KR20140090258A - 가스 센서 - Google Patents
가스 센서 Download PDFInfo
- Publication number
- KR20140090258A KR20140090258A KR1020147015736A KR20147015736A KR20140090258A KR 20140090258 A KR20140090258 A KR 20140090258A KR 1020147015736 A KR1020147015736 A KR 1020147015736A KR 20147015736 A KR20147015736 A KR 20147015736A KR 20140090258 A KR20140090258 A KR 20140090258A
- Authority
- KR
- South Korea
- Prior art keywords
- gas
- gas sensor
- metal layer
- light
- change
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 229910052751 metal Inorganic materials 0.000 claims abstract description 61
- 239000002184 metal Substances 0.000 claims abstract description 61
- 239000002608 ionic liquid Substances 0.000 claims abstract description 39
- 239000007788 liquid Substances 0.000 claims abstract description 34
- 238000002198 surface plasmon resonance spectroscopy Methods 0.000 claims abstract description 21
- 238000010521 absorption reaction Methods 0.000 claims description 8
- 229910052783 alkali metal Inorganic materials 0.000 claims description 2
- 150000001340 alkali metals Chemical class 0.000 claims description 2
- 229910052784 alkaline earth metal Inorganic materials 0.000 claims description 2
- 150000001342 alkaline earth metals Chemical class 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 147
- 239000010410 layer Substances 0.000 description 63
- 238000004519 manufacturing process Methods 0.000 description 16
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 11
- 229910052710 silicon Inorganic materials 0.000 description 11
- 239000010703 silicon Substances 0.000 description 11
- 239000010408 film Substances 0.000 description 10
- IQQRAVYLUAZUGX-UHFFFAOYSA-N 1-butyl-3-methylimidazolium Chemical compound CCCCN1C=C[N+](C)=C1 IQQRAVYLUAZUGX-UHFFFAOYSA-N 0.000 description 8
- 150000002500 ions Chemical class 0.000 description 8
- 238000001514 detection method Methods 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- -1 acryl Chemical group 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 230000035484 reaction time Effects 0.000 description 5
- 238000000926 separation method Methods 0.000 description 5
- NJMWOUFKYKNWDW-UHFFFAOYSA-N 1-ethyl-3-methylimidazolium Chemical compound CCN1C=C[N+](C)=C1 NJMWOUFKYKNWDW-UHFFFAOYSA-N 0.000 description 4
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 239000004033 plastic Substances 0.000 description 4
- 229920000052 poly(p-xylylene) Polymers 0.000 description 4
- 239000004810 polytetrafluoroethylene Substances 0.000 description 4
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 230000031700 light absorption Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- RVEJOWGVUQQIIZ-UHFFFAOYSA-N 1-hexyl-3-methylimidazolium Chemical compound CCCCCCN1C=C[N+](C)=C1 RVEJOWGVUQQIIZ-UHFFFAOYSA-N 0.000 description 2
- 244000117499 Colubrina elliptica Species 0.000 description 2
- 101100075837 Drosophila melanogaster Mabi gene Proteins 0.000 description 2
- 239000002033 PVDF binder Substances 0.000 description 2
- 229920002873 Polyethylenimine Polymers 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 239000004205 dimethyl polysiloxane Substances 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- JZLFUUHOTZKEFU-UHFFFAOYSA-N methyl 4-azidobenzenecarboximidate Chemical compound COC(=N)C1=CC=C(N=[N+]=[N-])C=C1 JZLFUUHOTZKEFU-UHFFFAOYSA-N 0.000 description 2
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 2
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 2
- 230000000717 retained effect Effects 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 238000000992 sputter etching Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000012795 verification Methods 0.000 description 2
- OOKUTCYPKPJYFV-UHFFFAOYSA-N 1-methyl-1h-imidazol-1-ium;bromide Chemical compound [Br-].CN1C=C[NH+]=C1 OOKUTCYPKPJYFV-UHFFFAOYSA-N 0.000 description 1
- WXMVWUBWIHZLMQ-UHFFFAOYSA-N 3-methyl-1-octylimidazolium Chemical compound CCCCCCCCN1C=C[N+](C)=C1 WXMVWUBWIHZLMQ-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 1
