JP5777063B2 - ガスセンサ - Google Patents

ガスセンサ Download PDF

Info

Publication number
JP5777063B2
JP5777063B2 JP2012004964A JP2012004964A JP5777063B2 JP 5777063 B2 JP5777063 B2 JP 5777063B2 JP 2012004964 A JP2012004964 A JP 2012004964A JP 2012004964 A JP2012004964 A JP 2012004964A JP 5777063 B2 JP5777063 B2 JP 5777063B2
Authority
JP
Japan
Prior art keywords
gas
gas sensor
metal layer
light
ionic liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2012004964A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013145137A5 (https=
JP2013145137A (ja
Inventor
勲 下山
下山　　勲
潔 松本
松本　　潔
哲朗 菅
哲朗 菅
裕介 竹井
裕介 竹井
高橋　英俊
英俊 高橋
光太郎 石津
光太郎 石津
祐仁 本多
祐仁 本多
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
University of Tokyo NUC
Original Assignee
Omron Corp
University of Tokyo NUC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2012004964A priority Critical patent/JP5777063B2/ja
Application filed by Omron Corp, University of Tokyo NUC filed Critical Omron Corp
Priority to KR1020147015736A priority patent/KR20140090258A/ko
Priority to PCT/JP2012/083880 priority patent/WO2013105450A1/ja
Priority to CN201280060964.4A priority patent/CN103998918A/zh
Priority to EP12865116.3A priority patent/EP2803974B1/en
Priority to US14/368,396 priority patent/US9546948B2/en
Publication of JP2013145137A publication Critical patent/JP2013145137A/ja
Publication of JP2013145137A5 publication Critical patent/JP2013145137A5/ja
Application granted granted Critical
Publication of JP5777063B2 publication Critical patent/JP5777063B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G01N21/552—Attenuated total reflection
    • G01N21/553—Attenuated total reflection and using surface plasmons
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • G01N33/004—CO or CO2
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06113—Coherent sources; lasers
    • G01N2201/0612—Laser diodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/067—Electro-optic, magneto-optic, acousto-optic elements

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Medicinal Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Combustion & Propulsion (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP2012004964A 2012-01-13 2012-01-13 ガスセンサ Active JP5777063B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2012004964A JP5777063B2 (ja) 2012-01-13 2012-01-13 ガスセンサ
PCT/JP2012/083880 WO2013105450A1 (ja) 2012-01-13 2012-12-27 ガスセンサ
CN201280060964.4A CN103998918A (zh) 2012-01-13 2012-12-27 气体传感器
EP12865116.3A EP2803974B1 (en) 2012-01-13 2012-12-27 Gas sensor
KR1020147015736A KR20140090258A (ko) 2012-01-13 2012-12-27 가스 센서
US14/368,396 US9546948B2 (en) 2012-01-13 2012-12-27 Gas sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012004964A JP5777063B2 (ja) 2012-01-13 2012-01-13 ガスセンサ

Publications (3)

Publication Number Publication Date
JP2013145137A JP2013145137A (ja) 2013-07-25
JP2013145137A5 JP2013145137A5 (https=) 2014-07-31
JP5777063B2 true JP5777063B2 (ja) 2015-09-09

Family

ID=48781406

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012004964A Active JP5777063B2 (ja) 2012-01-13 2012-01-13 ガスセンサ

Country Status (6)

