JP5811969B2 - 炭化珪素半導体装置の製造方法 - Google Patents
炭化珪素半導体装置の製造方法 Download PDFInfo
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims description 136
- 229910010271 silicon carbide Inorganic materials 0.000 title claims description 135
- 239000004065 semiconductor Substances 0.000 title claims description 59
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- 238000010438 heat treatment Methods 0.000 claims description 114
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 89
- 239000000758 substrate Substances 0.000 claims description 88
- MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 claims description 86
- 229910052757 nitrogen Inorganic materials 0.000 claims description 37
- 239000012298 atmosphere Substances 0.000 claims description 29
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 27
- 239000001301 oxygen Substances 0.000 claims description 27
- 229910052760 oxygen Inorganic materials 0.000 claims description 27
- 239000011261 inert gas Substances 0.000 claims description 7
- 239000010410 layer Substances 0.000 description 60
- 229960003753 nitric oxide Drugs 0.000 description 39
- 238000000137 annealing Methods 0.000 description 26
- 230000003647 oxidation Effects 0.000 description 19
- 238000007254 oxidation reaction Methods 0.000 description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 18
- 239000012535 impurity Substances 0.000 description 17
- 230000015556 catabolic process Effects 0.000 description 16
- 239000007789 gas Substances 0.000 description 16
- 230000008569 process Effects 0.000 description 10
- 235000012239 silicon dioxide Nutrition 0.000 description 9
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- 125000004433 nitrogen atom Chemical group N* 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 6
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- 239000000463 material Substances 0.000 description 6
- 230000004913 activation Effects 0.000 description 5
- 238000000206 photolithography Methods 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 238000000354 decomposition reaction Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 125000004432 carbon atom Chemical group C* 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- -1 for example Chemical compound 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000003763 carbonization Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000002050 diffraction method Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 229960001730 nitrous oxide Drugs 0.000 description 1
- 235000013842 nitrous oxide Nutrition 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/0445—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising crystalline silicon carbide
- H01L21/048—Making electrodes
- H01L21/049—Conductor-insulator-semiconductor electrodes, e.g. MIS contacts
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
- H01L21/0223—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate
- H01L21/02233—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer
- H01L21/02236—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer group IV semiconductor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System
- H01L29/1608—Silicon carbide
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66053—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide
- H01L29/66068—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Formation Of Insulating Films (AREA)
- Electrodes Of Semiconductors (AREA)
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Description
図1を参照して、本発明の実施の形態1に係る炭化珪素半導体装置の構成について説明する。
次に、本発明の実施の形態2に係る炭化珪素半導体装置1の構成について説明する。
まず、基板準備工程(S10)が実施される。ここでは、実施の形態1における炭化珪素半導体装置の製造方法と同様に任意の面方位の基板2が準備される。たとえば基板2として、{03−38}面が主面であって、n型を有する炭化珪素からなる基板2(図6参照)が準備される。なお主面は{0−11−2}面であってもよく、{0−11−2}面は、{0−33−8}面と{0−11−1}面とにより構成されていてもよい。
