JP5815404B2 - 圧電体/電歪体、圧電/電歪セラミックス組成物、圧電素子/電歪素子及び圧電モータ - Google Patents
圧電体/電歪体、圧電/電歪セラミックス組成物、圧電素子/電歪素子及び圧電モータ Download PDFInfo
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- 239000000919 ceramic Substances 0.000 title claims description 51
- 239000000203 mixture Substances 0.000 title claims description 51
- 230000005684 electric field Effects 0.000 claims description 32
- 229910052748 manganese Inorganic materials 0.000 claims description 9
- 229910052719 titanium Inorganic materials 0.000 claims description 6
- 229910052726 zirconium Inorganic materials 0.000 claims description 6
- 238000005452 bending Methods 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 229910052745 lead Inorganic materials 0.000 claims description 5
- 229910052721 tungsten Inorganic materials 0.000 claims description 5
- 229910052787 antimony Inorganic materials 0.000 claims description 4
- 229910052758 niobium Inorganic materials 0.000 claims description 4
- 229910052779 Neodymium Inorganic materials 0.000 claims description 2
- 229910052746 lanthanum Inorganic materials 0.000 claims description 2
- 239000000463 material Substances 0.000 description 41
- 239000002994 raw material Substances 0.000 description 38
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 28
- 230000008859 change Effects 0.000 description 19
- 238000000034 method Methods 0.000 description 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 16
- 239000000395 magnesium oxide Substances 0.000 description 14
- 238000006073 displacement reaction Methods 0.000 description 12
- 230000000052 comparative effect Effects 0.000 description 10
- 239000007772 electrode material Substances 0.000 description 10
- 238000010304 firing Methods 0.000 description 10
- 238000002156 mixing Methods 0.000 description 10
- 239000011268 mixed slurry Substances 0.000 description 8
- 230000007423 decrease Effects 0.000 description 7
- 239000002002 slurry Substances 0.000 description 7
- 229910010413 TiO 2 Inorganic materials 0.000 description 6
- 239000002131 composite material Substances 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- 101100513612 Microdochium nivale MnCO gene Proteins 0.000 description 5
- 238000011156 evaluation Methods 0.000 description 5
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 5
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 5
- 238000002360 preparation method Methods 0.000 description 5
- 238000010298 pulverizing process Methods 0.000 description 5
- 239000011324 bead Substances 0.000 description 4
- -1 cobblestones Substances 0.000 description 4
- 238000001035 drying Methods 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 4
- 238000001914 filtration Methods 0.000 description 4
- 238000007429 general method Methods 0.000 description 4
- 230000006872 improvement Effects 0.000 description 4
- 239000007769 metal material Substances 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 230000010287 polarization Effects 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- 238000001354 calcination Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 239000004014 plasticizer Substances 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229920002545 silicone oil Polymers 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- 229910008651 TiZr Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000004703 alkoxides Chemical class 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 230000001413 cellular effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000000975 co-precipitation Methods 0.000 description 1