Country Link
US (1) US9546948B2 (https=)
EP (1) EP2803974B1 (https=)
JP (1) JP5777063B2 (https=)
KR (1) KR20140090258A (https=)
CN (1) CN103998918A (https=)
WO (1) WO2013105450A1 (https=)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2853889B1 (en) * 2013-09-26 2016-03-02 ams International AG Integrated circuit with CO2 sensor, composition and manufacturing method of such an IC
KR101667316B1 (ko) * 2014-04-25 2016-10-19 포미주식회사 무창축사 환기시스템
US10067108B2 (en) 2015-05-13 2018-09-04 Elemental Sensor Llc Device for detecting volatile organic compounds
US10463275B2 (en) * 2015-08-09 2019-11-05 Elemental Sensor Llc Device for capturing and concentrating volatile organic compounds
US12188893B2 (en) 2016-08-30 2025-01-07 Analog Devices International Unlimited Company Electrochemical sensor, and a method of forming an electrochemical sensor
US11268927B2 (en) 2016-08-30 2022-03-08 Analog Devices International Unlimited Company Electrochemical sensor, and a method of forming an electrochemical sensor
US10620151B2 (en) 2016-08-30 2020-04-14 Analog Devices Global Electrochemical sensor, and a method of forming an electrochemical sensor
CN106645025A (zh) * 2016-12-27 2017-05-10 吉林大学 一种汽车尾气成分含量在线检测仪
US11022579B2 (en) 2018-02-05 2021-06-01 Analog Devices International Unlimited Company Retaining cap
JP7124579B2 (ja) * 2018-09-06 2022-08-24 日本精工株式会社 ガスセンサ
US11231365B2 (en) * 2019-07-08 2022-01-25 Hanwha Systems Co., Ltd. Apparatus and method for infrared imaging
KR102141357B1 (ko) * 2019-08-12 2020-08-05 울산과학기술원 기체상 화학작용제의 탐지 및 식별 방법 및 기체상 화학작용제의 탐지 및 식별을 위한 센서
CN110940863B (zh) * 2019-10-23 2020-11-17 上海大学 一种基于集成有源放大器芯片的谐振传感器
US20230026261A1 (en) * 2019-12-20 2023-01-26 3M Innovative Properties Company Nanohole array sensor elements and sensors including the same
JP2021117002A (ja) * 2020-01-22 2021-08-10 学校法人 創価大学 ヘテロコア光ファイバ二酸化炭素センサ
JP7443894B2 (ja) * 2020-03-31 2024-03-06 横河電機株式会社 分光分析装置、分光分析装置の動作方法、及びプログラム

Family Cites Families (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60125558A (ja) 1983-12-09 1985-07-04 Kuraray Co Ltd ガスセンサ
JPH0679009B2 (ja) 1985-11-22 1994-10-05 株式会社東芝 化学センサ
JP3167022B2 (ja) 1988-11-18 2001-05-14 新電元工業株式会社 ガスセンサ
JPH03237350A (ja) 1990-02-14 1991-10-23 Terumo Corp ｐＨセンサーおよびその製造方法
DE4445668C2 (de) * 1994-12-21 1997-05-15 Euroferm Gmbh I Gr Vorrichtung zur Messung des Partialdruckes von in Flüssigkeiten gelösten Gasen in Anlagen zur Durchführung von biotechnologischen oder lebensmitteltechnologischen Prozessen
US7875434B2 (en) * 2000-10-30 2011-01-25 Sru Biosystems, Inc. Label-free methods for performing assays using a colorimetric resonant reflectance optical biosensor
US7142296B2 (en) * 2000-10-30 2006-11-28 Sru Biosystems, Inc. Method and apparatus for detecting biomolecular interactions
US8154093B2 (en) 2002-01-16 2012-04-10 Nanomix, Inc. Nano-electronic sensors for chemical and biological analytes, including capacitance and bio-membrane devices
JP2004085392A (ja) 2002-08-27 2004-03-18 Fujitsu Ltd 炭素元素線状構造体を用いた電界効果トランジスタ化学センサー
US7927822B2 (en) * 2002-09-09 2011-04-19 Sru Biosystems, Inc. Methods for screening cells and antibodies
WO2005026694A2 (en) 2003-09-12 2005-03-24 Nanomix, Inc. Carbon dioxide nanoelectronic sensor
US7187446B2 (en) * 2004-07-26 2007-03-06 Fuji Photo Film Co., Ltd. Measuring apparatus
JP2006125860A (ja) * 2004-10-26 2006-05-18 Fujikura Ltd 表面プラズモンセンサ及び表面プラズモン測定装置
JP4891550B2 (ja) 2005-02-10 2012-03-07 独立行政法人科学技術振興機構 ｎ型トランジスタ、ｎ型トランジスタセンサ及びｎ型トランジスタ用チャネルの製造方法
US20060234391A1 (en) * 2005-02-18 2006-10-19 University Of Rochester Optical sensor based on resonant porous silicon structures
US7879619B2 (en) * 2005-10-07 2011-02-01 Tianwei Jing Apparatus for detecting one or more substances and method of detecting a substance
WO2008030666A2 (en) * 2006-07-25 2008-03-13 The Board Of Trustees Of The University Of Illinois Multispectral plasmonic crystal sensors
EP2172945A1 (en) * 2007-07-19 2010-04-07 Gunze Limited Solid ion-conducting material, electrochemical device utilizing the solid ion-conducting material, and method for production of the electrochemical device
JP4926865B2 (ja) * 2007-07-20 2012-05-09 シャープ株式会社 表面プラズモンセンサー
CN101398399A (zh) * 2007-09-26 2009-04-01 中国科学院大连化学物理研究所 一种石英晶体谐振器及其制备和应用
US8506887B2 (en) * 2008-10-17 2013-08-13 Vanderbilt University Porous membrane waveguide sensors and sensing systems therefrom for detecting biological or chemical targets
KR101052504B1 (ko) * 2008-11-27 2011-08-01 한국과학기술연구원 고 분해능 표면 플라즈몬 공진 센서 및 그것을 이용한 센서시스템
JP2010192599A (ja) 2009-02-17 2010-09-02 Olympus Corp カーボンナノ材料を用いた電界効果トランジスタにおける絶縁膜成膜方法及びカーボンナノ材料を用いた電界効果トランジスタ
JP5369755B2 (ja) * 2009-02-25 2013-12-18 株式会社豊田中央研究所 ガスセンサ
JP2010203838A (ja) * 2009-03-02 2010-09-16 Sonac Kk 光導波路型センサ
CN101504360A (zh) * 2009-03-03 2009-08-12 中国科学院光电技术研究所 一种有机气体传感方法
JP2010261793A (ja) * 2009-05-01 2010-11-18 Kurabo Ind Ltd 液体中の溶存物質含有量測定方法及び測定装置、並びに、エッチング液再生システム
US8711356B2 (en) * 2010-02-25 2014-04-29 Stichting Imec Nederland Gas sensor with a porous layer that detectably affects a surface lattice resonant condition of a nanoparticle array
KR100977292B1 (ko) * 2010-04-30 2010-08-23 지에스건설 주식회사 표면 플라즈몬 공명을 이용한 분자각인 가스 센서 칩 제조방법
WO2011155179A1 (ja) * 2010-06-10 2011-12-15 コニカミノルタホールディングス株式会社 分析素子チップ
CN102072929B (zh) * 2010-11-25 2013-02-06 厦门出入境检验检疫局检验检疫技术中心 一种甲醛气体传感器