Claims (5)
- 炭化珪素基板を酸素を含む雰囲気中において加熱することにより、前記炭化珪素基板上に接してゲート絶縁膜を形成する第1の加熱工程と、
前記ゲート絶縁膜が形成された前記炭化珪素基板を窒素および一酸化窒素を含む雰囲気中において1250℃以上に加熱する第2の加熱工程とを備え、
前記第2の加熱工程における前記一酸化窒素の分圧を前記窒素の分圧と前記一酸化窒素の分圧との合計の圧力で除した値は3%より大きく10%よりも小さい、炭化珪素半導体装置の製造方法。 - 前記第2の加熱工程において、前記ゲート絶縁膜が形成された前記炭化珪素基板が1350℃以下で加熱される、請求項1に記載の炭化珪素半導体装置の製造方法。
- 前記第2の加熱工程の後、前記ゲート絶縁膜が形成された前記炭化珪素基板を不活性ガス雰囲気において加熱する第3の加熱工程をさらに備え、
前記第3の加熱工程における前記炭化珪素基板の温度は、前記第1の加熱工程における前記炭化珪素基板の温度よりも高い、請求項1または2に記載の炭化珪素半導体装置の製造方法。 - 前記第1の加熱工程および前記第2の加熱工程の間に前記雰囲気中の酸素を窒素に置換する工程をさらに備えた、請求項1〜3のいずれか1項に記載の炭化珪素半導体装置の製造方法。
- 前記酸素を窒素に置換する工程の後、前記炭化珪素基板の温度が前記第2の加熱工程の温度にまで変化される、請求項4に記載の炭化珪素半導体装置の製造方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
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JP2012186156A JP5811969B2 (ja) | 2012-08-27 | 2012-08-27 | 炭化珪素半導体装置の製造方法 |
PCT/JP2013/068850 WO2014034289A1 (ja) | 2012-08-27 | 2013-07-10 | 炭化珪素半導体装置の製造方法 |
EP13832444.7A EP2889899B1 (en) | 2012-08-27 | 2013-07-10 | Method for manufacturing a silicon carbide semiconductor device |
CN201380037858.9A CN104471691A (zh) | 2012-08-27 | 2013-07-10 | 制造碳化硅半导体器件的方法 |
US13/944,512 US8877656B2 (en) | 2012-08-27 | 2013-07-17 | Method for manufacturing silicon carbide semiconductor device |
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JP2012186156A JP5811969B2 (ja) | 2012-08-27 | 2012-08-27 | 炭化珪素半導体装置の製造方法 |
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JP2014045053A JP2014045053A (ja) | 2014-03-13 |
JP5811969B2 true JP5811969B2 (ja) | 2015-11-11 |
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US (1) | US8877656B2 (ja) |
EP (1) | EP2889899B1 (ja) |
JP (1) | JP5811969B2 (ja) |
CN (1) | CN104471691A (ja) |
WO (1) | WO2014034289A1 (ja) |
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WO2014155651A1 (ja) * | 2013-03-29 | 2014-10-02 | 株式会社日立製作所 | 炭化珪素半導体装置及びその製造方法 |
JP2016115860A (ja) * | 2014-12-17 | 2016-06-23 | 三菱電機株式会社 | 炭化珪素半導体装置の製造方法 |
CN105161416A (zh) * | 2015-09-24 | 2015-12-16 | 株洲南车时代电气股份有限公司 | 一种半导体结构的掺杂方法 |
US9610975B1 (en) | 2015-12-17 | 2017-04-04 | Ford Global Technologies, Llc | Hitch angle detection for trailer backup assist system |
DE102017110508B4 (de) * | 2017-05-15 | 2023-03-02 | Infineon Technologies Ag | Halbleitervorrichtung mit Transistorzellen und einer Driftstruktur und Herstellungsverfahren |
DE102018107966B4 (de) | 2018-04-04 | 2022-02-17 | Infineon Technologies Ag | Verfahren zum Bilden eines Breiter-Bandabstand-Halbleiter-Bauelements |
CN109801840A (zh) * | 2018-12-04 | 2019-05-24 | 中国科学院微电子研究所 | 一种改善SiC器件界面特征的方法及SiC器件 |
JP7452014B2 (ja) | 2019-12-27 | 2024-03-19 | 株式会社レゾナック | 反応炉及びフラーレンの製造装置 |
US11823899B1 (en) * | 2020-10-09 | 2023-11-21 | CoolCAD Electronics, LLC | Fabrication of a high temperature silicon carbide transistor device |
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JP4164575B2 (ja) * | 2003-10-02 | 2008-10-15 | 独立行政法人産業技術総合研究所 | 半導体装置の製造方法 |
JP5157843B2 (ja) * | 2007-12-04 | 2013-03-06 | 住友電気工業株式会社 | 炭化ケイ素半導体装置およびその製造方法 |
JP4911263B2 (ja) * | 2009-03-11 | 2012-04-04 | 三菱電機株式会社 | 炭化珪素半導体装置の製造方法 |
JPWO2010116886A1 (ja) * | 2009-04-10 | 2012-10-18 | 住友電気工業株式会社 | 絶縁ゲート型バイポーラトランジスタ |
KR20130045834A (ko) * | 2010-03-12 | 2013-05-06 | 스미토모덴키고교가부시키가이샤 | 탄화규소 반도체 장치 및 그 제조 방법 |
JP2012038919A (ja) * | 2010-08-06 | 2012-02-23 | Mitsubishi Electric Corp | 炭化珪素半導体装置の製造方法 |
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EP2889899A1 (en) | 2015-07-01 |
JP2014045053A (ja) | 2014-03-13 |
US8877656B2 (en) | 2014-11-04 |
EP2889899A4 (en) | 2016-05-04 |
US20140057461A1 (en) | 2014-02-27 |
EP2889899B1 (en) | 2019-12-11 |
WO2014034289A1 (ja) | 2014-03-06 |
CN104471691A (zh) | 2015-03-25 |
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