion of hydrogen by decomposition of inorganic compounds, e.g. ammonia
- C01B3/047—Decomposition of ammonia
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
- C01B3/50—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
- C01B3/50—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification
- C01B3/501—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification by diffusion
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
- C01B3/50—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification
- C01B3/56—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification by contacting with solids; Regeneration of used solids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2256/00—Main component in the product gas stream after treatment
- B01D2256/16—Hydrogen
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
- B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
- C01B2203/04—Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
- C01B2203/0405—Purification by membrane separation
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
- C01B2203/04—Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
- C01B2203/042—Purification by adsorption on solids
- C01B2203/043—Regenerative adsorption process in two or more beds, one for adsorption, the other for regeneration
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
- C01B2203/04—Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
- C01B2203/0465—Composition of the impurity
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/36—Hydrogen production from non-carbon containing sources, e.g. by water electrolysis
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Combustion & Propulsion (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- General Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Hydrogen, Water And Hydrids (AREA)
- Treating Waste Gases (AREA)
Abstract
Description
Claims (13)
- 半導体処理ステップからのアンモニア含有廃棄ガス流の利用方法であって、
上記廃棄ガス流に含まれるアンモニアを水素と窒素に分解するステップと、
そのようにして得られたガス流を、そのガス流から水素ガス
を分離するために、水素分離装置に通すステップと、
分離した水素ガスを精製装置で精製するステップと、
精製した水素ガスを半導体処理に使用するステップと、
を有することを特徴とする廃棄ガス流の利用方法。 - 上記半導体処理は、窒化ガリウムエピタキシーであり、上記精製した水素ガスは、その半導体処理に使用するためにリサイクルされる請求項1記載の廃棄ガス流の利用方法。
- 水素分離装置は、圧力変動吸着装置である請求項1又は2記載の廃棄ガス流の利用方法。
- 精製装置は、パラジウム精製装置である請求項1乃至3の何れか一項に記載の廃棄ガス流の利用方法。
- アンモニア分解ステップは、アンモニアを高温触媒と接触させるステップを有する請求項1乃至4の何れか一項に記載の廃棄ガス流の利用方法。
- 上記水素分離装置から流れ出る水素ガスは、少なくとも99%の純度を有する請求項1乃至5の何れか一項に記載の廃棄ガス流の利用方法。
- 上記精製装置から流れ出る精製した水素は、少なくとも99.99%の純度を有する請求項1乃至6の何れか一項に記載の廃棄ガス流の利用方法。
- 上記水素分離装置から流れ出る水素ガスは、上記精製装置で精製される前に、新しい水素と混合される請求項1乃至7の何れか一項に記載の廃棄ガス流の利用方法。
- 上記精製装置から流れ出る精製した水素ガスは、更なる水素と混合され、混合した水素ガス流は、半導体処理に利用される請求項1乃至8の何れか一項に記載の廃棄ガス流の利用方法。
- 半導体製品の製造装置であって、
半導体処理装置と、
水素を回収するための廃棄ガス回収ループと、
を有し、
上記廃棄ガス回収ループは、
上記半導体処理装置からの廃棄ガスを受け入れ、アンモニアを分解し、窒素及び水素を含有するクラッキング装置流出物を形成するアンモニアクラッキング装置と、
上記アンモニアクラッキング装置流出物から水素を分離するための水素分離装置と、
分離された水素を精製するための精製装置と、
上記精製装置からの精製水素を上記半導体処理装置に再利用するためのリサイクルラインと、
を有することを特徴とする半導体製品の製造装置。 - 上記半導体処理装置は、窒化ガリウムエピタキシーチャンバである請求項10記載の半導体製品の製造装置。
- 上記水素分離装置は、圧力変動吸着装置である請求項10又は11記載の半導体製品の製造装置。
- 上記水素精製装置は、パラジウム精製装置である請求項10乃至12の何れか一項に記載の半導体製品の製造装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0219735.8A GB0219735D0 (en) | 2002-08-23 | 2002-08-23 | Utilisation of waste gas streams |
