JP5752119B2 - 真空グリッパー - Google Patents
真空グリッパー Download PDFInfo
- Publication number
- JP5752119B2 JP5752119B2 JP2012520905A JP2012520905A JP5752119B2 JP 5752119 B2 JP5752119 B2 JP 5752119B2 JP 2012520905 A JP2012520905 A JP 2012520905A JP 2012520905 A JP2012520905 A JP 2012520905A JP 5752119 B2 JP5752119 B2 JP 5752119B2
- Authority
- JP
- Japan
- Prior art keywords
- gripper
- workpiece
- vacuum gripper
- suction
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000011148 porous material Substances 0.000 claims description 5
- 238000004891 communication Methods 0.000 claims description 2
- 239000002984 plastic foam Substances 0.000 claims description 2
- 230000001105 regulatory effect Effects 0.000 claims description 2
- 230000007423 decrease Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 230000005484 gravity Effects 0.000 description 5
- 238000000926 separation method Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000011038 discontinuous diafiltration by volume reduction Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
- B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
- B65G47/911—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
グリッパーの下面が約2mm〜0.5mmまでワークピースの表面に近接すると、この真空グリッパーは従来型の真空グリッパーと同様に作用する。すなわち、空気がグリッパーの周縁から吸引されて吸引開口に向かって流れる。グリッパーの全面に負圧が形成され、その高さは、グリッパーの周縁に向かって低下する。凹部の領域においては、負圧は一定である。所定の空気の容積流れは通気孔からも吸引されるが、この容積流れは、グリッパー面において2mm〜0.5mm幅の間隙内部に吸引される容積流れに比べると相対的に小さい。
図1b:真空グリッパーの第1実施形態を示す。
図2a:真空グリッパーの第2実施形態を示す。
図2b:真空グリッパーの第2実施形態を示す。
図3a:真空グリッパーの第3実施形態を示す。
図3b:真空グリッパーの第3実施形態を示す。
図4a:真空グリッパーの第4実施形態を示す。
図4b:真空グリッパーの第4実施形態を示す。
Claims (13)
- ワークピース(1)を取り上げるための真空グリッパーであって、
・ 真直のまたは湾曲したグリッパープレート(2)と、
・ 前記グリッパープレート(2)の面の少なくとも中央位置に設けられる少なくとも1つの吸引開口(3;3a)であって、その吸引開口(3)の回りに吸引把持面(6)が形成される、少なくとも1つの吸引開口(3;3a)と、
・ 前記ワークピース側の前記グリッパープレート(2)の面に、前記吸引開口(3)に対して前記吸引把持面(6)の外側に設けられる少なくとも1つの凹部(4)と、
・ 前記凹部(4)が外部大気と連絡していて、外部空気が常に流入可能であるように、前記各凹部(4)の内部に設けられる少なくとも1つの通気孔(5)と、
を有する真空グリッパー。 - 前記通気孔(5)の開口面積が可変である、請求項1に記載の真空グリッパー。
- 凹部ごとに選択的に閉止可能な複数個の通気孔(5)が設けられる、請求項1に記載の真空グリッパー。
- 前記通気孔(5)に多孔質材料が充填される、請求項1に記載の真空グリッパー。
- 前記多孔質材料が開放多孔質のプラスチック発泡体製のプラグである、請求項4に記載の真空グリッパー。
- 前記通気孔(5)が交換可能な空気フィルタを有する、請求項1に記載の真空グリッパー。
- 前記通気孔(5)が、種々の形状を備えたノズルをネジ込むためのネジ穴を有する、請求項1に記載の真空グリッパー。
- 前記通気孔(5)が流量調整弁を有する、請求項1に記載の真空グリッパー。
- 前記凹部(4)の容積を変えることができる、請求項1に記載の真空グリッパー。
- グリッパープレート(2)の内部に複数の吸引把持面(6)が設けられる、請求項1に記載の真空グリッパー。
- 前記グリッパープレート(2)が、空気流出ノズルを備えた空気ベアリングとして形成される、請求項1に記載の真空グリッパー。
- 前記グリッパープレート(2)が少なくとも1つの超音波発振子と機械的に連結され、その場合、前記グリッパープレート(2)の寸法は、それが超音波空気ベアリングを形成するように定められる、請求項1に記載の真空グリッパー。
- 複数個の吸引開口(3)が設けられ、その場合、このそれぞれの吸引開口(3)の回りにそれぞれ1つの吸引把持面(6)が形成される、請求項1に記載の真空グリッパー。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102009039474.8 | 2009-07-22 | ||
DE102009034474 | 2009-07-22 | ||
PCT/DE2010/000860 WO2011009446A2 (de) | 2009-07-22 | 2010-07-22 | Vakuum-greifer |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012533491A JP2012533491A (ja) | 2012-12-27 |
JP5752119B2 true JP5752119B2 (ja) | 2015-07-22 |
Family
ID=43466897
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012520905A Active JP5752119B2 (ja) | 2009-07-22 | 2010-07-22 | 真空グリッパー |
Country Status (7)
Country | Link |
---|---|
US (2) | US20120274011A1 (ja) |
EP (1) | EP2456694A2 (ja) |
JP (1) | JP5752119B2 (ja) |
KR (1) | KR101759357B1 (ja) |
CN (1) | CN102639415B (ja) |
TW (1) | TWI571418B (ja) |
WO (1) | WO2011009446A2 (ja) |
Families Citing this family (26)
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DE102011051786A1 (de) * | 2011-07-12 | 2013-01-17 | Q-Cells Se | Transport- und/oder Greifvorrichtung für Halbleiterwafer-Solarzellen oder für Vorprodukte von Halbleiterwafer-Solarzellen |
US8858744B2 (en) | 2011-11-18 | 2014-10-14 | Nike, Inc. | Multi-functional manufacturing tool |