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000005549 size reduction Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
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Description
0.99≦Pb/(Sb+Nb+Mn+Ti+Zr+Cu+W)≦1.05
0.95≦Ti/Zr≦1.10
0.97≦Cu/W≦1.60
0.75≦Sb/Nb≦1.15
[2] 前記[1]に記載の圧電/電歪セラミック組成物を含み、1V/mmの電界におけるQmに対し、10V/mmの電界におけるQmの割合が30%以上であることを特徴とする圧電体/電歪体。
本発明の圧電素子11は、図1及び図2に示すように、圧電体と、この圧電体上に設けられた一対以上の電極(第一電極3、第二電極4)とから概ね構成される。ここで、図1は本発明の圧電素子の一実施形態を模式的に示す斜視図であり、図2は図1で示した圧電素子の構成をわかりやすく説明するために、各層で分解した分解斜視図である。以下、圧電素子/電歪素子について説明するが、主に圧電素子について説明する。電歪素子については、電圧を加えると微小に伸縮する素子として圧電素子と基本的構成が同様であることから、圧電素子を電歪素子と置き換えて、圧電素子の説明として参照されることを望む。
このような圧電セラミック組成物の調製方法としては、次のものがある。なお、本実施形態の圧電セラミック組成物は、全原料をまとめて混合してなる混合原料を仮焼・粉砕して調製しても良いし、一部の原料を混合してなる混合原料を仮焼・粉砕した二次原料を数種類調製し、これら数種類の二次原料および原料を混合してなる混合原料を仮焼・粉砕して調製しても良い。以下、圧電セラミック組成物の調製方法について具体的に説明する。
上記の第一及び第二の圧電セラミック組成物の調製方法によって作製した粒子状の圧電セラミック組成物の平均粒子径は0.03〜1.0μmであることが好ましく、0.03〜0.5μmであることがより好ましく、0.03〜0.1μmであることが更に好ましい。
本実施形態の圧電層を形成するための方法としては、圧電セラミック組成物に可塑剤や分散剤や溶媒等を加えて、ボールミル等の一般的な混合装置を用いてスラリー化した後、ドクターブレード等の一般的なシート成形機によりシート状に成形することができる。その後、切断し、所望の寸法の圧電層を形成する。
上記圧電層間に第一電極、第二電極、共通電極を形成するには、前記で所望の寸法にて作製した圧電層上に、例えばスクリーン印刷のような一般的な膜形成装置を用いて形成し、これらを順次積層し、加圧一体化する工程を経た後、電気炉等の加熱装置により焼成する。
また、上記圧電層中にAgを含むことが好ましい。
更に、上記圧電層中一次縦−二次屈曲振動モードを利用した定在波型圧電モータであることも望ましい実施形態の一つである。
PbOを68.4質量%、TiO2を11.5質量%、ZrO2を17.1質量%、Sb2O3を0.88質量%、Nb2O5を0.80質量%、MnCO3をMnO換算で0.48質量%となるように、各原料を量り取り、所定量の水と共にボールミルにて24時間の混合を行った。その後、調製スラリーを熱風乾燥機内に入れて蒸発・乾燥させた。得られた混合原料は、マグネシアのサヤ内に入れマグネシアの蓋をして、電気炉中で1000℃に加熱し仮焼・合成を行う。得られた仮焼物は、再度、所定量の水と共にボールミルにて所定時間の粉砕を行い、熱風乾燥機内にて蒸発・乾燥させ第一の二次原料とした。
実施例1における第一の二次原料のみを用いて、実施例1と同様に、直径20mm、厚み7mmの円板形状に圧粉成形した後、マグネシアサヤ中に入れて、電気炉にて1250℃で3時間保持して焼成することで圧電セラミックバルクを作製した。得られた圧電セラミックバルクを12mm×3mm×1mmの形状に加工し、12mm×3mmの二面にAgペーストを塗布・熱処理して試験片を作製した。試験片は140℃のシリコンオイル中で、3kV/mmの電界を、15分間印加することで分極処理を行った。なお、参考例1の材料を実施例1と同様の950℃で焼成しても、CuとWを含んでいないために緻密化しなかった。
PbOを63.7質量%、TiO2を10.9質量%、ZrO2を16.9質量%、Sb2O3を0.83質量%、Nb2O5を0.76質量%、MnCO3をMnO換算で0.43質量%となるように、各原料を量り取り、実施例1と同様な方法にて第一の二次原料とした。この第一の二次原料を93.53質量%に、実施例1と同じ第二の二次原料を6.47質量%、で量り取り、実施例1と同様な方法にて圧電セラミック組成物とした。更に、この圧電セラミック組成物から圧電セラミックバルクを作製した。この比較例1の圧電セラミック組成物は、Pb{(Sb1/2Nb1/2)TiZr}O3なる複合ペロブスカイト酸化物に、MnOを添加した組成であり、Pbが2%欠損する。
ここで、Qmの測定方法を説明する。分極処理を行った圧電セラミックバルクを、12mm×3mmの面の中心一点を、上下からプローブで保持する。プローブを介して圧電セラミックバルクに所定の電圧を印加しながら、共振周波数よりも低周波数側から、高周波数側へ掃印する。その電圧印加中の圧電セラミックバルクの振動速度を、圧電セラミックバルクの3mm×1mmの端面にレーザードップラーを照射し測定する。得られた結果を時間で積分することで、変位量が得られる。変位量が最大の時の周波数fmaxと、変位量が最大値の半分の時の周波数f1,f2を求め、下記式によりQmを求めた。
Qm=fmax/(f2−f1)
上記実施例1、参考例1及び比較例1におけるQmを、電界が1V/mmの場合と、10V/mmの場合について測定評価し、1V/mm電界時のQmに対する、10V/mm電界時のQmの割合を、表1にまとめた。
PbOを68.4質量%、TiO2を11.5質量%、ZrO2を17.1質量%、Sb2O3を0.88質量%、Nb2O5を0.80質量%、MnCO3をMnO換算で0.48質量%となるように、各原料を量り取り、所定量の水と共にボールミルにて24時間の混合を行った。その後、調製スラリーを熱風乾燥機内に入れて蒸発・乾燥させた。得られた混合原料は、マグネシアのサヤ内に入れマグネシアの蓋をして、電気炉中で1000℃に加熱し仮焼・合成を行う。得られた仮焼物は、再度、所定量の水と共にボールミルにて所定時間の粉砕を行い、熱風乾燥機内にて蒸発・乾燥させ第一の二次原料とした。
比較例2は、比較例1で作製した圧電セラミック組成物を用いて、実施例2と同様な方法により圧電素子を作製した。
上記実施例2および比較例2における、共振時の変位を測定評価した結果を表3にまとめた。共振時の変位は1V/mmの電界の時の変位に対し、2V/mm、3V/mmの電界の時の変位の割合を示した。
Claims (5)
- 主たる成分としてPb,Sb,Nb,Mn,Ti,Zr,CuおよびWを含む複合ペロブスカイト酸化物(ただし、La,Nd,Pr,Biのいずれかを含む場合を除く)からなり、CuをCuO換算で0.3質量%未満含み、また原子数比率が下記式を満たす圧電/電歪セラミック組成物。
0.99≦Pb/(Sb+Nb+Mn+Ti+Zr+Cu+W)≦1.05
0.95≦Ti/Zr≦1.10
0.97≦Cu/W≦1.60
0.75≦Sb/Nb≦1.15 - 請求項1に記載の圧電/電歪セラミック組成物を含み、1V/mmの電界におけるQmに対し、10V/mmの電界におけるQmの割合が30%以上であることを特徴とする圧電体/電歪体。
- 圧電層/電歪層と、前記圧電層/電歪層を挟む一対の電極を一以上備える圧電素子/電歪素子であって、
前記圧電層/電歪層が、請求項1に記載の圧電/電歪セラミック組成物からなることを特徴とする圧電素子/電歪素子。 - 前記圧電層/電歪層中にAgを含むことを特徴とする請求項3に記載の圧電素子/電歪素子。
- 請求項3または4に記載の圧電素子/電歪素子を備え、前記圧電層/電歪層の一次縦−二次屈曲振動モードを利用することを特徴とする圧電モータ。
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