PCT/GB2003/003670 WO2004018353A1 (en) | 2002-08-23 | 2003-08-22 | Utilisation of waste gas streams |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2005536336A true JP2005536336A (ja) | 2005-12-02 |
Family
ID=9942913
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004530384A Pending JP2005536336A (ja) | 2002-08-23 | 2003-08-22 | 廃棄ガス流の利用 |
Country Status (8)
Country | Link |
---|---|
US (1) | US20060099123A1 (ja) |
EP (1) | EP1532072A1 (ja) |
JP (1) | JP2005536336A (ja) |
KR (1) | KR20050058491A (ja) |
CN (1) | CN1678517A (ja) |
AU (1) | AU2003259341A1 (ja) |
GB (1) | GB0219735D0 (ja) |
WO (1) | WO2004018353A1 (ja) |
Cited By (5)
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WO2012120773A1 (ja) * | 2011-03-07 | 2012-09-13 | カンケンテクノ株式会社 | アンモニア除害装置 |
JP2014124584A (ja) * | 2012-12-26 | 2014-07-07 | Japan Pionics Co Ltd | アンモニア及び水素の回収方法及びその再利用方法 |
JP2014154792A (ja) * | 2013-02-13 | 2014-08-25 | Japan Pionics Co Ltd | アンモニア及び水素の回収方法及び再利用方法 |
JP2014214060A (ja) * | 2013-04-26 | 2014-11-17 | 日本パイオニクス株式会社 | 水素の回収方法及びそれを用いた水素の再利用方法 |
JP2015000842A (ja) * | 2013-06-18 | 2015-01-05 | 日本パイオニクス株式会社 | アンモニアの回収方法及びそれを用いたアンモニアの再利用方法 |
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-
2002
- 2002-08-23 GB GBGB0219735.8A patent/GB0219735D0/en not_active Ceased
-
2003
- 2003-08-22 JP JP2004530384A patent/JP2005536336A/ja active Pending
- 2003-08-22 AU AU2003259341A patent/AU2003259341A1/en not_active Abandoned
- 2003-08-22 WO PCT/GB2003/003670 patent/WO2004018353A1/en active Application Filing
- 2003-08-22 KR KR1020057003105A patent/KR20050058491A/ko active IP Right Grant
- 2003-08-22 US US10/524,927 patent/US20060099123A1/en not_active Abandoned
- 2003-08-22 EP EP03792512A patent/EP1532072A1/en not_active Withdrawn
- 2003-08-22 CN CNA038199858A patent/CN1678517A/zh active Pending
Patent Citations (3)
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JPH08150320A (ja) * | 1994-06-13 | 1996-06-11 | Japan Pionics Co Ltd | 排ガスの浄化方法 |
JPH08306623A (ja) * | 1995-04-28 | 1996-11-22 | Furukawa Electric Co Ltd:The | 気相成長装置 |
JP2002191923A (ja) * | 2000-12-25 | 2002-07-10 | Sumitomo Seika Chem Co Ltd | 水素ガスの分離方法 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012120773A1 (ja) * | 2011-03-07 | 2012-09-13 | カンケンテクノ株式会社 | アンモニア除害装置 |
US9120072B2 (en) | 2011-03-07 | 2015-09-01 | Kanken Techno Co., Ltd. | Ammonia detoxification device |
JP5893606B2 (ja) * | 2011-03-07 | 2016-03-23 | カンケンテクノ株式会社 | アンモニア除害装置 |
JP2014124584A (ja) * | 2012-12-26 | 2014-07-07 | Japan Pionics Co Ltd | アンモニア及び水素の回収方法及びその再利用方法 |
JP2014154792A (ja) * | 2013-02-13 | 2014-08-25 | Japan Pionics Co Ltd | アンモニア及び水素の回収方法及び再利用方法 |
JP2014214060A (ja) * | 2013-04-26 | 2014-11-17 | 日本パイオニクス株式会社 | 水素の回収方法及びそれを用いた水素の再利用方法 |
JP2015000842A (ja) * | 2013-06-18 | 2015-01-05 | 日本パイオニクス株式会社 | アンモニアの回収方法及びそれを用いたアンモニアの再利用方法 |
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AU2003259341A1 (en) | 2004-03-11 |
WO2004018353A1 (en) | 2004-03-04 |
EP1532072A1 (en) | 2005-05-25 |
GB0219735D0 (en) | 2002-10-02 |
US20060099123A1 (en) | 2006-05-11 |
KR20050058491A (ko) | 2005-06-16 |
CN1678517A (zh) | 2005-10-05 |
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