KR20140090258A - 가스 센서 - Google Patents

가스 센서 Download PDF

Info

Publication number
KR20140090258A
KR20140090258A KR1020147015736A KR20147015736A KR20140090258A KR 20140090258 A KR20140090258 A KR 20140090258A KR 1020147015736 A KR1020147015736 A KR 1020147015736A KR 20147015736 A KR20147015736 A KR 20147015736A KR 20140090258 A KR20140090258 A KR 20140090258A
Authority
KR
South Korea
Prior art keywords
gas
gas sensor
metal layer
light
change
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020147015736A
Other languages
English (en)
Korean (ko)
Inventor
이사오 시모야마
기요시 마쯔모또
데쯔오 간
유스께 다께이
히데또시 다까하시
고우따로 이시즈
마사히또 혼다
Original Assignee
도꾜 다이가꾸
오므론 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 도꾜 다이가꾸, 오므론 가부시키가이샤 filed Critical 도꾜 다이가꾸
Publication of KR20140090258A publication Critical patent/KR20140090258A/ko
Ceased legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55Specular reflectivity
    • G01N21/552Attenuated total reflection
    • G01N21/553Attenuated total reflection and using surface plasmons
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004Gaseous mixtures, e.g. polluted air
    • G01N33/0009General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004Gaseous mixtures, e.g. polluted air
    • G01N33/0009General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • G01N33/004CO or CO2
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00Features of devices classified in G01N21/00
    • G01N2201/06Illumination; Optics
    • G01N2201/061Sources
    • G01N2201/06113Coherent sources; lasers
    • G01N2201/0612Laser diodes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00Features of devices classified in G01N21/00
    • G01N2201/06Illumination; Optics
    • G01N2201/067Electro-optic, magneto-optic, acousto-optic elements

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Medicinal Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Combustion & Propulsion (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
KR1020147015736A 2012-01-13 2012-12-27 가스 센서 Ceased KR20140090258A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012004964A JP5777063B2 (ja) 2012-01-13 2012-01-13 ガスセンサ
JPJP-P-2012-004964 2012-01-13
PCT/JP2012/083880 WO2013105450A1 (ja) 2012-01-13 2012-12-27 ガスセンサ

Publications (1)

Publication Number Publication Date
KR20140090258A true KR20140090258A (ko) 2014-07-16

Family

ID=48781406

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020147015736A Ceased KR20140090258A (ko) 2012-01-13 2012-12-27 가스 센서

Country Status (6)

Country Link
US (1) US9546948B2 (https=)
EP (1) EP2803974B1 (https=)
JP (1) JP5777063B2 (https=)
KR (1) KR20140090258A (https=)
CN (1) CN103998918A (https=)
WO (1) WO2013105450A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102141357B1 (ko) * 2019-08-12 2020-08-05 울산과학기술원 기체상 화학작용제의 탐지 및 식별 방법 및 기체상 화학작용제의 탐지 및 식별을 위한 센서

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2853889B1 (en) * 2013-09-26 2016-03-02 ams International AG Integrated circuit with CO2 sensor, composition and manufacturing method of such an IC
KR101667316B1 (ko) * 2014-04-25 2016-10-19 포미주식회사 무창축사 환기시스템
US10067108B2 (en) 2015-05-13 2018-09-04 Elemental Sensor Llc Device for detecting volatile organic compounds
US10463275B2 (en) * 2015-08-09 2019-11-05 Elemental Sensor Llc Device for capturing and concentrating volatile organic compounds
US12188893B2 (en) 2016-08-30 2025-01-07 Analog Devices International Unlimited Company Electrochemical sensor, and a method of forming an electrochemical sensor
US11268927B2 (en) 2016-08-30 2022-03-08 Analog Devices International Unlimited Company Electrochemical sensor, and a method of forming an electrochemical sensor
US10620151B2 (en) 2016-08-30 2020-04-14 Analog Devices Global Electrochemical sensor, and a method of forming an electrochemical sensor
CN106645025A (zh) * 2016-12-27 2017-05-10 吉林大学 一种汽车尾气成分含量在线检测仪
US11022579B2 (en) 2018-02-05 2021-06-01 Analog Devices International Unlimited Company Retaining cap
JP7124579B2 (ja) * 2018-09-06 2022-08-24 日本精工株式会社 ガスセンサ
US11231365B2 (en) * 2019-07-08 2022-01-25 Hanwha Systems Co., Ltd. Apparatus and method for infrared imaging
CN110940863B (zh) * 2019-10-23 2020-11-17 上海大学 一种基于集成有源放大器芯片的谐振传感器
US20230026261A1 (en) * 2019-12-20 2023-01-26 3M Innovative Properties Company Nanohole array sensor elements and sensors including the same
JP2021117002A (ja) * 2020-01-22 2021-08-10 学校法人 創価大学 ヘテロコア光ファイバ二酸化炭素センサ
JP7443894B2 (ja) * 2020-03-31 2024-03-06 横河電機株式会社 分光分析装置、分光分析装置の動作方法、及びプログラム

