Classifications

• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
  • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
  • B65G47/90—Devices for picking-up and depositing articles or materials
  • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
  • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
  • B25J15/00—Gripping heads and other end effectors
  • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
  • B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
  • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
  • B65G47/90—Devices for picking-up and depositing articles or materials
  • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
  • B65G47/911—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
  • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
  • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
  • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
  • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
  • B65G2249/04—Arrangements of vacuum systems or suction cups

Definitions

• the present invention relates to a vacuum gripper and more particularly to a vacuum gripper for gently gripping surface sensitive workpieces such.
• a vacuum gripper for gently gripping surface sensitive workpieces such.
• solar cells wafers or panels for flat screens, as well as for gripping heavy glass plates or plates made of other material with a very smooth surface, which are stacked on each other and should be removed from above.
• Vacuum grippers are well known and are suitable for use, i. H. adapted to the workpiece to be gripped constructively. If the task is to grip surface-sensitive workpieces, special measures must be taken not to damage the workpiece surface when gripping.
• vacuum grippers which are placed on the workpiece and mechanically brought into contact with the workpiece surface at the beginning of the gripping process, d. H. the gripper is provided with sealing lips which provide a seal between the workpiece surface and the gripper such that upon creation of a vacuum within the gripper, the external air pressure presses the workpiece against the sealing lips.
• the high surface pressure can lead to undesirable changes in the workpiece surface.
• vacuum grippers which are designed to suck the workpiece from a distance to the gripper head and close to the Gripper surface to keep contact-free.
• This effect is z. B. achieved in that the gripper surface is designed as an air bearing.
• An air bearing can be produced by a nozzle field, from which compressed air flows or by means of a vibrating plate, as described in the document EP 1387808 B1, which is hereby fully incorporated into the description.
• a vacuum suction gripper which sucks the workpieces without mechanical contact, must therefore be designed such that the suction force of the gripper first overcomes the breaking force, then accelerates the workpiece towards the gripper surface against the gravitational force. If the workpiece has a predetermined distance from the gripper surface, it would be desirable to decelerate the workpiece so that it does not hit the gripper surface because of the inertial force.
• a vacuum gripper according to claim 1, wherein the vacuum gripper has the following features: a straight or curved gripper plate.
• the gripper plate can be flat to accommodate flat plates, it can be bent one-dimensionally, for. B. but can also be curved two-dimensional, for example, spherical workpieces on increase.
• the gripper plate may have a form adapted to the workpiece surface shape, as far as the technical teaching described below can be implemented in terms of fluid mechanics.
• In the gripper plate is provided at least one, acted upon by a predetermined negative pressure suction port.
• a workpiece throttle area is formed around the suction port. As a workpiece throttle area, a surface portion is designated, which forms a defined gap when sucking the workpiece with the workpiece surface.
• this workpiece throttle area is dimensioned such that the suction force that arises at this workpiece throttle area is greater than the oppositely directed weight force of the workpiece, which depends on the mass of the workpiece.
• At least one recess is provided in the workpiece-facing side of the gripper plate.
• This recess is arranged according to the technical teaching of the invention so that it is always outside the workpiece throttle area. In other words, sucked air flows from the edge of the gripper plate along the gripper plate to the suction port, passing through the suction opening associated with this, d. H. upstream recess. In the recess at least one vent hole is present.
• the vacuum gripper acts like a conventional vacuum gripper, ie the air is drawn in from the gripper edge and flows towards the suction opening. Over the entire gripper surface forms a negative pressure, the height of which drops towards the gripper edge. In the area of the recesses, the negative pressure is constant. A predetermined volume flow of air is also drawn through the vent hole. However, this volume flow is relatively small compared to the volume flow, which is sucked into the gripper surface within the 2 mm to 0, 5 mm wide gap.
• the gripper has in this constellation its maximum load capacity at a predetermined constant suction pressure and the predetermined surface of the gripper plate.
• the suction force is the product of effective suction area and suction pressure - and the effective suction area is essentially limited to the area of the workpiece throttle area, the effective suction area is thus many times smaller than with one greater distance of the gripper surface from the workpiece surface.
• the suction force is many times smaller than at a greater distance of the gripper surface of the workpiece surface.
• the lowering of the suction force is thus automatic.
• levitation of the workpiece can be achieved, ie without the workpiece surface touching the vacuum gripper.
• an equilibrium of forces arises between the suction force which lifts the workpiece and the weight force which pulls the workpiece downwards.
• the suction power changes, for. B. becomes slightly weaker the workpiece would lower slightly. This increases but the effective suction surface, so that the suction increases and the workpiece is pulled up again.
• This floating state always sets in and is independent of the surface condition of the workpiece.
• glass plates with a very smooth surface but also wood plates with a rough surface can be detected with this gripper.
• the opening cross sections of the vent holes are variably formed.
• vent holes per recess are provided, which are selectively closed.
• the vent holes are filled with a porous material which acts as a throttle.
• a porous material which acts as a throttle.
• the porous material is a plug made of an open-cell plastic foam. These plugs are easy to produce and easy to replace.
• vent holes are provided with air filters as an alternative to a porous material, which act as a throttle and are also easily replaceable.
• vent holes are designed as threaded holes in which nozzles with different geometries, ie can be screwed with predetermined flow profiles.
• the vent holes have steerable flow control valves.
• the air flow rate during the suction of the workpiece can be actively controlled, which leads under certain conditions to an improvement of the suction and holding properties of the vacuum gripper.
• the volume of the recess is variable, whereby a faster adaptation of the gripper to another workpiece can be achieved.
• the volume change can be effected by inserting material. If the gripper z. B. made of steel, magnets can be inserted into the recesses, which then hold without further attachment. It can also be screwed screws whose heads contribute to the reduction in volume within the recess.
• a plurality of workpiece throttle surfaces are provided within a gripper plate. This arrangement is chosen if the board to be removed is to be worn at several points.
• the workpiece throttle surfaces do not necessarily have to be ring-shaped, but can also extend in a straight line, which will be explained in greater detail in the exemplary embodiments.
• the gripper plate is designed as an air bearing with air outlet nozzles. This creates an additional safeguard against touching the gripper by the workpiece.
• the gripper plate is mechanically coupled to at least one ultrasonic oscillator according to claim 12. at the gripper plate is dimensioned so that it forms an ultrasonic air bearing, as z. As described in EP 1387808 B1.
• a plurality of suction openings are provided, wherein a workpiece throttle area is formed around each of these suction openings.
• This arrangement can be advantageously used when a workpiece z. B. has a straight surface to which the gripper attaches, but the workpiece is of different thickness.
• the suction openings can be operated with different suction pressures, which allows a uniform and horizontal lifting of the workpiece.
• FIG. 1a, b show a first embodiment of the vacuum gripper.
• Fig. 2a, b show a second embodiment of the vacuum gripper.
• Fig. 3a, b show a third embodiment of the vacuum gripper.
• FIG. 4a, b show a fourth embodiment of the vacuum gripper.
• 1a, b show the cross section of a circular vacuum gripper for picking up a workpiece 1, the vacuum gripper having the following features:
• a circular disk-shaped gripper plate 2 has a suction opening 3 at its center.
• a circular-shaped workpiece is arranged around the suction opening 3
• Throttle surface 6 is formed, whose operation is explained in the following section.
• an annular recess 4 is provided, which in the present case has two ventilation holes offset by 180 degrees, ie, the entire recess 4 is connected to the external atmosphere.
• FIG. 1a shows the workpiece 1 still in the starting position.
• the suction hole 3 air is sucked, which flows laterally via the gap 7, which is usually between about 2 mm to 0, 5 mm. In this position, the vacuum gripper its highest suction force, which is greater than the weight of the workpiece. 1
• the vacuum gripper acts like a conventional vacuum gripper, i. H. the air is drawn in from the gripper edge and flows towards the intake opening. Over the entire gripper surface forms a negative pressure, the height of which drops towards the gripper edge. In the region of the recess 4, however, the negative pressure P is constant, which can be seen in the underlying diagram A as a plateau line 8.
• a predetermined volume flow of air is also drawn through the vent hole. However, this volume flow is relatively small compared to the volume flow, which is sucked into the gripper surface within the 2 mm to 0, 5 mm wide gap.
• the pressure curve 9 is additionally shown, as it would appear without the recesses 4.
• the suction force is the product of effective suction surface and suction pressure - and the effective suction surface is essentially limited only to the area of the workpiece throttle surface 6, the effective suction surface has thus become many times smaller than in a greater distance of the gripper surface from the workpiece surface.
• the suction force is many times smaller than at a greater distance of the gripper surface from the workpiece surface.
• the nozzle geometry and the required pressure and vacuum are determined by the properties of the workpiece to be gripped. In many technological processes, the workpieces are the same, so that the nozzle and pressure parameters can remain constant. Since the nozzle and pressure parameters depend on the size, weight, surface, and a number of other features of the workpiece, it does not make sense to specify specific nozzle shapes and other parameters.
• FIGS. 2a, b show a circular gripper plate with two intake openings 3, 3a.
• the second suction port 3a is an annular groove having 4 holes to which vacuum is applied.
• the suction effect of the suction groove 3a is also less than the suction effect of the suction port 3.
• the suction cross section of the suction groove 3a may be larger be selected so that the suction is at least as large as that of the suction port.
• Figs. 3a, b show a rectangular gripper plate for optimal gripping of preferably rectangular workpieces.
• the suction port 3 is rectangular and the groove-shaped recesses 4 are parallel to each other.
• Figs. 4a, b show a gripper plate according to Fig. 3 for lifting a pipe.
• the gripper plate is adapted to the curvature of the pipe diameter.