- 229920002302 Nylon 6,6 Polymers 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000013039 cover film Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000001745 non-dispersive infrared spectroscopy Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N21/552—Attenuated total reflection
- G01N21/553—Attenuated total reflection and using surface plasmons
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
- G01N33/004—CO or CO2
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/061—Sources
- G01N2201/06113—Coherent sources; lasers
- G01N2201/0612—Laser diodes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/067—Electro-optic, magneto-optic, acousto-optic elements
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Medicinal Chemistry (AREA)
- Food Science & Technology (AREA)
- Combustion & Propulsion (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012004964A JP5777063B2 (ja) | 2012-01-13 | 2012-01-13 | ガスセンサ |
| JPJP-P-2012-004964 | 2012-01-13 | ||
| PCT/JP2012/083880 WO2013105450A1 (ja) | 2012-01-13 | 2012-12-27 | ガスセンサ |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20140090258A true KR20140090258A (ko) | 2014-07-16 |
Family
ID=48781406
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020147015736A Ceased KR20140090258A (ko) | 2012-01-13 | 2012-12-27 | 가스 센서 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US9546948B2 (https=) |
| EP (1) | EP2803974B1 (https=) |
| JP (1) | JP5777063B2 (https=) |
| KR (1) | KR20140090258A (https=) |
| CN (1) | CN103998918A (https=) |
| WO (1) | WO2013105450A1 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102141357B1 (ko) * | 2019-08-12 | 2020-08-05 | 울산과학기술원 | 기체상 화학작용제의 탐지 및 식별 방법 및 기체상 화학작용제의 탐지 및 식별을 위한 센서 |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2853889B1 (en) * | 2013-09-26 | 2016-03-02 | ams International AG | Integrated circuit with CO2 sensor, composition and manufacturing method of such an IC |
| KR101667316B1 (ko) * | 2014-04-25 | 2016-10-19 | 포미주식회사 | 무창축사 환기시스템 |
| US10067108B2 (en) | 2015-05-13 | 2018-09-04 | Elemental Sensor Llc | Device for detecting volatile organic compounds |
| US10463275B2 (en) * | 2015-08-09 | 2019-11-05 | Elemental Sensor Llc | Device for capturing and concentrating volatile organic compounds |
| US12188893B2 (en) | 2016-08-30 | 2025-01-07 | Analog Devices International Unlimited Company | Electrochemical sensor, and a method of forming an electrochemical sensor |
| US11268927B2 (en) | 2016-08-30 | 2022-03-08 | Analog Devices International Unlimited Company | Electrochemical sensor, and a method of forming an electrochemical sensor |
| US10620151B2 (en) | 2016-08-30 | 2020-04-14 | Analog Devices Global | Electrochemical sensor, and a method of forming an electrochemical sensor |
| CN106645025A (zh) * | 2016-12-27 | 2017-05-10 | 吉林大学 | 一种汽车尾气成分含量在线检测仪 |
| US11022579B2 (en) | 2018-02-05 | 2021-06-01 | Analog Devices International Unlimited Company | Retaining cap |
| JP7124579B2 (ja) * | 2018-09-06 | 2022-08-24 | 日本精工株式会社 | ガスセンサ |
| US11231365B2 (en) * | 2019-07-08 | 2022-01-25 | Hanwha Systems Co., Ltd. | Apparatus and method for infrared imaging |
| CN110940863B (zh) * | 2019-10-23 | 2020-11-17 | 上海大学 | 一种基于集成有源放大器芯片的谐振传感器 |
| US20230026261A1 (en) * | 2019-12-20 | 2023-01-26 | 3M Innovative Properties Company | Nanohole array sensor elements and sensors including the same |
| JP2021117002A (ja) * | 2020-01-22 | 2021-08-10 | 学校法人 創価大学 | ヘテロコア光ファイバ二酸化炭素センサ |
| JP7443894B2 (ja) * | 2020-03-31 | 2024-03-06 | 横河電機株式会社 | 分光分析装置、分光分析装置の動作方法、及びプログラム |
Family Cites Families (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60125558A (ja) | 1983-12-09 | 1985-07-04 | Kuraray Co Ltd | ガスセンサ |
| JPH0679009B2 (ja) | 1985-11-22 | 1994-10-05 | 株式会社東芝 | 化学センサ |
| JP3167022B2 (ja) | 1988-11-18 | 2001-05-14 | 新電元工業株式会社 | ガスセンサ |
| JPH03237350A (ja) | 1990-02-14 | 1991-10-23 | Terumo Corp | pHセンサーおよびその製造方法 |
| DE4445668C2 (de) * | 1994-12-21 | 1997-05-15 | Euroferm Gmbh I Gr | Vorrichtung zur Messung des Partialdruckes von in Flüssigkeiten gelösten Gasen in Anlagen zur Durchführung von biotechnologischen oder lebensmitteltechnologischen Prozessen |