Family Cites Families (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60125558A (ja) 1983-12-09 1985-07-04 Kuraray Co Ltd ガスセンサ
JPH0679009B2 (ja) 1985-11-22 1994-10-05 株式会社東芝 化学センサ
JP3167022B2 (ja) 1988-11-18 2001-05-14 新電元工業株式会社 ガスセンサ
JPH03237350A (ja) 1990-02-14 1991-10-23 Terumo Corp pHセンサーおよびその製造方法
DE4445668C2 (de) * 1994-12-21 1997-05-15 Euroferm Gmbh I Gr Vorrichtung zur Messung des Partialdruckes von in Flüssigkeiten gelösten Gasen in Anlagen zur Durchführung von biotechnologischen oder lebensmitteltechnologischen Prozessen
US7875434B2 (en) * 2000-10-30 2011-01-25 Sru Biosystems, Inc. Label-free methods for performing assays using a colorimetric resonant reflectance optical biosensor
US7142296B2 (en) * 2000-10-30 2006-11-28 Sru Biosystems, Inc. Method and apparatus for detecting biomolecular interactions
US8154093B2 (en) 2002-01-16 2012-04-10 Nanomix, Inc. Nano-electronic sensors for chemical and biological analytes, including capacitance and bio-membrane devices
JP2004085392A (ja) 2002-08-27 2004-03-18 Fujitsu Ltd 炭素元素線状構造体を用いた電界効果トランジスタ化学センサー
US7927822B2 (en) * 2002-09-09 2011-04-19 Sru Biosystems, Inc. Methods for screening cells and antibodies
WO2005026694A2 (en) 2003-09-12 2005-03-24 Nanomix, Inc. Carbon dioxide nanoelectronic sensor
US7187446B2 (en) * 2004-07-26 2007-03-06 Fuji Photo Film Co., Ltd. Measuring apparatus
JP2006125860A (ja) * 2004-10-26 2006-05-18 Fujikura Ltd 表面プラズモンセンサ及び表面プラズモン測定装置
JP4891550B2 (ja) 2005-02-10 2012-03-07 独立行政法人科学技術振興機構 n型トランジスタ、n型トランジスタセンサ及びn型トランジスタ用チャネルの製造方法
US20060234391A1 (en) * 2005-02-18 2006-10-19 University Of Rochester Optical sensor based on resonant porous silicon structures
US7879619B2 (en) * 2005-10-07 2011-02-01 Tianwei Jing Apparatus for detecting one or more substances and method of detecting a substance
WO2008030666A2 (en) * 2006-07-25 2008-03-13 The Board Of Trustees Of The University Of Illinois Multispectral plasmonic crystal sensors
EP2172945A1 (en) * 2007-07-19 2010-04-07 Gunze Limited Solid ion-conducting material, electrochemical device utilizing the solid ion-conducting material, and method for production of the electrochemical device
JP4926865B2 (ja) * 2007-07-20 2012-05-09 シャープ株式会社 表面プラズモンセンサー
CN101398399A (zh) * 2007-09-26 2009-04-01 中国科学院大连化学物理研究所 一种石英晶体谐振器及其制备和应用
US8506887B2 (en) * 2008-10-17 2013-08-13 Vanderbilt University Porous membrane waveguide sensors and sensing systems therefrom for detecting biological or chemical targets
KR101052504B1 (ko) * 2008-11-27 2011-08-01 한국과학기술연구원 고 분해능 표면 플라즈몬 공진 센서 및 그것을 이용한 센서시스템
JP2010192599A (ja) 2009-02-17 2010-09-02 Olympus Corp カーボンナノ材料を用いた電界効果トランジスタにおける絶縁膜成膜方法及びカーボンナノ材料を用いた電界効果トランジスタ
JP5369755B2 (ja) * 2009-02-25 2013-12-18 株式会社豊田中央研究所 ガスセンサ
JP2010203838A (ja) * 2009-03-02 2010-09-16 Sonac Kk 光導波路型センサ
CN101504360A (zh) * 2009-03-03 2009-08-12 中国科学院光电技术研究所 一种有机气体传感方法
JP2010261793A (ja) * 2009-05-01 2010-11-18 Kurabo Ind Ltd 液体中の溶存物質含有量測定方法及び測定装置、並びに、エッチング液再生システム
US8711356B2 (en) * 2010-02-25 2014-04-29 Stichting Imec Nederland Gas sensor with a porous layer that detectably affects a surface lattice resonant condition of a nanoparticle array
KR100977292B1 (ko) * 2010-04-30 2010-08-23 지에스건설 주식회사 표면 플라즈몬 공명을 이용한 분자각인 가스 센서 칩 제조방법
WO2011155179A1 (ja) * 2010-06-10 2011-12-15 コニカミノルタホールディングス株式会社 分析素子チップ
CN102072929B (zh) * 2010-11-25 2013-02-06 厦门出入境检验检疫局检验检疫技术中心 一种甲醛气体传感器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102141357B1 (ko) * 2019-08-12 2020-08-05 울산과학기술원 기체상 화학작용제의 탐지 및 식별 방법 및 기체상 화학작용제의 탐지 및 식별을 위한 센서