US9010827B2 (en) | 2011-11-18 | 2015-04-21 | Nike, Inc. | Switchable plate manufacturing vacuum tool |
DE102013100051B4 (de) | 2012-02-16 | 2018-02-08 | Hamberger Industriewerke Gmbh | Demontierbarer Outdoor-Bodenbelag |
DE102012215798B4 (de) * | 2012-09-06 | 2016-08-11 | J. Schmalz Gmbh | Flächensauggreifer |
DE102012019841B4 (de) * | 2012-10-09 | 2022-01-05 | Grenzebach Maschinenbau Gmbh | Verfahren und Vorrichtung für das Umsetzen großflächiger Platten in extremer Übergröße |
DE202012010508U1 (de) * | 2012-10-25 | 2012-11-12 | BANDELIN patent GmbH & Co. KG | Vorrichtung zur Beaufschlagung flüssiger Medien mitUltraschall durch eine Membran sowie Ultraschallsystem |
KR101729454B1 (ko) | 2013-07-22 | 2017-04-21 | 제트에스-핸들링 게엠베하 | 공작물 표면과 스트립 재료 검사 장치 |
WO2015010680A2 (de) | 2013-07-22 | 2015-01-29 | Zs-Handling Gmbh | Vorrichtung zur oberflächenbehandlung oder -bearbeitung |
EP3221272A1 (en) | 2014-11-17 | 2017-09-27 | Corning Incorporated | Ultrasonic near field hot glass transportation and forming |
JP6169627B2 (ja) * | 2015-01-23 | 2017-07-26 | 黒田テクノ株式会社 | 回転体の装着装置及び方法 |
US9553010B2 (en) * | 2015-06-25 | 2017-01-24 | Coreflow Ltd. | Wafer gripper with non-contact support platform |
CN109689303B (zh) | 2016-09-09 | 2020-10-13 | 宝洁公司 | 具有可延展的裙边衬圈的真空保持器 |
US11097429B2 (en) | 2016-12-01 | 2021-08-24 | Touchless Automation Gmbh | Device for non-contact object handling |
US9889995B1 (en) * | 2017-03-15 | 2018-02-13 | Core Flow Ltd. | Noncontact support platform with blockage detection |
DE102017115738B4 (de) * | 2017-07-13 | 2021-07-22 | J. Schmalz Gmbh | Bernoulli-Greifer |
JP7348069B2 (ja) * | 2017-11-17 | 2023-09-20 | 浜松ホトニクス株式会社 | 吸着方法 |
US10814459B2 (en) * | 2018-02-09 | 2020-10-27 | The Boeing Company | Apparatus and method for holding a workpiece |
CN108996242B (zh) * | 2018-08-17 | 2021-04-09 | 通彩智能科技集团有限公司 | 一种非接触式的气浮爪装置 |
DE102018125682B4 (de) * | 2018-10-16 | 2023-01-19 | Asm Assembly Systems Gmbh & Co. Kg | Ejektorvorrichtung sowie Verfahren zum Unterstützen eines Ablösens eines auf einer Haltefolie angeordneten elektrischen Bauteils |
US10821611B1 (en) * | 2019-04-08 | 2020-11-03 | Amazon Technologies, Inc. | Multi-zone end effector |
KR20200142622A (ko) * | 2019-06-12 | 2020-12-23 | 삼성디스플레이 주식회사 | 기판 이송 장치 및 이를 이용한 기판 이송 방법 |
CN110683356A (zh) * | 2019-10-01 | 2020-01-14 | 深圳市世椿智能装备股份有限公司 | 一种氢燃料电池芯片的上料设备 |
KR102377826B1 (ko) * | 2020-03-06 | 2022-03-23 | 세메스 주식회사 | 다이 이송 모듈 및 이를 포함하는 다이 본딩 장치 |
KR102377825B1 (ko) * | 2020-03-06 | 2022-03-23 | 세메스 주식회사 | 다이 이송 모듈 및 이를 포함하는 다이 본딩 장치 |
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-
2010
- 2010-07-22 WO PCT/DE2010/000860 patent/WO2011009446A2/de active Application Filing
- 2010-07-22 TW TW099124118A patent/TWI571418B/zh not_active IP Right Cessation
- 2010-07-22 US US13/386,593 patent/US20120274011A1/en not_active Abandoned
- 2010-07-22 JP JP2012520905A patent/JP5752119B2/ja active Active
- 2010-07-22 KR KR1020127004511A patent/KR101759357B1/ko active IP Right Grant
- 2010-07-22 EP EP10768366A patent/EP2456694A2/de not_active Withdrawn
- 2010-07-22 CN CN201080042938.XA patent/CN102639415B/zh not_active Expired - Fee Related
-
2014
- 2014-04-23 US US14/259,699 patent/US9266686B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
WO2011009446A3 (de) | 2011-03-24 |
TWI571418B (zh) | 2017-02-21 |
EP2456694A2 (de) | 2012-05-30 |
US20150015013A1 (en) | 2015-01-15 |
US20120274011A1 (en) | 2012-11-01 |
US9266686B2 (en) | 2016-02-23 |
KR20120051025A (ko) | 2012-05-21 |
CN102639415B (zh) | 2015-05-20 |
KR101759357B1 (ko) | 2017-07-18 |
TW201116468A (en) | 2011-05-16 |
WO2011009446A2 (de) | 2011-01-27 |
CN102639415A (zh) | 2012-08-15 |
JP2012533491A (ja) | 2012-12-27 |
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