JP5797246B2 - 流量計及びそれを備えた流量制御装置 - Google Patents

流量計及びそれを備えた流量制御装置 Download PDF

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Publication number
JP5797246B2
JP5797246B2 JP2013223018A JP2013223018A JP5797246B2 JP 5797246 B2 JP5797246 B2 JP 5797246B2 JP 2013223018 A JP2013223018 A JP 2013223018A JP 2013223018 A JP2013223018 A JP 2013223018A JP 5797246 B2 JP5797246 B2 JP 5797246B2
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JP
Japan
Prior art keywords
flow rate
build
flow
pressure
switching valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2013223018A
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English (en)
Japanese (ja)
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JP2015087110A5 (enExample
JP2015087110A (ja
Inventor
正明 永瀬
正明 永瀬
池田　信一
信一 池田
功ニ 西野
功ニ 西野
土肥　亮介
亮介 土肥
敦志 日高
敦志 日高
勝幸 杉田
勝幸 杉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2013223018A priority Critical patent/JP5797246B2/ja
Application filed by Fujikin Inc filed Critical Fujikin Inc
Priority to CN201480049538.XA priority patent/CN105659178B/zh
Priority to PCT/JP2014/005322 priority patent/WO2015064050A1/ja
Priority to KR1020167006626A priority patent/KR101843378B1/ko
Priority to KR1020187000288A priority patent/KR101930304B1/ko
Priority to US15/028,127 priority patent/US10073469B2/en
Priority to TW103137005A priority patent/TWI524054B/zh
Publication of JP2015087110A publication Critical patent/JP2015087110A/ja
Publication of JP2015087110A5 publication Critical patent/JP2015087110A5/ja
Application granted granted Critical
Publication of JP5797246B2 publication Critical patent/JP5797246B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0647—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged in series
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/363—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction with electrical or electro-mechanical indication
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/40—Details of construction of the flow constriction devices
    • G01F1/42—Orifices or nozzles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/001—Means for regulating or setting the meter for a predetermined quantity
    • G01F15/002—Means for regulating or setting the meter for a predetermined quantity for gases
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/005—Valves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/02—Compensating or correcting for variations in pressure, density or temperature
    • G01F15/04—Compensating or correcting for variations in pressure, density or temperature of gases to be measured

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Measuring Volume Flow (AREA)
JP2013223018A 2013-10-28 2013-10-28 流量計及びそれを備えた流量制御装置 Active JP5797246B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2013223018A JP5797246B2 (ja) 2013-10-28 2013-10-28 流量計及びそれを備えた流量制御装置
PCT/JP2014/005322 WO2015064050A1 (ja) 2013-10-28 2014-10-21 流量計及びそれを備えた流量制御装置
KR1020167006626A KR101843378B1 (ko) 2013-10-28 2014-10-21 유량계 및 그것을 구비한 유량 제어 장치
KR1020187000288A KR101930304B1 (ko) 2013-10-28 2014-10-21 유량계
CN201480049538.XA CN105659178B (zh) 2013-10-28 2014-10-21 流量计及具备该流量计的流量控制装置
US15/028,127 US10073469B2 (en) 2013-10-28 2014-10-21 Flow meter and flow control device provided therewith
TW103137005A TWI524054B (zh) 2013-10-28 2014-10-27 Flow meter and flow control device with the flowmeter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013223018A JP5797246B2 (ja) 2013-10-28 2013-10-28 流量計及びそれを備えた流量制御装置

Publications (3)

Publication Number Publication Date
JP2015087110A JP2015087110A (ja) 2015-05-07
JP2015087110A5 JP2015087110A5 (enExample) 2015-07-02
JP5797246B2 true JP5797246B2 (ja) 2015-10-21

Family

ID=53003682

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013223018A Active JP5797246B2 (ja) 2013-10-28 2013-10-28 流量計及びそれを備えた流量制御装置

Country Status (6)

Country Link
US (1) US10073469B2 (enExample)
JP (1) JP5797246B2 (enExample)
KR (2) KR101930304B1 (enExample)
CN (1) CN105659178B (enExample)
TW (1) TWI524054B (enExample)
WO (1) WO2015064050A1 (enExample)

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JP6871636B2 (ja) * 2016-03-29 2021-05-12 株式会社フジキン 圧力式流量制御装置及び流量自己診断方法
US10684159B2 (en) * 2016-06-27 2020-06-16 Applied Materials, Inc. Methods, systems, and apparatus for mass flow verification based on choked flow
KR20190058552A (ko) * 2016-09-19 2019-05-29 플로우 디바이시스 앤드 시스템즈 인크. 유량 측정을 위한 가변 제한
WO2018070464A1 (ja) * 2016-10-14 2018-04-19 株式会社フジキン 流体制御装置
KR101910615B1 (ko) 2017-04-03 2018-10-24 주식회사 러셀 유량제어시스템 및 이를 이용한 공정모니터링시스템
JP6913498B2 (ja) * 2017-04-18 2021-08-04 東京エレクトロン株式会社 流量制御器の出力流量を求める方法及び被処理体を処理する方法
CN107422754B (zh) * 2017-09-01 2023-11-14 中国人民解放军军事科学院军事医学研究院 一种微量气体流速控制装置及控制方法
JP7216425B2 (ja) * 2017-11-30 2023-02-01 株式会社フジキン 流量制御装置
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CN111989635A (zh) * 2018-04-27 2020-11-24 株式会社富士金 流量控制方法以及流量控制装置
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KR102087253B1 (ko) * 2018-07-20 2020-03-10 김영탁 액상 공정용 소재의 유량제어 시스템 및 이를 이용한 공정 모니터링 시스템
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CN109012322A (zh) * 2018-08-21 2018-12-18 王维春 一种畜牧业用消毒液配制装置
RU2682540C9 (ru) * 2018-08-22 2019-07-08 Александр Александрович Калашников Способ настройки измерительного канала расхода среды с сужающим устройством
KR102771309B1 (ko) * 2019-04-25 2025-02-24 가부시키가이샤 후지킨 유량 제어 장치
TWI774227B (zh) * 2020-02-21 2022-08-11 日商富士金股份有限公司 流量控制裝置、流量控制裝置的控制方法、流量控制裝置的控制程式
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Also Published As

Publication number Publication date
KR20160043060A (ko) 2016-04-20
WO2015064050A1 (ja) 2015-05-07
US20160239026A1 (en) 2016-08-18
TWI524054B (zh) 2016-03-01
KR101930304B1 (ko) 2018-12-18
US10073469B2 (en) 2018-09-11
KR20180004854A (ko) 2018-01-12
CN105659178B (zh) 2017-12-22
JP2015087110A (ja) 2015-05-07
TW201531668A (zh) 2015-08-16
CN105659178A (zh) 2016-06-08
KR101843378B1 (ko) 2018-03-29

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