Also Published As

Publication number Publication date
EP2803974B1 (en) 2020-04-15
EP2803974A4 (en) 2015-12-30
US9546948B2 (en) 2017-01-17
JP5777063B2 (ja) 2015-09-09
JP2013145137A (ja) 2013-07-25
WO2013105450A1 (ja) 2013-07-18
EP2803974A1 (en) 2014-11-19
US20150009503A1 (en) 2015-01-08
CN103998918A (zh) 2014-08-20

Similar Documents

Publication Publication Date Title
KR20140090258A (ko) 가스 센서
JP4911606B2 (ja) 全反射減衰型光学プローブおよびそれを用いた水溶液分光測定装置
US7842243B2 (en) Chemical sensor with an indicator dye
KR101350264B1 (ko) 광섬유 산소 감지 장치
US10852201B2 (en) Remote sensing
JP2012098303A (ja) 全反射減衰型光学プローブおよびそれを用いた水溶液分光測定装置
WO2012161067A1 (ja) 測定ユニットおよびガス分析装置
JP2005156415A (ja) 表面プラズモン共鳴センサ
JP4958220B2 (ja) 全反射減衰型光学プローブおよびそれを用いた水溶液分光測定装置
KR101350262B1 (ko) 광섬유 패브리-페롯 간섭계를 이용하는 가스 감지 장치
US20180364166A1 (en) Improvements in and relating to remote sensing
JP3961405B2 (ja) 表面プラズモン共鳴センサおよび屈折率変化測定方法
KR20180103760A (ko) 침착물 센서를 구비한 광 센서
CN104502292A (zh) 痕量气体传感器光路系统及气室
JP4500967B2 (ja) 物質吸着検知方法およびセンサ
US9188528B2 (en) Sensor for monitoring a medium
US20090066957A1 (en) Method and Apparatus for Sensing a Target Substance by Analysing Time Series of Said Target Substance
CN100595570C (zh) 一种半导体激光透过率分析系统
KR20150001676A (ko) 장치를 위한 외부 부품 및 장치
JP5467477B2 (ja) 水蒸気透過測定装置および水蒸気透過測定方法
JP4549292B2 (ja) 光熱変換測定装置、光熱変換測定方法
EP3179223A1 (en) Improvements in and relating to remote sensing
JP2003329578A (ja) 全反射光を利用した測定装置
JP2017026425A (ja) 光学式センサ
JP2003139686A (ja) 全反射減衰を利用した測定装置に用いられる測定チップへの自己組織化膜形成方法

Legal Events

Date Code Title Description
A201 Request for examination
PA0105 International application

Patent event date: 20140610

Patent event code: PA01051R01D

Comment text: International Patent Application

PA0201 Request for examination
PG1501 Laying open of application
E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20160121

Patent event code: PE09021S01D

E601 Decision to refuse application
PE0601 Decision on rejection of patent

Patent event date: 20160516

Comment text: Decision to Refuse Application

Patent event code: PE06012S01D

Patent event date: 20160121

Comment text: Notification of reason for refusal

Patent event code: PE06011S01I