Also Published As

Publication number Publication date
EP2803974B1 (en) 2020-04-15
EP2803974A4 (en) 2015-12-30
US9546948B2 (en) 2017-01-17
KR20140090258A (ko) 2014-07-16
JP2013145137A (ja) 2013-07-25
WO2013105450A1 (ja) 2013-07-18
EP2803974A1 (en) 2014-11-19
US20150009503A1 (en) 2015-01-08
CN103998918A (zh) 2014-08-20

Similar Documents

Publication Publication Date Title
JP5777063B2 (ja) ガスセンサ
US9739705B2 (en) Gas cell assembly and applications in absorption spectroscopy
CN107991250B (zh) 测量单元及气体分析装置
US8675200B2 (en) Hydrogen detecting surface plasmon resonator, surface plasmon resonance optical hydrogen detector and method for optically detecting hydrogen using surface plasmon resonance
US9816860B2 (en) Spectrometer with active beam steering
CN106574869B (zh) 具有可变光束功率和形状的光谱仪
JP4958220B2 (ja) 全反射減衰型光学プローブおよびそれを用いた水溶液分光測定装置
US10113955B2 (en) Gas cell for absorption spectroscopy
Dong et al. A high-sensitive methane measuring telemetry system based on a direct optical absorption technique
US10620045B2 (en) Spectrometer with active beam steering
CA2468924A1 (en) A device and method for non-contact sensing of low-concentration and trace substances
KR102211898B1 (ko) 노광 장치용 액체 누출 감지 장치 및 방법
CN100595570C (zh) 一种半导体激光透过率分析系统
JP2007120971A (ja) 光式水素ガス及び炭化水素ガスセンサ
US20230324282A1 (en) Optical measuring cell
JP5467477B2 (ja) 水蒸気透過測定装置および水蒸気透過測定方法
JP4549292B2 (ja) 光熱変換測定装置、光熱変換測定方法
Mishra et al. Fiber optic hydrogen gas sensor utilizing surface plasmon resonance of indium-tin oxide (ITO) thin films
JP2002139425A (ja) 校正用光検出器
Pailloux et al. Chemical warfare and industrial agents detection and identification by LIBS and CRDS
JP2017026425A (ja) 光学式センサ
JP2003139686A (ja) 全反射減衰を利用した測定装置に用いられる測定チップへの自己組織化膜形成方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140617

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20140617

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20140617

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20150623

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20150630

R150 Certificate of patent or registration of utility model

Ref document number: 5777063

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250