| US7875434B2 (en) * | 2000-10-30 | 2011-01-25 | Sru Biosystems, Inc. | Label-free methods for performing assays using a colorimetric resonant reflectance optical biosensor |
| US7142296B2 (en) * | 2000-10-30 | 2006-11-28 | Sru Biosystems, Inc. | Method and apparatus for detecting biomolecular interactions |
| US8154093B2 (en) | 2002-01-16 | 2012-04-10 | Nanomix, Inc. | Nano-electronic sensors for chemical and biological analytes, including capacitance and bio-membrane devices |
| JP2004085392A (ja) | 2002-08-27 | 2004-03-18 | Fujitsu Ltd | 炭素元素線状構造体を用いた電界効果トランジスタ化学センサー |
| US7927822B2 (en) * | 2002-09-09 | 2011-04-19 | Sru Biosystems, Inc. | Methods for screening cells and antibodies |
| WO2005026694A2 (en) | 2003-09-12 | 2005-03-24 | Nanomix, Inc. | Carbon dioxide nanoelectronic sensor |
| US7187446B2 (en) * | 2004-07-26 | 2007-03-06 | Fuji Photo Film Co., Ltd. | Measuring apparatus |
| JP2006125860A (ja) * | 2004-10-26 | 2006-05-18 | Fujikura Ltd | 表面プラズモンセンサ及び表面プラズモン測定装置 |
| JP4891550B2 (ja) | 2005-02-10 | 2012-03-07 | 独立行政法人科学技術振興機構 | n型トランジスタ、n型トランジスタセンサ及びn型トランジスタ用チャネルの製造方法 |
| US20060234391A1 (en) * | 2005-02-18 | 2006-10-19 | University Of Rochester | Optical sensor based on resonant porous silicon structures |
| US7879619B2 (en) * | 2005-10-07 | 2011-02-01 | Tianwei Jing | Apparatus for detecting one or more substances and method of detecting a substance |
| WO2008030666A2 (en) * | 2006-07-25 | 2008-03-13 | The Board Of Trustees Of The University Of Illinois | Multispectral plasmonic crystal sensors |
| EP2172945A1 (en) * | 2007-07-19 | 2010-04-07 | Gunze Limited | Solid ion-conducting material, electrochemical device utilizing the solid ion-conducting material, and method for production of the electrochemical device |
| JP4926865B2 (ja) * | 2007-07-20 | 2012-05-09 | シャープ株式会社 | 表面プラズモンセンサー |
| CN101398399A (zh) * | 2007-09-26 | 2009-04-01 | 中国科学院大连化学物理研究所 | 一种石英晶体谐振器及其制备和应用 |
| US8506887B2 (en) * | 2008-10-17 | 2013-08-13 | Vanderbilt University | Porous membrane waveguide sensors and sensing systems therefrom for detecting biological or chemical targets |
| KR101052504B1 (ko) * | 2008-11-27 | 2011-08-01 | 한국과학기술연구원 | 고 분해능 표면 플라즈몬 공진 센서 및 그것을 이용한 센서시스템 |
| JP2010192599A (ja) | 2009-02-17 | 2010-09-02 | Olympus Corp | カーボンナノ材料を用いた電界効果トランジスタにおける絶縁膜成膜方法及びカーボンナノ材料を用いた電界効果トランジスタ |
| JP5369755B2 (ja) * | 2009-02-25 | 2013-12-18 | 株式会社豊田中央研究所 | ガスセンサ |
| JP2010203838A (ja) * | 2009-03-02 | 2010-09-16 | Sonac Kk | 光導波路型センサ |
| CN101504360A (zh) * | 2009-03-03 | 2009-08-12 | 中国科学院光电技术研究所 | 一种有机气体传感方法 |
| JP2010261793A (ja) * | 2009-05-01 | 2010-11-18 | Kurabo Ind Ltd | 液体中の溶存物質含有量測定方法及び測定装置、並びに、エッチング液再生システム |
| US8711356B2 (en) * | 2010-02-25 | 2014-04-29 | Stichting Imec Nederland | Gas sensor with a porous layer that detectably affects a surface lattice resonant condition of a nanoparticle array |
| KR100977292B1 (ko) * | 2010-04-30 | 2010-08-23 | 지에스건설 주식회사 | 표면 플라즈몬 공명을 이용한 분자각인 가스 센서 칩 제조방법 |
| WO2011155179A1 (ja) * | 2010-06-10 | 2011-12-15 | コニカミノルタホールディングス株式会社 | 分析素子チップ |
| CN102072929B (zh) * | 2010-11-25 | 2013-02-06 | 厦门出入境检验检疫局检验检疫技术中心 | 一种甲醛气体传感器 |
-
2012
- 2012-01-13 JP JP2012004964A patent/JP5777063B2/ja active Active
- 2012-12-27 US US14/368,396 patent/US9546948B2/en active Active
- 2012-12-27 KR KR1020147015736A patent/KR20140090258A/ko not_active Ceased
- 2012-12-27 WO PCT/JP2012/083880 patent/WO2013105450A1/ja not_active Ceased
- 2012-12-27 CN CN201280060964.4A patent/CN103998918A/zh active Pending
- 2012-12-27 EP EP12865116.3A patent/EP2803974B1/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102141357B1 (ko) * | 2019-08-12 | 2020-08-05 | 울산과학기술원 | 기체상 화학작용제의 탐지 및 식별 방법 및 기체상 화학작용제의 탐지 및 식별을 위한 센서 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2803974B1 (en) | 2020-04-15 |
| EP2803974A4 (en) | 2015-12-30 |
| US9546948B2 (en) | 2017-01-17 |
| JP5777063B2 (ja) | 2015-09-09 |
| JP2013145137A (ja) | 2013-07-25 |
| WO2013105450A1 (ja) | 2013-07-18 |
| EP2803974A1 (en) | 2014-11-19 |
| US20150009503A1 (en) | 2015-01-08 |
| CN103998918A (zh) | 2014-08-20 |
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