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• Engineering & Computer Science (AREA)
• Mechanical Engineering (AREA)
• Physics & Mathematics (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• General Physics & Mathematics (AREA)
• Manufacturing & Machinery (AREA)
• Computer Hardware Design (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Power Engineering (AREA)
• Robotics (AREA)
• Manipulator (AREA)
• Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Applications Claiming Priority (1)

Publications (1)

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Family Applications (1)

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Citations (1)

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• 2010
  • 2010-07-22 US US13/386,593 patent/US20120274011A1/en not_active Abandoned
  • 2010-07-22 TW TW099124118A patent/TWI571418B/zh not_active IP Right Cessation
  • 2010-07-22 CN CN201080042938.XA patent/CN102639415B/zh not_active Expired - Fee Related
  • 2010-07-22 KR KR1020127004511A patent/KR101759357B1/ko active IP Right Grant
  • 2010-07-22 JP JP2012520905A patent/JP5752119B2/ja active Active
  • 2010-07-22 WO PCT/DE2010/000860 patent/WO2011009446A2/de active Application Filing
  • 2010-07-22 EP EP10768366A patent/EP2456694A2/de not_active Withdrawn
• 2014
  • 2014-04-23 US US14/259,699 patent/US9266686B2/en active Active

Patent Citations (1)

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